Device for pasting adsorption pad

Abstract

The utility model discloses a device for sticking an adsorption pad, which comprises a base, a nylon rod and a roller, a ceramic disc is arranged on the base, the roller is movably connected onto the nylon rod through a connecting rod, a double-sided film tearing adhesive tape is stuck on the surface of the nylon rod, and the nylon rod passes through the space between the adsorption pad and the ceramic disc and is stuck with a release film on the back surface of the adsorption pad to move together. The roller presses the surface of the adsorption pad. The adsorption pad is pasted by means of the roller and the nylon rod, the release film can be torn while the adsorption pad is pressed, bubbles generated between the adsorption pad and the ceramic plate can be extruded, and the pasting quality is improved. The device can be operated by a single person, and can be conveniently aligned with the ceramic plate.

Description

Technical Field

[0001] The utility model relates to equipment for pasting an adsorption pad on a ceramic disc on a polishing head, in particular to a device for pasting an adsorption pad. Background Art

[0002] In silicon carbide semiconductors, when the silicon carbide wafer is polished or CMP processed on the back side, the wafer needs to be adsorbed on the adsorption pad, and then the ceramic disc with the adsorption pad attached is loaded into the polishing head for polishing or CMP. Because the adsorption pad has a limited life, it needs to be replaced frequently. The current method of replacing the adsorption pad is to manually replace it, tearing the adsorption pad off the ceramic disc and then sticking a new adsorption pad. Disadvantages: ① Peeling the pad too quickly will easily leave residual glue, affecting the quality of subsequent pad pasting and polishing. ② The pad peeling process is not easy to operate.

[0003] Attachment process: The size of the absorption pad and the ceramic plate are similar. ① First tear off a corner of the release paper on the back of the absorption pad, align the absorption pad with the ceramic plate, (misalignment may cause the pad to not completely cover the ceramic polishing) and gently press the corner with the adhesive on the ceramic plate; ② One person A has attached the end, and the other person B gently pulls a small section of the release paper of the absorption pad, and A then presses the release paper in the direction of pulling with his palm until the absorption pad is completely attached to the ceramic plate. If the release paper is pulled too quickly, bubbles are easily formed, resulting in poor adhesion of the absorption pad. Summary of the invention

[0004] In order to overcome the shortcomings and deficiencies in the prior art, the utility model aims to provide a device for sticking an adsorption pad.

[0005] The purpose of the utility model is achieved through the following technical solutions: a device for pasting an adsorption pad, comprising a base, a nylon rod and a roller, wherein the base is provided with a ceramic disk, the roller is movably connected to the nylon rod through a connecting rod, the surface of the nylon rod is adhered with a double-sided film-tearing tape, the nylon rod passes between the adsorption pad and the ceramic disk, and moves together with the release film pasted on the back of the adsorption pad, and the roller is pressed on the surface of the adsorption pad. During the movement of the nylon rod, the roller also moves with it, and the roller pressing on the back of the adsorption pad can squeeze the adsorption pad, discharge bubbles, and improve the quality of pasting.

[0006] As an improvement of the device for sticking the adsorption pad of the utility model, one end of the connecting rod is movably connected to the nylon rod through a ring, and the other end of the connecting rod is movably connected to one end of the roller through a shaft pin.

[0007] As an improvement of the device for sticking the adsorption pad of the utility model, it also includes two guide rails, the ceramic plate is located between the two guide rails, the two ends of the nylon rod are respectively slidably connected to the guide rails, and the nylon rod can roll along the guide rails. When the nylon rod is cylindrical, the pull rod is connected to the two ends of the nylon rod to facilitate pulling the nylon rod to move.

[0008] As an improvement of the device for sticking the adsorption pad of the utility model, the length of the roller can just pass through between the two guide rails, and the length of the roller is smaller than the length of the nylon rod.

[0009] As an improvement of the device for sticking the adsorption pad of the utility model, it also includes a pull rod, one end of which is connected to the nylon rod.

[0010] As an improvement of the device for sticking the adsorption pad of the utility model, the nylon rod is flat, and the length of the nylon rod is less than the length of the roller. When the nylon rod is flat, the pull rod is connected to the middle of the nylon rod, and the nylon rod does not need to be guided by the guide rail. Pulling the pull rod drives the nylon rod to slowly pull forward to separate the release paper from the adsorption pad, and at the same time, the roller presses the adsorption pad forward to make the adhesive backing of the adsorption pad fit with the ceramic disc. The adsorption pad can be a polishing pad, and the ceramic disc can be a polishing disc.

[0011] As an improvement of the device for sticking the adsorption pad of the utility model, an adsorption rubber pad is provided on the bottom edge of the ceramic plate, and the adsorption rubber pad is stuck on the base.

[0012] The beneficial effects of the utility model are as follows: the utility model uses a roller and a nylon rod to paste the adsorption pad, can press the adsorption pad while tearing off the release film, can squeeze out the bubbles generated between the adsorption pad and the ceramic plate, and improve the pasting quality. The utility model only needs one person to operate, and is convenient to align the ceramic plate. BRIEF DESCRIPTION OF THE DRAWINGS

[0013] Figure 1 This is a structural schematic diagram of the first embodiment of the utility model;

[0014] Figure 2 This is a schematic structural diagram of the second embodiment of the utility model;

[0015] Figure 3 This is a schematic diagram of the structure of the roller part of the second embodiment of the utility model;

[0016] The reference numerals in the drawings are: 1, base 2, nylon rod 3, roller 4, ceramic disk 5, connecting rod 6, guide rail 7, pull rod 8, adsorption pad. DETAILED DESCRIPTION

[0017] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments of the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0018] It should be noted that all directional indications (such as up, down, left, right, front, back...) in the embodiments of the present invention are only used to explain the relative position relationship, movement status, etc. between the components under a specific posture (as shown in the accompanying drawings). If the specific posture changes, the directional indication will also change accordingly.

[0019] In addition, the descriptions of "first", "second", etc. in the present utility model are only used for descriptive purposes and cannot be understood as indicating or implying their relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first" and "second" may explicitly or implicitly include at least one of the features. In addition, the technical solutions between the various embodiments can be combined with each other, but they must be based on the ability of ordinary technicians in the field to implement them. When the combination of technical solutions is contradictory or cannot be implemented, it should be deemed that such a combination of technical solutions does not exist and is not within the scope of protection required by the present utility model.

[0020] Embodiment 1: Figure 1 As shown, a device for pasting an adsorption pad comprises a base 1, a nylon rod 2 and a roller 3. A ceramic plate 4 is provided on the base 1. The roller 3 is movably connected to the nylon rod 2 through a connecting rod 5. A double-sided film-tearing tape is adhered to the surface of the nylon rod 2. The nylon rod 2 passes between the adsorption pad and the ceramic plate 4 and moves together with the release film on the back of the adsorption pad. The roller 3 is pressed on the surface of the adsorption pad. An adsorption rubber pad is provided at the bottom edge of the ceramic plate 4. The adsorption rubber pad is pasted on the base 1. When the nylon rod 2 moves, the roller 3 also moves with it. The roller 3 pressing on the back of the adsorption pad can squeeze the adsorption pad, discharge bubbles, and improve the pasting quality.

[0021] Preferably, one end of the connecting rod 5 is movably connected to the nylon rod 2 through a ring, and the other end of the connecting rod 5 is movably connected to one end of the roller 3 through a shaft pin.

[0022] Preferably, two guide rails 6 are further included, the ceramic plate 4 is located between the two guide rails 6, and both ends of the nylon rod 2 are slidably connected to the guide rails 6, so that the nylon rod 2 can roll along the guide rails 6. When the nylon rod 2 is cylindrical, the pull rod 7 is connected to both ends of the nylon rod 2, so as to facilitate pulling the nylon rod 2 to move.

[0023] Preferably, the length of the roller 3 can just pass through between the two guide rails 6 , and the length of the roller 3 is smaller than the length of the nylon rod 2 .

[0024] The process of installing the adsorption pad: stick the ceramic plate 4 on the base 1, the diameter of the ceramic plate 4 is 360mm, put the adsorption pad on the ceramic plate 4, the bottom of the ceramic plate 4 is surrounded by the adsorption pad and is not easy to move, pass the nylon rod 2 (made of nylon, not easy to damage the ceramic plate) from the bottom of the adsorption pad with the release paper (i.e. the back of the adsorption pad), and use the stickiness of the double-sided tear film tape on the nylon rod 2 to stick the release paper. The roller 3 is pressed on the front of the adsorption pad, and the nylon rod 2 is slowly pulled forward to separate the release paper from the adsorption pad. At the same time, the roller 3 presses the adsorption pad forward to make the adsorption pad adhesive fit the ceramic plate 4.

[0025] Embodiment 2: Figure 2 and Figure 3 As shown, it also includes a pull rod 7, one end of which is connected to the middle of the nylon rod 2. The nylon rod 2 is flat, and the length of the nylon rod 2 is less than the length of the roller 3. When the nylon rod 2 is flat, the pull rod 7 is connected to the middle of the nylon rod 2, and the nylon rod 2 does not need to be guided by the guide rail. Pulling the pull rod 7 drives the nylon rod 2 to slowly pull forward to separate the release paper from the adsorption pad, and at the same time, the roller 3 presses the adsorption pad 8 forward to make the adhesive backing of the adsorption pad fit with the ceramic disc 4. The adsorption pad 8 can be a polishing pad, and the ceramic disc 4 can be a polishing disc.

[0026] Although the embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and structures of the present invention, and the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A device for sticking an adsorption pad, characterized in that: It includes a base, a nylon rod and a roller. The base is provided with a ceramic disk. The roller is movably connected to the nylon rod through a connecting rod. The surface of the nylon rod is adhered with a double-sided film-tearing tape. The nylon rod passes between the adsorption pad and the ceramic disk and moves together with the release film adhered to the back of the adsorption pad. The roller is pressed on the surface of the adsorption pad.

2. The device for sticking an adsorption pad according to claim 1, characterized in that: One end of the connecting rod is movably connected to the nylon rod through a ring, and the other end of the connecting rod is movably connected to one end of the roller through a shaft pin.

3. The device for sticking an adsorption pad according to claim 2, characterized in that: It also includes two guide rails, the ceramic disc is located between the two guide rails, the two ends of the nylon rod are respectively slidably connected to the guide rails, and the nylon rod can roll along the guide rails.

4. The device for sticking an adsorption pad according to claim 3, characterized in that: The length of the roller can just pass through between the two guide rails, and the length of the roller is smaller than the length of the nylon rod.

5. The device for sticking an adsorption pad according to claim 1, characterized in that: It also includes a pull rod, one end of which is connected to the nylon rod.

6. The device for sticking an adsorption pad according to claim 5, characterized in that: The nylon rod is flat, and the length of the nylon rod is smaller than the length of the roller.

7. The device for sticking an adsorption pad according to claim 1, characterized in that: An adsorption rubber pad is arranged on the bottom edge of the ceramic plate, and the adsorption rubber pad is pasted on the base.

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