PVD tray reflow system with RFID information storage function

Abstract

The utility model discloses a PVD pallet reflow system with an information RFID storage function, including a PVD equipment body, a lifting and transplanting conveyor connected to the PVD equipment body, a No. 1 lifting cylinder connected to the bottom of the lifting and transplanting conveyor, an output end of the lifting and transplanting conveyor extending into the pallet conveying mechanism at the bottom of the pallet rack, a No. 2 lifting cylinder installed at the bottom of the pallet conveying mechanism, the pallet conveying mechanism is arranged in the PVD chamber body, and an RFID reader and writer is also arranged on the side of the PVD chamber body. The utility model can transport multiple pallets through the operation of a lifting cylinder, saving human resources, and pallets in various states can be placed on the same shelf, and the transportation will not be affected by the tilt state or angle of the pallet, and the efficiency of conveying pallets is high. At the same time, the shelf has the RFID reading and writing information function to avoid human errors.

Description

Technical Field

[0001] The utility model relates to the technical field of tray conveying and laminating, in particular to a PVD tray reflow system with an RFID information storage function. Background Art

[0002] Physical vapor deposition (PVD) technology refers to the technology of vaporizing the solid or liquid surface of the material source into gaseous atoms, molecules or partially ionized into ions under vacuum conditions by physical methods, and depositing a thin film with some special functions on the surface of the substrate through a low-pressure gas (or plasma) process. The principle of physical vapor deposition can be roughly divided into evaporation coating, sputtering coating and ion plating, which specifically includes various coating technologies such as MBE. At present, physical vapor deposition technology can not only deposit metal films and alloy films, but also compounds, ceramics, semiconductors, polymer films, etc.

[0003] Existing PVD coating equipment generally realizes the function of lifting the tray through a ball screw structure or a cylinder. The tray return does not have the ability of automatic transmission and is mostly carried manually. The cost of this transportation method is relatively high, the floor space is large, the overall work efficiency is relatively low, and it does not have the RFID information reading function. It is easy to make mistakes during manual transportation. For example, the carrier buffer device and PVD coating equipment disclosed in the publication number CN210456544U use a lifting component to drive the extraction component lifting plate to move the support plate to the position corresponding to any card slot. This solution can realize automatic loading and unloading of carriers without manual intervention, thus ensuring the personal safety of workers, avoiding the occupation of the robot arm, and saving costs. However, it is impossible to monitor whether the coating is carried out during the transportation process, and it cannot be guaranteed that every carrier is coated, and the yield rate is not high.

[0004] Therefore, it is necessary to invent a PVD tray reflow system with RFID information storage function to solve the above problems. Utility Model Content

[0005] The utility model aims to provide a PVD tray reflow system with an information RFID storage function, so as to solve the problem that whether a PVD coating device is coated cannot be monitored in the technology.

[0006] In order to achieve the above-mentioned purpose, the utility model provides the following technical solutions: a PVD pallet reflow system with RFID information storage function, including a PVD equipment body, the PVD equipment body is connected to a jacking and transplanting conveyor, the bottom of the jacking and transplanting conveyor is connected to a No. 1 jacking cylinder, the output end of the jacking and transplanting conveyor extends into the pallet conveying mechanism at the bottom of the pallet rack, the bottom of the pallet conveying mechanism is installed with a No. 2 jacking cylinder, the pallet conveying mechanism is arranged in the PVD chamber body, and an RFID read-write head is also arranged on the side of the PVD chamber body.

[0007] Preferably, a plurality of conveying tracks are provided in the lifting and transplanting conveyor, and the plurality of conveying tracks are parallel to each other, and the conveying direction of the conveying tracks is perpendicular to the lifting direction of the No. 1 lifting cylinder.

[0008] Preferably, the lifting height of the No. 1 lifting cylinder is adapted to the lifting height of the No. 2 lifting cylinder.

[0009] Preferably, the pallet rack is multi-layered, and the multi-layer pallet racks have the same size and are all frame structures, and the bottom of the multi-layer pallet rack is flush with the pallet conveying mechanism that is lifted to the highest height.

[0010] Preferably, the initial position of the pallet conveying mechanism is flush with the initial position of the lifting and transplanting conveyor, and the highest heights of the lifting and transplanting conveyor and the pallet conveying mechanism are also flush.

[0011] Preferably, the PVD chamber body is in direct contact with the ground, and an electric push rod of a No. 2 lifting cylinder runs through the PVD chamber body, and the frame of the PVD chamber body is fixedly connected to the frame of the pallet rack.

[0012] Preferably, the RFID read / write head is fixedly arranged at a frame corner of the PVD chamber body, and the RFID read / write head is electrically connected to the track inside the tray rack through a controller.

[0013] In the above technical solution, the technical effects and advantages provided by the utility model are:

[0014] 1. The utility model can transport multiple pallets through the operation of a lifting cylinder, saving human resources, and pallets in various states can be placed on the same shelf, and the transportation will not be affected by the tilt state or angle of the pallet. The efficiency of transporting pallets is high, and the shelf has RFID reading and writing information function to avoid manual errors;

[0015] 2. The utility model improves the efficiency of transportation by lifting and transporting pallets in batches, and can read and write RFID information on whether the pallets are coated during the efficient transportation process, accurately monitor whether the coating is applied, and improve the operating efficiency of the entire pallet coating production line. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 It is a schematic diagram of the overall structure of the utility model;

[0017] Figure 2 This is a schematic diagram of the three-dimensional structure of the RFID read / write head of the utility model;

[0018] Figure 3 This is a front view of the main body of the PVD chamber of the utility model;

[0019] Figure 4 For this utility model Figure 3 A in the figure is an enlarged structural diagram.

[0020] Description of reference numerals:

[0021] 1. PVD equipment body; 2. Lifting and transplanting conveyor; 3. No. 1 lifting cylinder; 4. Pallet rack; 5. Pallet conveying mechanism; 6. No. 2 lifting cylinder; 7. PVD chamber body; 8. RFID read / write head. DETAILED DESCRIPTION

[0022] In order to enable those skilled in the art to better understand the technical solution of the present invention, the present invention will be further described in detail below in conjunction with the accompanying drawings.

[0023] The utility model provides Figure 1-4 The PVD pallet reflow system with RFID information storage function shown in the figure includes a PVD equipment body 1, a lifting and transplanting conveyor 2 is connected to the PVD equipment body 1, a No. 1 lifting cylinder 3 is connected to the bottom of the lifting and transplanting conveyor 2, and the output end of the lifting and transplanting conveyor 2 extends into the pallet conveying mechanism 5 at the bottom of the pallet rack 4, a No. 2 lifting cylinder 6 is installed at the bottom of the pallet conveying mechanism 5, and the pallet conveying mechanism 5 is arranged in the PVD chamber body 7, and an RFID read-write head 8 is also arranged on the side of the PVD chamber body 7.

[0024] The entire status of whether the pallet is coated does not require manual intervention and can be accurately judged to improve the efficiency of pallet coating.

[0025] A plurality of conveying tracks are arranged in the lifting and transplanting conveyor 2, and the plurality of conveying tracks are parallel to each other, and the conveying direction of the conveying tracks is perpendicular to the lifting direction of the No. 1 lifting cylinder 3, and the lifting height of the No. 1 lifting cylinder 3 is adapted to the lifting height of the No. 2 lifting cylinder 6, and the pallet rack 4 is multi-layered, and the sizes of the multi-layer pallet rack 4 are the same, and they are all frame structures, and the bottom of the multi-layer pallet rack 4 is flush with the pallet conveying mechanism 5 lifted to the highest height, and the initial position of the pallet conveying mechanism 5 is flush with the initial position of the lifting and transplanting conveyor 2, and the highest heights of the lifting and transplanting conveyor 2 and the pallet conveying mechanism 5 are also flush.

[0026] By using the lifting of the No. 1 lifting cylinder 3 and the No. 2 lifting cylinder 6, the lifting and transplanting conveyor 2 and the pallet conveying mechanism 5 can be synchronously raised and lowered, and the pallet can be continuously transported upward.

[0027] The PVD chamber body 7 is in direct contact with the ground, and the electric push rod of the No. 2 lifting cylinder 6 runs through the PVD chamber body 7. The frame of the PVD chamber body 7 is fixedly connected to the frame of the tray rack 4. The RFID read-write head 8 is fixedly arranged at the corner of the frame of the PVD chamber body 7, and the RFID read-write head 8 is electrically connected to the track inside the tray rack 4 through the controller.

[0028] Whether each tray lifted up through the PVD chamber body 7 is coated will be transmitted and stored by the RFID reader / writer 8, so that an accurate judgment can be made as to whether the coating is performed.

[0029] Working principle of this utility model:

[0030] The specific steps are as follows:

[0031] (1) Lifting cylinder No. 1 is raised;

[0032] (2) The lifting and transferring conveyor 2 moves to receive the tray conveyed from the outlet of the PVD chamber body 7 and stops when it reaches the position;

[0033] (3) The No. 1 lifting cylinder 3 is actuated and moves to the empty space at the bottom of the pallet rack 4;

[0034] (4) The No. 2 lifting cylinder 6 is actuated to move to the empty position of the pallet rack 4;

[0035] (5) The lifting and transplanting conveyor 2 and the pallet conveying mechanism 5 act synchronously to move the pallet to the empty position of the pallet rack 4;

[0036] (6) The No. 2 lifting cylinder 6 is actuated and falls back to the starting position, and the pallet is placed on the pallet rack 4;

[0037] (7) Repeat steps (1) to (6) until the tray rack is full;

[0038] (8) The tray rack 4 is manually moved to the entrance of the PVD chamber body 7, and the RFID reads the information to determine the tray status (to be coated or once coated or twice coated); if it is to be coated, perform a coating once; if the coating has been completed once, repeat steps (1)-(7); if the coating has been completed twice, the tray flows to the next process.

[0039] It should be noted that, in this article, relational terms such as first and second, etc. are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Moreover, the terms "include", "comprise" or any other variants thereof are intended to cover non-exclusive inclusion, so that a process, method, article or device including a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such process, method, article or device.

[0040] Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A PVD tray reflow system with an information RFID storage function, comprising a PVD equipment body (1), characterized in that: The PVD equipment body (1) is connected to a lifting and transplanting conveyor (2), the bottom of which is connected to a No. 1 lifting cylinder (3), the output end of the lifting and transplanting conveyor (2) extends into a tray conveying mechanism (5) at the bottom of a tray rack (4), a No. 2 lifting cylinder (6) is installed at the bottom of the tray conveying mechanism (5), the tray conveying mechanism (5) is arranged in a PVD chamber body (7), and an RFID read / write head (8) is also arranged on the side of the PVD chamber body (7).

2. The PVD tray reflow system with RFID information storage function according to claim 1, characterized in that: The lifting and transplanting conveyor (2) is provided with a plurality of conveying tracks, and the plurality of conveying tracks are parallel to each other, and the conveying direction of the conveying tracks is perpendicular to the lifting direction of the No. 1 lifting cylinder (3).

3. The PVD tray reflow system with RFID information storage function according to claim 2, characterized in that: The lifting height of the No. 1 lifting cylinder (3) is adapted to the lifting height of the No. 2 lifting cylinder (6).

4. The PVD tray reflow system with RFID information storage function according to claim 1, characterized in that: The pallet rack (4) is multi-layered, and the dimensions of the multi-layered pallet racks (4) are the same, and they are all frame structures. The bottom of the multi-layered pallet racks (4) is flush with the pallet conveying mechanism (5) that is lifted to the highest height.

5. The PVD tray reflow system with RFID information storage function according to claim 4, characterized in that: The initial position of the pallet conveying mechanism (5) is flush with the initial position of the lifting and transplanting conveyor (2), and the highest heights of the lifting and transplanting conveyor (2) and the pallet conveying mechanism (5) are also flush.

6. The PVD tray reflow system with RFID information storage function according to claim 1, characterized in that: The PVD chamber body (7) is in direct contact with the ground, and an electric push rod of the No. 2 lifting cylinder (6) runs through the PVD chamber body (7), and the frame of the PVD chamber body (7) is fixedly connected to the frame of the tray rack (4).

7. The PVD tray reflow system with RFID information storage function according to claim 6, characterized in that: The RFID read / write head (8) is fixedly arranged at the frame corner of the PVD chamber body (7), and the RFID read / write head (8) is electrically connected to the inner track of the tray rack (4) through a controller.

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