A horizontal feeding device for preparing rotating target material

Abstract

The utility model relates to the technical field of rotary target material preparation, specifically a horizontal feeding device for rotary target material preparation, comprising a mounting plate and an adjusting device, wherein two cylinders are arranged above the mounting plate, a feeding mechanism is arranged at the output ends of the two cylinders, the adjusting device is arranged on the surface of the mounting plate, the adjusting device comprises guide rails, there are two guide rails, the two guide rails are fixedly connected to the surface of the mounting plate, a slide plate is slidably connected to the surface of the guide rail, a fixing frame is fixedly connected to the upper surface of the slide plate, a connecting block is arranged above the slide plate, two cylinders are installed in the connecting block, and sliding parts are respectively arranged on both sides of the connecting block. The utility model, by arranging the adjusting device, can flexibly adjust the position of the equipment after installation, without manual adjustment, thereby improving ease of use, and at the same time can more accurately adjust the target material to the required position, thereby ensuring better coordination with other equipment or process links, and improving processing precision and accuracy.

Description

Technical Field

[0001] The utility model relates to the technical field of rotary target material preparation, in particular to a horizontal feeding device for rotary target material preparation. Background Art

[0002] Rotating target is an important component of magnetron sputtering coating technology. It is a tubular sputtering target. By setting a stationary magnet inside the target, it can rotate slowly during the sputtering process, thereby achieving large-area and uniform thin film deposition. It is widely used in solar cells, architectural glass, automotive glass, semiconductors, flat-screen TVs and other fields. When preparing rotating targets, a loading device is used.

[0003] Prior art includes a utility model with publication number CN219708354U. The utility model discloses a horizontal loading device for preparing a rotating target material, comprising a horizontally arranged hydraulic cylinder, a fixed end of the hydraulic cylinder being provided with a lifting seat capable of adjusting the height, a telescopic end of the hydraulic cylinder being provided with a fixed seat, a V-shaped splint being provided on the side of the fixed seat away from the hydraulic cylinder, a control component for controlling the unloading of the splint being provided at the bottom of the fixed seat, the splint comprising a fixed plate obliquely mounted on the fixed seat, a rotating shaft being rotatably provided at the bottom of the fixed plate, a movable plate being provided on the side of the rotating shaft, and the control component being able to control the rotation of the movable plate. The horizontal feeding device for preparing the rotating target material is directly installed on the ground, and there is no need to build a platform on the upper side of the hydraulic press. The height can be adjusted, and the heated tube blank can be transported to a position flush with the extrusion rod of the hydraulic press through horizontal transportation. There is no need to transfer the tube blank up and down, which saves the processing time of the entire rotating target blank. The operation is simple and easy to use, and the problem of needing to build an operating platform on the upper side of the hydraulic press for installing a medium-frequency heating furnace and feeding equipment before the feeding operation of conveying the tube blank downward can be realized. The tube blank undergoes the processes of upward transportation and heating, as well as downward feeding and extrusion, which wastes time and causes troublesome operation.

[0004] In daily work, it is found that when the above-mentioned horizontal feeding device for preparing rotating targets is used, it is necessary to manually turn the bolts to adjust the height. It is difficult to achieve very precise height adjustment by manual operation, and there may be certain errors. In addition, manual rotation is laborious and the adjustment speed is slow. At the same time, after installation, once the installation position deviates, it is difficult to correct it by adjusting left and right, which may affect the accuracy and stability of the subsequent target preparation process. As a result, the manual adjustment of the existing horizontal feeding device for preparing rotating targets is troublesome, and it is not easy to adjust and correct after installation. Utility Model Content

[0005] The utility model aims to solve the shortcomings of the prior art that manual adjustment is troublesome and it is inconvenient to adjust and correct after installation, and proposes a horizontal feeding device for preparing a rotating target material.

[0006] In order to achieve the above-mentioned purpose, the utility model adopts the following technical scheme: a horizontal feeding device for preparing a rotating target material, comprising a mounting plate and an adjusting device, two cylinders are arranged above the mounting plate, and a feeding mechanism is arranged at the output end of the two cylinders, and the adjusting device is arranged on the surface of the mounting plate, and the adjusting device comprises a guide rail, and there are two guide rails, and the two guide rails are fixedly connected to the surface of the mounting plate, and a slide plate is slidably connected to the surface of the guide rail, and a fixing frame is fixedly connected to the upper surface of the slide plate, and a connecting block is arranged above the slide plate, and the two cylinders are installed in the connecting block. Slide members are respectively provided on both sides of the connecting block, and the connecting block is slidably connected to the inner wall of the fixing frame through the slide members, and the inner wall of the fixing frame is rotatably connected with a screw rod 1, and the screw rod 1 is threadedly connected to the inner wall of the connecting block, and the upper surface of the fixing frame is fixedly connected with a motor 1, and the motor 1 is fixedly connected to one end of the screw rod 1. Through the above components, the motor 1 can cooperate with the screw rod 1 to drive the connecting block and the slide member to slide in the inner wall of the fixing frame to achieve height adjustment without manual operation. At the same time, after installation, if there is a deviation, the slide plate can be moved on the guide rail, and the slide plate cooperates with the fixing frame to drive the connecting block and the cylinder for fine adjustment.

[0007] Preferably, two hollow members are fixedly connected to the upper surface of the mounting plate, the inner walls of the hollow members are rotatably connected to screw rod 2, screw rod 2 is slidably connected to the inner wall of the skateboard, and motor 2 is fixedly connected to the upper surface of the mounting plate, and motor 2 is fixedly connected to one end of screw rod 2. Through the above components, motor 2 drives screw rod 2 to rotate, which can control the skateboard to move on the guide rail, thereby improving ease of use.

[0008] Preferably, the sliding member includes an insert block, which is fixedly connected to the surface of the connecting block, and two balls are rotatably connected to the inner walls on both sides of the insert block. Through the above components, when the sliding member moves, it mainly slides between the balls on both sides of the insert block and the inner wall of the fixed frame, thereby reducing friction.

[0009] Preferably, a scale one is provided on one side surface of the fixing frame, and a scale block one is fixedly connected to a side of the connecting block close to the scale one. Through the above components, when the connecting block moves, observation can be performed according to scale block one in coordination with scale one, thereby achieving precise height adjustment.

[0010] Preferably, one side surface of the mounting plate is fixedly connected with a ruler 2, and one side surface of the skateboard is fixedly connected with a mark block 2. Through the above components, when the skateboard is fine-tuned on the guide rail, the mark block 2 can cooperate with the ruler 2 to accurately perform fine-tuning movement.

[0011] Preferably, auxiliary devices are provided on both sides of the mounting plate, and the auxiliary devices include mounting brackets. There are four mounting brackets, and the four mounting brackets are respectively arranged on both sides of the mounting plate in pairs. Two sliders are fixedly connected to one side of the mounting plate close to the mounting bracket, and the mounting bracket is slidably connected to the surface of the slider, and two hollow seats are fixedly connected to the surface of one side of the mounting plate located between the two sliders, and the inner wall of the hollow seat is rotatably connected with a screw rod three, and the screw rod three is threadedly connected to the inner wall of the mounting bracket. Through the above-mentioned components, when the equipment is installed as a whole, due to the unevenness of the mounting surface, the screw rod three can be rotated to adjust the mounting bracket, thereby resulting in an overall level installation effect.

[0012] Compared with the prior art, the advantages and positive effects of the utility model are:

[0013] 1. In the utility model, by setting an adjustment device, the connecting block and the sliding piece can be driven by a motor 1 in cooperation with a screw rod 1 to slide in the inner wall of the fixed frame to achieve height adjustment without manual operation. At the same time, after installation, if there is a deviation, the motor 2 can drive the screw rod 2 to move the slide plate on the guide rail, and the slide plate cooperates with the fixed frame to drive the connecting block and the cylinder for fine adjustment. By setting the adjustment device, after the equipment is installed, the position can be flexibly adjusted without manual adjustment, thereby improving ease of use. At the same time, the target material can be adjusted to the desired position more accurately, ensuring better coordination with other equipment or process links, and improving processing precision and accuracy.

[0014] 2. In the present invention, by providing an auxiliary device, the position of the equipment installation can be adjusted, and the overall equipment can be installed horizontally on an uneven installation surface, thereby improving the effect of horizontal feeding. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] Figure 1 The utility model provides a three-dimensional structural schematic diagram of a horizontal feeding device for preparing a rotating target material;

[0016] Figure 2 A partial structural schematic diagram of a horizontal feeding device for preparing a rotating target material is provided in the utility model;

[0017] Figure 3 The utility model proposes a horizontal feeding device for preparing a rotating target material. Figure 2 Schematic diagram of the structure at A in the middle;

[0018] Figure 4 The utility model proposes a horizontal feeding device for preparing a rotating target material. Figure 2 Schematic diagram of the structure at B in the middle;

[0019] Figure 5The utility model provides a partial structural schematic diagram of an adjusting device of a horizontal feeding device for preparing a rotating target material.

[0020] Legend:

[0021] 1. Mounting plate; 2. Cylinder; 3. Feeding mechanism; 4. Adjusting device; 41. Slide plate; 42. Fixing bracket; 43. Motor 1; 44. Screw 1; 45. Guide rail; 46. Screw 2; 47. Motor 2; 48. Slide; 481. Insert block; 482. Rolling ball; 49. Marking block 1; 410. Scale 1; 411. Scale 2; 412. Marking block 2; 413. Connecting block; 5. Auxiliary device; 51. Mounting bracket; 52. Sliding block; 53. Screw 3; 54. Hollow seat. DETAILED DESCRIPTION

[0022] See also Figure 1-Figure 5 The utility model provides a technical solution: a horizontal feeding device for preparing a rotating target material, comprising a mounting plate 1 and an adjusting device 4, two cylinders 2 are arranged above the mounting plate 1, a feeding mechanism 3 is arranged at the output end of the two cylinders 2, the adjusting device 4 is arranged on the surface of the mounting plate 1, and auxiliary devices 5 are arranged on both sides of the mounting plate 1.

[0023] The specific settings and functions of the adjusting device 4 and the auxiliary device 5 are described in detail below.

[0024] Specifically, the adjusting device 4 includes a guide rail 45, and there are two guide rails 45. The two guide rails 45 are fixedly connected to the surface of the mounting plate 1, and a slide plate 41 is slidably connected to the surface of the guide rail 45. A fixing frame 42 is fixedly connected to the upper surface of the slide plate 41, and a connecting block 413 is arranged above the slide plate 41. Two cylinders 2 are installed in the connecting block 413, and slide members 48 are respectively arranged on both sides of the connecting block 413. The connecting block 413 is slidably connected to the inner wall of the fixing frame 42 through the slide members 48. The inner wall of the fixing frame 42 is rotatably connected to a screw rod 44, and the screw rod 44 is threadedly connected to the inner wall of the connecting block 413. A motor 43 is fixedly connected to the upper surface of the fixing frame 42, and the motor 43 is fixedly connected to one end of the screw rod 44.

[0025] In this embodiment: the motor 43 cooperates with the screw 44 to drive the connecting block 413 and the sliding member 48 to slide in the inner wall of the fixed frame 42 to achieve height adjustment without manual operation. At the same time, after installation, if there is a deviation, the slide plate 41 can be moved on the guide rail 45, and the slide plate 41 cooperates with the fixed frame 42 to drive the connecting block 413 and the cylinder 2 for fine adjustment.

[0026] Specifically, two hollow parts are fixedly connected to the upper surface of the mounting plate 1, and the inner walls of the hollow parts are rotatably connected to a second screw 46, which is slidably connected to the inner wall of the slide plate 41, and a second motor 47 is fixedly connected to the upper surface of the mounting plate 1, and the second motor 47 is fixedly connected to one end of the second screw 46.

[0027] In this embodiment, the second motor 47 drives the second screw 46 to rotate, so as to control the slide plate 41 to move on the guide rail 45, thereby improving the usability.

[0028] Specifically, the sliding member 48 includes an insert block 481, which is fixedly connected to the surface of the connecting block 413. The inner walls on both sides of the insert block 481 are rotatably connected to two balls 482. When the sliding member 48 moves, it mainly slides between the balls 482 on both sides of the insert block 481 and the inner wall of the fixed frame 42, thereby reducing friction.

[0029] Specifically, a scale 1 410 is disposed on one side surface of the fixing frame 42 , and a scale block 1 49 is fixedly connected to a side of the connecting block 413 close to the scale 1 410 .

[0030] In this embodiment, when the connecting block 413 is moving, it can be observed according to the block 49 and the ruler 410, so that the height adjustment can be achieved accurately.

[0031] Specifically, a second ruler 411 is fixedly connected to one side surface of the mounting plate 1, and a second mark block 412 is fixedly connected to one side surface of the slide plate 41. When the slide plate 41 is fine-tuned on the guide rail 45, the second mark block 412 can cooperate with the second ruler 411 to accurately perform fine-tuning.

[0032] Specifically, the auxiliary device 5 includes a mounting bracket 51, and there are four mounting brackets 51. The four mounting brackets 51 are arranged in pairs on both sides of the mounting plate 1. Two sliders 52 are fixedly connected to one side of the mounting plate 1 close to the mounting bracket 51. The mounting bracket 51 is slidably connected to the surface of the slider 52. Two hollow seats 54 are fixedly connected to the surface of one side of the mounting plate 1 located between the two sliders 52. The inner wall of the hollow seat 54 is rotatably connected to a screw rod 53, and the screw rod 53 is threadedly connected to the inner wall of the mounting bracket 51.

[0033] In this embodiment, when the device is installed as a whole, due to the unevenness of the installation surface, the screw rod 53 can be rotated to adjust the installation bracket 51, thereby achieving the effect of overall leveling of the installation.

[0034] Working principle: By setting the adjustment device 4 and the auxiliary device 5, when the mounting plate 1 is being installed, if the mounting surface is uneven, the screw rod 3 53 is rotated, and the screw rod 3 53 can drive the slider 52 of the mounting bracket 51 to slide, thereby adjusting the position of the four mounting brackets 51. When the mounting plate 1 is in a horizontal state, the mounting plate 1 is then installed. If there is a deviation, the motor 2 47 is turned on, and the motor 2 47 can drive the screw rod 2 46 to rotate, and the screw rod 2 46 controls the slide plate 41, the fixing frame 42 and the connecting block 4 13. The cylinder 2 is moved and adjusted, and is precisely adjusted in conjunction with the block 2 412 and the ruler 2 411. After the adjustment is completed, the motor 2 47 can be turned off. When height adjustment is required, the motor 1 43 is turned on. The motor 1 43 drives the screw 1 44 to rotate. The screw 1 44 controls the connecting block 413 and the sliding member 48 to slide in the inner wall of the fixed frame 42. When the sliding frame slides, it is mainly rolled by the ball 482. In conjunction with the ruler 1 410 and the block 1 49, precise adjustment can be performed to complete the use.

Claims

1. A horizontal feeding device for preparing a rotating target material, comprising a mounting plate (1) and an adjusting device (4), characterized in that: Two cylinders (2) are arranged above the mounting plate (1), and a feeding mechanism (3) is arranged at the output ends of the two cylinders (2). The adjusting device (4) is arranged on the surface of the mounting plate (1), and the adjusting device (4) comprises a guide rail (45). There are two guide rails (45), and the two guide rails (45) are fixedly connected to the surface of the mounting plate (1). A slide plate (41) is slidably connected to the surface of the guide rail (45), and a fixing frame (42) is fixedly connected to the upper surface of the slide plate (41). A connecting frame (42) is arranged above the slide plate (41). The connecting block (413) comprises a connecting block (413), wherein the two cylinders (2) are installed in the connecting block (413), and slide members (48) are respectively arranged on both sides of the connecting block (413). The connecting block (413) is slidably connected to the inner wall of the fixing frame (42) through the slide members (48), and the inner wall of the fixing frame (42) is rotatably connected to a screw rod (44), and the screw rod (44) is threadedly connected to the inner wall of the connecting block (413), and the upper surface of the fixing frame (42) is fixedly connected to a motor (43), and the motor (43) is fixedly connected to one end of the screw rod (44).

2. A horizontal feeding device for preparing a rotating target according to claim 1, characterized in that: Two hollow members are fixedly connected to the upper surface of the mounting plate (1), the inner walls of the hollow members are rotatably connected to a second screw rod (46), the second screw rod (46) is slidably connected to the inner wall of the slide plate (41), and a second motor (47) is fixedly connected to the upper surface of the mounting plate (1), the second motor (47) is fixedly connected to one end of the second screw rod (46).

3. A horizontal feeding device for preparing a rotating target according to claim 1, characterized in that: The sliding member (48) comprises an insert block (481), the insert block (481) is fixedly connected to the surface of the connecting block (413), and two inner walls on both sides of the insert block (481) are rotatably connected to two rolling balls (482).

4. A horizontal feeding device for preparing a rotating target according to claim 1, characterized in that: A scale one (410) is provided on one side surface of the fixing frame (42), and a scale block one (49) is fixedly connected to a side of the connecting block (413) close to the scale one (410).

5. The horizontal feeding device for preparing a rotating target according to claim 1, characterized in that: A second scale (411) is fixedly connected to one side surface of the mounting plate (1), and a second scale block (412) is fixedly connected to one side surface of the slide plate (41).

6. A horizontal feeding device for preparing a rotating target according to claim 1, characterized in that: Auxiliary devices (5) are provided on both sides of the mounting plate (1), and the auxiliary devices (5) include mounting brackets (51). There are four mounting brackets (51), and the four mounting brackets (51) are arranged in pairs on both sides of the mounting plate (1). Two sliders (52) are fixedly connected to one side of the mounting plate (1) close to the mounting brackets (51), and the mounting brackets (51) are slidably connected to the surfaces of the sliders (52). Two hollow seats (54) are fixedly connected to the surface of one side of the mounting plate (1) located between the two sliders (52), and the inner wall of the hollow seat (54) is rotatably connected to a screw rod three (53), and the screw rod three (53) is threadedly connected to the inner wall of the mounting bracket (51).

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