Vacuum magnetic rod and vacuum coating equipment

Abstract

The utility model discloses a vacuum magnetic rod and vacuum coating equipment. The vacuum magnetic rod of the utility model includes a pipe fitting, a sleeve and an inner rod, wherein a receiving cavity is defined inside the pipe fitting; the sleeve is sleeved on the pipe fitting and slidably connected with the pipe fitting, and the sleeve is connected with a first magnet; the inner rod is passed through the receiving cavity and slidably connected with the pipe fitting, and the inner rod is connected with a second magnet, and the second magnet is coupled with the first magnet, so that the inner rod moves with the movement of the sleeve; the vacuum magnetic rod also includes at least two abutments, the abutments are connected with the inner rod, and at least one abutment is respectively provided on both sides of the second magnet along the moving direction of the inner rod, and the abutment is used to abut against the inner wall of the pipe fitting. The vacuum magnetic rod is supported by adding abutments, which eliminates the influence of wall thickness changes on the inner rod, so that the movement of the inner rod is more stable.

Description

Technical Field

[0001] The utility model relates to the technical field of vacuum coating, in particular to a vacuum magnetic rod and vacuum coating equipment. Background Art

[0002] In the coating process of vacuum coating equipment, vacuum magnetic rods are used to transport substrates into the vacuum chamber. The movement of the vacuum magnetic rods is mainly coupled by the magnet in the sleeve and the magnet in the inner rod, so that the sleeve drives the inner rod to move. This structure has very high requirements on the dimensional accuracy and uniformity of the wall thickness of the pipe. If the wall thickness of the pipe is too thin, the magnet adsorption force will be too strong, causing the inner rod to tilt, resulting in movement stagnation and poor sampling fork position accuracy. Utility Model Content

[0003] The utility model aims to solve at least one of the technical problems existing in the prior art. To this end, the utility model provides a vacuum magnetic rod, which eliminates the influence of wall thickness variation on the inner rod by adding abutment members for support, so that the movement of the inner rod is more stable.

[0004] The utility model also provides a vacuum coating device having the vacuum magnetic rod.

[0005] According to the first aspect of the present invention, the vacuum magnetic rod comprises:

[0006] A pipe fitting, wherein a receiving cavity is defined inside the pipe fitting;

[0007] A sliding sleeve, the sliding sleeve is sleeved on the pipe and slidably connected to the pipe, and the sliding sleeve is connected to a first magnet;

[0008] an inner rod, the inner rod being inserted into the accommodating cavity and being slidably connected to the pipe member, the inner rod being connected to a second magnet, the second magnet being coupled to the first magnet so that the inner rod moves along with the movement of the sliding sleeve;

[0009] Wherein, the vacuum magnetic rod also includes at least two abutments, which are connected to the inner rod, and at least one abutment is provided on both sides of the second magnet along the moving direction of the inner rod, and the abutment is used to abut against the inner wall of the tube.

[0010] The vacuum magnetic rod according to the embodiment of the utility model has at least the following beneficial effects:

[0011] The vacuum magnetic rod of the present application is supported by adding an abutment piece, which eliminates the influence of wall thickness changes on the inner rod. Regardless of whether the wall thickness increases or decreases, the distance from the second magnet to the inner wall of the pipe fitting is kept constant to avoid the inner rod from tilting at the end away from the sampling fork, making the movement state of the vacuum magnetic rod more stable. In addition, this type of vacuum magnetic rod has lower precision requirements on the pipe fitting, and the wall thickness error of the pipe fitting can be appropriately relaxed, thereby reducing the processing difficulty of the pipe fitting and reducing the manufacturing cost of the vacuum magnetic rod.

[0012] According to some embodiments of the present invention, the first magnet abuts against the outer peripheral surface of the tube, and the second magnet is spaced apart from the inner wall of the tube.

[0013] According to some embodiments of the utility model, the abutment member is annular and is sleeved on the inner rod.

[0014] According to some embodiments of the utility model, the abutment member includes at least three abutment portions, and the abutment portions are arranged at intervals along the circumference of the inner rod; wherein the arc corresponding to the central angle between two adjacent abutment portions is less than 180°.

[0015] According to some embodiments of the present invention, the abutting portions are evenly distributed along the circumference of the inner rod.

[0016] According to some embodiments of the utility model, the vacuum magnetic rod also includes a third magnet and a fourth magnet, the third magnet is connected to the sliding sleeve, and the first magnet and the third magnet are arranged in sequence along the moving direction of the inner rod, and the fourth magnet is connected to the inner rod, and the second magnet and the fourth magnet are arranged in sequence along the moving direction of the inner rod, wherein the third magnet and the fourth magnet have the same magnetic properties.

[0017] According to some embodiments of the present invention, the first magnet includes a plurality of magnetic blocks, and each of the magnetic blocks is arranged at intervals along the circumference of the tube;

[0018] And / or, the second magnet includes a plurality of magnetic blocks, each of which is arranged at intervals along the circumference of the inner rod;

[0019] And / or, the third magnet comprises a plurality of magnetic blocks, and the magnetic blocks are arranged at intervals along the circumference of the tube;

[0020] And / or, the fourth magnet includes a plurality of magnetic blocks, and the magnetic blocks are arranged at intervals along the circumference of the inner rod.

[0021] According to some embodiments of the present invention, the sliding sleeve is further connected to a limiting member, and the limiting member can abut against the outer wall of the pipe to limit the displacement of the sliding sleeve relative to the pipe.

[0022] According to some embodiments of the present utility model, the vacuum magnetic rod further includes a first mounting member, the first mounting member is connected to the inner rod, the abutment member is disposed on the first mounting member, and is connected to the inner rod via the first mounting member.

[0023] The vacuum coating device according to the second embodiment of the utility model includes:

[0024] A device body, wherein the device body has a vacuum chamber;

[0025] A vacuum magnetic rod as described in any one of the above embodiments;

[0026] A sampling fork, the sampling fork is connected to the inner rod of the vacuum magnetic rod;

[0027] The tube of the vacuum magnetic rod is connected to the device body, the accommodating cavity of the vacuum magnetic rod is communicated with the vacuum cavity, and the vacuum magnetic rod is used to drive the sampling fork to move in the vacuum cavity for sampling.

[0028] Additional aspects and advantages of the present invention will be given in part in the following description, and in part will become apparent from the following description, or will be learned through the practice of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS

[0029] The present invention is further described below with reference to the accompanying drawings and embodiments, wherein:

[0030] Figure 1 It is a schematic diagram of the cross-sectional structure of a vacuum magnetic rod in the related art;

[0031] Figure 2 It is a schematic diagram of the cross-sectional structure of a vacuum magnetic rod according to an embodiment of the utility model;

[0032] Figure 3 This is a schematic diagram of the assembly of the vacuum magnetic rod and the sampling fork according to an embodiment of the utility model.

[0033] Reference numerals:

[0034] Pipe fitting 100;

[0035] Sliding sleeve 200; first magnet 210; third magnet 220; first isolating member 230;

[0036] Inner rod 300; second magnet 310; fourth magnet 320; second spacer 330;

[0037] Abutment member 400;

[0038] Limiting member 500; Friction pad 510;

[0039] First mounting member 600; second mounting member 650; end stopper 651; bottom gasket 652;

[0040] Sampling fork 700. DETAILED DESCRIPTION

[0041] The embodiments of the present invention are described in detail below, and examples of the embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present invention, and cannot be understood as limiting the present invention.

[0042] In the description of the present invention, it should be understood that descriptions involving orientation, such as up, down, front, back, left, right, etc., indicating orientations or positional relationships, are based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present invention.

[0043] In the description of the present utility model, "several" means more than one, "many" means more than two, "greater than", "less than", "exceed" etc. are understood to exclude the number itself, and "above", "below", "within" etc. are understood to include the number itself. If there is a description of "first" or "second", it is only used to distinguish the technical features, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features or implicitly indicating the order of the indicated technical features.

[0044] In the description of the present invention, unless otherwise clearly defined, terms such as setting, installing, connecting, etc. should be understood in a broad sense, and technicians in the relevant technical field can reasonably determine the specific meanings of the above terms in the present invention based on the specific content of the technical solution.

[0045] In the description of the utility model, the description with reference to the terms "one embodiment", "some embodiments", "illustrative embodiments", "examples", "specific examples", or "some examples" means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the utility model. In this specification, the schematic representation of the above terms does not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described can be combined in any one or more embodiments or examples in a suitable manner.

[0046] In the coating process of vacuum coating equipment, vacuum magnetic rods are used to transport substrates into the vacuum chamber. The movement of the vacuum magnetic rods is mainly coupled by the magnets in the sleeve and the magnets in the inner rod, so that the sleeve drives the inner rod to move. This structure has very high requirements on the dimensional accuracy and uniformity of the wall thickness of the pipe. If the wall thickness of the pipe is too thin, the magnet adsorption force will be too strong, causing the inner rod to tilt, resulting in movement stagnation, abnormality, etc.

[0047] like Figure 1 The figure shows a schematic diagram of the structure of a vacuum magnetic rod in the related art, in which one end of the vacuum magnetic rod away from the sampling fork (i.e., the right end in the figure) is suspended in the pipe fitting. When the pipe wall of the pipe fitting is too thin, the distance from the magnet in the sleeve to the magnet on the inner rod is shortened, thereby increasing the adsorption force and causing the right end of the inner rod to tilt, thereby destroying the steady state of movement of the inner rod, which can easily lead to problems such as jamming of the inner rod and poor position accuracy of the sampling fork.

[0048] In order to solve the above problems, the first embodiment of the present application proposes a vacuum magnetic rod, such as Figure 2 As shown, the vacuum magnetic rod includes a pipe 100, a sleeve 200 and an inner rod 300. The sleeve 200 is sleeved on the pipe 100 and slidably connected with the pipe 100. Driven by the driving mechanism, the sleeve 200 can move relative to the pipe 100. The pipe 100 defines an accommodating cavity inside. One end of the inner rod 300 is inserted into the accommodating cavity and slidably connected with the pipe 100. The other end is located outside the accommodating cavity and connected with the sampling fork 700. The inner rod 300 can be driven to move relative to the pipe 100 to drive the sampling fork 700 to move to the target position for sampling or placing.

[0049] It should be noted that since the pipe 100 is used to connect with the vacuum chamber, the accommodating chamber of the pipe 100 is connected with the vacuum chamber, so the interior of the pipe 100 also needs to be maintained in a vacuum environment. For this reason, the inner rod 300 needs to adopt a non-contact driving structure. In the present application, the sleeve 200 is connected to the first magnet 210, and the inner rod 300 is connected to the second magnet 310. The first magnet 210 and the second magnet 310 have opposite magnetic properties and can attract each other. The first magnet 210 can be N-pole polarity, and the second magnet 310 can be S-pole polarity, or the first magnet 210 can be S-pole polarity, and the second magnet 310 can be N-pole polarity.

[0050] The first magnet 210 and the second magnet 310 are respectively located on the outside and the inside of the pipe 100. The two magnets are coupled to each other through the pipe wall of the pipe 100. When the sleeve 200 is driven to move, the first magnet 210 is driven to move, so that the second magnet 310 moves in the accommodating cavity along with the movement of the first magnet 210, thereby driving the inner rod 300 to move.

[0051] In order to eliminate the influence of the thickness change of the tube wall on the magnetic adsorption effect of the first magnet 210 and the second magnet 310, and to ensure that there is a relatively stable adsorption force between the first magnet 210 and the second magnet 310, the vacuum magnetic rod also includes at least two abutment members 400, the abutment members 400 are connected to the inner rod 300, and along the moving direction of the inner rod 300, at least one abutment member 400 is respectively arranged on both sides of the second magnet 310, and the abutment members 400 are used to abut against the inner wall of the tube 100.

[0052] In such Figure 2 In the illustrated embodiment, an abutment member 400 is provided on each side of the second magnet 310, and the abutment member 400 defines the distance between the outer periphery of the second magnet 310 and the inner wall of the pipe 100, and keeps the distance constant. It should be explained that the distance between the outer periphery of the second magnet 310 and the inner wall of the pipe 100 can be 0 or any value greater than 0, and can be designed according to the wall thickness of the pipe 100 and the magnetic force.

[0053] In other embodiments, a plurality of abutting members 400 may be disposed on both sides of the second magnet 310. Alternatively, one abutting member 400 may be disposed on one side of the second magnet 310, and a plurality of abutting members 400 may be disposed on the other side.

[0054] The vacuum magnetic rod of the present application is supported by adding an abutment member 400, eliminating the influence of wall thickness changes on the inner rod 300. Regardless of whether the wall thickness increases or decreases, the distance from the second magnet 310 to the inner wall of the pipe 100 remains constant, so that the coupling degree between the first magnet 210 and the second magnet 310 is within an appropriate range, so as to avoid the end of the inner rod 300 away from the sampling fork 700 from tilting up, making the movement state of the vacuum magnetic rod more stable. In addition, this type of vacuum magnetic rod has lower accuracy requirements on the pipe 100, and the wall thickness error of the pipe 100 can be appropriately relaxed, thereby reducing the processing difficulty of the pipe 100 and reducing the manufacturing cost of the vacuum magnetic rod.

[0055] For example, Figure 1 In the related art shown in FIG. 1 , the wall thickness error is required to be within 0.02 mm. Figure 2 In the embodiment of the present application shown, the wall thickness error is required to be within 0.1 mm, which is sufficient to ensure the normal operation of the vacuum magnetic rod. The vacuum magnetic rod of the present application has greatly reduced the requirement for the wall thickness error.

[0056] It should be noted that the abutment 400 is a self-lubricating material, for example, it can be PEEK (polyetheretherketone) material, which can reduce the friction resistance between the abutment 400 and the inner wall of the pipe fitting 100 when the inner rod 300 moves relative to the pipe fitting 100, and has good wear resistance and a long service life.

[0057] In some embodiments, to prevent the second magnet 310 from directly abutting against the inner wall of the pipe 100 and causing jamming after the abutment member 400 is worn, the first magnet 210 abuts against the outer circumference of the pipe 100 and the second magnet 310 is spaced apart from the inner wall of the pipe 100 .

[0058] In some embodiments, the abutment member 400 is annular, and the magnetic rod further includes a first mounting member 600, which is connected to the inner rod 300. Figure 2 As shown, the first mounting member 600 is sleeved on the inner rod 300 and forms an integral structure with the inner rod 300 through interference fit, etc. The outer peripheral surface of the first mounting member 600 is provided with an annular groove, and the abutment member 400 is arranged in the annular groove. The groove wall of the annular groove limits the displacement of the abutment member 400 along the moving direction of the inner rod 300.

[0059] In other embodiments, the abutment member 400 is not a continuous ring, and each abutment member 400 includes at least three abutment portions, each of which is arranged at intervals along the circumference of the inner rod 300. It should be noted that, taking the abutment member 400 including three abutment portions as an example, in order to achieve stable abutment between the inner rod 300 and the pipe 100, the central angle corresponding to the arc between any two adjacent abutment portions among the three abutment portions should be less than 180°. Furthermore, each abutment portion is evenly distributed along the circumference of the inner rod 300, so that taking the abutment member 400 including three abutment portions as an example, the circle corresponding to the arc between two adjacent abutment portions is equal to 120°.

[0060] In some embodiments, the vacuum magnetic rod also includes a third magnet 220 and a fourth magnet 320, the third magnet 220 is connected to the sleeve 200, and the first magnet 210 and the third magnet 220 are arranged in sequence along the moving direction of the inner rod 300, the fourth magnet 320 is connected to the inner rod 300, and the second magnet 310 and the fourth magnet 320 are arranged in sequence along the moving direction of the inner rod 300, wherein the third magnet 220 and the fourth magnet 320 have the same magnetic properties.

[0061] The third magnet 220 and the fourth magnet 320 can both have N-pole polarity, so that the first magnet 210 and the second magnet 310 attract each other, and the third magnet 220 and the fourth magnet 320 repel each other, so as to ensure that a certain gap is maintained between the inner rod 300 and the inner wall of the pipe 100, thereby reducing the probability of the inner rod 300 tilting. The third magnet 220 and the fourth magnet 320 can also have S-pole polarity, which can also achieve the effect of repelling each other. Figure 2 As shown, the first magnet 210 and the third magnet 220 are separated by the first isolating member 230 to avoid attraction or repulsion between the first magnet 210 and the third magnet 220, and the second magnet 310 and the fourth magnet 320 are separated by the second isolating member 330 to avoid attraction or repulsion between the second magnet 310 and the fourth magnet 320.

[0062] In some further embodiments, the first magnet 210, the second magnet 310, the third magnet 220 and the fourth magnet 320 are all annular magnets. Figure 2 Taking the assembly of the inner rod 300 shown as an example, after the second magnet 310 is inserted into the inner rod 300 from right to left and installed in place, the second isolation member 330 is installed at the end of the second magnet 310 to abut and fix the second magnet 310, and then the third magnet 220 is inserted and installed.

[0063] In other embodiments, one or more of the first magnet 210, the second magnet 310, the third magnet 220 and the fourth magnet 320 include a plurality of magnetic blocks. For example, the first magnet 210 and the third magnet 220 may include a plurality of magnetic blocks, so that the magnetic blocks can be conveniently installed one by one on the inner wall of the sleeve 200, and the assembly is relatively simple and quick. The second magnet 310 and the fourth magnet 320 are annular structures, so that they are sequentially sleeved on the inner rod 300. Alternatively, the first magnet 210, the second magnet 310, the third magnet 220 and the fourth magnet 320 may all be structures of a plurality of magnetic blocks. It should be noted that if the first magnet 210 and / or the third magnet 220 are magnetic block structures, the magnetic blocks of the first magnet 210 and / or the third magnet 220 are arranged at intervals along the circumference of the pipe 100, and if the second magnet 310 and / or the fourth magnet 320 are magnetic block structures, the magnetic blocks of the second magnet 310 and / or the fourth magnet 320 are arranged at intervals along the circumference of the inner tube.

[0064] In some embodiments, Figure 2 As shown, the sleeve 200 is also connected to a limiting member 500. A through hole is provided on the sleeve 200. The limiting member 500 is arranged in the through hole. The limiting member 500 can abut against the outer wall of the pipe 100 to limit the displacement of the sleeve 200 relative to the pipe 100. It should be noted that in some specific embodiments, a friction pad 510 with a large friction coefficient can be provided at the end of the limiting member 500. When the limiting member 500 is threadedly connected to the through hole, the limiting member 500 can be rotated to achieve upward or downward movement. When the limiting member 500 moves downward until the friction pad 510 abuts against the outer wall of the pipe 100, the displacement of the sleeve 200 relative to the pipe 100 is limited; when the limiting member 500 moves upward until the friction pad 510 separates from the outer wall of the pipe 100, the displacement of the sleeve 200 is not limited.

[0065] In such Figure 2 In the embodiment shown, the inner rod 300 is further provided with a second mounting member 650 for mounting the second magnet 310 and the fourth magnet 320. Figure 2As shown, the second mounting member 650 is sleeved on the inner rod 300, and the second mounting member 650 includes an end baffle 651 and a bottom washer 652. The outer diameter of the end baffle 651 is greater than the outer diameter of the bottom washer 652. The inner side surface of the end baffle 651 and the outer peripheral surface of the bottom washer 652 jointly define a groove for accommodating the second magnet 310 and the fourth magnet 320.

[0066] The second embodiment of the present application further proposes a vacuum coating device, which includes a device body, a sampling fork 700 and a vacuum magnetic rod mentioned in any of the above embodiments, wherein the device body has a vacuum chamber, the pipe 100 is connected to the device body, and the accommodating chamber inside the pipe 100 is connected to the vacuum chamber. The sampling fork 700 is connected to the inner rod 300, and the vacuum magnetic rod is used to drive the sampling fork 700 to move in the vacuum chamber and perform sampling or placing operations.

[0067] like Figure 2 The figure shows a connection diagram of the sampling fork 700 and the vacuum magnetic rod. The first magnet 210 of the sleeve 200 and the second magnet 310 of the inner rod 300 are coupled through the magnetic field. When the sleeve 200 is driven by the driving mechanism, the second magnet 310 fixed on the inner rod 300 drives the inner rod 300 to move through the magnetic field, so that the inner rod 300 drives the sampling fork 700 to complete the sampling action of extending or retracting.

[0068] The embodiments of the utility model are described in detail above in conjunction with the accompanying drawings, but the utility model is not limited to the above embodiments. Various changes can be made within the knowledge of ordinary technicians in the relevant technical field without departing from the purpose of the utility model. In addition, the embodiments of the utility model and the features in the embodiments can be combined with each other without conflict.

Claims

1. Vacuum magnetic rod, characterized in that: include: A pipe fitting, wherein a receiving cavity is defined inside the pipe fitting; A sliding sleeve, the sliding sleeve is sleeved on the pipe and slidably connected to the pipe, and the sliding sleeve is connected to a first magnet; an inner rod, the inner rod being inserted into the accommodating cavity and being slidably connected to the pipe member, the inner rod being connected to a second magnet, the second magnet being coupled to the first magnet so that the inner rod moves along with the movement of the sliding sleeve; Wherein, the vacuum magnetic rod also includes at least two abutments, which are connected to the inner rod, and at least one abutment is provided on both sides of the second magnet along the moving direction of the inner rod, and the abutment is used to abut against the inner wall of the tube.

2. The vacuum magnetic rod according to claim 1, characterized in that: The first magnet abuts against the outer peripheral surface of the tube, and the second magnet is spaced apart from the inner wall of the tube.

3. The vacuum magnetic rod according to claim 1, characterized in that: The abutment piece is annular and sleeved on the inner rod.

4. The vacuum magnetic rod according to claim 1, characterized in that: The abutment member includes at least three abutment portions, each of which is arranged at intervals along the circumference of the inner rod; wherein the arc corresponding to the central angle between two adjacent abutment portions is less than 180°.

5. The vacuum magnetic rod according to claim 4, characterized in that: The abutting portions are evenly distributed along the circumference of the inner rod.

6. The vacuum magnetic rod according to claim 1, characterized in that: The vacuum magnetic rod also includes a third magnet and a fourth magnet, the third magnet is connected to the sliding sleeve, and the first magnet and the third magnet are arranged in sequence along the moving direction of the inner rod, and the fourth magnet is connected to the inner rod, and the second magnet and the fourth magnet are arranged in sequence along the moving direction of the inner rod, wherein the third magnet and the fourth magnet have the same magnetic properties.

7. The vacuum magnetic rod according to claim 6, characterized in that: The first magnet includes a plurality of magnetic blocks, each of which is arranged at intervals along the circumference of the tube; And / or, the second magnet includes a plurality of magnetic blocks, each of which is arranged at intervals along the circumference of the inner rod; And / or, the third magnet comprises a plurality of magnetic blocks, and the magnetic blocks are arranged at intervals along the circumference of the tube; And / or, the fourth magnet includes a plurality of magnetic blocks, and the magnetic blocks are arranged at intervals along the circumference of the inner rod.

8. The vacuum magnetic rod according to claim 1, characterized in that: The sliding sleeve is also connected to a limiting member, and the limiting member can abut against the outer wall of the pipe to limit the displacement of the sliding sleeve relative to the pipe.

9. The vacuum magnetic rod according to claim 1, characterized in that: The vacuum magnetic rod further comprises a first mounting member, wherein the first mounting member is connected to the inner rod, and the abutment member is arranged on the first mounting member and connected to the inner rod through the first mounting member.

10. Vacuum coating equipment, characterized in that: include: A device body, wherein the device body has a vacuum chamber; The vacuum magnetic rod according to any one of claims 1 to 9; A sampling fork, the sampling fork is connected to the inner rod of the vacuum magnetic rod; The tube of the vacuum magnetic rod is connected to the device body, the accommodating cavity of the vacuum magnetic rod is communicated with the vacuum cavity, and the vacuum magnetic rod is used to drive the sampling fork to move in the vacuum cavity for sampling.

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