A target material fixing device for vacuum coating

Abstract

The utility model belongs to the technical field of vacuum coating, and specifically relates to a target material fixing device for vacuum coating. Through the cooperation of a fixed frame group and a movable frame group, it can be more convenient and flexible when installing a fixed target material. When installing the target material, it can be suspended by interlocking and limiting the interlocking frame and the bottom plate, and there is no need to lift the target material manually. The cooperation between the threaded ring and the matching window can achieve the effect of flexibly adjusting and adapting the target material, so as to achieve the purpose of effective connection and matching with the cathode plate.

Description

Technical Field

[0001] The utility model belongs to the technical field of vacuum coating, and in particular relates to a target material fixing device for vacuum coating. Background Art

[0002] Target material is a key material used in vacuum coating technology. Ions or atomic streams bombard the target surface in a vacuum, so that the atoms or molecules of the target are ejected and deposited on the substrate to form a thin film, which can give the product new functional properties.

[0003] As a consumable, the target material often needs to be disassembled and replaced during vacuum coating to meet different coating needs and ensure the stable use of the target material. Currently, conventional target material installation methods mostly use bolt connections, but this method is cumbersome and the disassembly and assembly time is too long. Therefore, there are also methods of fixing with fasteners such as snaps, but this method is not flexible and still has the problem of inconvenient installation when the target material of some coating equipment is at the upper end of the equipment. Utility Model Content

[0004] The purpose of the utility model is to provide a target material fixing device for vacuum coating, which is used to solve the problems mentioned in the background technology.

[0005] In order to achieve the above technical purpose, the technical solution adopted by the utility model is as follows:

[0006] A target material fixing device for vacuum coating comprises a cathode plate and a bottom plate, wherein the bottom plate is arranged at the lower end of the cathode plate, a connection window corresponding to the cathode plate is opened in the middle of the bottom plate, and the bottom plate is also provided with a connection mechanism;

[0007] The connecting mechanism includes a fixed frame group and a movable frame group, the movable frame group is movably embedded in the fixed frame group, the fixed frame group includes a fitting frame and a limiter, the fitting frame corresponds to the size of the connecting window, the limiter is two in number and is symmetrically arranged on the side of the fitting frame, a matching window corresponding to the cathode plate is opened in the middle of the fitting frame, the movable frame group is arranged in the matching frame, the movable frame group includes a placement ring and a threaded ring, the vertical section of the placement ring is an L-shaped structure, the threaded ring is connected to the upper side of the placement ring and forms a cylindrical structure with a smooth inner ring wall.

[0008] The limiter includes a pressing head, a connecting plate, a locking tongue and an elastic member. The engaging frame is provided with a C-shaped mounting cavity matching the limiter. The opening of the C-shaped mounting cavity faces a side away from the middle of the engaging frame and passes through the side of the engaging frame. The elastic member is arranged in the C-shaped mounting cavity. The connecting plate is slidably arranged in the C-shaped mounting cavity and is located on the side of the elastic member away from the middle of the engaging frame. The locking tongue and the pressing head are respectively arranged on the upper and lower sides of the connecting plate and both extend out of the C-shaped mounting cavity. A positioning opening matching the locking tongue is opened in the connecting window.

[0009] The elastic member is a spring sheet, which pushes the connecting plate to move away from the middle of the engaging frame in a static state.

[0010] The number of the positioning openings is four and they are distributed on the front, back, left and right sides of the connecting window.

[0011] The threaded ring is threadably connected to the matching window, the placement ring extends downward out of the matching window, and a limiting ring is provided at the opening of the matching window.

[0012] A floating member is also provided in the placing ring, and the floating member includes a compensation spring and a bayonet ring plate. The compensation spring is provided at the opening of the placing ring, and the bayonet ring plate is connected to the compensation spring and matches the opening of the placing ring.

[0013] Compared with the prior art, this application has at least the following advantages:

[0014] Through the cooperation of the fixed frame group and the movable frame group, the installation of the fixed target material can be more convenient and flexible. When installing the target material, the interlocking frame and the bottom plate can be interlocked and limited to achieve suspension, and there is no need to lift the target material manually. The cooperation between the threaded ring and the matching window can achieve the effect of flexibly adjusting and adapting the target material, so as to achieve the purpose of effective connection and matching with the cathode plate. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] The present invention can be further described by the non-limiting embodiments given in the accompanying drawings.

[0016] Figure 1 The utility model is a schematic structural diagram of a target material fixing device for vacuum coating.

[0017] Figure 2 It is a structural sectional view of the utility model.

[0018] Figure 3 for Figure 2 A magnified schematic diagram of center A.

[0019] Figure 4 for Figure 2 A magnified schematic diagram of point B in the middle.

[0020] Figure 5 This is a schematic diagram of the structure after removing the connecting mechanism.

[0021] Figure 6 It is a structural diagram of the connecting mechanism.

[0022] Cathode plate 1, bottom plate 11, connecting window 12, mosaic frame 2, matching window 21, placement ring 3, threaded ring 31, pressure head 4, connecting plate 41, locking tongue 42, elastic member 43, C-shaped mounting cavity 44, positioning port 45, limiting ring 5, compensation spring 6, bayonet ring plate 61. DETAILED DESCRIPTION

[0023] In order to enable those skilled in the art to better understand the present invention, the technical solution of the present invention is further described below in conjunction with the accompanying drawings and embodiments.

[0024] like Figure 1-6 As shown, a target material fixing device for vacuum coating comprises a cathode plate 1 and a bottom plate 11, wherein the bottom plate 11 is arranged at the lower end of the cathode plate 1, a connecting window 12 corresponding to the cathode plate 1 is opened in the middle of the bottom plate 11, and the bottom plate 11 is also provided with a connecting mechanism;

[0025] The connecting mechanism includes a fixed frame group and a movable frame group. The movable frame group is movably embedded in the fixed frame group. The fixed frame group includes a fitting frame 2 and a limiter. The fitting frame 2 corresponds to the size of the connecting window 12. There are two limiters and they are symmetrically arranged on the side of the fitting frame 2. A matching window 21 corresponding to the cathode plate 1 is opened in the middle of the fitting frame 2. The movable frame group is arranged in the matching frame. The movable frame group includes a placement ring 3 and a threaded ring 31. The vertical section of the placement ring 3 is an L-shaped structure. The threaded ring 31 is connected to the upper side of the placement ring 3 and forms a cylindrical structure with a smooth inner ring wall.

[0026] The cathode plate 1 and the bottom plate 11 are arranged on the upper side of the vacuum coating equipment. When installing the target material, the target material is placed in the placement ring 3 of the movable frame group through the matching window 21 of the chimeric frame 2. Since the placement ring 3 is an L-shaped structure, the target material will be supported in the placement ring 3 and remain relatively stable. At this time, the chimeric frame 2 can be pushed into the connection window 12 corresponding to the bottom plate 11, so that the stopper is connected to the bottom plate 11. At this time, the chimeric frame 2 is convenient for the bottom plate 11 to be connected to form a hanging state;

[0027] When the connection between the mosaic frame 2 and the base plate 11 is relatively stable, the placement ring 3 can be rotated to make the threaded ring 31 move upward along the matching window 21 until the upper end of the target material abuts against the lower end of the cathode plate 1, so that the connection and fixation of the target material can be completed. During the connection process, the target material can be placed in the placement ring 3 for storage in advance without manual lifting. When further adjusting the degree of fit and matching, the suspension of the limiter can be used to make the adjustment more convenient and labor-saving, and the connection is stable and the regulation is flexible. The bottom-up adjustment method using the movable frame group can adapt to the installation and fixation needs of targets of different thicknesses to a greater extent.

[0028] The limiter includes a pressing head 4, a connecting plate 41, a locking tongue 42 and an elastic member 43. The engaging frame 2 is provided with a C-shaped mounting cavity 44 matching the limiter. The opening of the C-shaped mounting cavity 44 faces a side away from the middle of the engaging frame 2 and passes through the side of the engaging frame 2. The elastic member 43 is arranged in the C-shaped mounting cavity 44. The connecting plate 41 is slidably arranged in the C-shaped mounting cavity 44 and is located on the side of the elastic member 43 away from the middle of the engaging frame 2. The locking tongue 42 and the pressing head 4 are respectively arranged on the upper and lower sides of the connecting plate 41 and both extend out of the C-shaped mounting cavity 44. A positioning opening 45 matching the locking tongue 42 is opened in the connecting window 12.

[0029] The elastic member 43 is a spring sheet, which pushes the connecting plate 41 to move away from the middle of the engaging frame 2 in a static state.

[0030] During the connection between the engaging frame 2 and the connecting window 12, the locking tongue 42 is blocked by the bottom plate 11 and retracted into the C-shaped mounting cavity 44 until the engaging frame 2 moves upward to the positioning opening 45 corresponding to the locking tongue 42. Then, the locking tongue 42 is pushed by the elastic member 43 to embed into the positioning opening 45 to complete the hanging positioning. When unlocking, it is only necessary to lift the engaging frame 2 and press the pressing heads 4 of the two limiters at the same time. The locking tongue 42 is disengaged from the positioning opening 45 by the driving action of the connecting plate 41, and the disassembly of the engaging frame 2 can be quickly completed.

[0031] There are four positioning openings 45 distributed at the front, back, left and right sides of the connection window 12 ; thus, when installing and connecting, there is no need to deliberately match the orientation of the fitting frame 2 and the positioning openings 45 .

[0032] The threaded ring 31 is threadedly connected to the matching window 21 , the placement ring 3 extends downward out of the matching window 21 , and a limiting ring 5 is provided at the opening of the matching window 21 .

[0033] A floating member is also provided in the placement ring 3 , and the floating member includes a compensation spring 6 and a bayonet ring plate 61 . The compensation spring 6 is provided at the opening of the placement ring 3 , and the bayonet ring plate 61 is connected to the compensation spring 6 and matches the opening of the placement ring 3 .

[0034] The setting of the floating part can, on the one hand, play a certain buffering role when adjusting the placement ring 3 until the target material and the cathode plate 1 are abutted and matched. On the other hand, it can play a certain self-compensating lifting role in the process of gradual consumption of the target material, and compensate for the unstable connection caused by misoperation during installation, so as to ensure that the target material and the cathode plate 1 can be connected and matched.

[0035] The above embodiments are merely illustrative of the principles and effects of the present invention, and are not intended to limit the present invention. Anyone familiar with the technology may modify or change the above embodiments without violating the spirit and scope of the present invention. Therefore, all equivalent modifications or changes made by those with ordinary knowledge in the relevant technical field without departing from the spirit and technical ideas disclosed in the present invention shall still be covered by the claims of the present invention.

Claims

1. A target material fixing device for vacuum coating, comprising a cathode plate and a bottom plate, wherein the bottom plate is arranged at the lower end of the cathode plate, characterized in that: A connection window corresponding to the cathode plate is opened in the middle of the bottom plate, and the bottom plate is also provided with a connection mechanism; The connecting mechanism includes a fixed frame group and a movable frame group, the movable frame group is movably embedded in the fixed frame group, the fixed frame group includes a fitting frame and a limiter, the fitting frame corresponds to the size of the connecting window, the limiter is two in number and is symmetrically arranged on the side of the fitting frame, a matching window corresponding to the cathode plate is opened in the middle of the fitting frame, the movable frame group is arranged in the matching frame, the movable frame group includes a placement ring and a threaded ring, the vertical section of the placement ring is an L-shaped structure, the threaded ring is connected to the upper side of the placement ring and forms a cylindrical structure with a smooth inner ring wall.

2. A target material fixing device for vacuum coating according to claim 1, characterized in that: The limiter includes a pressing head, a connecting plate, a locking tongue and an elastic member. The engaging frame is provided with a C-shaped mounting cavity matching the limiter. The opening of the C-shaped mounting cavity faces a side away from the middle of the engaging frame and passes through the side of the engaging frame. The elastic member is arranged in the C-shaped mounting cavity. The connecting plate is slidably arranged in the C-shaped mounting cavity and is located on the side of the elastic member away from the middle of the engaging frame. The locking tongue and the pressing head are respectively arranged on the upper and lower sides of the connecting plate and both extend out of the C-shaped mounting cavity. A positioning opening matching the locking tongue is opened in the connecting window.

3. A target material fixing device for vacuum coating according to claim 2, characterized in that: The elastic member is a spring sheet, which pushes the connecting plate to move away from the middle of the engaging frame in a static state.

4. A target material fixing device for vacuum coating according to claim 3, characterized in that: The number of the positioning openings is four and they are distributed on the front, back, left and right sides of the connecting window.

5. A target material fixing device for vacuum coating according to claim 4, characterized in that: The threaded ring is threadably connected to the matching window, the placement ring extends downward out of the matching window, and a limiting ring is provided at the opening of the matching window.

6. A target material fixing device for vacuum coating according to claim 5, characterized in that: A floating member is also provided in the placing ring, and the floating member includes a compensation spring and a bayonet ring plate. The compensation spring is provided at the opening of the placing ring, and the bayonet ring plate is connected to the compensation spring and matches the opening of the placing ring.

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