A PVD target

Abstract

This invention discloses a PVD target material, comprising an outer tube, an inner tube, and a magnetic rod. The outer tube is fitted onto the inner tube, and a tubular gap for coolant flow exists between the outer tube and the inner tube. The inner tube encloses the magnetic rod. The outer wall of the inner tube has multiple groove structures that spirally surround the outer wall along the axial direction of the inner tube. Coolant entering the groove structures flows from the inlet of the tubular gap through the groove structures, spiraling around the outer wall of the inner tube to the outlet of the tubular gap. This invention can improve heat dissipation efficiency without increasing the coolant inlet pressure or the gap between the inner and outer tubes.

Description

Technical Field

[0001] The utility model relates to the technical field of PVD target materials, in particular to a PVD target material. Background Art

[0002] Physical vapor deposition coating equipment is referred to as PVD. It is widely used in photovoltaic applications. The target material is an important auxiliary material in PVD equipment (the target material includes metals, alloys or compounds. These materials are deposited on the substrate surface under vacuum conditions through sputtering technology to form a thin film). There is a welding material called indium inside the target material. The melting point of indium is 156.61°C. If this temperature is exceeded, indium will melt and overflow from the outside of the target material. The operating temperature of the PVD chamber is 280°C, and coolant is needed to cool the indium in the target material.

[0003] See also Figure 1 The existing PVD target has a long cylindrical structure, which is divided into two parts, the outer tube 11 covers the inner tube 12. The outer tube is a metal material welded with indium and a matching sputtering material; the inner tube is a magnetic rod and other related accessories, wrapped in metal; the coolant passes through the 5MM gap between the outer tube and the inner tube to cool the indium. The water inlet pressure of the coolant is about 0.4-0.6MPa, and the water outlet pressure is about 0.15MPa after passing through the large inner tube gap, which is one third of the original pressure, which greatly slows down the flow and heat-carrying process of the coolant and greatly reduces the cooling effect; coupled with the excessive water inlet pressure, eddy currents and backflows will form in the gap, causing local negative pressure in the pipeline, which will also cause bubbles to form. The place with bubbles cannot be cooled, causing the indium to melt and overflow from the target material, causing the target material to be scrapped. Utility Model Content

[0004] The technical problem to be solved by the utility model is to provide a PVD target material, which can improve the heat dissipation efficiency without increasing the water inlet pressure of the coolant and the gap between the inner and outer tubes.

[0005] In order to solve the above technical problems, the utility model discloses a PVD target material, including an outer tube, an inner tube and a magnetic rod, the outer tube is sleeved on the inner tube, and there is a tubular gap between the outer tube and the inner tube for circulating coolant, and the inner tube wraps the magnetic rod; the outer wall surface of the inner tube is provided with a plurality of groove structures which spirally surround and wrap the outer wall surface along the axial direction of the inner tube, and the coolant entering the groove structure spirally surrounds the outer wall surface of the inner tube through the groove structure from the inlet of the tubular gap to flow to the outlet of the tubular gap.

[0006] As an optional implementation, the ratio of the sum of the widths of the plurality of groove structures distributed along the circumference of the end of the inner tube to the circumference of the end is 1:5 to 1:2.

[0007] As another optional implementation, the ratio of the depth of the groove structure to the thickness of the tubular gap is 1:6 to 1:1.5.

[0008] As another optional implementation, the ratio of the number of turns of all the groove structures spirally wrapped around the outer wall of the inner tube to the length of the inner tube is 1:200 to 1:100.

[0009] As another optional implementation, the ratio of the number of turns of a single groove structure spirally wrapped around the outer wall of the inner tube to the length of the inner tube is 1:3000 to 1:1500.

[0010] As yet another optional implementation, the initial pressure of the coolant at the inlet of the tubular gap is 0.4-0.6 MPa.

[0011] As another optional implementation, the thickness of the tubular gap is 3-10 mm.

[0012] As yet another optional embodiment, the outer tube comprises a metal material welded with indium and a matching sputtering material.

[0013] As another optional implementation, the inner tube is made of metal material.

[0014] As another optional implementation, the cross-sectional shape of the groove structure in the circumferential direction is an inverted triangle, a rectangular arc, a circular arc or a rectangle.

[0015] Compared with the prior art, the embodiments of the present invention have the following beneficial effects:

[0016] Since the pressure at the entrance of the tubular gap is usually relatively high, the coolant flows very fast at the entrance, and the flow direction is disordered, which will form eddy currents and backflows, generate bubbles, and the cooling effect is low at the bubbles, resulting in uneven cooling of the outer tube. The circumferential groove structure of the present embodiment has a drainage effect, which can limit the flow direction of the coolant, so that the bubbles generated by the water flow in the cooling water are discharged along the groove structure. In addition, the liquid pressure loss after drainage is smaller than that of disordered flow. Therefore, under the same gap and inlet pressure, the outlet pressure of the present embodiment is greater than that of the existing smooth wall inner tube solution, so that the liquid flows faster and takes away more heat in the same time. It can be seen that the embodiment of the utility model can improve the heat dissipation efficiency without increasing the water inlet pressure of the coolant and without increasing the gap between the inner and outer tubes. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the drawings required for use in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without creative work.

[0018] Figure 1 It is a structural schematic diagram of an existing PVD target material disclosed in an embodiment of the utility model;

[0019] Figure 2 It is a structural schematic diagram of a PVD target material disclosed in an embodiment of the utility model;

[0020] Figure 3 It is a schematic diagram of the cross-sectional structure of a PVD target material disclosed in an embodiment of the utility model;

[0021] Figure 4 It is a structural schematic diagram of an inner tube of a PVD target material disclosed in an embodiment of the utility model. DETAILED DESCRIPTION

[0022] In order to enable those skilled in the art to better understand the solution of the utility model, the technical solution in the embodiment of the utility model will be clearly and completely described below in conjunction with the drawings in the embodiment of the utility model. Obviously, the described embodiment is only a part of the embodiment of the utility model, not all of the embodiments. Based on the embodiment of the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0023] See also Figure 2-4 The utility model embodiment discloses a PVD target material, including an outer tube 101, an inner tube 102 and a magnetic rod 103, wherein the outer tube 101 is sleeved on the inner tube 102, and there is a tubular gap 104 for circulating cooling liquid between the outer tube 101 and the inner tube 102, wherein the tubular gap 104 is a tubular gap surrounded by the inner wall surface of the outer tube 101 and the outer wall surface of the inner tube 102, and the inner tube 102 wraps the magnetic rod 103; wherein, a plurality of groove structures are provided on the outer wall surface of the inner tube 102 along the axial direction of the inner tube 102, and the cooling liquid entering the groove structure flows from the inlet of the tubular gap 104 through the groove structure around the outer wall surface of the inner tube 102 to flow to the outlet of the tubular gap 104.

[0024] Since the pressure at the entrance of the tubular gap 104 is usually relatively high, the coolant flows very fast at the entrance, and the flow direction is disordered, which will form eddy currents and backflows, generate bubbles, and the cooling effect at the bubbles is low, thus resulting in uneven cooling of the outer tube 101. The surrounding groove structure of this embodiment has a drainage effect, which can limit the flow direction of the coolant, so that the bubbles generated by the water flow in the cooling water are discharged along the groove structure. In addition, the liquid pressure loss after drainage is smaller than that of disordered flow. Therefore, under the same gap and inlet pressure, this embodiment is superior to the existing solution of the smooth wall inner tube 102 (i.e., the attached Figure 1 The structure shown in the figure has a greater outlet pressure, which makes the liquid flow faster and takes away more heat in the same time. It can be seen that this embodiment can improve the heat dissipation efficiency without increasing the water inlet pressure of the coolant and the gap between the inner and outer tubes 101.

[0025] Optionally, the ratio of the sum of the widths of the plurality of groove structures distributed along the end circumference of the inner tube 102 to the circumference of the end circumference is 1:5 to 1:2.

[0026] Further optionally, the ratio of the depth of the groove structure to the thickness of the tubular gap 104 is 1:6 to 1:1.5.

[0027] Further optionally, the ratio of the number of turns of all the groove structures spirally wrapped around the outer wall of the inner tube 102 to the length of the inner tube 102 is 1:200 to 1:100.

[0028] Further optionally, the ratio of the number of turns of a single groove structure spirally wrapped around the outer wall of the inner tube 102 to the length of the inner tube 102 is 1:3000 to 1:1500.

[0029] Optionally, the initial pressure of the coolant at the inlet of the tubular gap 104 is 0.4-0.6 MPa.

[0030] Further optionally, the thickness of the tubular gap 104 is 3-10 mm.

[0031] Further optionally, the outer tube 101 includes a metal material welded with indium and a matching sputtering material.

[0032] Further optionally, the inner tube 102 is made of metal material.

[0033] Further optionally, the cross-sectional shape of the groove structure in the circumferential direction is an inverted triangle, a rectangular arc, a circular arc or a rectangle.

[0034] The contents disclosed in the embodiments of the present invention only disclose the preferred embodiments of the present invention, which are only used to illustrate the technical solutions of the present invention, rather than to limit the present invention. Although the present invention has been described in detail with reference to the aforementioned embodiments, it should be understood by those skilled in the art that the technical solutions described in the aforementioned embodiments can still be modified, or some of the technical features therein can be replaced by equivalents. However, these modifications or replacements do not deviate the essence of the corresponding technical solutions from the spirit and scope of the technical solutions of the embodiments of the present invention.

Claims

1. A PVD target material, comprising an outer tube, an inner tube and a magnetic rod, wherein the outer tube is sleeved on the inner tube, and there is a tubular gap between the outer tube and the inner tube for circulating a coolant, and the inner tube wraps the magnetic rod; characterized in that: The outer wall surface of the inner tube is provided with a plurality of groove structures which spirally surround the outer wall surface along the axial direction of the inner tube. The coolant entering the groove structure flows from the inlet of the tubular gap through the groove structure, spirally surrounds the outer wall surface of the inner tube, and flows to the outlet of the tubular gap.

2. The PVD target according to claim 1, characterized in that: The ratio of the sum of the widths of the plurality of groove structures distributed along the circumference of the end of the inner tube to the circumference of the end is 1:5 to 1:

2.

3. The PVD target according to claim 1, characterized in that: The ratio of the depth of the groove structure to the thickness of the tubular gap is 1:6 to 1:1.

5.

4. The PVD target according to claim 1, characterized in that The ratio of the number of turns of all the groove structures spirally encircling the outer wall surface of the inner tube to the length of the inner tube is 1:200 to 1:

100.

5. The PVD target according to claim 1, characterized in that: The ratio of the number of turns of a single groove structure spirally encircling the outer wall of the inner tube to the length of the inner tube is 1:3000 to 1:1500.

6. The PVD target according to claim 1, characterized in that: The initial pressure of the coolant at the inlet of the tubular gap is 0.4-0.6 MPa.

7. The PVD target according to claim 1, characterized in that: The thickness of the tubular gap is 3-10 mm.

8. The PVD target according to claim 1, characterized in that: The outer tube includes a metal material welded with indium and a matching sputtering material.

9. The PVD target according to claim 1, characterized in that: The inner tube is made of metal material.

10. The PVD target according to claim 1, characterized in that: The cross-sectional shape of the groove structure in the circumferential direction is an inverted triangle, a rectangular arc, a circular arc or a rectangle.

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