A vacuum sealing pad

Abstract

The utility model discloses a vacuum sealing gasket, which relates to the technical field of vacuum equipment, and includes a clamp, a sealing gasket and a centering bracket; the centering bracket is an open annular member, the sealing gasket is arranged between two joints to be connected and is located at the center of the centering bracket, and the clamp is used to connect the two joints to be connected. The vacuum sealing gasket in the utility model is locked by a metal chain clamp on the outside, so that the flange sealing surface of the KF joint gradually squeezes the metal sealing gasket, and after reaching a certain squeezing amount, metal sealing is achieved, and different high and low temperature use requirements can be achieved according to different materials of the metal sealing gasket.

Description

Technical Field

[0001] The utility model relates to the technical field of vacuum equipment, in particular to a vacuum sealing pad. Background Art

[0002] The KF sealing system uses a prototype flange and rubber O-ring structure, which allows the KF seal to be quickly disassembled and assembled through the matching clamp. The KF system is widely used in various fields, including physical research, chemical experiments, semiconductor manufacturing, aerospace technology, etc., in these fields to connect and seal the various components of the vacuum system to ensure the effective operation of the system.

[0003] The patent with publication number CN217683209U discloses a sealing structure suitable for KF flange, including a KF flange mounting seat and several groups of sealing structures, each group of sealing structures includes a pressure ring, a sealing ring and a clamping member, and the KF flange mounting seat is provided with several groups of stepped through holes, and the sealing structures correspond to the through holes one by one; the diameters of the stepped through holes are respectively the first channel, the second channel and the third channel from small to large, and the thermocouple can pass through the third channel, the second channel and the first channel in sequence; a sealing ring and a pressure ring are placed in the second channel, and the pressure ring is located on the side close to the first channel; the diameters of the pressure ring and the sealing ring are larger than the diameter of the first channel; the clamping member can move in the third channel and clamp the sealing ring in the second channel. The above sealing structure can solve the problem of the lack of sealing structures specifically for KF flanges on the market; multiple groups of sealing structures and through holes are provided to achieve sealing of multiple test points.

[0004] Existing KF seals usually have low leakage rates, but in high vacuum or ultra-high vacuum applications, leakage problems may still occur, and the limit leakage rate of rubber O-rings is also lower than that of metal seals. The KF sealing system uses stainless steel flanges and rubber O-rings, which are suitable for most occasions, but because the rubber O-rings are in direct contact with the internal chamber of the vacuum system, the corrosiveness of some gases will cause the rubber O-rings to fail and become unusable. The rubber O-rings used in KF seals have performance changes at extreme temperatures and can generally only be used between -15 and 200°C. Higher or lower temperatures require the replacement of other sealing systems to ensure the vacuum degree of the vacuum system. Summary of the invention

[0005] In order to solve the above technical problems, the utility model provides a vacuum sealing pad which has a wider operating temperature range while having a lower leakage rate than a rubber sealing ring.

[0006] To achieve the above purpose, the utility model provides the following solutions:

[0007] The utility model provides a vacuum sealing pad, comprising a clamp, a sealing pad and a centering bracket; the centering bracket is an open annular piece, the sealing pad is arranged between two joints that need to be connected and is located at the center of the centering bracket, and the clamp is used to connect the two joints that need to be connected.

[0008] Optionally, the sealing gasket is a ring-mounted metal sealing gasket.

[0009] Optionally, the cross-sectional surface of the sealing gasket is hexagonal, trapezoidal, rhombus or triangle.

[0010] Optionally, a plurality of centering spring sheets are evenly arranged on the side wall of the centering bracket along the circumferential direction, one end of the centering spring sheet is connected to the side wall of the centering bracket, and the middle part of the centering spring sheet protrudes toward the center of the centering bracket.

[0011] Optionally, the clamp includes a first chain, a second chain, a screw and a nut; adjacent first chains are connected via the second chain, and an end of the first chain is rotatably connected to an end of an adjacent second chain via a pin; an end of the first chain located at one end of the clamp away from the second chain is connected to one end of the screw, and the other end of the screw is provided with the nut; an end of the first chain located at the other end of the clamp away from the second chain is provided with a locking groove; a locking cylinder is provided on the screw, and the locking cylinder is radially provided with a through hole, the screw passes through the through hole, and after the locking cylinder penetrates into the locking groove, the clamp is locked by tightening the nut.

[0012] Compared with the prior art, the utility model has achieved the following technical effects:

[0013] The vacuum sealing gasket in the utility model is locked externally by a metal chain clamp, so that the flange sealing surface of the KF joint gradually squeezes the metal sealing gasket. After a certain squeezing amount is reached, metal sealing is achieved. Different high and low temperature use requirements can be met according to different materials of the metal sealing gasket. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] In order to more clearly illustrate the embodiments of the utility model or the technical solutions in the prior art, the drawings required for use in the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the utility model. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0015] Figure 1 This is a schematic diagram of the installation structure of the vacuum sealing pad of the utility model;

[0016] Figure 2 for Figure 1 BB cross-sectional structure diagram;

[0017] Figure 3 for Figure 1 AA cross-sectional structural diagram;

[0018] Figure 4 for Figure 1 A schematic diagram of a top view structure;

[0019] Figure 5 for Figure 4 Schematic diagram of CC cross-sectional structure;

[0020] Figure 6 This is a schematic diagram of the installation structure of the centering bracket and the KF joint in the vacuum sealing gasket of the utility model;

[0021] Figure 7 for Figure 6 A schematic cross-sectional structure diagram of ;

[0022] Figure 8 This is a schematic diagram of the structure of the clamp in the vacuum sealing gasket of the utility model;

[0023] Fig. 9 for Figure 8 A schematic cross-sectional structure diagram of ;

[0024] Fig.10 This is a schematic diagram of the unfolded structure of the clamp in the vacuum sealing gasket of the utility model;

[0025] Fig.11 It is a side view schematic diagram of the unfolded structure of the clamp in the vacuum sealing gasket of the utility model;

[0026] Fig.12 This is a schematic diagram of the structure of the centering bracket in the vacuum sealing pad of the utility model;

[0027] Fig.13 This is a schematic diagram of the structure of the sealing gasket in the vacuum sealing gasket of the utility model;

[0028] Fig.14 for Fig.13 A schematic cross-sectional structure diagram of ;

[0029] Fig.15 This is a schematic cross-sectional view of the second type of vacuum sealing gasket of the utility model;

[0030] Fig.16 This is a schematic cross-sectional view of the third type of vacuum sealing gasket of the utility model;

[0031] Fig.17 This is a schematic cross-sectional view of the fourth type of vacuum sealing gasket of the utility model.

[0032] Description of reference numerals: 1. joint; 2. clamp; 3. sealing pad; 4. centering bracket;

[0033] 21. Screw; 22. Locking groove; 23. Locking cylinder; 24. Nut; 25. First chain; 26. Second chain; 27. Pin. DETAILED DESCRIPTION

[0034] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0035] like Figures 1 to 17 As shown, this embodiment provides a vacuum sealing gasket, including a clamp 2, a sealing gasket 3 and a centering bracket 4; the centering bracket 4 is an open annular part, the sealing gasket 3 is arranged between two joints 1 that need to be connected and is located at the center of the centering bracket 4, and the clamp 2 is used to connect the two joints 1 that need to be connected.

[0036] In this specific embodiment, the sealing gasket 3 is a ring-mounted metal sealing gasket 3. Figures 13 to 17 As shown, the cross-section of the sealing gasket 3 is hexagonal, trapezoidal, rhombus or triangular. The upper and lower surfaces of the sealing gasket 3 are conical surfaces, which are in contact with the sealing flange plane and deform under a certain pressure to form a metal seal.

[0037] Three centering springs are evenly arranged on the side wall of the centering bracket 4 along the circumferential direction. One end of the centering spring is connected to the side wall of the centering bracket 4, and the middle part of the centering spring protrudes toward the center of the centering bracket 4. The centering bracket 4 is made of thin metal sheet, and the outer ring is sleeved on the outer ring of the KF joint 1. The inner ring diameter between the three centering springs is slightly smaller than the outer diameter of the metal sealing gasket 3. At the same time, the outer ring is provided with a notch, so that the centering bracket 4 has a certain deformation margin. The centering bracket 4 causes a certain extrusion between the inner ring and the outer ring of the metal sealing ring to ensure that the metal sealing ring is centered. The centering bracket 4 ensures that the metal sealing gasket 3 will not shake during the installation process, so that the metal sealing gasket 3 is evenly compressed and deformed.

[0038] The clamp 2 includes a first chain 25, a second chain 26, a screw 21 and a nut 24; adjacent first chains 25 are connected by the second chain 26, and the end of the first chain 25 is rotatably connected to the end of the adjacent second chain 26 by a pin 27; the end of the first chain 25 at one end of the clamp 2 away from the second chain 26 is connected to one end of the screw 21, and the other end of the screw 21 is provided with a nut 24; the end of the first chain 25 at the other end of the clamp 2 away from the second chain 26 is provided with a locking groove 22; a locking cylinder 23 is provided on the screw 21, and the locking cylinder 23 is provided with a through hole in the radial direction, and the screw 21 passes through the through hole. After the locking cylinder 23 penetrates into the locking groove 22, the clamp 2 is locked by tightening the nut 24. The clamp 2 is made of a metal with good strength and is used to replace the vacuum quick-connect clamp 2. The head and tail joints are matched with a cylinder and a cylindrical groove to prevent them from falling out during installation. The assembly is convenient. The whole is in the form of a multi-section chain, so that the metal sealing gasket 3 is evenly stressed and has a good sealing effect. The locking nut 24 is in the form of an external hexagon and can be tightened with a wrench, which is easy to operate.

[0039] It should be noted that, for those skilled in the art, it is obvious that the present invention is not limited to the details of the above exemplary embodiments, and the present invention can be implemented in other specific forms without departing from the spirit or basic features of the present invention. Therefore, no matter from which point of view, the embodiments should be regarded as exemplary and non-restrictive, and the scope of the present invention is defined by the appended claims rather than the above description, so it is intended to include all changes within the meaning and scope of the equivalent elements of the claims in the present invention, and any figure mark in the claims should not be regarded as limiting the claims involved.

[0040] This specification uses specific examples to illustrate the principles and implementation methods of the utility model. The above examples are only used to help understand the method and core idea of ​​the utility model. At the same time, for those skilled in the art, according to the idea of ​​the utility model, there will be changes in the specific implementation methods and application scope. In summary, the content of this specification should not be understood as limiting the utility model.

Claims

1. A vacuum sealing gasket, characterized in that: It includes a clamp, a sealing gasket and a centering bracket; the centering bracket is an open annular part, the sealing gasket is arranged between two joints that need to be connected and is located at the center of the centering bracket, and the clamp is used to connect the two joints that need to be connected.

2. The vacuum sealing gasket according to claim 1, characterized in that: The sealing gasket is a ring-mounted metal sealing gasket.

3. The vacuum sealing gasket according to claim 1 or 2, characterized in that: The cross-section of the sealing gasket is hexagonal, trapezoidal, rhombus or triangle.

4. The vacuum sealing gasket according to claim 1, characterized in that: A plurality of centering spring pieces are evenly arranged on the side wall of the centering bracket along the circumferential direction, one end of each centering spring piece is connected to the side wall of the centering bracket, and the middle part of each centering spring piece protrudes toward the center of the centering bracket.

5. The vacuum sealing gasket according to claim 1, characterized in that: The clamp comprises a first chain, a second chain, a screw and a nut; adjacent first chains are connected by the second chain, and the end of the first chain is rotatably connected to the end of the adjacent second chain by a pin; The end of the first chain located at one end of the clamp away from the second chain is connected to one end of the screw rod, and the other end of the screw rod is provided with the nut; the end of the first chain located at the other end of the clamp away from the second chain is provided with a locking groove; the screw rod is provided with a locking cylinder, and the locking cylinder is radially provided with a through hole, and the screw rod penetrates the through hole, and after the locking cylinder penetrates into the locking groove, the clamp is locked by tightening the nut.

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