A degreasing tool for target material
By setting a specific through-hole structure on the support column of the target degreasing tool, the chimney effect is used to quickly discharge moisture and additives, the problem of poor volatility in the degreasing stage during the ITO target sintering process is solved, and the sintering quality and product pass rate are improved.
Patent Information
- Application Number
- CN202420454997.7
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-03-08
- Publication Date
- 2025-04-01
- Estimated Expiration
- 2034-03-08
AI Technical Summary
During the sintering process of ITO targets, the moisture and binder volatilization in the degreasing stage are not smooth, which can easily lead to cracking of the cylindrical target and deformation of the high-temperature sintering, affecting the sintering yield and product pass rate.
A degreasing tool for a target material is designed, and by providing a second through hole vertically through the support column and a multiple third through hole horizontally through the side wall on the support column, an external airflow is used to form a chimney effect, quickly discharge moisture and other additives, and help the target material shrink.
It effectively solves the problems of cracking and high-temperature sintering deformation of cylindrical targets, and improves the sintering yield and product pass rate.
Smart Images

Figure CN222703805U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of target material degreasing, in particular to a degreasing tool for a target material. Background Art
[0002] ITO is an important raw material for preparing ITO conductive glass. After sputtering, ITO targets can form transparent ITO conductive films on glass. Its performance is a key factor in determining the quality, production efficiency, and yield of conductive glass products. In the production process of ITO targets, the chemical oxygen content and impurity content must be strictly controlled to ensure the purity of the targets.
[0003] At present, the commonly used methods for target molding are: cold isostatic pressing, grouting, etc. ITO powder is already nanoparticles when it is made. Large-sized ITO targets are heavy after molding. When sintering long cylindrical targets, the thicker the target, the more water and binder evaporate from the target during the low-temperature degreasing stage of 0-600℃. The water vapor atmosphere easily causes the cylindrical target to crack.
[0004] CN218065947U discloses a support for sintering a rotating target material, which is intended to supply oxygen to the inner cavity of the rotating target material and improve the sintering quality of the rotating target material. Its technical solution is: a support for sintering a rotating target material, comprising a base plate, on which is provided a support column for mounting the rotating target material, the outer diameter of the support column being smaller than the inner diameter of the rotating target material, a chamber being formed between the outer wall of the support column and the inner wall of the rotating target material, the support column and / or the base plate being provided with a plurality of oxygen supply holes connected to the chamber.
[0005] It can be seen that the above technical solution mainly supplies oxygen to the chamber through the oxygen supply hole, so that the chamber contains a large amount of oxygen. The oxygen concentration of the rotating target is relatively high during the sintering process, which is beneficial to inhibit the volatilization of tin dioxide, and then to increase the density of the rotating target. However, the target will first go through a degreasing stage during sintering, and then enter the sintering shrinkage stage. During the degreasing stage, the moisture, binder, etc. inside the target will volatilize. The chamber design of the above technical solution cannot form a chimney effect, which is not conducive to the discharge of these volatile substances such as moisture and binder. Utility Model Content
[0006] The utility model aims to solve the above-mentioned problems and provides a degreasing tool for a target material. The degreasing tool is provided with a second through hole on the support column which vertically penetrates the support column and is coaxially connected to the first through hole, and a plurality of third through holes which are arranged along the side wall thereof and horizontally penetrate the side wall thereof. During degreasing, the external airflow passes through the first through hole and the second through hole in sequence to form a chimney effect and is discharged from the top of the support column. With the cooperation of the third through hole, it is beneficial to the rapid discharge of moisture and other additives. With the cooperation of the base and the support column, the target material is helped to shrink, which can effectively solve the problems of cracking of the cylindrical target material and deformation due to high-temperature sintering, and improve the sintering yield and the qualified rate of products.
[0007] In order to achieve the above purpose, the utility model provides the following technical solutions:
[0008] A degreasing tool for a target material, comprising a base and a support column connected to the base, characterized in that the base and the support column form a placement portion for the target material to be sleeved on the outside of the support column, the base is provided with a first through hole penetrating the base, the support column is provided with a second through hole vertically penetrating the support column and coaxial with the first through hole, and the support column is provided with a plurality of third through holes arranged along the side wall thereof and horizontally penetrating the side wall thereof;
[0009] When the target material is degreased, the external airflow passes through the first through hole and the second through hole in sequence to form a chimney effect and is discharged from the top of the support column.
[0010] In the above-mentioned degreasing tool for the target material, the aperture of the input end of the second through hole is the same as the aperture of the output end.
[0011] In the above-mentioned degreasing tool for the target material, the aperture of the first through hole is the same as the aperture of the second through hole.
[0012] In the above-mentioned degreasing tooling for the target material, the support column is detachably connected to the base by means of a snap connection, a threaded connection or a plug connection;
[0013] If the support column is detachably connected to the base in a plug-in manner, a protrusion is provided at the bottom of the support column, and a groove matching the protrusion is provided on the base.
[0014] In the above-mentioned degreasing tooling for the target material, the protrusion is a protrusion with a cubic structure, and the groove is a square groove.
[0015] In the above-mentioned target material degreasing tooling, the bump and the support column are an integrally formed structure.
[0016] In the above-mentioned degreasing tool for the target material, the third through holes are arranged in a circular array on the side surface of the support column.
[0017] In the above-mentioned target material degreasing tooling, the support column is a support column made of alumina material, and the base is a base made of alumina material.
[0018] In the above-mentioned degreasing tool for the target material, the height of the support column is greater than or equal to the length of the target material sleeved on the outside of the support column.
[0019] Compared with the prior art, the beneficial effects of the utility model are:
[0020] The utility model provides a second through hole on the support column that vertically penetrates the support column and is coaxially connected to the first through hole, and a plurality of third through holes are arranged along the side wall thereof and horizontally penetrate the side wall thereof. During degreasing, the external airflow passes through the first through hole and the second through hole in sequence to form a chimney effect and is discharged from the top of the support column. With the cooperation of the third through hole, it is beneficial to the rapid discharge of moisture and other additives. With the cooperation of the base and the support column, the target material is helped to shrink. The problems of cracking of the cylindrical target material and deformation during high-temperature sintering can be effectively solved, and the sintering yield and product qualification rate can be improved. BRIEF DESCRIPTION OF THE DRAWINGS
[0021] Figure 1 is a front view of the degreasing tooling of the target material of Example 1;
[0022] Figure 2 is a top view of the degreasing tooling of the target material of Example 1;
[0023] Figure 3 yes Figure 2 BB cross-sectional view;
[0024] Figure 4 yes Figure 3 A partial enlarged view of point A. DETAILED DESCRIPTION
[0025] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of them. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.
[0026] Example 1
[0027] refer to Figures 1 to 4 A degreasing tool for a target material comprises a base 1 and a support column 2 connected to the base, wherein the base 1 and the support column 2 form a placement portion 3 for the target material to be sleeved on the outside of the support column, the base 1 is provided with a first through hole 11 penetrating the base, the support column 2 is provided with a second through hole 21 vertically penetrating the support column 2 and coaxial with the first through hole 11, and the support column 2 is provided with a plurality of third through holes 22 arranged along the side wall thereof and penetrating the side wall thereof horizontally;
[0028] When the target is degreased, the external airflow passes through the first through hole 11 and the second through hole 21 in sequence to form a chimney effect and is discharged from the top of the support column 2 .
[0029] It should be noted here that before using this tooling, it is necessary to first make a target blank from powder and then cut the target blank through machining.
[0030] Under this design, the staff first arranges the high-temperature resistant supporting panels such as alumina of the refractory materials of the sintering furnace charge car neatly, places the tooling on the horizontal supporting plate, and then sleeves the target blank on the outside of the support column 2, keeping it aligned with the side wall of the support column 2 to avoid bumps, and finally puts the tooling and the target blank into the degreasing and sintering integrated furnace. During sintering, the target material first enters the degreasing stage, and the top of the sintering furnace is in a ventilation state. During this process, the moisture, binder and other additives in the target material are volatilized, and the external air flow passes through the first through hole 11 and the second through hole 21 in turn to form a chimney effect and is discharged from the top of the support column 2, and with the cooperation of the third through hole 22, it is conducive to the rapid discharge of moisture and other additives, and with the cooperation of the base 1 and the support column 2, it helps the target material to shrink, which can effectively solve the problems of cracking of the cylindrical target material and high-temperature sintering deformation, and improve the sintering yield and product qualification rate.
[0031] It should also be explained here that the chimney effect refers to the continuous rise of airflow along a vertical channel. Therefore, in order to form a chimney effect, the aperture of the input end and the aperture of the output end of the second through hole 21 can be the same or different. If the aperture of the input end of the second through hole 21 is larger than the aperture of the output end, then the aperture of the second through hole 21 should decrease linearly from the input end to the output end. If the aperture of the second through hole 21 decreases nonlinearly from the input end to the output end, then the chimney effect cannot be formed, and the airflow will be blocked in the second through hole 21 and reverse flow will occur, causing the moisture, binder and other additives at the volatilization site of the target material to return to the target material under the action of the reverse airflow, resulting in problems such as cracking of the target material.
[0032] As a preferred embodiment of the present invention, the aperture of the input end of the second through hole is the same as the aperture of the output end. In other words, the second through hole is a vertical channel of equal diameter, so that the length of each third through hole is equal, which is more conducive to the rapid discharge of water and other additives.
[0033] Preferably, the aperture of the first through hole 11 is the same as the aperture of the second through hole 21. The same aperture can ensure that the flow of gas in the sintering furnace in the first through hole 11 and the second through hole 21 is balanced, and can also reduce the resistance of gas transported from the first through hole 11 to the second through hole 21, improve the transport efficiency, and reduce the transport energy consumption.
[0034] In this embodiment, the support column 2 is detachably connected to the base 1 by means of a snap connection, a threaded connection or a plug connection;
[0035] If the support column 2 is detachably connected to the base 1 by means of a clip connection, a first clip connection piece should be provided at the bottom of the support column 2, and a second clip connection piece matching the first clip connection piece should be provided on the base 1;
[0036] If the support column 2 is detachably connected to the base 1 by threaded connection, the bottom of the support column 2 should be provided with a first thread, and the base 1 should be provided with a second thread matching the first clamping member;
[0037] If the support column 2 is detachably connected to the base 1 in a plug-in manner, a protrusion 23 is provided at the bottom of the support column 2 , and a groove 12 matching the protrusion 23 is provided on the base 1 .
[0038] This embodiment adopts a plug-in method based on the convenience of processing and disassembly, that is, a protrusion 23 is provided at the bottom of the support column 2, and a groove 12 matching the protrusion 23 is provided on the base 1.
[0039] It should be noted here that the first clamping member and the second clamping member, the first thread and the second thread are all examples and are not shown in the drawings.
[0040] As a further optimization of this embodiment, the protrusion 23 is a cube-shaped protrusion 23, and the groove 12 is a square groove. The square protrusion 23 and the square groove are adopted because the square protrusion 23 and the groove can provide a larger contact area during insertion, thereby improving the load-bearing capacity and stability.
[0041] In this embodiment, the protrusion 23 and the support column 2 are an integrally formed structure, which can ensure the stability of the protrusion 23 and the support column 2.
[0042] Preferably, the third through holes 22 are arranged in a circular array on the side of the support column 2 .
[0043] By arranging the third through holes 22 in a circular array, the third through holes 22 can be evenly distributed, so that the support column 2 is more evenly stressed when bearing external loads, and the overall structure of the support column 2 can be kept uniform, avoiding the problem of uneven strength caused by the third through holes 22 being concentrated on one side, thereby improving the overall strength and stability of the support column 2, enhancing the aesthetics, making construction more convenient and quick, reducing construction difficulty and time cost, and improving construction efficiency.
[0044] In this embodiment, the support column 2 is a support column 2 made of alumina, and the base 1 is a base 1 made of alumina. Alumina has the characteristics of good high temperature resistance, high corrosion resistance, insulation, high hardness, can maintain stability in a high temperature environment, is not easy to soften or melt, can resist chemical corrosion such as acid and alkali, and has strong wear resistance.
[0045] Preferably, the height of the support column 2 is greater than or equal to the length of the target material sleeved outside the support column 2. The target blank length is less than or equal to the tooling design length, which can better provide a shrinkage surface for the target blank and realize sintering of a finished target material with high straightness.
[0046] The above is only a preferred embodiment of the present invention. It should be pointed out that a person skilled in the art can make several improvements or modifications without departing from the principle of the present invention. These improvements or modifications should also be regarded as within the protection scope of the present invention.
Claims
1. A degreasing tool for a target material, comprising a base and a support column connected to the base, characterized in that: The base and the support column form a placement portion for the target material to be sleeved on the outside of the support column, the base is provided with a first through hole penetrating the base, the support column is provided with a second through hole vertically penetrating the support column and coaxial with the first through hole, and the support column is provided with a plurality of third through holes arranged along the side wall thereof and horizontally penetrating the side wall thereof; When the target material is degreased, the external airflow passes through the first through hole and the second through hole in sequence to form a chimney effect and is discharged from the top of the support column.
2. The degreasing tool for the target material according to claim 1, characterized in that: The apertures of the second through holes from the input end to the output end are the same.
3. The degreasing tool for the target material according to claim 2, characterized in that: The aperture of the first through hole is the same as the aperture of the second through hole.
4. The target material degreasing tool according to claim 1, characterized in that: The support column is detachably connected to the base by means of a snap connection, a threaded connection or a plug connection; If the support column is detachably connected to the base in a plug-in manner, a protrusion is provided at the bottom of the support column, and a groove matching the protrusion is provided on the base.
5. The degreasing tool for the target material according to claim 4, characterized in that: The protrusion is a protrusion with a cubic structure, and the groove is a square groove.
6. The degreasing tool for the target material according to claim 5, characterized in that: The convex block and the supporting column are an integrally formed structure.
7. The target material degreasing tool according to claim 1, characterized in that: The third through holes are arranged in a circular array on the side of the support column.
8. The target material degreasing tool according to claim 1, characterized in that: The support column is made of an alumina material, and the base is made of an alumina material.
9. The target material degreasing tool according to claim 1, characterized in that: The height of the support column is greater than or equal to the length of the target material sleeved on the outside of the support column.