Electrode feeding device and coating equipment

Abstract

The present application discloses an electrode feeding device and a coating device. The electrode feeding device includes a paddle rod, a fixing part and a boat-supporting feeding part. The fixing part is sleeved on the paddle rod. The boat-supporting feeding part can be detachably mounted on the fixing part. Among them, one of the fixing part and the boat-supporting feeding part is provided with a mounting shaft, and the other is provided with a mounting groove corresponding to the mounting shaft, and the mounting shaft cooperates with the mounting groove to mount the boat-supporting feeding part on the fixing part. Through the above method, the present application can conveniently disassemble and maintain the boat-supporting feeding part, reduce the maintenance time of the coating equipment, and improve production efficiency.

Description

Technical Field

[0001] The present application relates to the field of film coating technology, and in particular to an electrode feeding device and a film coating equipment. Background Art

[0002] In the coating equipment, the electrode feeding device can feed current into the wafer boat, thereby ionizing the process gas for the purpose of wafer coating. In the related art, the boat block used to support the wafer boat in the electrode feeding device is installed on the paddle rod through a snap-fit ​​mechanism. As the use time increases, the boat block will be worn out and needs to be regularly maintained and cleaned of the coating on the surface. However, the coating process is usually carried out in a high-temperature environment in the process tube, and the maintenance of the boat block requires waiting for the process tube to cool down before it can be disassembled for maintenance. In this case, a lot of time will be wasted, reducing production efficiency. Utility Model Content

[0003] The embodiments of the present application provide an electrode feed-in device and a coating device, which can conveniently disassemble and maintain the boat feed-in component, thereby reducing the maintenance time of the coating device and improving production efficiency.

[0004] In a first aspect, an embodiment of the present application provides an electrode feeding device. The electrode feeding device includes a paddle rod, a fixing member and a boat-supporting feeding member. The fixing member is sleeved on the paddle rod. The boat-supporting feeding member can be detachably mounted on the fixing member. Among them, one of the fixing member and the boat-supporting feeding member is provided with a mounting shaft, and the other is provided with a mounting groove corresponding to the mounting shaft, and the mounting shaft cooperates with the mounting groove to mount the boat-supporting feeding member on the fixing member.

[0005] Optionally, the boat support feed-in component includes a load-bearing portion and a supporting portion, the load-bearing portion is arranged above the paddle rod in the direction of gravity, and the upper surface of the load-bearing portion is a horizontal plane; one end of the supporting portion is connected to the load-bearing portion, and the other end can be detachably installed on the fixing component.

[0006] Optionally, at least two mounting shafts are provided, at least two mounting grooves are provided, and the extension direction of the mounting shafts and the mounting grooves is parallel to the extension direction of the paddle rod.

[0007] Optionally, the mounting shaft includes a first mounting shaft and a second mounting shaft, and the extension length of the first mounting shaft is greater than the extension length of the second mounting shaft; the mounting groove includes a first mounting groove and a second mounting groove corresponding to the first mounting shaft and the second mounting shaft respectively, and only when the first mounting shaft is installed in the first mounting groove, the boat support feeding member can rotate relative to the fixed member.

[0008] Optionally, the boat support feed-in component includes a load-bearing portion and a supporting portion, the load-bearing portion is arranged above the paddle rod in the direction of gravity, and the upper surface of the load-bearing portion is a horizontal plane; one end of the supporting portion is connected to the load-bearing portion, and the other end is detachably mounted on the fixing member, and the supporting portion extends in a direction perpendicular to the load-bearing portion; the first mounting axis and the second mounting axis are respectively mounted on one end of the load-bearing portion away from the supporting portion and one end of the supporting portion away from the load-bearing portion.

[0009] Optionally, the first installation slot has a first opening, and the opening direction of the first opening is upward in the direction of gravity;

[0010] And / or, the second installation groove has a second opening, and the opening direction of the second opening is upward in the direction of gravity.

[0011] Optionally, a positioning block is protruded from the paddle rod, and the positioning block extends along the length direction of the paddle rod. The positioning block at least partially extends into the fixing member and at least partially cooperates with the bearing portion to limit the rotation of the boat support feeding member.

[0012] Optionally, the electrode feeding device further comprises an electrode rod, the extension direction of the electrode rod is parallel to the extension direction of the paddle rod, and the electrode rod is connected to the boat-supporting feeding component.

[0013] In a second aspect, an embodiment of the present application provides a coating device. The coating device includes a process tube and the aforementioned electrode feed device. The electrode feed device is arranged in the process tube.

[0014] Optionally, the electrode feeding device includes two paddle rods, each paddle rod is provided with at least one boat supporting member, at least one boat supporting feeding member and a fixing member are spaced apart from the boat supporting member, and the boat supporting member and the boat supporting feeding member are used for carrying the wafer boat; wherein, in the spacing direction of the two paddle rods, the boat supporting member corresponds to the whole formed by the boat supporting feeding member and the fixing member.

[0015] The beneficial effects of the present application are as follows: Different from the prior art, the paddle rod can be used to carry and install the fixing part, and the fixing part can be used to install the boat support feeding part. The detachable boat support feeding part can be used to support the wafer carrier boat, and can feed current into the wafer carrier boat. In the electrode feeding device proposed in the present application, the boat support feeding part can be easily removed and installed from the fixing part without waiting for the equipment to cool down. The boat support feeding part can be directly removed and maintained, which saves the maintenance time of the equipment and improves the production efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 It is a schematic diagram of the structure of the coating equipment of the present application;

[0017] Figure 2 yes Figure 1 A schematic diagram of the cross-sectional structure of the coating equipment shown;

[0018] Figure 3 yes Figure 2 A schematic structural diagram of the electrode feeding device shown;

[0019] Figure 4 yes Figure 2 An enlarged structural schematic diagram of the electrode feeding device is shown. DETAILED DESCRIPTION

[0020] The following will be combined with the drawings in the embodiments of the present application to clearly and completely describe the technical solutions in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, not all of the embodiments. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of this application.

[0021] Combination Figures 1 to 3 , an embodiment of the present application provides a coating device 1. The coating device 1 includes an electrode feeding device 11 and a process tube 12. The electrode feeding device 11 is arranged in the process tube 12. The coating device 1 is used to coat wafers. The coating device 1 also includes a wafer boat for carrying wafers. The wafer boat is placed in the process tube 12, and the electrode feeding device 11 can provide mechanical support for the wafer boat on the one hand, and can feed current to the wafer boat on the other hand. After feeding current, the wafer boat can ionize the process gas, thereby coating the wafer. The coating device 1 can perform, for example, a plasma enhanced chemical vapor deposition (PECVD) process.

[0022] An embodiment of the present application provides an electrode feeding device 11. The electrode feeding device 11 includes a paddle rod 111, a fixing member 112 and a boat-supporting feeding member 113. The paddle rod 111 is inserted into the aforementioned process tube 12, and the extension direction is consistent with the axial direction of the process tube 12. The fixing member 112 is sleeved on the paddle rod 111. The boat-supporting feeding member 113 is detachably installed on the fixing member 112. The paddle rod 111 can support the fixing member 112, and the fixing member 112 can support the boat-supporting feeding member 113. The boat-supporting feeding member 113 is used to directly support the wafer carrier boat, and can feed current into the wafer carrier boat.

[0023] Among them, one of the fixing member 112 and the boat-supporting feed-in member 113 is provided with a mounting shaft, and the other is provided with a mounting groove corresponding to the mounting shaft, and the mounting shaft cooperates with the mounting groove to install the boat-supporting feed-in member 113 on the fixing member 112. For example, the mounting shaft can be arranged on the boat-supporting feed-in member 113, and the mounting groove can be arranged on the fixing member 112. For another example, the mounting shaft can be arranged on the fixing member 112, and the mounting groove can be arranged on the boat-supporting feed-in member 113. The present application takes the case where the mounting shaft is arranged on the boat-supporting feed-in member 113, and the mounting groove is arranged on the fixing member 112 as an example to illustrate the technical solution. The case where the mounting shaft is arranged on the fixing member 112, and the mounting groove is arranged on the boat-supporting feed-in member 113 is similar. Optionally, the boat-supporting feed-in member 113 can also be sleeved on the outer periphery of the paddle rod 111, so that the paddle rod 111 can also support the boat-supporting feed-in member 113.

[0024] In some embodiments, the electrode feeding device 11 of the coating equipment 1 includes two paddles 111, each paddle 111 is provided with at least one boat supporting member 115, and the whole formed by at least one boat supporting feed-in member 113 and a fixing member 112 is spaced apart from the boat supporting member 115, and the boat supporting member 115 and the boat supporting feed-in member 113 are used to support the carrier boat. Specifically, the boat supporting feed-in member 113 can provide mechanical support for the carrier boat and can feed current into the carrier boat. The boat supporting member 115 can provide mechanical support for the carrier boat. In some embodiments, the carrier boat includes four boat feet, and all four boat feet need to be supported. The boat supporting feed-in member 113 can support at least two of the boat feet of the carrier boat, and the boat supporting member 115 can support the remaining two boat feet of the carrier boat.

[0025] Furthermore, in the spacing direction of the two paddle rods 111, the boat support member 115 of one of the paddle rods 111 corresponds to the boat support feed member 113 of the other paddle rod 111. In other words, the four boat feet of the wafer carrier boat can form a virtual quadrilateral, and the boat support feed member 113 can support two boat feet located on one of the diagonals, and the boat support member 115 can support two boat feet on the other diagonal. The two boat support feed members 113 can be connected to the positive and negative electrodes of the power supply, respectively. In the above manner, the positive and negative electrodes can be fed into the two boat feet of the wafer carrier boat located on the diagonal, respectively, and the current can fully flow through the wafer carrier boat to achieve the purpose of fully ionizing the process gas.

[0026] In some embodiments, the structure of the boat support member 115 can be the same as that of the fixing member 112, so that the boat support feed member 113 can be selectively installed on the fixing member 112 or the boat support member 115 during use. In this way, the boat support member 115 and the fixing member 112, as relatively difficult to disassemble components, can alternately carry the film boat, so that the loss can be shared by the boat support member 115 and the fixing member 112 respectively, and then the maintenance of the boat support member 115 and the fixing member 112 can be spaced at a longer interval, which is conducive to improving production efficiency. Optionally, the installation groove is set through the fixing member 112, so that both sides of the fixing member 112 can be inserted into the installation shaft.

[0027] In other embodiments, each boat foot of the wafer carrier boat may be supported by the boat support feed-in component 113 .

[0028] In some embodiments, in combination Figure 3 , the boat-carrying feeding member 113 includes a bearing portion 1132 and a supporting portion 1131, the bearing portion 1132 is used to directly carry the wafer boat, and the supporting portion 1131 is used to support and maintain the position of the bearing portion 1132. Specifically, the bearing portion 1132 is arranged above the paddle rod 111 in the direction of gravity, and the upper surface is a horizontal plane, so that the wafer boat can be conveniently and stably placed on the bearing portion 1132. One end of the supporting portion 1131 is connected to the bearing portion 1132, and the other end can be detachably mounted on the fixing member 112. The supporting portion 1131 can transmit the force and torque exerted on the bearing portion 1132 to the fixing member 112, so that the bearing portion 1132 can stably support the wafer boat.

[0029] In some embodiments, the extension directions of the bearing portion 1132 and the supporting portion 1131 are perpendicular. In this way, the space occupied by the bearing portion 1132 and the supporting portion 1131 can be reduced, so that the two can surround the outer periphery of the paddle rod 111 to reduce the risk of interference with other components. In other embodiments, the surface of the bearing portion 1132 and the supporting portion 1131 facing the paddle rod 111 is configured to be in the same shape as the outer surface of the paddle rod 111 (for example, the outer surface of the paddle rod 111 is a circular surface. Then the surface of the boat-supporting feed-in 113 facing the paddle rod 111 is also a circular surface), so that the boat-supporting feed-in 113 can be attached to the outer periphery of the paddle rod 111, so that the paddle rod 111 can also support and limit the boat-supporting feed-in 113. The surfaces of the bearing portion 1132 and the supporting portion 1131 facing away from the paddle rod 111 can be configured to be perpendicular to each other, which is not specifically limited here.

[0030] In some embodiments, the paddle rod 111 is provided with a locating block, which extends along the length direction of the paddle rod 111, and the locating block at least partially extends into the fixing member 112, and at least partially cooperates with the bearing portion 1132 to limit the rotation of the boat-supporting feed-in member 113 and the fixing member 112. The locating block can limit the rotation of the boat-supporting feed-in member 113 and the fixing member 112 by engaging with the boat-supporting feed-in member 113 and the fixing member 112. Optionally, the position where the boat-supporting feed-in member 113 cooperates with the locating block is located on the bearing portion 1132, and is located at one end of the bearing portion 1132 away from the supporting portion 1131. In this arrangement, one end of the bearing portion 1132 can be limited by the locating block, and one end of the supporting portion 1131 can be limited by installing the limit, so that the boat-supporting feed-in member 113 can be sufficiently limited.

[0031] In some embodiments, at least two mounting shafts are provided, at least two mounting grooves are provided, and the extending direction of the mounting shafts and the mounting grooves is parallel to the extending direction of the paddle rod 111. The mounting shaft extends into the mounting groove, and the boat feed-in 113 can be installed on the fixing member 112. The mounting shaft is pulled out of the mounting groove, and the boat feed-in 113 can be removed from the fixing member 112. The extending direction of the mounting shaft and the mounting groove directly affects the installation and removal direction of the boat feed-in 113. In the coating device 1, the transfer of components is usually achieved through the openings at both ends of the process tube 12 (or referred to as the furnace door and the furnace tail). The extending direction of the paddle rod 111 is consistent with the axial direction of the process tube 12. By setting the extending direction of the mounting shaft and the mounting groove to be parallel to the extending direction of the paddle rod 111, it is possible to facilitate the removal of the boat feed-in 113 from the process tube 12. There are two mounting shafts and mounting grooves, which can stably install the boat feed-in 113 on the fixing member 112 and limit its rotation.

[0032] Combination Figure 4 , Figure 4It is a schematic diagram when the first installation shaft 1133 extends into the first installation groove 1121, but the second installation shaft 1134 has not yet extended into the second installation groove 1122 during the installation of the support boat feed-in 113 on the fixed member 112. In some embodiments, the installation shaft includes a first installation shaft 1133 and a second installation shaft 1134, and the extension length of the first installation shaft 1133 is greater than the extension length of the second installation shaft 1134. The installation groove includes a first installation groove 1121 and a second installation groove 1122 corresponding to the first installation shaft 1133 and the second installation shaft 1134, respectively. When only the first installation shaft 1133 is installed in the first installation groove 1121, the support boat feed-in 113 is rotatable relative to the fixed member 112. It can be understood that it is difficult to simultaneously position two sets of installation shafts and installation grooves. Through the above method, the present application can enable the support boat feed-in 113 to first extend the longer first installation shaft 1133 into the first installation groove 1121 during the installation process, so as to achieve the pre-positioning of the support boat feed-in 113. Then the first installation shaft 1133 can be used as a rotation shaft, so that the positioning of the second installation shaft 1134 and the second installation slot 1122 can be achieved during the rotation of the boat support feed-in 113. The present application divides the positioning cooperation of the two installation shafts and the two installation slots into sections, thereby reducing the difficulty of installing the boat support feed-in 113.

[0033] In some embodiments, the boat-supporting feed-in member 113 includes a bearing portion 1132 and a supporting portion 1131, wherein the bearing portion 1132 is disposed above the paddle rod 111 in the direction of gravity and extends in the horizontal direction. One end of the supporting portion 1131 is connected to the bearing portion 1132, and the other end is detachably mounted on the fixing member 112. The first mounting shaft 1133 and the second mounting shaft 1134 are respectively mounted on one end of the bearing portion 1132 away from the supporting portion 1131 and one end of the supporting portion 1131 away from the bearing portion 1132. In other words, the first mounting shaft 1133 and the second mounting shaft 1134 are respectively mounted on two ends of the boat-supporting feed-in member 113 away from each other. With such a configuration, a sufficient distance can be provided between the first mounting shaft 1133 and the second mounting shaft 1134, so that when the boat-supporting feed-in member 113 rotates, sufficient torque can be generated to prevent it from rotating, which is beneficial to improving the installation stability of the boat-supporting feed-in member 113.

[0034] Further, in some embodiments, the first installation shaft 1133 is thicker than the second installation shaft 1134, for example, the diameter of the first installation shaft 1133 is greater than the diameter of the second installation shaft 1134, or the length and width of the cross section of the first installation shaft 1133 are greater than the length and width of the second installation shaft 1134. Since the first installation shaft 1133 assumes the aforementioned pre-positioning function, setting the first installation shaft 1133 to a larger size can improve the success rate of the installation of the first installation shaft 1133. Optionally, the first installation shaft 1133 is set on the support portion 1131, and setting the first installation shaft 1133 with a larger size on the support portion 1131 can make it away from the area with a larger number of components to reduce mutual interference between components, and the support portion 1131 has sufficient strength and space to set the first installation shaft 1133, which can optimize the structure of the boat feed-in 113.

[0035] In some embodiments, the first mounting groove 1121 has a first opening, and the direction of the first opening is upward in the direction of gravity. And / or, the second mounting groove 1122 has a second opening, and the direction of the second opening is upward in the direction of gravity. In addition to extending along the axis direction of the first mounting groove 1121 and the second mounting groove 1122, the first mounting shaft 1133 and the second mounting shaft 1134 can also enter through the first opening and the second opening on the side. The boat feed-in member 113 will be affected by gravity during installation and will tend to move downward. By orienting the first opening and the second opening upward in the direction of gravity, the first mounting shaft 1133 and the second mounting shaft 1134 can be installed in the first mounting groove 1121 and the second mounting groove 1122 in a "hanging" manner. This method of installation is more convenient and quick. Optionally, the direction of the opening (the first opening and the second opening) may refer to the direction in which the axis of the mounting groove points to the opening. Among them, the direction of the opening upward in the direction of gravity means that the direction of the opening points above the horizontal plane, and it is not strictly limited to the direction opposite to the direction of gravity.

[0036] In some embodiments, the electrode feed device 11 further includes an electrode rod 114, the extension direction of the electrode rod 114 is parallel to the extension direction of the paddle rod 111, and the electrode rod 114 is connected to the boat feed-in component 113. The electrode rod 114 can connect the boat feed-in component 113 to a power source. And the installation and disassembly of the boat feed-in component 113 can also be achieved by operating the electrode rod 114. Optionally, the axial direction of the electrode rod 114 coincides with the axial direction of the first installation shaft 1133, so that in the process of operating the electrode rod 114 to move, the movement trajectory and position of the first installation shaft 1133 can correspond to the movement trajectory and position of the electrode rod 114, which can facilitate the installation of the first installation shaft 1133.

[0037] Further, the electrode rod 114 is connected to one end of the boat support feed-in member 113 away from the fixing member 112, and the electrode rod 114 extends from the boat support feed-in member 113 in a direction away from the fixing member 112 until it extends out of the process tube 12. The electrode rod 114 can be fixed by a fixing device outside the process tube 12. In this way, the movement of the boat support feed-in member 113 in the extension direction of the paddle rod 111 can be limited by the fixing member 112 and the electrode rod 114 on both sides thereof, so that it can stably carry the wafer boat.

[0038] In some embodiments, a support groove may be provided on the boat support 115, and the electrode rod 114 may be placed in the support groove to reduce the bending of the electrode rod 114. Optionally, a support member may be provided on the portion of the paddle rod 111 corresponding to the extended length of the electrode rod 114, and the electrode rod 114 may be placed on the support member, which can also reduce the bending of the electrode rod 114.

[0039] The above are merely embodiments of the present application and are not intended to limit the patent scope of the present application. Any equivalent structure or equivalent process transformation made using the contents of the present application specification and drawings, or directly or indirectly applied in other related technical fields, are also included in the patent protection scope of the present application.

Claims

1. An electrode feed device, characterized in that: include: Paddle pole; A fixing member, sleeved on the paddle rod; A boat-supporting feed-in component, which can be detachably mounted on the fixing component; Wherein, one of the fixing member and the boat supporting feed-in member is provided with a mounting shaft, and the other is provided with a mounting groove corresponding to the mounting shaft, and the mounting shaft cooperates with the mounting groove to mount the boat supporting feed-in member on the fixing member.

2. The electrode feedthrough device according to claim 1, characterized in that: The boat support feed-in component includes a bearing portion and a supporting portion, the bearing portion is arranged above the paddle rod in the gravity direction, and the upper surface of the bearing portion is a horizontal plane; one end of the supporting portion is connected to the bearing portion, and the other end is detachably mounted on the fixing component.

3. The electrode feedthrough device according to claim 1, characterized in that: At least two installation shafts are provided, at least two installation grooves are provided, and the extension direction of the installation shafts and the installation grooves is parallel to the extension direction of the paddle rod.

4. The electrode feed-in device according to claim 3, characterized in that: The mounting shaft includes a first mounting shaft and a second mounting shaft, and the extension length of the first mounting shaft is greater than the extension length of the second mounting shaft; the mounting groove includes a first mounting groove and a second mounting groove corresponding to the first mounting shaft and the second mounting shaft respectively, and only when the first mounting shaft is installed in the first mounting groove, the boat support feeding component can rotate relative to the fixing component.

5. The electrode feed-in device according to claim 4, characterized in that: The boat support feed-in component includes a load-bearing portion and a supporting portion, the load-bearing portion is arranged above the paddle rod in the direction of gravity, and the upper surface of the load-bearing portion is a horizontal plane; one end of the supporting portion is connected to the load-bearing portion, and the other end is detachably mounted on the fixing component; the first mounting axis and the second mounting axis are respectively mounted on one end of the load-bearing portion away from the supporting portion and one end of the supporting portion away from the load-bearing portion.

6. The electrode feedthrough device according to claim 5, characterized in that: The first installation slot has a first opening, and the opening direction of the first opening is upward in the direction of gravity; And / or, the second installation groove has a second opening, and the opening direction of the second opening is upward in the direction of gravity.

7. The electrode feedthrough device according to claim 2, characterized in that: The paddle rod is convexly provided with a positioning block, which extends along the length direction of the paddle rod. The positioning block at least partially extends into the fixing member and at least partially cooperates with the bearing portion to limit the rotation of the boat support feeding member.

8. The electrode feedthrough device according to claim 1, characterized in that: The electrode feeding device further comprises an electrode rod, the extension direction of the electrode rod is parallel to the extension direction of the paddle rod, and the electrode rod is connected to the boat supporting feeding member.

9. The electrode feedthrough device according to claim 1, characterized in that: The electrode feeding device includes two paddle rods, each of which is provided with at least one boat supporting member. On each of the paddle rods, a whole consisting of at least one boat supporting feeding member and the fixing member is spaced apart from the boat supporting member, and the boat supporting member and the boat supporting feeding member are used for carrying a wafer boat; wherein, in the spacing direction of the two paddle rods, the boat supporting member of one of the paddle rods corresponds to the boat supporting feeding member of the other paddle rod.

10. A coating device, characterized in that: include: A process tube and an electrode feeding device as described in any one of claims 1 to 9, wherein the electrode feeding device is arranged in the process tube.

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