A crystal bar sheet taking component and multi-station cutting machine

Abstract

The utility model discloses a wafer taking component for a crystal rod sheet material and a multi-station cutting machine, belonging to the technical field of silicon rod processing accessories. The device comprises a driving member, a support frame, and two clamping sheet components arranged on the support frame; the support frame is connected to the movable end of the driving member, and the driving member can drive the support frame to move in a vertical plane where the axis of the material to be processed is located; the clamping surfaces of the two clamping sheet components are relatively arranged and are both concave; the clamping surfaces of the two clamping sheet components can move relatively; driven by the driving member, the wafer taking component can move along the axis of the rod material to any position of the sheet material to be clamped on the outer cylindrical surface of the rod material, and then relatively move the two concave clamping surfaces, so that the clamping surfaces form a virtual cylindrical covering surface in space, so as to take the material by embracing the outer cylindrical surface of the sheet material, thereby providing structural support for the work of cutting the sheet material from the middle of the silicon crystal rod.

Description

Technical Field

[0001] The utility model belongs to the technical field of silicon rod processing accessories, and particularly relates to a sheet taking component for crystal rod sheets and a multi-station cutting machine. Background Art

[0002] After the single crystal furnace pulls out the silicon crystal rod, the approximately cylindrical silicon crystal rod needs to be cut according to the specified length specifications to obtain short silicon crystal rods; then the cut silicon crystal rods are subjected to processing procedures such as squaring and slicing to obtain the required finished silicon wafers. In the process of cutting the silicon crystal rod, in addition to cutting out rods of a certain length, a certain number of sheets need to be cut out to test the silicon crystal rod. In order to achieve the above effects, a silicon rod cutting mechanism is disclosed in the Chinese utility model patent with application number 202021635886.4. The double-wire cutting wheel system used in the cutting structure can slice while cutting the silicon crystal rod, thereby improving the overall work efficiency.

[0003] In order to make the detected data better reflect the real situation of the silicon crystal rod, so as to control the production quality of the silicon crystal rod in time, it is usually chosen to slice and sample in the middle of the silicon crystal rod. However, the current market mainly uses suction cups to take slices of truncated silicon wafers, such as the slice taking and unloading mechanism of the cutter disclosed in the Chinese utility model patent with application number 202220356378.5. When cutting materials, it is necessary to first adsorb the suction cups on both ends of the silicon crystal rod, and then cut the materials downward. After the cutting is completed, the cut materials are taken out by the suction cups; due to the structural limitations of the cutter, if the suction cup is set in the middle of the silicon crystal rod, it will not only affect the cutting work of the cutter, but also when the cutting operation is performed in the middle of the silicon crystal rod, it is impossible to reserve sufficient space for the suction cup to perform the adsorption action. Therefore, the device can only absorb the slices at the head and tail ends of the silicon crystal rod, but cannot realize the middle slice taking, which will eventually lead to the distortion of the detection results of the silicon crystal rod, so that the quality of the finished product cannot meet the high standards of the market. Utility Model Content

[0004] The technical problem to be solved by the utility model is: how to provide a wafer taking component for taking wafers at various positions of a silicon crystal rod, especially for taking wafers at the middle of a silicon rod.

[0005] In order to solve the above technical problems, the technical solution adopted by the utility model is:

[0006] A sheet-taking assembly for a crystal bar sheet material comprises a driving member, a support frame, and two clip assemblies arranged on the support frame;

[0007] The support frame is connected to the movable end of the driving member, and the driving member can drive the support frame to move in a vertical plane where the axis of the material to be processed is located;

[0008] The clamping surfaces of the two clip assemblies are arranged opposite to each other and are both concave surfaces;

[0009] The clamping surfaces of the two clamping pieces can move relative to each other.

[0010] Furthermore, the clip assembly also includes an elastic clamping block;

[0011] Elastic clamping blocks are provided at both ends of the concave surface in the extension direction;

[0012] The direction of the clamping surface of the elastic clamping block is consistent with the opening direction of the concave surface.

[0013] Further, it also includes a linear displacement device;

[0014] The fixed end of the linear displacement device is connected to the support frame;

[0015] The movable end of the linear displacement device is connected to the clip assembly.

[0016] Further, it also includes an extension frame;

[0017] The clip assembly is connected to the movable end of the linear displacement device through an extension frame.

[0018] Furthermore, the support frame is also provided with a universal nozzle;

[0019] The virtual support surface enclosed by the clamping surfaces of the two clip assemblies and the spraying end of the universal nozzle are located in the same plane.

[0020] Further, the driving member includes a first displacement device and a second displacement device;

[0021] The second displacement device is connected to the movable end of the first displacement device;

[0022] The support frame is connected to the movable end of the second displacement device;

[0023] The moving direction of the first displacement device is parallel to the axial direction of the bar to be processed;

[0024] The moving direction of the second displacement device is perpendicular to the axial direction of the bar to be processed.

[0025] Furthermore, a multi-station cutting machine is provided, comprising a roller frame, a cutting wheel system and at least two of the above-mentioned crystal rod sheet taking assemblies;

[0026] The sheet taking assembly of the crystal rod sheet is arranged on one side of the moving direction of the roller frame;

[0027] A cutting wheel system is provided on the support frame of the wafer taking assembly of the crystal rod wafer;

[0028] The cutting end of each cutting wheel train is arranged between the clamping surfaces of the corresponding two clamping pieces, and the cutting end of the cutting wheel train is arranged toward the conveying surface of the roller frame.

[0029] Further, it also includes a floating support;

[0030] The roller frame comprises two roller groups whose length directions are parallel to each other;

[0031] Along a conveying direction perpendicular to the roller group, two roller groups are arranged at intervals;

[0032] The floating support member is arranged between two roller groups, and the supporting end of the floating support member is arranged toward the bar material to be processed.

[0033] Furthermore, the number of the floating support members is at least one more than the number of the wafer taking components of the crystal ingot wafer;

[0034] When the wafer taking assembly for the crystal ingot sheet material cuts the ingot material, at least one floating support is provided on both sides of the wafer taking assembly for the crystal ingot sheet material along the axial direction of the ingot material.

[0035] Further, it also includes a horizontal moving device;

[0036] The moving direction of the horizontal moving device is parallel to the conveying direction of the roller group;

[0037] The horizontal moving device is arranged between the two roller groups;

[0038] The floating support is connected to the movable end of the horizontal moving device.

[0039] The beneficial effect of the utility model is that the sheet picking assembly of the crystal rod sheet material provided by the utility model can be moved along the axis of the rod material to any sheet material to be clamped on the outer cylindrical surface of the rod material under the drive of the driving member, and then the two concave clamping surfaces are relatively moved so that the clamping surfaces form a virtual cylindrical covering surface in space, so as to pick up the material by embracing the outer cylindrical surface of the sheet material, thereby providing structural support for the work of cutting the sheet material from the middle of the silicon crystal rod. BRIEF DESCRIPTION OF THE DRAWINGS

[0040] Figure 1 Shown is a structural schematic diagram of a clip assembly according to a specific embodiment of the utility model;

[0041] Figure 2 Shown is a front view of a clip assembly according to a specific embodiment of the utility model;

[0042] Figure 3 Shown is a right side view of a clip assembly according to a specific embodiment of the utility model;

[0043] Figure 4Shown is a schematic structural diagram of a support frame, a clip assembly and a cutting wheel train according to a specific embodiment of the utility model;

[0044] Figure 5 Shown is a structural schematic diagram of another clip assembly according to a specific embodiment of the utility model;

[0045] Figure 6 The figure shows a schematic structural diagram of a wafer taking assembly and a wafer body of a crystal ingot wafer according to a specific embodiment of the present invention;

[0046] Description of labels:

[0047] 1. Support frame;

[0048] 2. Clip assembly; 21. Elastic clamping block; 22. Connecting frame; 23. Clamping wire assembly;

[0049] 3. Linear displacement device;

[0050] 4. Extension frame;

[0051] 5. Universal nozzle;

[0052] 6. Cutting gear train;

[0053] 7. Sliding assembly;

[0054] 8. The sheet body. DETAILED DESCRIPTION

[0055] In order to explain the technical content, achieved objectives and effects of the present invention in detail, the following is an explanation in conjunction with the implementation modes and the accompanying drawings.

[0056] The most critical concept of the utility model is that: driven by the driving member, the sheet picking assembly can move along the axis of the rod to any sheet to be clamped on the outer cylindrical surface of the rod, and then move the two concave clamping surfaces relatively to make the clamping surfaces form a virtual cylindrical covering surface in space, so as to pick up the material by embracing the outer cylindrical surface of the sheet, thereby providing structural support for the work of cutting the sheet in the middle of the silicon crystal rod.

[0057] Please refer to Figures 1 to 6 The crystal rod sheet material taking assembly provided by the utility model comprises a driving member, a support frame 1, and two clip assemblies 2 arranged on the support frame 1;

[0058] The support frame 1 is connected to the movable end of the driving member, and the driving member can drive the support frame 1 to move in a vertical plane where the axis of the material to be processed is located;

[0059] The clamping surfaces of the two clip assemblies 2 are arranged opposite to each other and are both concave surfaces; the clamping surfaces of the two clip assemblies 2 can move relative to each other.

[0060] From the above description, it can be seen that the beneficial effects of the utility model are: providing a sheet picking assembly for a crystal rod sheet material, driven by a driving member, the sheet picking assembly can move along the axis of the rod material to any sheet material to be clamped on the outer cylindrical surface of the rod material, and then relatively move the two concave clamping surfaces so that the clamping surfaces form a virtual cylindrical covering surface in space, so as to pick up the material by embracing the outer cylindrical surface of the sheet material; compared with the existing sheet picking assembly, not only the existing sheet picking assembly, in which the clamping end can only move along the axis of the rod material until it conflicts with the end face of the sheet material, is changed, but also because the clamping surface can be relatively moved, the size of the virtual cylindrical covering surface can be changed according to the diameter of the sheet material to be clamped, thereby providing structural support for the work of cutting the sheet material from the middle of the silicon crystal rod.

[0061] Furthermore, the clip assembly 2 also includes an elastic clamping block 21;

[0062] Elastic clamping blocks 21 are provided at both ends of the concave surface in the extension direction;

[0063] The direction of the clamping surface of the elastic clamping block 21 is consistent with the opening direction of the concave surface.

[0064] Specifically, the elastic clamping block 21 is made of any commercially available flexible adaptive material, such as nitrile rubber.

[0065] From the above description, it can be seen that when the clamping assembly 2 is in contact with the outer cylindrical surface of the sheet to be clamped, the elastic clamping block 21 can play a certain buffering role, thereby preventing the sheet from being damaged due to rigid contact between the clamping assembly 2 and the sheet to be clamped, thereby affecting the final inspection data of the sheet, resulting in the inspection results being unable to truly reflect the production quality of the silicon crystal rod, and then unable to adjust the production plan in time to improve the quality of the finished product.

[0066] Furthermore, the above-mentioned crystal rod sheet material taking assembly also includes a linear displacement device 3;

[0067] The fixed end of the linear displacement device 3 is connected to the support frame 1;

[0068] The movable end of the linear displacement device 3 is connected to the clip assembly 2 .

[0069] Furthermore, the above-mentioned crystal rod sheet material taking assembly also includes an extension frame 4;

[0070] The clip assembly 2 is connected to the movable end of the linear displacement device 3 through the extension frame 4.

[0071] Specifically, the extension frame 4 is any structure that can displace the elastic clamping block 21 and the movable end of the linear displacement device 3, such as a plate-shaped structure or a rod-shaped structure, and the length direction of the extension frame 4 is perpendicular to the moving direction of the movable end of the linear displacement device 3. The linear displacement device 3 is any commercially available device that can drive an object to move in a straight line, such as a cylinder. Preferably, the linear displacement device 3 of the utility model connects an induced check valve to the two chambers of the cylinder respectively, and controls the induced check valve through a three-position five-way solenoid valve so that the linear displacement device 3 can maintain a fixed posture even under the action of an external force when it stops working, thereby improving the stability when clamping the sheet material and avoiding the problem of sheet material overturning.

[0072] From the above description, it can be seen that the design has further optimized the composition structure of the crystal rod sheet picking assembly. In order to make the equipment conform to the integrated transformation, the crystal rod sheet picking assembly is usually combined with the existing cutting wheel system, so that the existing cutting wheel system has the cutting ability and the function of clamping the sheet, thereby improving the overall work efficiency; in order to achieve the ability to clamp the corresponding sheet while cutting the rod material, it is necessary to set the clamping end of the clamping assembly 2 and the cutting end of the cutting wheel system on the same vertical plane, but because the clamping assembly 2 and the cutting wheel system both have a large space occupancy rate, if the two are directly superimposed and compounded, it will affect the normal work of the two. Therefore, by setting the corresponding extension frame 4, the staff can adjust the position of the clamping assembly 2 according to actual needs, thereby providing structural support for the crystal rod sheet picking assembly of the utility model to be combined with the corresponding cutting wheel system.

[0073] Further, it also includes a connecting frame 22;

[0074] The elastic clamping block 21 is connected to the movable end of the linear displacement device 3 through the connecting frame 22;

[0075] The connecting frame 22 and the elastic clamping block 21 are an integrated structure;

[0076] In the Z-axis direction, elastic clamping blocks 21 are provided at both ends of the connecting frame 22;

[0077] In the Y-axis direction, the clamping ends of the two elastic clamping blocks 21 are both arranged toward the same side;

[0078] At least two clamping wire groups 23 are connected between the clamping ends of the two elastic clamping blocks 21;

[0079] The clamping wire groups 23 are arranged at intervals along the X-axis direction.

[0080] Furthermore, in the Y-axis direction, the clamping ends of the two elastic clamping blocks 21 are arranged at a preset distance from the connecting frame 22 .

[0081] Furthermore, in the Y-axis direction, one side of the connecting frame 22 close to the clamping end of the elastic clamping block 21 is an arc surface.

[0082] Furthermore, the two elastic clamping blocks 21 are elastically connected to the connecting frame 22;

[0083] In the Z-axis direction, the two elastic clamping blocks 21 can move relative to the connecting frame 22 .

[0084] From the above description, it can be seen that the design has made specific modifications to the component structure of the clamping assembly 2, so that the clamping assembly 2 can embrace the outer cylindrical surface of the sheet material along the radial direction of the sheet material, and can effectively clamp the sheet material on both sides in the thickness direction to provide structural support, so that the clamping assembly 2 can effectively solve the problem of the sheet material easily overturning during the clamping process.

[0085] Furthermore, a universal nozzle 5 is also provided on the support frame 1;

[0086] The virtual support surface enclosed by the clamping surfaces of the two clip assemblies 2 and the spraying end of the universal nozzle 5 are located in the same plane.

[0087] From the above description, it can be seen that in order to reduce the heat generated by the cutting surface during cutting, the corresponding coolant is usually sprayed on the cutting surface during the cutting process to achieve the purpose of cooling; but this also leads to excess coolant remaining in the cutting seam of the sheet after cutting, thereby forming a water film; due to the effect of surface tension, when you want to withdraw the remaining rod after cutting, the water films on both sides of the thickness direction of the sheet will attract the rod at the same time, inhibiting the movement trend of the rod and the sheet to separate from each other. If forced separation, the sheet will overturn or even cause damage, thereby affecting subsequent detection results; therefore, a corresponding universal nozzle 5 is set on the support frame 1, and the universal nozzle is connected to any peripheral air source device, so as to effectively remove the water film, so as to facilitate the quick and smooth removal of the sheet.

[0088] Further, the driving member includes a first displacement device and a second displacement device;

[0089] The second displacement device is connected to the movable end of the first displacement device;

[0090] The support frame 1 is connected to the movable end of the second displacement device;

[0091] The moving direction of the first displacement device is parallel to the axial direction of the bar to be processed;

[0092] The moving direction of the second displacement device is perpendicular to the axial direction of the bar to be processed.

[0093] Specifically, the first displacement device and the second displacement device are any commercially available devices that can drive an object to move in a straight line, such as a linear guide rail, a lead screw assembly, etc.

[0094] From the above description, it can be seen that the design has made specific improvements to the component structure of the driving member, thereby providing structural support for the driving member to drive the support frame 1 to move in the vertical plane where the axis of the material to be processed is located, and then the sheet picking assembly can be moved to any position on the outer cylindrical surface of the bar to clamp the sheet material.

[0095] The utility model also provides a multi-station cutting machine, comprising a roller frame, a cutting wheel system 6 and at least two wafer taking assemblies of any one of the above-mentioned crystal rod wafers;

[0096] The sheet taking assembly of the crystal rod sheet is arranged on one side of the moving direction of the roller frame;

[0097] The support frame 1 of the wafer taking assembly of the crystal rod wafer is provided with a cutting wheel train 6;

[0098] The cutting end of each cutting wheel train 6 is arranged between the clamping surfaces of the corresponding two clamping pieces 2, and the cutting end of the cutting wheel train 6 is arranged toward the conveying surface of the roller frame.

[0099] Specifically, the cutting wheel train 6 is a double-wire cutting wheel train, and the structure of the double-wire cutting wheel train can refer to the specific arrangement of the first roller, the second roller, the first cutting wire, the second cutting wire, the first tension wheel, the second tension wheel, the swing arm component, the heavy hammer, the first driven wheel and the second driven wheel of a silicon rod cutting mechanism disclosed in the Chinese utility model patent with application number 202021635886.4. Thus, the double-wire cutting wheel train 81 can simultaneously complete the work of slicing at the cutting position while cutting the silicon crystal rod, thereby improving the overall work efficiency.

[0100] From the above description, it can be seen that the design has made specific modifications to the existing multi-station cutting machine, so that the existing multi-station cutting machine, after being combined with the crystal rod sheet taking component of the present application, can not only realize multi-point cutting of silicon crystal rods, but also slice and sample multiple different positions of the silicon crystal rod at one time, thereby improving the overall cutting efficiency while providing abundant test samples for subsequent related testing work, thereby increasing the reliability of the test results.

[0101] Furthermore, the support frame 1 is also provided with an electromagnetic coupling device and a sliding assembly 7;

[0102] The moving direction of the sliding assembly 7 and the Z axis are parallel to each other;

[0103] The fixed end of the linear displacement device 3 is connected to the movable end of the sliding assembly 7;

[0104] The coupling end of the electromagnetic coupling device is located on the moving path of the linear displacement device 3 in the Z-axis direction, and the coupling end of the electromagnetic coupling device is arranged toward the fixed end of the linear displacement device 3 .

[0105] Specifically, the electromagnetic coupling device is an electromagnet. When the electromagnetic coupling device is electrically connected to a peripheral power supply device, the electromagnetic coupling device can generate magnetism, thereby achieving the function of adsorbing and fixing the object.

[0106] From the above description, it can be seen that when the cutting wheel train cuts the silicon crystal rod, the fixed end of the linear displacement device 3 is coupled through the electromagnetic coupling device, so that the sheet-taking chuck of the crystal rod sheet moves synchronously with the cutting wheel train; when the cutting wheel train cuts the silicon crystal rod to a position convenient for the sheet-taking chuck of the crystal rod sheet to subsequently embrace the sheet, the electromagnetic coupling device is turned off to decouple the electromagnetic coupling device from the fixed end of the linear displacement device 3. At this time, the fixed end of the linear displacement device 3 can move relative to the cutting wheel train along the moving direction of the sliding component 7, that is, when the sheet-taking chuck of the crystal rod sheet and the sheet are in a relatively static state, the cutting wheel train can still continue to perform the cutting work independently until the silicon crystal rod and the corresponding sheet are completely cut off; thereby completing the embracing and fixing work of the sheet in advance while cutting the rod, thereby improving the stability of the subsequent sheet clamping work.

[0107] Further, it also includes a floating support;

[0108] The roller frame includes two roller groups whose length directions are parallel to each other;

[0109] Along the conveying direction perpendicular to the roller group, the two roller groups are arranged at intervals;

[0110] The floating support is arranged between the two roller groups, and the supporting end of the floating support is arranged toward the bar to be processed.

[0111] Specifically, the structure of the roller frame can refer to the transmission roller frame of a multi-station cutting machine disclosed in the Chinese invention patent with application number 202011504975.X.

[0112] Furthermore, the number of the floating support members is at least one more than the number of the wafer taking components of the crystal ingot wafers;

[0113] When the wafer taking assembly for the crystal ingot sheet material cuts the ingot material, at least one floating support is provided on both sides of the wafer taking assembly for the crystal ingot sheet material along the axial direction of the ingot material.

[0114] From the above description, it can be seen that the design has made specific improvements to the composition structure of the multi-station cutting machine, the number of floating supports, and the positional relationship between the floating supports and the crystal rod sheet taking components during processing, thereby ensuring high stability during the process of cutting the rods and taking the sheets, so that the quality of the cut rods and sheets meets the processing and testing requirements, thereby providing guarantee for the quality of subsequent finished products and the authenticity of the test results.

[0115] Furthermore, the above-mentioned multi-station cutting machine also includes a horizontal moving device;

[0116] The moving direction of the horizontal moving device is parallel to the conveying direction of the roller group;

[0117] The horizontal moving device is arranged between the two roller groups;

[0118] The floating support is connected to the movable end of the horizontal moving device.

[0119] From the above description, it can be seen that setting a horizontal moving device can add a degree of freedom to the floating support, so that the floating support can move back and forth between the roller groups along the conveying direction of the roller groups. That is, after the crystal rod sheet material taking component initially holds the discharge material, the floating support is driven by the horizontal moving device to support the cut rod material away from the sheet material along the thickness direction of the sheet material, thereby increasing the gap at the sheet cutting position, thereby avoiding the crystal rod sheet material taking component from interfering with the remaining rod material during the sheet taking process, thereby effectively improving the overall sheet taking efficiency.

[0120] The sheet-taking component of the crystal rod sheet material of the utility model can assist in the clamping of the sheet material, especially in the sheet taking work in the middle part of the silicon crystal rod; it can also be applied to existing products such as the cutting mechanism of a cutting machine that ensures stable cutting quality disclosed in the Chinese invention patent with application number 202211144749.4, to perform single-station cutting, and take out the sheet material while cutting the sheet material; it can also be applied to the cutting mechanism of a multi-station cutting machine disclosed in the existing Chinese utility model patent with application number 202023080931.7, so as to complete the sheet taking work of multiple cutting positions.

[0121] Please refer to Figures 1 to 3 , Embodiment 1 of the present utility model is:

[0122] A sheet-taking assembly for a crystal rod sheet comprises a driving member, a linear displacement device 3, an extension frame 4, a support frame 1, two universal nozzles 5 arranged on the support frame 1, and two clamping assemblies 2 arranged on the support frame 1; the support frame 1 is connected to the movable end of the driving member, and the driving member can drive the support frame 1 to move in a vertical plane where the axis of the material to be processed is located; the clamping surfaces of the two clamping assemblies 2 are arranged opposite to each other and are both concave surfaces; the clamping surfaces of the two clamping assemblies 2 can move relatively.

[0123] The clip assembly 2 also includes an elastic clamping block 21; elastic clamping blocks 21 are provided at both ends of the extension direction of the concave surface; the direction of the clamping surface of the elastic clamping block 21 is consistent with the opening direction of the concave surface; the fixed end of the linear displacement device 3 is connected to the support frame 1; the movable end of the linear displacement device 3 is connected to the clip assembly 2; the clip assembly 2 is connected to the movable end of the linear displacement device 3 through the extension frame 4; the virtual support surface enclosed by the clamping surfaces of the two clip assemblies 2 and the injection end of the universal nozzle 5 are located in the same plane.

[0124] The driving member includes a first displacement device and a second displacement device; the second displacement device is connected to the movable end of the first displacement device; the support frame 1 is connected to the movable end of the second displacement device; the moving direction of the first displacement device is parallel to the axial direction of the bar to be processed; the moving direction of the second displacement device is perpendicular to the axial direction of the bar to be processed.

[0125] Please refer to Figure 4 , Embodiment 2 of the present utility model is:

[0126] A multi-station cutting machine comprises a roller frame, a cutting wheel train 6, a floating support, a horizontal moving device and two crystal rod sheet picking assemblies in the first embodiment; the crystal rod sheet picking assembly is arranged on one side of the moving direction of the roller frame; a cutting wheel train 6 is provided on the support frame 1 of the crystal rod sheet picking assembly; the cutting end of each cutting wheel train 6 is arranged between the clamping surfaces of the corresponding two clamping assemblies 2, and the cutting end of the cutting wheel train 6 is arranged toward the conveying surface of the roller frame.

[0127] The roller frame includes two roller groups parallel to each other in length direction; the two roller groups are arranged at intervals along the conveying direction perpendicular to the roller groups; the floating support is arranged between the two roller groups, and the supporting end of the floating support is arranged toward the bar to be processed.

[0128] The number of floating supports is one more than the number of wafer taking assemblies for the crystal rod sheet; when the wafer taking assembly for the crystal rod sheet cuts the rod material, a floating support is provided on both sides of the wafer taking assembly for the crystal rod sheet along the axial direction of the rod material.

[0129] The moving direction of the horizontal moving device is parallel to the conveying direction of the roller group; the horizontal moving device is arranged between the two roller groups; and the floating support is connected to the movable end of the horizontal moving device.

[0130] Please refer to Figure 5 to Figure 6 The difference between the third embodiment of the present invention and the first embodiment is that:

[0131] On the basis of the crystal rod sheet material taking assembly of Example 1, the clamping assembly also includes a connecting frame 22; the elastic clamping block 21 is connected to the movable end of the linear displacement device 3 through the connecting frame 22; the connecting frame 22 and the elastic clamping block 21 are an integral structure; in the Z-axis direction, elastic clamping blocks 21 are provided at both ends of the connecting frame 22; in the Y-axis direction, the clamping ends of the two elastic clamping blocks 21 are both arranged toward the same side; at least two clamping line groups 23 are connected between the clamping ends of the two elastic clamping blocks 21; the clamping line groups 23 are arranged at intervals along the X-axis direction; in the Y-axis direction, the clamping ends of the two elastic clamping blocks 21 are arranged at a preset distance from the connecting frame 22; in the Y-axis direction, the side of the connecting frame 22 close to the clamping end of the elastic clamping block 21 is an arc surface; the two elastic clamping blocks 21 are elastically connected to the connecting frame 22; in the Z-axis direction, the two elastic clamping blocks 21 can both move relative to the connecting frame 22.

[0132] The working principle of the utility model is as follows: first, the bar to be cut is moved to the cutting wheel train 6 by the roller frame until the cutting position of the bar is aligned with the cutting end of the cutting wheel train 6, and then the floating support is started to ensure that both sides of the cutting position of the bar are supported by floating supports; then, the cutting wheel train 6 is started, and the driving member drives the cutting wheel train 6 and the clamping piece assembly 2 to move synchronously toward the bar in the vertical direction, and the cutting work of the bar is carried out by the cutting wheel train 6; when the cutting wheel train 6 cuts the bar to a position that is convenient for the clamping piece assembly 2 to subsequently embrace the sheet material, the linear displacement device 3 is started, and the linear displacement device 3 is driven by the linear displacement device 3 to move the cutting piece toward the bar. The device 3 drives the clamping assembly 2 to approach the outer cylindrical surface of the sheet material along the radial direction of the rod material until the two cross sections of the sheet material are embedded in the clamping assembly 2, thus completing the clamping of the sheet material; then, the universal nozzle 5 is started, so that the gas blown out by the universal nozzle 5 dries the water film in the cutting gap, and then the floating support is driven to move by the horizontal moving device, so that the floating support drives the excess material on both sides of the thickness direction of the sheet material away from the sheet material; finally, the driving member drives the clamped sheet material to be lifted to the specified height in the vertical direction, and then the driving member drives the support frame 1 to reset to complete the sheet material removal work.

[0133] In summary, the utility model provides a wafer picking assembly for a crystal rod sheet material. Driven by a driving member, the wafer picking assembly can move along the axis of the rod material to any position of the sheet material to be clamped on the outer cylindrical surface of the rod material, and then relatively move the two concave clamping surfaces so that the clamping surfaces form a virtual cylindrical covering surface in space, so as to pick up the sheet material by embracing the outer cylindrical surface of the sheet material. Compared with the existing wafer picking assembly, not only the existing wafer picking assembly, in which the clamping end can only move along the axis of the rod material until it conflicts with the end surface of the sheet material, is changed, but also because the clamping surfaces can be relatively moved, the size of the virtual cylindrical covering surface can be changed according to the diameter of the sheet material to be clamped, thereby realizing the sheet cutting process in the middle of the silicon crystal rod. In order to provide structural support for the work; and in order to reduce the heat generated by the cutting surface during cutting, the corresponding coolant is usually sprayed on the cutting surface during the cutting process to achieve the purpose of cooling; but this also leads to the fact that after cutting, excess coolant is likely to remain in the cutting seam of the sheet material, thereby forming a water film; due to the effect of surface tension, when you want to withdraw the remaining bar material after cutting, the water films on both sides of the thickness direction of the sheet material will attract the bar material at the same time, inhibiting the movement trend of the bar material and the sheet material to separate from each other. If forced separation occurs, the sheet material will overturn or even be damaged, thereby affecting the subsequent detection results; therefore, a corresponding universal nozzle is set on the support frame, and the universal nozzle is connected to any peripheral air source device, so as to effectively remove the water film, so as to facilitate the quick and smooth removal of the sheet material.

[0134] The above description is only an embodiment of the present invention, and does not limit the patent scope of the present invention. Any equivalent transformations made using the contents of the specification and drawings of the present invention, or directly or indirectly applied in the relevant technical field, are also included in the patent protection scope of the present invention.

Claims

1. A wafer removal assembly for a crystal bar wafer, characterized in that: It includes a driving member, a support frame, and two clip assemblies arranged on the support frame; The support frame is connected to the movable end of the driving member, and the driving member can drive the support frame to move in a vertical plane where the axis of the material to be processed is located; The clamping surfaces of the two clip assemblies are arranged opposite to each other and are both concave surfaces; The clamping surfaces of the two clamping pieces can move relative to each other.

2. The crystal bar sheet removal assembly according to claim 1, characterized in that: The clip assembly also includes an elastic clamping block; Elastic clamping blocks are provided at both ends of the concave surface in the extension direction; The direction of the clamping surface of the elastic clamping block is consistent with the opening direction of the concave surface.

3. The crystal bar sheet removal assembly according to claim 1, characterized in that: Also included is a linear displacement device; The fixed end of the linear displacement device is connected to the support frame; The movable end of the linear displacement device is connected to the clip assembly.

4. The crystal bar sheet removal assembly according to claim 3, characterized in that: Also includes extension rack; The clip assembly is connected to the movable end of the linear displacement device through an extension frame.

5. The crystal bar sheet removal assembly according to claim 1, characterized in that: The support frame is also provided with a universal nozzle; The virtual support surface enclosed by the clamping surfaces of the two clip assemblies and the spraying end of the universal nozzle are located in the same plane.

6. The crystal bar sheet removal assembly according to claim 1, characterized in that: The driving member includes a first displacement device and a second displacement device; The second displacement device is connected to the movable end of the first displacement device; The support frame is connected to the movable end of the second displacement device; The moving direction of the first displacement device is parallel to the axial direction of the bar to be processed; The moving direction of the second displacement device is perpendicular to the axial direction of the bar to be processed.

7. A multi-station cutting machine, characterized in that: A wafer taking assembly comprising a roller frame, a cutting wheel system and at least two wafer taking assemblies for the crystal rod wafers according to any one of claims 1 to 6; The sheet taking assembly of the crystal rod sheet is arranged on one side of the moving direction of the roller frame; A cutting wheel system is provided on the support frame of the wafer taking assembly of the crystal rod wafer; The cutting end of each cutting wheel train is arranged between the clamping surfaces of the corresponding two clamping pieces, and the cutting end of the cutting wheel train is arranged toward the conveying surface of the roller frame.

8. The multi-station cutting machine according to claim 7, characterized in that: Also included is a floating support; The roller frame comprises two roller groups whose length directions are parallel to each other; Along a conveying direction perpendicular to the roller group, two roller groups are arranged at intervals; The floating support member is arranged between two roller groups, and the supporting end of the floating support member is arranged toward the bar material to be processed.

9. The multi-station cutting machine according to claim 8, characterized in that: The number of the floating support members is at least one more than the number of the wafer taking components of the crystal ingot wafer; When the wafer taking assembly for the crystal ingot sheet material cuts the ingot material, at least one floating support is provided on both sides of the wafer taking assembly for the crystal ingot sheet material along the axial direction of the ingot material.

10. The multi-station cutting machine according to claim 9, characterized in that: Also included is a horizontal movement device; The moving direction of the horizontal moving device is parallel to the conveying direction of the roller group; The horizontal moving device is arranged between the two roller groups; The floating support is connected to the movable end of the horizontal moving device.

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