A high-strength mask plate storage carrier

Abstract

The utility model relates to the technical field of mask plate production. The technical problem to be solved by the utility model is that it cannot be used for loading mask plates of different specifications. In order to solve the above technical problems, the utility model provides a high-strength mask plate storage carrier. The utility model includes: a bearing base, including a first body, a first support, a first limit assembly and two second limit assemblies; the first limit assembly is used to limit the displacement of the mask plate along the X direction and the Y direction; the two second limit assemblies are symmetrically arranged on the inner wall of the first body along the Y direction, and the second limit assembly is used to clamp the mask plate to limit the displacement of the mask plate; the second limit assembly includes an auxiliary limit member provided with a slot, and the slots of the two second limit assemblies clamp the mask plate from both sides of the mask plate; the horizontal distance from the slot to the center of the first body is adjustable; the light shielding cover is buckled on the top of the bearing base. The utility model is suitable for loading mask plates of different sizes.

Description

Technical Field

[0001] The utility model relates to the technical field of mask plate production, in particular to a high-strength mask plate storage carrier. Background Art

[0002] Mask is a technology used in microelectronics processing. Its main function is to isolate and protect specific areas of the circuit. The production of mask involves multiple steps, including substrate preparation, photoresist application, development, evaporation and rubbing. Mask is widely used in integrated circuit manufacturing, semiconductor device manufacturing and photolithography. Due to the high unit price of large-sized mask, in order to avoid

[0003] The mask is contaminated by cavitation, particles, humidity, static electricity and ultraviolet light during storage and transportation, so special carriers are needed to load the mask.

[0004] Most existing mask carriers are non-standard customized or spliced ​​carriers. Non-standard customized carriers cannot be used to load masks of different specifications. Large-sized mask plates generally weigh around 200kg or more, and spliced ​​carriers are easily damaged during use. Utility Model Content

[0005] Therefore, the technical problem to be solved by the present invention is to overcome the above-mentioned problems existing in the prior art.

[0006] In order to solve the above technical problems, the utility model provides a high-strength mask plate storage carrier, comprising:

[0007] The bearing base comprises a first body, a first support member arranged in the first body, a first limit assembly arranged in the first body, and two second limit assemblies arranged in the first body; the first limit assembly is used to limit the displacement of the mask plate along the X direction and the Y direction; the two second limit assemblies are symmetrically arranged on the inner wall of the first body along the Y direction, and the second limit assembly is used to clamp the mask plate to limit the displacement of the mask plate; the second limit assembly comprises an auxiliary limit member provided with a clamping groove, and the clamping grooves of the two second limit assemblies clamp the mask plate from both sides of the mask plate; along the Y direction, the horizontal distance from the clamping groove to the center of the first body is adjustable;

[0008] The light shielding cover is buckled on the top of the bearing base, and the light shielding cover includes a second body and a second support member arranged in the second body;

[0009] The light shielding cover is sealed and connected to the supporting base and locked and fixed.

[0010] In one embodiment of the utility model, the present application also includes a plurality of locking assemblies arranged on the side of the carrier, and the shading cover and the supporting base are locked and fixed by the locking assemblies; the locking assembly includes a buckle and a hook connected to the buckle; one of the buckle and the hook is connected to the side wall of the supporting base, and the other is connected to the side wall of the shading cover.

[0011] In one embodiment of the utility model, the second limiting assembly also includes at least one locking bolt; the auxiliary limiting piece is provided with a waist-shaped hole corresponding to the locking bolt, and the waist-shaped hole extends along the Y direction; the first body is provided with a threaded hole at the position where the auxiliary limiting piece is provided, and the threaded hole is corresponding to the locking bolt; the locking bolt passes through the waist-shaped hole and is connected to the threaded hole.

[0012] In an embodiment of the present invention, a first buffer pad is provided at the slot.

[0013] In an embodiment of the present utility model, a first limiting assembly includes two limiting grooves, and the two limiting grooves are arranged along the diagonal lines of the first body; the limiting grooves are L-shaped grooves.

[0014] In one embodiment of the present invention, the first limiting components are divided into two groups.

[0015] In one embodiment of the utility model, the shading cover plate and the supporting base are sealed by at least one sealing strip; a circle of sealing grooves is provided on the top of the supporting base, and the sealing strips are arranged in the sealing grooves.

[0016] In one embodiment of the present invention, the color of the shading cover is tea yellow.

[0017] In one embodiment of the utility model, at least one side of the light shielding cover is provided with a carrying wrench; at least one side of the supporting base is also provided with a carrying wrench.

[0018] In an embodiment of the present invention, the supporting base and the light shielding cover are respectively provided with at least one electrostatic wheel on the same side.

[0019] The above technical solution of the utility model has the following advantages compared with the prior art:

[0020] The high-strength mask plate storage carrier described in the utility model hoists the mask plate into the first body of the carrier, first adjusts the placement position through the first limiting component, and then adjusts the horizontal distance from the card slot of the second limiting component to the center of the first body so that the mask plate is stuck in the card slot, thereby further limiting and fixing the mask plate to prevent the mask plate from shaking horizontally and hitting the carrier. It can be seen that this embodiment is suitable for loading mask plates of different sizes by adjusting the horizontal distance from the card slot to the center of the first body. In this embodiment, the first support member and the second support member are respectively provided in the first body and the second body, so that the mask plate is supported by the first support member and the second support member, and has sufficient supporting force for large-sized mask plates to avoid damage to the mask plate during use. In addition, after the light-shielding cover plate is buckled and sealed with the bearing base, on the one hand, the mask plate is locked and fixed to avoid displacement, dislocation, etc. during movement; on the other hand, it can avoid damage to the mask plate caused by ambient air or water vapor entering the interior of the carrier. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] In order to make the content of the utility model easier to understand, the utility model is further described in detail according to the specific embodiments of the utility model in combination with the accompanying drawings, wherein:

[0022] Figure 1 This is a structural schematic diagram of a high-strength mask plate storage carrier in a preferred embodiment of the utility model;

[0023] Figure 2 yes Figure 1 A schematic diagram of the structure of a high-strength mask plate storage carrier (excluding a light shielding cover);

[0024] Figure 3 yes Figure 2 A magnified image of point A;

[0025] Figure 4 yes Figure 1 A schematic diagram of the structure of a light shielding cover plate in a high-strength mask plate storage carrier;

[0026] Figure 5 is a schematic diagram of placing the mask in a carrying base;

[0027] Figure 6 is a cross-sectional schematic diagram of a mask plate placed in the carrier;

[0028] Figure 7 yes Figure 6 The enlarged view of point B;

[0029] Description of the reference numerals in the specification: 100, light shielding cover; 110, second body; 120, second support member;

[0030] 200, bearing base; 210, first body; 220, first support member; 230, first limiting assembly; 231, limiting groove; 232, second buffer pad; 240, second limiting assembly; 241, auxiliary limiting member; 2411, slot; 2412, waist-shaped hole; 2413, first buffer pad; 242, locking bolt; 250, carrying wrench;

[0031] 300, mask;

[0032] 400, locking assembly; 410, buckle; 420, hook;

[0033] 500, Sealing strip;

[0034] 600. Electrostatic wheel. DETAILED DESCRIPTION

[0035] The present invention will be further described below in conjunction with the accompanying drawings and specific embodiments so that those skilled in the art can better understand the present invention and implement it, but the embodiments are not intended to limit the present invention.

[0036] Reference Figure 1 to Figure 7 As shown, an embodiment of the utility model provides a high-strength mask plate storage carrier, including: a light shielding cover plate 100 and a carrying base 200 .

[0037] The light shielding cover 100 is buckled on the top of the supporting base 200, and the light shielding cover 100 includes a second body 110 and a second support member 120 disposed in the second body 110;

[0038] The supporting base 200 includes a first body 210, a first support member 220 disposed in the first body 210, a first limiting assembly 230 disposed in the first body 210, and two second limiting assemblies 240 disposed in the first body 210; the first limiting assembly 230 is used to limit the displacement of the mask plate 300 along the X direction and the Y direction; the two second limiting assemblies 240 are symmetrically arranged on the inner wall of the first body 210 along the Y direction, and the second limiting assemblies 240 are used to clamp the mask plate 300 to limit the displacement of the mask plate 300;

[0039] The second limiting assembly 240 includes an auxiliary limiting member 241 provided with a clamping slot 2411. The clamping slots 2411 of the two second limiting assemblies 240 clamp the mask plate 300 from both sides of the mask plate 300. The horizontal distance from the clamping slot 2411 to the center of the first body 210 is adjustable.

[0040] The light shielding cover 100 is sealed and locked to the supporting base 200 .

[0041] The supporting base 200 and the light shielding cover 100 are both manufactured by an integrated injection molding process, thereby improving the molding efficiency during the production process.

[0042] Specifically, the mask plate 300 is hoisted into the first body 210 of the carrier, and the placement position is adjusted by the first limiting assembly 230, and then the horizontal distance from the slot 2411 of the second limiting assembly 240 to the center of the first body 210 is adjusted so that the mask plate 300 is stuck in the slot 2411, thereby further limiting and fixing the mask plate 300 to prevent the mask plate 300 from shaking horizontally and hitting the carrier. It can be seen that this embodiment is suitable for loading mask plates 300 of different sizes by adjusting the horizontal distance from the slot 2411 to the center of the first body 210. In this embodiment, the first support member 220 and the second support member 120 are respectively provided in the first body 210 and the second body 110, so that the mask plate 300 is supported by the first support member 220 and the second support member 120, and has sufficient support force for large-sized mask plates 300 to avoid damage to the mask plate 300 during use. In addition, after the light shielding cover 100 is snapped and sealed with the supporting base 200, on the one hand, the mask plate 300 is locked and fixed to prevent displacement and misalignment during movement; on the other hand, it can prevent the mask plate 300 from being damaged due to ambient air or water vapor entering the interior of the carrier.

[0043] Furthermore, the present application also includes a plurality of locking components 400 disposed on the side of the carrier, and the light shielding cover 100 and the bearing base 200 are locked and fixed by the locking components 400; in some embodiments, at least one locking component 400 is disposed on each of the four sides of the carrier. The locking component 400 includes a buckle 410 and a hook 420 that cooperates with the buckle 410 and is connected to the side wall of the bearing base 200, and the other is connected to the side wall of the light shielding cover 100. After the mask plate 300 is placed in the carrier, the light shielding cover 100 is covered on the top of the bearing base 200 and the light shielding cover 100 is locked and fixed to the bearing base 200 by the buckle connection of the plurality of buckles 410 and the hook 420, and the operation is convenient and quick.

[0044] Further, the second limiting assembly 240 also includes at least one locking bolt 242; the auxiliary limiting member 241 is provided with a waist-shaped hole 2412 corresponding to the locking bolt 242, and the waist-shaped hole 2412 extends along the Y direction; the first body 210 is provided with a threaded hole at the position where the auxiliary limiting member 241 is provided, and the threaded hole is corresponding to the locking bolt 242; the locking bolt 242 passes through the waist-shaped hole 2412 and is connected to the threaded hole. Specifically, in this embodiment, the locking bolt 242 is connected to the threaded hole at different positions of the waist-shaped hole 2412 to achieve the adjustment of the horizontal distance from the slot 2411 to the center of the first body 210, which is convenient for adjustment.

[0045] In some embodiments, the supporting base 200 further includes two second limiting components 240 symmetrically disposed on the inner wall of the first body 210 along the X direction, and the waist-shaped holes 2412 of the two second limiting components 240 extend along the X direction.

[0046] Furthermore, a first buffer pad 2413 is provided at the slot 2411. Specifically, the first buffer pad 2413 isolates and buffers the mask plate 300 to prevent the mask plate 300 from being damaged by impact during transportation.

[0047] Furthermore, a first limiting assembly 230 includes two limiting grooves 231, which are arranged along the diagonal lines of the first body 210; the limiting grooves 231 are L-shaped grooves. The two limiting grooves 231 limit the mask plate 300 from two diagonal positions to prevent the mask plate 300 from shifting after being placed on the carrier.

[0048] Furthermore, there are two groups of first limiting components 230. Thus, the two groups of first limiting components 230 have four limiting grooves 231, which are respectively arranged at the four corners of the first body 210. Specifically, the arrangement of the two groups of first limiting components 230 makes the limiting of the mask plate 300 more stable and reliable.

[0049] Furthermore, a mounting groove is provided in the limiting groove 231, and a second buffer pad 232 is installed in the mounting groove. Specifically, the second buffer pad 232 isolates and buffers the mask plate 300 to prevent the mask plate 300 from being damaged by vertical impact.

[0050] Furthermore, the light shielding cover 100 and the supporting base 200 are sealed by at least one sealing strip 500; a circle of sealing grooves is provided on the top of the supporting base 200, and the sealing strip 500 is provided in the sealing groove. Specifically, when the light shielding cover 100 and the supporting base 200 are buckled together, the tension of the buckle 410 causes the light shielding cover 100 and the supporting base 200 to mutually squeeze the sealing strip 500 provided therebetween, thereby achieving the effect of sealing the inside of the carrier; the structure is stable and reliable.

[0051] Furthermore, the color of the light shielding cover plate 100 is brown. Specifically, the present embodiment can filter the ultraviolet rays irradiating the mask plate 300 during storage or transportation, thereby preventing the ultraviolet rays from affecting the photoresist on the mask plate 300.

[0052] Furthermore, at least one side of the light shielding cover 100 is provided with a transport wrench 250; at least one side of the supporting base 200 is also provided with a transport wrench 250. Specifically, the transport wrench 250 provided in this embodiment facilitates manual transport of the carrier and is more convenient to use.

[0053] Further, the bearing base 200 and the light shielding cover 100 are respectively provided with at least one electrostatic wheel 600 on the same side. Specifically, the electrostatic wheel 600 is provided to facilitate transportation. In some embodiments, the bearing base 200 and the light shielding cover 100 are respectively provided with a pair of electrostatic wheels 600, so that the four electrostatic wheels 600 are more stable and reliable in operation.

[0054] Obviously, the above embodiments are merely examples for the purpose of clear explanation and are not intended to limit the implementation methods. For those skilled in the art, other different forms of changes or modifications can be made based on the above description. It is not necessary and impossible to list all the implementation methods here. The obvious changes or modifications derived therefrom are still within the scope of protection of the invention of the utility model.

Claims

1. A high-strength mask plate storage carrier, characterized in that: include: A bearing base, comprising a first body, a first support member arranged in the first body, a first limit assembly arranged in the first body, and two second limit assemblies arranged in the first body; the first limit assembly is used to limit the displacement of the mask plate along the X direction and the Y direction; the two second limit assemblies are symmetrically arranged on the inner wall of the first body along the Y direction, and the second limit assembly is used to clamp the mask plate to limit the displacement of the mask plate; the second limit assembly includes an auxiliary limit member provided with a clamping groove, and the clamping grooves of the two second limit assemblies clamp the mask plate from both sides of the mask plate; the horizontal distance from the clamping groove to the center of the first body is adjustable; A light shielding cover is buckled on the top of the bearing base, and the light shielding cover comprises a second body and a second support member arranged in the second body; Wherein, the light shielding cover is sealed and locked to the supporting base.

2. The high-strength mask plate storage carrier according to claim 1, characterized in that: It also includes a plurality of locking components arranged on the side of the carrier, and the light-shielding cover and the supporting base are locked and fixed by the locking components; the locking component includes a buckle and a hook connected to the buckle; one of the buckle and the hook is connected to the side wall of the supporting base, and the other is connected to the side wall of the light-shielding cover.

3. The high-strength mask plate storage carrier according to claim 1, characterized in that: The second limiting component also includes at least one locking bolt; the auxiliary limiting piece is provided with a waist-shaped hole which is arranged one-to-one with the locking bolt, and the waist-shaped hole extends along the Y direction; the first body is provided with a threaded hole at the position where the auxiliary limiting piece is provided, and the threaded hole is arranged one-to-one with the locking bolt; the locking bolt passes through the waist-shaped hole and is connected with the threaded hole.

4. The high-strength mask plate storage carrier according to claim 3, characterized in that: A first buffer pad is provided at the slot.

5. The high-strength mask plate storage carrier according to claim 1, characterized in that: The first limiting assembly includes two limiting grooves, and the two limiting grooves are arranged along the diagonal lines of the first body; the limiting grooves are L-shaped grooves.

6. The high-strength mask plate storage carrier according to claim 5, characterized in that: The first limiting components are divided into two groups.

7. The high-strength mask storage carrier according to claim 1, characterized in that: The light shielding cover plate and the supporting base are sealed by at least one sealing strip; a circle of sealing grooves is arranged on the top of the supporting base, and the sealing strips are arranged in the sealing grooves.

8. The high-strength mask plate storage carrier according to claim 1, characterized in that: The color of the shading cover plate is tea yellow.

9. The high-strength mask plate storage carrier according to claim 1, characterized in that: A carrying wrench is provided on at least one side of the light-shielding cover; and a carrying wrench is also provided on at least one side of the supporting base.

10. The high-strength mask plate storage carrier according to claim 1, characterized in that: The bearing base and the light shielding cover are respectively provided with at least one electrostatic wheel on the same side.

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