A sedimentation vacuum chamber

Abstract

The utility model provides a sedimentation vacuum chamber, which relates to the technical field of coating machines, including: a chamber assembly; the chamber assembly includes a main chamber and an air pressure balance tube, an air pressure balance tube is welded on the left side of the main chamber, an internal balance tube is installed inside the air pressure balance tube, and a substrate heating element is fixedly connected to the inside of the main chamber through a welding connecting rod; a flip element is clamped inside the substrate heating element; and a clamping sleeve is fixedly clamped inside the internal balance tube. When one side of the substrate is coated, the rotating rod is pulled to drive the clamping ring to tighten, and then the rotating rod is rotated to make one end of the substrate tilt up, and the rotating rod is always kept in a sealed connection with the main chamber through sealing and blocking. After the rotating rod turns the substrate, it is placed on the substrate heating element, and the coating can continue without taking out the substrate and turning it over, thereby improving the processing efficiency and solving the problem that the sedimentation coating needs to flip the substrate separately to coat the other side, resulting in low processing efficiency.

Description

Technical Field

[0001] The utility model relates to the technical field of coating machines, in particular to a sedimentation type vacuum chamber. Background Art

[0002] Vacuum coating machine refers to coating performed under a relatively high vacuum degree, including electron gun heating evaporation, magnetron sputtering and other types. Evaporation coating is completed by heating the target material so that its surface components are evaporated in the form of atomic groups or ions, and then deposited on the surface of the substrate to be coated. Sedimentation coating requires the substrate to be flipped before the other side can be coated. The substrate needs to be taken out and flipped, resulting in low processing efficiency. During coating, the air pressure inside the vacuum chamber is prone to change. When the pressure difference changes greatly, the vacuum coating effect is affected, and it is difficult to achieve automatic balance of the pressure difference. Utility Model Content

[0003] The disclosed embodiment relates to a sedimentation type vacuum chamber, which can be turned over after single-side coating of a substrate is completed by providing a flipping piece, thereby improving processing efficiency.

[0004] In a first aspect of the present disclosure, a sedimentation vacuum chamber is provided, which specifically includes: a chamber assembly and a balancing piece; the chamber assembly includes a main chamber and an air pressure balancing tube, an air pressure balancing tube is welded on the left side of the main chamber, an inner balancing tube is installed inside the air pressure balancing tube, and a substrate heating element is fixedly connected to the inside of the main chamber by a welding connecting rod; a flip element is clamped inside the substrate heating element; a clamping sleeve is fixedly clamped inside the inner balancing tube; a rotating shaft is rotatably clamped inside the clamping sleeve, a transmission belt is sleeved on the rotating shaft, and a fixed-axis rotating rod is connected to the other end of the transmission belt; the bottom of the balancing piece is fixedly connected to a rack, and the rack is movably clamped inside the inner balancing tube; the fixed-axis rotating rod is fixedly rotatably clamped inside the inner balancing tube, and gears are fixedly connected to both ends of the fixed-axis rotating rod; the bottom of the gear is meshingly connected to a rack.

[0005] In at least some embodiments, three groups of rotating plates are fixedly connected to the rotating shaft, the left and right groups of rotating plates are in horizontal positions, and a counterweight is welded to the right side of the middle group of rotating plates.

[0006] In at least some embodiments, the flip part is composed of a clamping ring, a connecting block and a rotating rod. A special-shaped groove is provided inside the connecting block, the center of the special-shaped groove is penetrated by the rotating rod, the clamping ring is clamped inside the special-shaped groove, a socket is provided on the rotating rod, the clamping ring is clamped inside the socket, the clamping ring is clamped on the outer edge of the substrate, a scale is engraved on the top surface of the rotating rod, and the rotating rod is rotatably connected to the main cavity through a sealing plug. The sealing plug has a conical structure and is sealed and connected to the main cavity. When one side of the substrate is coated, the rotating rod is pulled to tighten the clamping ring. The degree of tightening is judged according to the value read on the scale to avoid damage to the substrate due to excessive tightening.

[0007] In at least some embodiments, a connecting rod is welded to the outer wall of the substrate heating element, and the outer end of the connecting rod is fixedly welded to the inner wall of the main cavity. A substrate heating device is arranged inside the substrate heating element, a substrate to be coated is placed on the top of the substrate heating element, and a socket is opened on the right side of the substrate heating element.

[0008] In at least some embodiments, a double-layer piston plate is fixedly bonded to the balancing member, and the double-layer piston plate fits tightly against the inner wall of the inner balancing tube. When air is drawn through the inner balancing tube, the double-layer piston plate moves to the left, also driving the balancing member to move, and driving the fixed-axis rotating rod to rotate through the meshing of the gear and the rack, so that the air pressure inside the inner balancing tube can be balanced with the air pressure inside the main cavity.

[0009] In at least some embodiments, an evaporation module is fixedly installed on the inner top of the main cavity, and the cavity assembly further includes a vacuum connecting pipe connected to an external vacuum system.

[0010] The utility model provides a sedimentation type vacuum chamber, which has the following beneficial effects:

[0011] When the utility model is in use, after coating is completed on one side of the substrate, the rotating rod is pulled to drive the clamping ring to tighten, and then the rotating rod is rotated to make one end of the substrate tilt up, and the rotating rod is always kept in sealed connection with the main cavity through sealing blockage. After the substrate is turned over by the rotating rod, it is placed on the substrate heating element, and the coating can continue without taking out the substrate and turning it over, thereby improving the processing efficiency.

[0012] In addition, during the coating process, the pressure difference of the air pressure drives the rotating plate to rotate, the rotating shaft is driven coaxially to rotate, the fixed-axis rotating rod is driven to rotate through the transmission belt, and the balancing piece is driven to move through the engagement of the gear and the rack, thereby automatically balancing the pressure difference between the inside of the inner balance tube and the inside of the main cavity. BRIEF DESCRIPTION OF THE DRAWINGS

[0013] In order to more clearly illustrate the technical solution of the embodiment of the utility model, the drawings of the embodiment will be briefly introduced below.

[0014] The drawings described below only relate to some embodiments of the present invention, but are not intended to limit the present invention.

[0015] In the attached picture:

[0016] Figure 1 A schematic structural diagram of the cavity assembly of the present application is shown;

[0017] Figure 2 A schematic diagram of the cross-sectional structure of the main cavity of the present application is shown;

[0018] Figure 3 A partial cross-sectional structural schematic diagram of the balance pipe in the present application is shown;

[0019] Figure 4 A schematic diagram of the connection structure between the fixed-axis rotating rod and the balancing member of the present application is shown;

[0020] Figure 5 A schematic diagram of the unfolded structure between the rotating rod and the substrate heating element of the present application is shown;

[0021] Figure 6 Shows this application Figure 5 Schematic diagram of the enlarged structure at point A in the middle.

[0022] Reference numerals list

[0023] 1. Chamber assembly; 11. Main chamber; 1101. Evaporation module; 12. Air pressure balance pipe; 13. Vacuum connecting pipe;

[0024] 2. substrate heating element; 201. connecting rod; 202. socket;

[0025] 3. Flipping piece; 31. Snap ring; 32. Connecting block; 3201. Special-shaped groove; 33. Rotating rod; 3301. Socket; 3302. Scale;

[0026] 4. Internal balance pipe; 401. Rotating shaft; 4011. Rotating plate; 40111. Counterweight; 4012. Transmission belt;

[0027] 5. Card holder;

[0028] 6. Fixed axis rotating rod; 601. Gear;

[0029] 7. Balance part; 701. Rack. DETAILED DESCRIPTION

[0030] In order to make the purpose, technical solution and advantages of the embodiment of the utility model clearer, the technical solution of the embodiment of the utility model will be clearly and completely described below in conjunction with the drawings of the embodiment of the utility model. Obviously, the described embodiment is a part of the embodiment of the utility model, not all of the embodiments. Based on the described embodiment of the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0031] Example: Please refer to the attached Figure 1 To Attachment Figure 6 :

[0032] The utility model proposes a sedimentation type vacuum chamber, comprising: a chamber component 1 and a balancing member 7; the chamber component 1 comprises a main chamber 11 and an air pressure balancing tube 12, the air pressure balancing tube 12 is welded on the left side of the main chamber 11, an inner balancing tube 4 is installed inside the air pressure balancing tube 12, a substrate heating element 2 is fixedly connected to the inside of the main chamber 11 through a welding connecting rod 201; a flipping member 3 is clamped inside the substrate heating element 2; a clamping sleeve 5 is fixedly clamped inside the inner balancing tube 4; a rotating shaft 401 is rotatably clamped inside the clamping sleeve 5, a transmission belt 4012 is sleeved on the rotating shaft 401, and a fixed axis rotating rod 6 is connected to the other end of the transmission belt 4012; a rack 701 is fixedly connected to the bottom of the balancing member 7, and the rack 701 is movably clamped inside the inner balancing tube 4; the fixed axis rotating rod 6 is fixedly rotatably clamped inside the inner balancing tube 4, and gears 601 are fixedly connected to both ends of the fixed axis rotating rod 6; and the rack 701 is meshingly connected to the bottom of the gear 601.

[0033] In the embodiments of the present disclosure, as shown in the attached Figure 4 As shown, three groups of rotating plates 4011 are fixedly connected to the rotating shaft 401, the left and right groups of rotating plates 4011 are in a horizontal position, and a counterweight block 4011 is welded on the right side of the middle group of rotating plates 4011. The rotating plates 4011 of the middle group are slightly tilted to the left due to the gravity of the counterweight block 40111, so that after the internal air of the main cavity 11 is extracted by the internal balance tube 4, the internal air pressure of the main cavity 11 is greater than the internal air pressure of the internal balance tube 4, thereby pressing the rotating plate 4011 to rotate, coaxially driving the rotating shaft 401 to rotate, and driving the fixed axis rotating rod 6 to rotate through the transmission belt 4012, so that the internal air pressure of the internal balance tube 4 is balanced with the internal air pressure of the main cavity 11.

[0034] In the embodiments of the present disclosure, as shown in the attached Figure 5 As shown, a connecting rod 201 is welded to the outer wall of the substrate heating element 2, and the outer end of the connecting rod 201 is fixedly welded to the inner wall of the main cavity 11. A substrate heating device is arranged inside the substrate heating element 2. The substrate to be coated is placed on the top of the substrate heating element 2, and a socket 202 is provided on the right side of the substrate heating element 2. The rotating rod 33 can be passed through the socket 202, so as to cooperate with the clamping ring 31 to complete the clamping of the substrate. After the substrate is placed on the substrate heating element 2, the surface components of the target material are evaporated in the form of atomic groups or ions through the evaporation module 1101, and precipitated to the surface of the substrate, and a thin film is formed through the film forming process to complete the coating.

[0035] In the embodiments of the present disclosure, as shown in the attached Figure 4As shown, a double-layer piston plate is fixedly bonded to the balance member 7, and the double-layer piston plate fits tightly against the inner wall of the inner balance tube 4. When air is extracted through the inner balance tube 4, the double-layer piston plate moves to the left, and also drives the balance member 7 to move. The fixed-axis rotating rod 6 is driven to rotate by the engagement of the gear 601 and the rack 701, so that the air pressure inside the inner balance tube 4 can be balanced with the air pressure inside the main cavity 11, so that during the coating period, the rotating plate 4011 can be driven to rotate by the pressure difference of the air pressure, so that the air pressure inside the inner balance tube 4 and the air pressure inside the main cavity 11 can be automatically balanced.

[0036] In the embodiments of the present disclosure, as shown in the attached Figure 5 and attached Figure 6 As shown, the flip member 3 is composed of a snap ring 31, a connecting block 32 and a rotating rod 33. A special-shaped groove 3201 is provided inside the connecting block 32. The center of the special-shaped groove 3201 is penetrated by the rotating rod 33. The snap ring 31 is clamped inside the special-shaped groove 3201. A socket 3301 is provided on the rotating rod 33. The snap ring 31 is clamped inside the socket 3301. The snap ring 31 is clamped on the outer edge of the substrate. A scale 3302 is engraved on the top surface of the rotating rod 33. The rotating rod 33 is rotatably connected to the main cavity 1 through a sealing plug. 1, the sealing plug is a conical structure and is sealed and connected to the main cavity 11. When one side of the substrate is coated, the rotating rod 33 is pulled to tighten the clamping ring 31. The tightening degree is judged according to the value read by the scale 3302 to avoid damage to the substrate caused by excessive tightening. Then, the rotating rod 33 is rotated to make one end of the substrate tilt up. The sealing plug keeps the rotating rod 33 always sealed and connected to the main cavity 11. The rotating rod 33 turns the substrate and places it on the substrate heating element 2, and the coating can continue.

[0037] In the embodiments of the present disclosure, as shown in the attached Figure 1 and attached Figure 2 As shown, an evaporation module 1101 is fixedly installed at the internal top of the main cavity 11, and the cavity assembly 1 also includes a vacuum connecting pipe 13, which is connected to an external vacuum system. The air pressure inside the main cavity 11 can be balanced through the air pressure balance pipe 12, and the vacuum connecting pipe 13 can make the inside of the main cavity 11 reach a vacuum state through the external vacuum system to facilitate evaporation and deposition film formation.

[0038] The working principle of this embodiment is as follows: after the substrate is placed on the substrate heating element 2, the surface components of the target material are evaporated in the form of atomic groups or ions through the evaporation module 1101, and are deposited on the surface of the substrate, and a thin film is formed through the film forming process to complete the coating;

[0039] When one side of the substrate is coated, the rotating rod 33 is pulled to tighten the clamp ring 31, and then the rotating rod 33 is rotated to tilt one end of the substrate. The rotating rod 33 turns the substrate and places it on the substrate heating element 2, and the coating can continue;

[0040] During the coating process, the pressure difference of the air pressure drives the rotating plate 4011 to rotate, coaxially drives the rotating shaft 401 to rotate, drives the fixed axis rotating rod 6 to rotate through the transmission belt 4012, and drives the balancing member 7 to move through the engagement of the gear 601 and the rack 701, so that the pressure difference between the inside of the inner balance tube 4 and the inside of the main cavity 11 can be automatically balanced.

[0041] In this article, there are a few points to note:

[0042] 1. The drawings of the embodiments of the present disclosure only involve structures related to the embodiments of the present disclosure, and other structures may refer to general designs.

[0043] 2. In the absence of conflict, the embodiments of the present disclosure and the features therein may be combined with each other to obtain new embodiments.

[0044] The above are only specific embodiments of the present disclosure, but the protection scope of the present disclosure is not limited thereto. Any technician familiar with the technical field can easily think of changes or substitutions within the technical scope disclosed in the present disclosure, which should be included in the protection scope of the present disclosure. Therefore, the protection scope of the present disclosure should be based on the protection scope of the claims.

Claims

1. A sedimentation vacuum chamber, comprising: A cavity assembly (1) and a balancing member (7); characterized in that the cavity assembly (1) comprises a main cavity (11) and an air pressure balancing tube (12); an air pressure balancing tube (12) is welded on the left side of the main cavity (11); an internal balancing tube (4) is installed inside the air pressure balancing tube (12); the interior of the main cavity (11) is fixedly connected to a substrate heating member (2) via a welding connecting rod (201); a flip member (3) is clamped inside the substrate heating member (2); a clamping sleeve (5) is fixedly clamped inside the internal balancing tube (4); the clamping sleeve ( 5) is rotatably connected to a rotating shaft (401), a transmission belt (4012) is sleeved on the rotating shaft (401), and the other end of the transmission belt (4012) is connected to a fixed-axis rotating rod (6); the bottom of the balancing member (7) is fixedly connected to a rack (701), and the rack (701) is movably connected to the inside of the inner balancing tube (4); the fixed-axis rotating rod (6) is fixedly rotatably connected to the inside of the inner balancing tube (4), and gears (601) are fixedly connected to both ends of the fixed-axis rotating rod (6); and the bottom of the gear (601) is meshingly connected to the rack (701).

2. A sedimentation vacuum chamber according to claim 1, characterized in that: An evaporation module (1101) is fixedly installed at the top of the interior of the main cavity (11), and the cavity assembly (1) also includes a vacuum connecting pipe (13), and the vacuum connecting pipe (13) is connected to an external vacuum system.

3. A sedimentation vacuum chamber according to claim 2, characterized in that: A connecting rod (201) is welded to the outer wall of the substrate heating element (2), and the outer end of the connecting rod (201) is fixedly welded to the inner wall of the main cavity (11). A substrate heating device is arranged inside the substrate heating element (2), a substrate to be coated is placed on the top of the substrate heating element (2), and a socket (202) is opened on the right side of the substrate heating element (2).

4. A sedimentation vacuum chamber according to claim 2, characterized in that: The flip member (3) is composed of a snap ring (31), a connecting block (32) and a rotating rod (33); a special-shaped groove (3201) is provided inside the connecting block (32); the rotating rod (33) penetrates the center of the special-shaped groove (3201); the snap ring (31) is clamped inside the special-shaped groove (3201); a socket (3301) is provided on the rotating rod (33); the snap ring (31) is clamped inside the socket (3301); the snap ring (31) is clamped on the outer edge of the substrate; a scale (3302) is engraved on the top surface of the rotating rod (33); and the rotating rod (33) is rotatably connected to the main cavity (11) through a sealing plug; the sealing plug has a conical structure and is sealingly connected to the main cavity (11).

5. A sedimentation vacuum chamber according to claim 1, characterized in that: Three groups of rotating plates (4011) are fixedly connected to the rotating shaft (401), the left and right groups of rotating plates (4011) are in horizontal positions, and a counterweight block (40111) is welded on the right side of the middle group of rotating plates (4011).

6. A sedimentation vacuum chamber according to claim 1, characterized in that: A double-layer piston sheet is fixedly bonded to the balance member (7), and the double-layer piston sheet is tightly fitted to the inner wall of the inner balance tube (4).

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