Semiconductor Equipment

Abstract

The utility model relates to a semiconductor device. The semiconductor device comprises a mainframe and a door panel, a latch sensor and a magnetic device are arranged at the chamber opening of the mainframe, one end of the door panel is rotatably connected to the mainframe, and a magnetic latch is arranged at the edge of the other end, when the other end of the door panel approaches the mainframe, i.e., performs a door closing action to seal the chamber opening, the magnetic latch is attracted by the magnetic device and moves toward the sensing area of ​​the latch sensor, and the magnetic attraction of the magnetic device on the magnetic latch helps the magnetic latch move to the set position when closing the door and avoids directional deviation, reduces the risk of the inductive latch failing to reach the set position, helps reduce system errors, and improves the working efficiency of the semiconductor device.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductors, in particular to a semiconductor device. Background Art

[0002] Semiconductor equipment includes process equipment for manufacturing semiconductor devices and measurement equipment for measuring the quality, performance and reliability of semiconductor devices. The semiconductor equipment usually includes a door panel (cover). When using the semiconductor equipment for semiconductor process or measurement, the door panel is opened, and the substrate used to form the semiconductor device is placed in the chamber of the equipment, and then the door panel is closed and locked, and then the relevant semiconductor process or measurement is started.

[0003] In order to automatically confirm the closing and lock, many semiconductor devices use induction devices. Take a probe station for electrical testing of semiconductor devices as an example. The door panel is installed on its main station. A latch is provided on the door panel. The main station is provided with a latch sensor at the door panel connection for sensing whether the latch has reached the set position when closing the door. When the latch reaches the set position when closing the door, the signal sent by the latch sensor is obtained by the control system, and the signal is used to trigger the cylinder to lock the door panel, and the control system starts initialization to perform relevant measurement processes.

[0004] However, since the door panel moves and the latch is brought out when the device opens the door, there is a risk that the latch will not reach the set position when the door is closed due to insufficient movement of the door panel or the direction of the latch being offset. In order to determine whether the latch is offset and whether it has reached the set position, manual confirmation is often required. Otherwise, when the latch still does not reach the set position when the door is closed within the specified time, the control system cannot perform subsequent operations due to the inability to obtain information from the latch sensor, and an error message will appear, affecting the normal operation of the equipment and causing a decrease in work efficiency. Utility Model Content

[0005] In order to reduce the risk that a latch cannot reach a set position when a door is closed and improve the working efficiency of semiconductor equipment, the utility model provides a semiconductor equipment.

[0006] The semiconductor device provided by the utility model includes:

[0007] A host platform, the host platform having a chamber opening, wherein a latch sensor and a magnetic device are arranged at the chamber opening; and

[0008] A door panel is arranged corresponding to the opening of the chamber and one end of the door panel is rotatably connected to the main unit. A magnetic latch is arranged on the edge of the other end of the door panel. When the other end of the door panel is close to the main unit, the magnetic latch is attracted by the magnetic device and moves toward the sensing area of ​​the latch sensor.

[0009] Optionally, a latch hole is provided at the opening of the chamber, and the latch hole is located in a sensing area of ​​the latch sensor.

[0010] Optionally, the magnetic device is an electromagnetic inductor.

[0011] Optionally, the electromagnetic inductor includes an electromagnetic induction coil arranged around the latch hole.

[0012] Optionally, the main station further includes a magnetic protection cover arranged on the periphery of the magnetic device.

[0013] Optionally, the magnetic device is arranged closer to the door panel than the latch sensor to one end of the magnetic latch.

[0014] Optionally, the magnetic device is fixed to the chamber opening by screws.

[0015] Optionally, the semiconductor equipment is semiconductor process equipment or measurement equipment.

[0016] Optionally, the semiconductor device is a probe station device.

[0017] Optionally, the latch sensor is a photoelectric sensor or an electromagnetic wave sensor.

[0018] The semiconductor equipment provided by the utility model comprises a mainframe and a door panel, wherein a latch sensor and a magnetic device are arranged at the chamber opening of the mainframe, one end of the door panel is rotatably connected to the mainframe, and a magnetic latch is arranged at the edge of the other end, and when the other end of the door panel is close to the mainframe, i.e., when the door is closed to seal the chamber opening, the magnetic latch is attracted by the magnetic device and moves toward the sensing area of ​​the latch sensor, and the magnetic attraction force of the magnetic device on the magnetic latch is utilized to help the magnetic latch move to the set position when the door is closed and avoid directional deviation, thereby reducing the risk of the sensing latch failing to reach the set position, helping to reduce system errors, and improving the working efficiency of the semiconductor equipment. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] Figure 1 It is a schematic diagram of the positions of a magnetic latch and a magnetic protective cover in a semiconductor device according to an embodiment of the utility model.

[0020] Description of reference numerals:

[0021] 10-door panel; 11-magnetic latch; 12-latch hole; 13-screw; 20-magnetic protective cover. DETAILED DESCRIPTION

[0022] The semiconductor device of the utility model is further described in detail below in conjunction with the accompanying drawings and specific embodiments. According to the following description, the advantages and features of the utility model will be clearer. It should be understood that the drawings in the specification are all in a very simplified form and use non-precise proportions, which are only used to conveniently and clearly assist in explaining the purpose of the embodiments of the utility model. It should be understood that spatial relative terms are intended to include different orientations in use or operation in addition to the orientation of the device described in the figure. For example, if the structure in the accompanying drawings is inverted or positioned in other different ways (such as rotated), the exemplary term "on..." may also include "under..." and other orientation relationships.

[0023] The embodiment of the utility model includes a semiconductor device. The semiconductor device can be a process device for manufacturing semiconductor devices and a measuring device for measuring the quality, performance and reliability of semiconductor devices. As an example, the semiconductor device is a measuring device, more specifically, a probe station device, which is used to perform electrical tests (such as testing resistance, capacitance, leakage current and threshold voltage, etc.) on semiconductor devices made on semiconductor substrates.

[0024] Figure 1 This is a schematic diagram of the positions of the magnetic latch and the magnetic protective cover in a semiconductor device according to an embodiment of the present invention. Figure 1 The semiconductor device includes a main stage (not shown) and a door panel 10. The main stage has a chamber opening, which is the opening of a chamber for placing a semiconductor substrate. The chamber opening is opened when the semiconductor substrate enters and exits the chamber or when the chamber is maintained, and is closed when the semiconductor process or measurement is performed normally. The door panel 10 is arranged corresponding to the chamber opening, and the chamber opening can be exposed or closed by moving the door panel 10. Specifically, one end of the door panel 10 is rotatably connected to the main stage, so that the chamber opening can be exposed or closed by rotating the door panel 10.

[0025] In this embodiment, a latch sensor is provided at the opening of the chamber (not shown in the figure, the latch sensor is located at Figure 1The magnetic protection cover 20 shown in the cross section is shown in the figure. The other end edge of the door panel 10 is provided with a magnetic latch 11. Thus, when the door is closed, the other end of the door panel 10 is moved toward the chamber opening by rotating the door panel 10, and the magnetic latch 11 moves toward the sensing area of ​​the latch sensor. When the magnetic latch 11 reaches the sensing area of ​​the latch sensor, the latch sensor senses the magnetic latch 11 and generates a signal indicating that the magnetic latch 11 reaches the set position when the door is closed. The semiconductor device, for example, has a control system. The latch sensor can send a signal indicating that the magnetic latch 11 reaches the set position when the door is closed to the control system. The control system can use the signal to trigger the component (such as a cylinder) for locking the door panel 10 to work, so that the door panel 10 is locked with the host station. Based on the signal indicating that the magnetic latch 11 reaches the set position when the door is closed, the control system can initialize the device so that the semiconductor device is ready to perform corresponding processes or measurements. The latch sensor can sense based on the principles of photoelectricity, capacitance or electromagnetic waves (such as infrared). As an example, the latch sensor is a photoelectric sensor or an electromagnetic wave sensor (such as an infrared sensor). Photoelectric sensors use photoresistors, photodiodes or other photosensitive elements to sense light changes in the sensing area. Infrared sensors use infrared rays to sense changes in the sensing area. The latch sensor and the control system can be set up using known technologies.

[0026] In this embodiment, a magnetic latch 11 is provided at the edge of the door panel 10, and the magnetic latch 11 has the characteristic of being attracted by magnetic force in an appropriate magnetic field. The magnetic latch 11 includes a material that is magnetized in a magnetic field, such as iron. A magnetic device is provided at the chamber opening of the host station, and when one end of the door panel 10 where the magnetic latch 11 is provided is close to the host station, the magnetic latch 11 is attracted by the magnetic device and moves toward the sensing area of ​​the latch sensor, that is, the magnetic attraction of the magnetic device is utilized to help the magnetic latch 11 move toward the sensing area of ​​the latch sensor and avoid directional deviation, thereby reducing the risk that the sensing latch 11 cannot reach the set position when the door is closed, reducing the number of times the control system reports an error due to the latch not being able to reach the set position when the door is closed, and helping to improve the working efficiency of semiconductor equipment.

[0027] In the present embodiment, the chamber opening of the semiconductor device has, for example, a latch hole 12, and the latch hole 12 is located in the sensing area of ​​the latch sensor. Thus, when the door is closed, the door panel 10 rotates to move the magnetic latch 11 toward the latch hole 12. When the magnetic latch 11 is inserted into the latch hole 12, it is sensed by the latch sensor. The latch sensor sends a corresponding signal to trigger the locking assembly to lock the door panel 10 with the host station, and based on the signal sent by the latch sensor, the control system can initialize the device to facilitate normal operation of the device.

[0028] The magnetic device is capable of generating a magnetic field and generating magnetic attraction to the magnetic plug 11 close to the host. In one embodiment, the magnetic device includes a permanent magnet. However, it is not limited to this. In this embodiment, the magnetic device uses an electromagnetic inductor (not shown in the figure, the electromagnetic inductor is located at Figure 1 The electromagnetic sensor can generate a magnetic field to attract the magnetic latch 11 during the movement of the magnetic latch 11 toward the chamber opening. The electromagnetic sensor can adopt a known structure that uses the principle of electromagnetic induction to generate a magnetic field, and it can obtain current through a port on a semiconductor device (port voltage such as 24V). As an example, the electromagnetic sensor includes an electromagnetic induction coil arranged around the latch hole 12. When the door is closed, the magnetic latch 11 approaches the electromagnetic sensor, and through the magnetic attraction, the magnetic latch 11 is sucked into the latch hole 12, thereby being sensed by the latch sensor. By using the electromagnetic sensor, the risk of equipment alarms due to insufficient movement distance or direction deviation of the latch can be reduced, and the time for processing equipment alarms can be reduced, which helps to improve the working efficiency of the equipment.

[0029] like Figure 1 As shown, the magnetic device can be fixed to the chamber opening by screws 13. In addition, in order to make the magnetic latch 11 attracted by magnetic force and move toward the sensing area of ​​the latch sensor (the latch hole 12 in this embodiment) before the magnetic latch 11 reaches the sensing area of ​​the latch sensor, the magnetic device is, for example, arranged at one end of the magnetic latch 11 closer to the door panel 11 than the latch sensor.

[0030] In a preferred embodiment, the host station may further include a magnetic protective cover 20 disposed on the periphery of the magnetic device. The magnetic protective cover 20 is used to prevent the magnetic field generated by the magnetic device (for example, an electromagnetic inductor is used in this embodiment) from being disturbed by the external environment, and the magnetic field generated by the magnetic device from affecting the process or test environment in the device cavity. For example, for a probe station, the magnetic protective cover 20 can be used to reduce the risk of electrical test data fluctuations caused by the magnetic field generated by the magnetic device.

[0031] The semiconductor device described in the above embodiment includes a host platform and a door panel 10. A latch sensor and a magnetic device are provided at the chamber opening of the host platform. One end of the door panel 10 is rotatably connected to the host platform, and a magnetic latch 11 is provided at the edge of the other end. When the other end of the door panel 10 is close to the host platform (such as when the semiconductor device is closing the door to seal the chamber opening), the magnetic latch 11 is attracted by the magnetic device and moves to the sensing area of ​​the latch sensor. The magnetic attraction of the magnetic device helps the magnetic latch 11 to move to the sensing area of ​​the latch sensor and avoids directional deviation, which can reduce the risk of the inductive latch 11 failing to reach the set position when closing the door, and reduce the number of system errors caused by the latch failing to reach the set position when closing the door, which helps to improve the working efficiency of the semiconductor device. In addition, the magnetic device is used to attract the magnetic latch 11 to move to the sensing area of ​​the latch sensor, which is convenient and quick. When an electromagnetic inductor is used as a magnetic device, the power supply interface of the semiconductor device can be used for power supply, which is safe and low in cost.

[0032] The above description is only a description of the preferred embodiment of the utility model, and is not any limitation on the scope of rights of the utility model. Any technical personnel in this field can make possible changes and modifications to the technical solution of the utility model by using the methods and technical contents disclosed above without departing from the spirit and scope of the utility model. Therefore, any simple modifications, equivalent changes and modifications made to the above embodiments based on the technical essence of the utility model without departing from the content of the technical solution of the utility model are within the protection scope of the technical solution of the utility model.

Claims

1. A semiconductor device, characterized in that: include: A mainframe, the mainframe having a chamber opening, wherein a latch sensor and a magnetic device are arranged at the chamber opening; as well as A door panel is arranged corresponding to the opening of the chamber and one end of the door panel is rotatably connected to the main unit. A magnetic latch is arranged on the edge of the other end of the door panel. When the other end of the door panel is close to the main unit, the magnetic latch is attracted by the magnetic device and moves toward the sensing area of ​​the latch sensor.

2. The semiconductor device according to claim 1, wherein: The chamber opening is provided with a latch hole, and the latch hole is located in the sensing area of ​​the latch sensor.

3. The semiconductor device according to claim 2, wherein: The magnetic device is an electromagnetic inductor.

4. The semiconductor device according to claim 3, wherein: The electromagnetic inductor comprises an electromagnetic induction coil arranged around the latch hole.

5. The semiconductor device according to claim 1, wherein: The main station also includes a magnetic protection cover arranged on the periphery of the magnetic device.

6. The semiconductor device according to claim 1, wherein The magnetic device is closer to the door panel than the latch sensor to one end of the magnetic latch.

7. The semiconductor device according to claim 1, wherein: The magnetic device is fixed to the opening of the chamber by screws.

8. The semiconductor device according to any one of claims 1 to 7, wherein: The semiconductor equipment is a semiconductor process equipment or a measurement equipment.

9. The semiconductor device according to claim 8, wherein: The semiconductor device is a probe station device.

10. The semiconductor device according to any one of claims 1 to 7, wherein: The latch sensor is a photoelectric sensor or an electromagnetic wave sensor.

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