A vacuum pipe for preventing chamber backflow

Abstract

The utility model relates to the technical field of pipelines, and discloses a vacuum pipeline for preventing chamber backflow, comprising a lower bottom plate and a rotating assembly, wherein the top of the lower bottom plate is detachably connected with a pipeline body, two grooves one are symmetrically provided inside the pipeline body, two connecting rods are symmetrically fixedly connected with the top of the lower bottom plate, the inner walls of the two grooves one are fixedly connected with springs, the top ends of the two connecting rods respectively extend to the inside of the corresponding grooves one and are fixedly connected with one end of the spring, the top of the pipeline body is fixedly connected with an upper top plate, and the rotating assembly is arranged inside the upper top plate. According to the utility model, when the lower bottom plate is subjected to upward pressure, the lower bottom plate drives the connecting rod to move, and the connecting rod squeezes the spring to realize the connection between the lower bottom plate and the pipeline body; at the same time, the lower bottom plate drives the L-shaped rod to move upward, so that the clamping rod is engaged with the groove two to prevent backflow.

Description

Technical Field

[0001] The utility model relates to the technical field of pipelines, in particular to a vacuum pipeline for preventing chamber backflow. Background Art

[0002] In actual production, backflow may occur in the vacuum pipeline, which will cause product scrapping, equipment downtime, and replacement of spare parts. Backflow principle: due to the downtime of the vacuum pump, the chamber loses the power to pump air. The vacuum value between the vacuum valve and the vacuum pump rises instantly and reaches the atmospheric pressure state, but the vacuum value between the vacuum valve and the process chamber remains unchanged. When personnel deal with equipment downtime, due to negligence or lack of experience, the process chamber is not vacuum-broken and the vacuum valve is directly opened. Due to the huge pressure difference, the dust remaining at the bottom of the vacuum pipeline (excess chemical reactants in the chamber) will flow back into the process chamber, which will pollute the chamber, affect the yield rate and the utilization rate of the equipment, and the chamber needs to be cleaned or replaced.

[0003] Chinese patent CN110173032B discloses an anti-backflow drainage conduit, which includes a reserved hole connecting indoor and outdoor, the reserved hole is opened on the wall, an anti-backflow pipe body is arranged in the reserved hole, and an anti-backflow mechanism is arranged on the anti-backflow pipe body; the anti-backflow mechanism includes a water diversion pipe connected to the anti-backflow pipe body at the bottom of one end indoors, a sealing connection component is arranged between the water diversion pipe and the anti-backflow pipe body, and the lower end of the water diversion pipe is connected to the indoor drainage pipe. This patent has the effect of reducing rainwater from seeping into the reserved hole.

[0004] This patent adopts a sealed connection component, so that when rainwater backflows, it can intercept the entry into the anti-backflow pipe body by lifting the interception plate. At the same time, the anti-backflow pipe body is tilted downward 15° toward the outdoors, which can further reduce the effect of rainwater backflow. However, this patent has a complex structure and is troublesome to repair when problems arise. Therefore, we propose a vacuum pipe that prevents chamber backflow. Utility Model Content

[0005] The purpose of the utility model is to provide a vacuum pipe for preventing backflow of the chamber in order to solve the above-mentioned problem, thereby solving the problem mentioned in the background technology.

[0006] In order to solve the above problems, the utility model provides a technical solution:

[0007] A vacuum pipe for preventing chamber backflow, comprising a lower base plate and a rotating assembly, wherein the top of the lower base plate is detachably connected to a pipe body, two grooves 1 are symmetrically provided inside the pipe body, and two connecting rods are symmetrically fixedly connected to the top of the lower base plate, the inner walls of the two grooves 1 are fixedly connected to springs, the top ends of the two connecting rods respectively extend to the interior of the corresponding grooves 1 and are fixedly connected to one end of the spring, the top of the pipe body is fixedly connected to an upper top plate, and the rotating assembly is arranged inside the upper top plate.

[0008] As a preferred solution of the utility model, the outer wall of the pipe body is symmetrically fixedly connected with connecting blocks, the interiors of the two connecting blocks are slidably connected with L-shaped rods, and the bottom ends of the two L-shaped rods extend to the outside of the corresponding connecting blocks and are fixedly connected to the top of the lower base plate.

[0009] As a preferred solution of the utility model, a clamping rod is fixedly connected to the inside of the two connecting blocks, and a groove 2 for cooperating with the clamping rod is formed on one side of the two L-shaped rods.

[0010] As a preferred solution of the utility model, a groove three is opened inside the upper top plate, and two arc-shaped sleeve plates are symmetrically fixedly connected to the inner wall of the groove three.

[0011] As a preferred solution of the utility model, the rotating assembly includes a screw, which is rotatably installed inside the groove three, and the two arc-shaped sleeves are slidably connected to the inside with an arc plate, and one side of the two arc plates is fixedly connected to the outer wall of the screw.

[0012] As a preferred solution of the utility model, the top end of the screw rod extends to the outside of the upper top plate, and the outer wall of the screw rod is threadedly connected with a nut.

[0013] The beneficial effects of the utility model are as follows: when the lower bottom plate is subjected to upward pressure, the lower bottom plate drives the connecting rod to move, and the connecting rod squeezes the spring to achieve the connection between the lower bottom plate and the pipeline body; at the same time, the lower bottom plate drives the L-shaped rod to move upward, so that the clamping rod is engaged with the second groove to prevent backflow; by rotating the screw rod, the screw rod drives the arc plate to slide, so that the arc plate is matched with the inner wall of the third groove, thereby achieving sealing of the upper top plate and preventing backflow. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] For ease of explanation, the present invention is described in detail by the following specific implementations and drawings.

[0015] Figure 1 It is a schematic diagram of the appearance of the utility model;

[0016] Figure 2 It is a schematic internal cross-sectional view of the utility model;

[0017] Figure 3 This utility model Figure 2 The enlarged view of point A in the middle;

[0018] Figure 4 It is a schematic diagram of the top structure of the upper top plate in the utility model.

[0019] In the figure: 1. lower base plate; 2. pipe body; 3. groove one; 4. spring; 5. connecting rod; 6. L-shaped rod; 7. connecting block; 8. clamping rod; 9. groove two; 10. upper top plate; 11. arc sleeve plate; 12. groove three; 13. rotating assembly; 131. screw; 132. arc plate; 133. nut. DETAILED DESCRIPTION

[0020] The technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the accompanying drawings in the embodiments of the present invention.

[0021] Example

[0022] See also Figure 1-Figure 4 The utility model provides a technical solution: a vacuum pipeline for preventing backflow of a chamber, comprising a lower bottom plate 1 and a rotating assembly 13, the top of the lower bottom plate 1 is detachably connected with a pipeline body 2, the interior of the pipeline body 2 is symmetrically provided with two grooves 3, the top of the lower bottom plate 1 is symmetrically fixedly connected with two connecting rods 5, the inner walls of the two grooves 3 are fixedly connected with springs 4, the top ends of the two connecting rods 5 extend to the interior of the corresponding grooves 3 respectively and are fixedly connected with one end of the spring 4, when the lower bottom plate 1 is subjected to upward pressure, the lower bottom plate 1 drives the connecting rods 5 to move, and the connecting rods 5 squeeze the springs 4 to realize the connection between the lower bottom plate 1 and the pipeline body 2; the top of the pipeline body 2 is fixedly connected with An upper top plate 10 and a rotating assembly 13 are arranged inside the upper top plate 10, and the outer wall of the pipe body 2 is symmetrically fixedly connected with connecting blocks 7, and the interiors of the two connecting blocks 7 are slidably connected with L-shaped rods 6, and the bottom ends of the two L-shaped rods 6 extend to the outside of the corresponding connecting blocks 7 and are fixedly connected to the top of the lower bottom plate 1, and the interiors of the two connecting blocks 7 are fixedly connected with clamping rods 8, and one side of the two L-shaped rods 6 is provided with grooves 2 9 used to cooperate with the clamping rods 8, and the L-shaped rods 6 are driven upward by the lower bottom plate 1, so that the clamping rods 8 and the grooves 2 9 are engaged to prevent backflow; a groove 3 12 is provided inside the upper top plate 10, and the inner wall of the groove 3 12 is symmetrically fixedly connected with two arc-shaped sleeve plates 11.

[0023] Furthermore, the rotating assembly 13 includes a screw 131, which is rotatably installed inside the groove three 12. The two arc-shaped sleeves 11 are slidably connected to the inside with an arc plate 132. One side of the two arc plates 132 is fixedly connected to the outer wall of the screw 131. By rotating the screw 131, the screw 131 drives the arc plate 132 to slide, so that the arc plate 132 fits with the inner wall of the groove three 12, thereby sealing the upper top plate 10 and preventing backflow; the top end of the screw 131 extends to the outside of the upper top plate 10, and the outer wall of the screw 131 is threadedly connected with a nut 133.

[0024] To sum up: when the pipeline body 2 needs to be sealed, the screw 131 is rotated, and the screw 131 drives the arc plate 132 to slide. At this time, the arc plate 132 slides out from the inside of the arc sleeve 11, so that the arc plate 132 fits with the inner wall of the groove three 12, thereby sealing the upper top plate 10 and preventing backflow. At the same time, when the lower bottom plate 1 is subjected to upward pressure, the lower bottom plate 1 drives the connecting rod 5 to move, and the connecting rod 5 squeezes the spring 4 to achieve the connection between the lower bottom plate 1 and the pipeline body 2; at the same time, the lower bottom plate 1 drives the L-shaped rod 6 to move upward, so that the clamping rod 8 is engaged with the groove two 9, further improving the connectivity between the lower bottom plate 1 and the pipeline body 2 and preventing backflow.

[0025] Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A vacuum pipe for preventing backflow of a chamber, characterized in that: The utility model comprises a lower base plate (1) and a rotating assembly (13), wherein the top of the lower base plate (1) is detachably connected to a pipe body (2), the interior of the pipe body (2) is symmetrically provided with two grooves (3), the top of the lower base plate (1) is symmetrically fixedly connected to two connecting rods (5), the inner walls of the two grooves (3) are fixedly connected to springs (4), the top ends of the two connecting rods (5) respectively extend to the interior of the corresponding grooves (3) and are fixedly connected to one end of the spring (4), the top of the pipe body (2) is fixedly connected to an upper top plate (10), and the rotating assembly (13) is arranged inside the upper top plate (10).

2. A vacuum pipe for preventing chamber backflow according to claim 1, characterized in that: The outer wall of the pipe body (2) is symmetrically fixedly connected with a connecting block (7), the interiors of the two connecting blocks (7) are slidably connected with an L-shaped rod (6), and the bottom ends of the two L-shaped rods (6) extend to the outside of the corresponding connecting block (7) and are fixedly connected to the top of the lower base plate (1).

3. A vacuum pipe for preventing chamber backflow according to claim 2, characterized in that: The insides of the two connection blocks (7) are fixedly connected with a clamping rod (8), and one side of the two L-shaped rods (6) is provided with a second groove (9) used in conjunction with the clamping rod (8).

4. The vacuum pipe for preventing chamber backflow according to claim 1, characterized in that: A groove three (12) is provided inside the upper top plate (10), and two arc-shaped sleeve plates (11) are symmetrically fixedly connected to the inner wall of the groove three (12).

5. The vacuum pipe for preventing chamber backflow according to claim 4, characterized in that: The rotating assembly (13) comprises a screw (131), wherein the screw (131) is rotatably mounted inside the groove three (12), and the insides of the two arc-shaped sleeve plates (11) are both slidably connected with arc-shaped plates (132), and one side of the two arc-shaped plates (132) is fixedly connected to the outer wall of the screw (131).

6. The vacuum pipe for preventing chamber backflow according to claim 5, characterized in that: The top end of the screw rod (131) extends to the outside of the upper top plate (10), and the outer wall of the screw rod (131) is threadedly connected with a nut (133).

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