A boron diffusion process chamber furnace door structure

Abstract

The utility model provides a furnace door structure for a boron diffusion process chamber, including a connecting assembly, wherein the connecting assembly includes an outer furnace door, a cavity, a support plate, an electric push rod, a connecting plate, a clamping rod, a quartz heat insulation bag, a fixed plate, a connecting rod, a clamping slot, a rectangular plate, a buffer spring, and a damper; the outer furnace door is provided with a cavity. The utility model moves the quartz heat insulation bag to insert the connecting rod into the cavity through a square hole. When the left end of the connecting rod contacts the left inner wall of the cavity, the electric push rod drives the corresponding connecting plate to move, and the connecting plate drives the corresponding clamping rod to clamp with the clamping slot, thereby fixing it. The operation is simple and convenient. During buffering, the fixed plate drives the quartz heat insulation bag to slide on the connecting rod and stretch or compress the buffer spring. Through the setting of the buffer spring, a buffering effect is played. At the same time, through the setting of multiple dampers, the anti-seismic buffering performance is concentrated, which can reduce shaking, improve stability, and improve the buffering effect.

Description

Technical Field

[0001] The utility model relates to the technical field of photovoltaic cell manufacturing, in particular to a boron diffusion process chamber furnace door structure. Background Art

[0002] Solar photovoltaic cells are a new type of clean energy cell that converts sunlight directly into electrical energy. Currently, silicon photovoltaic cells based on silicon are commonly used, including single-crystal silicon, polycrystalline silicon and amorphous silicon photovoltaic cells. In the preparation process of solar photovoltaic cells, silicon wafers need to go through processes such as texturing, diffusion, etching, coating and printing in sequence. In the preparation process of photovoltaic cells, the boron diffusion furnace is a commonly used process furnace for the reaction;

[0003] The known authorized invention (publication number: CN218915921U) discloses a furnace door structure for a boron diffusion process chamber, including an outer furnace door, a connecting plate and a quartz insulation bag, wherein the outer furnace door is correspondingly located on the outside of the furnace cavity pipe mouth, the connecting plate and the quartz insulation bag are located on the inside of the outer furnace door, the connecting plate and the quartz insulation bag are fixedly connected, and the outer furnace door and the connecting plate are elastically and movably connected via a buffer assembly. The utility model connects the connecting plate and the quartz insulation bag into a whole, and realizes a flexible connection with the outer furnace door via a buffer assembly, which effectively protects the quartz insulation bag and prevents the quartz insulation bag from being broken and damaged. A protective layer is provided on one side surface corresponding to the outer furnace door and the furnace cavity pipe mouth through a spraying process, which effectively isolates the process gas from contacting the outer furnace door and avoids contamination of the process chamber by the outer furnace door;

[0004] When the device is in use, the connecting plate and the quartz insulation package are connected into a whole, and a flexible connection is achieved between the device and the outer furnace door through the buffer component, which effectively protects the quartz insulation package and prevents the quartz insulation package from being broken and damaged. However, when installing the current furnace door structure, it is necessary to connect the connecting plate to the outer furnace door through multiple bolts. This process is relatively cumbersome, which not only increases the installation time and cost, but also may affect the sealing and stability of the furnace door to a certain extent. In addition, although the buffer component plays a certain role in reducing impact and vibration, it is not used in conjunction with the damper. Therefore, when facing strong vibration or impact, its buffering effect is limited. For this reason, a boron diffusion process chamber furnace door structure is proposed. Utility Model Content

[0005] In view of this, the utility model provides a boron diffusion process chamber furnace door structure to solve or alleviate the technical problems existing in the prior art and at least provide a beneficial option.

[0006] The technical solution of the embodiment of the utility model is implemented as follows: a boron diffusion process chamber furnace door structure, including a connecting assembly, the connecting assembly including an outer furnace door, a cavity, a support plate, an electric push rod, a connecting plate, a clamping rod, a quartz insulation bag, a fixing plate, a connecting rod, a clamping slot, a rectangular plate, a buffer spring, and a damper;

[0007] A cavity is provided on the outer furnace door, and a support plate is welded between the inner walls on both sides of the cavity, and electric push rods are fixedly connected to both sides of the support plate, and the output shaft of the electric push rod is fixedly connected to a connecting plate, and one side of the connecting plate is fixedly connected to a clamping rod, and the right side of the outer furnace door is movably in contact with a quartz insulation bag, and a fixing plate is fixedly connected to the inner wall of the quartz insulation bag, and two connecting rods are arranged on the fixing plate, and a clamping groove is provided on one side of the connecting rod, and the clamping groove is clamped with the corresponding clamping rod, and the ends of the two connecting rods are fixedly connected to the same rectangular plate, and a plurality of buffer springs are fixedly connected between one side of the rectangular plate and one side of the fixing plate, and four dampers are fixedly connected to one side of the rectangular plate, and the output end of the damper is fixedly connected to one side of the fixing plate.

[0008] Further preferably, two square holes are provided on the right inner wall of the cavity, and the inner walls of the square holes are not in contact with the outer sides of the corresponding connecting rods.

[0009] Further preferably, a first circular groove is provided on the right side of the outer furnace door, and an inner wall of the first circular groove is in movably contact with the outer side of the quartz insulation package.

[0010] Further preferably, a second circular groove is opened on the right side of the outer furnace door, and a sealing ring is fixedly connected to the inner wall of the second circular groove.

[0011] Further preferably, two limit rods are fixedly connected to one side of the support plate, a sliding rod is slidably connected to the limit rod, and an end of the sliding rod is fixedly connected to the other side of the corresponding connecting plate.

[0012] Further preferably, a control switch is fixedly connected to the left side of the outer furnace door, and the control switch is electrically connected to the electric push rod through a conductive line.

[0013] Further preferably, the fixing plate is provided with two positioning holes, and the fixing plate is slidably connected to the corresponding connecting rods through the positioning holes.

[0014] Further preferably, a limiting hole is provided on the sliding rod, and the sliding rod is slidably connected to the corresponding limiting rod through the limiting hole.

[0015] The embodiment of the utility model has the following advantages due to the adoption of the above technical solution:

[0016] The utility model moves the quartz heat insulation bag to insert the connecting rod into the cavity through the square hole. When the left end of the connecting rod contacts the left inner wall of the cavity, the electric push rod drives the corresponding connecting plate to move, and the connecting plate drives the corresponding clamping rod to be clamped with the clamping groove, so as to fix it. The operation is simple and convenient. During buffering, the fixing plate drives the quartz heat insulation bag to slide on the connecting rod and stretch or compress the buffer spring. The buffer spring is provided to play a buffering role. At the same time, the provision of multiple dampers concentrates the anti-seismic buffering performance, which can reduce shaking, improve stability performance, and improve buffering effect.

[0017] The above summary is for the purpose of description only and is not intended to be limiting in any way. In addition to the illustrative aspects, embodiments and features described above, further aspects, embodiments and features of the utility model will be readily apparent by reference to the accompanying drawings and the following detailed description. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the drawings required for use in the embodiments or technical descriptions will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0019] Figure 1 It is a three-dimensional structural diagram of the utility model;

[0020] Figure 2 This is a cutaway three-dimensional structural diagram of the outer furnace door of the utility model;

[0021] Figure 3 It is a three-dimensional structural diagram of the outer furnace door and the sealing ring of the utility model;

[0022] Figure 4 It is a partial three-dimensional structural diagram of the utility model;

[0023] Figure 5 It is a three-dimensional structural diagram of the fixed plate, buffer spring, damper and connecting rod of the utility model.

[0024] Figure numerals: 1. connecting assembly; 2. outer furnace door; 3. cavity; 4. support plate; 5. electric push rod; 6. connecting plate; 7. clamping rod; 8. quartz insulation bag; 9. fixing plate; 10. connecting rod; 11. clamping groove; 12. rectangular plate; 13. buffer spring; 14. damper; 15. square hole; 16. first circular groove; 17. second circular groove; 18. sealing ring; 19. limit rod; 20. sliding rod; 21. control switch. DETAILED DESCRIPTION

[0025] In the following, only some exemplary embodiments are briefly described. As those skilled in the art will appreciate, the described embodiments may be modified in various ways without departing from the spirit or scope of the present invention. Therefore, the drawings and descriptions are considered to be exemplary and non-restrictive in nature.

[0026] The embodiments of the present utility model are described in detail below with reference to the accompanying drawings.

[0027] like Figure 1-5 As shown, the embodiment of the utility model provides a boron diffusion process chamber furnace door structure, including a connecting assembly 1, the connecting assembly 1 includes an outer furnace door 2, a cavity 3, a support plate 4, an electric push rod 5, a connecting plate 6, a clamping rod 7, a quartz insulation bag 8, a fixing plate 9, a connecting rod 10, a clamping groove 11, a rectangular plate 12, a buffer spring 13, and a damper 14;

[0028] A cavity 3 is provided on the outer furnace door 2, and a support plate 4 is welded between the inner walls on both sides of the cavity 3. Electric push rods 5 are fixedly connected to both sides of the support plate 4. The output shaft of the electric push rod 5 is fixedly connected to a connecting plate 6, and a clamping rod 7 is fixedly connected to one side of the connecting plate 6. A quartz insulation bag 8 is movably contacted on the right side of the outer furnace door 2, and a fixing plate 9 is fixedly connected to the inner wall of the quartz insulation bag 8. Two connecting rods 10 are provided on the fixing plate 9, and a clamping groove 11 is provided on one side of the connecting rod 10. The clamping groove 11 is clamped with the corresponding clamping rod 7. The ends of the two connecting rods 10 are fixedly connected to the same rectangular plate 12, and a plurality of buffer springs 13 are fixedly connected between one side of the rectangular plate 12 and one side of the fixing plate 9. Four dampers 14 are fixedly connected to one side of the rectangular plate 12, and the output end of the damper 14 is connected to the fixing plate 9. One side is fixedly connected, and the quartz insulation bag 8 is moved to insert the connecting rod 10 into the cavity 3 through the square hole 15. When the left end of the connecting rod 10 contacts the left inner wall of the cavity 3, the electric push rod 5 is started by controlling the switch 21. The electric push rod 5 drives the corresponding connecting plate 6 to move, and the connecting plate 6 drives the corresponding sliding rod 20 to slide on the limit rod 19. The connecting plate 6 drives the corresponding clamping rod 7 to be clamped with the clamping groove 11, so as to fix it. The operation is simple and convenient. During buffering, the fixed plate 9 drives the quartz insulation bag 8 to slide on the connecting rod 10 and stretch or compress the buffer spring 13. Through the setting of the buffer spring 13, a buffering effect is played. At the same time, through the setting of multiple dampers 14, the seismic buffering performance is concentrated, which can reduce shaking, improve stability performance, and improve buffering effect.

[0029] In one embodiment, two square holes 15 are provided on the right inner wall of the cavity 3, and the inner walls of the square holes 15 are not in contact with the outer sides of the corresponding connecting rods 10. The setting of the connecting rods 10 plays a connecting role.

[0030] In one embodiment, a first circular groove 16 is provided on the right side of the outer furnace door 2 , and the inner wall of the first circular groove 16 is in active contact with the outer side of the quartz insulation bag 8 .

[0031] In one embodiment, a second circular groove 17 is formed on the right side of the outer furnace door 2, and a sealing ring 18 is fixedly connected to the inner wall of the second circular groove 17. The sealing ring 18 plays a sealing role.

[0032] In one embodiment, two limiting rods 19 are fixedly connected to one side of the support plate 4 , a sliding rod 20 is slidably connected to the limiting rod 19 , and an end of the sliding rod 20 is fixedly connected to the other side of the corresponding connecting plate 6 .

[0033] In one embodiment, a control switch 21 is fixedly connected to the left side of the outer furnace door 2. The control switch 21 is electrically connected to the electric push rod 5 through a conductive line. The setting of the electric push rod 5 realizes automation.

[0034] In one embodiment, two positioning holes are provided on the fixing plate 9, and the fixing plate 9 is slidably connected to the corresponding connecting rods 10 through the positioning holes. The setting of the fixing plate 9 plays a connecting role.

[0035] In one embodiment, a limiting hole is provided on the slide bar 20, and the slide bar 20 is slidably connected to the corresponding limiting rod 19 through the limiting hole. The setting of the limiting rod 19 plays a limiting role.

[0036] When the utility model is working: when in use, the outer furnace door 2 and the quartz insulation bag 8 are in a separated state. When installing, the quartz insulation bag 8 is moved to insert the connecting rod 10 into the cavity 3 through the square hole 15. When the left end of the connecting rod 10 contacts the left inner wall of the cavity 3, the electric push rod 5 is started by controlling the switch 21. The electric push rod 5 drives the corresponding connecting plate 6 to move, and the connecting plate 6 drives the corresponding sliding rod 20 to slide on the limit rod 19. The connecting plate 6 drives the corresponding clamping rod 7 to be clamped with the clamping groove 11, so as to fix it. The operation is simple and convenient. During buffering, the fixing plate 9 drives the quartz insulation bag 8 to slide on the connecting rod 10 and stretches or compresses the buffer spring 13. Through the setting of the buffer spring 13, a buffering effect is played. At the same time, through the setting of multiple dampers 14, the seismic buffering performance is concentrated, which can reduce shaking, improve stability performance, and improve buffering effect.

[0037] The above is only a specific implementation of the utility model, but the protection scope of the utility model is not limited thereto. Any technician familiar with the technical field can easily think of various changes or substitutions within the technical scope disclosed by the utility model, which should be included in the protection scope of the utility model. Therefore, the protection scope of the utility model should be based on the protection scope of the claims.

Claims

1. A boron diffusion process chamber furnace door structure, comprising a connection assembly (1), characterized in that: The connecting assembly (1) comprises an outer furnace door (2), a cavity (3), a support plate (4), an electric push rod (5), a connecting plate (6), a clamping rod (7), a quartz heat insulation bag (8), a fixing plate (9), a connecting rod (10), a clamping groove (11), a rectangular plate (12), a buffer spring (13), and a damper (14); The outer furnace door (2) is provided with a cavity (3), a support plate (4) is welded between the inner walls on both sides of the cavity (3), electric push rods (5) are fixedly connected to both sides of the support plate (4), the output shaft of the electric push rod (5) is fixedly connected to a connecting plate (6), one side of the connecting plate (6) is fixedly connected to a clamping rod (7), the right side of the outer furnace door (2) is movably in contact with a quartz heat insulation bag (8), the inner wall of the quartz heat insulation bag (8) is fixedly connected to a fixing plate (9), and the fixing plate (9) is provided with two A connecting rod (10) is provided with a slot (11) on one side of the connecting rod (10), the slot (11) is clamped with a corresponding clamping rod (7), the ends of the two connecting rods (10) are fixedly connected to the same rectangular plate (12), a plurality of buffer springs (13) are fixedly connected between one side of the rectangular plate (12) and one side of a fixed plate (9), four dampers (14) are fixedly connected to one side of the rectangular plate (12), and the output end of the damper (14) is fixedly connected to one side of the fixed plate (9).

2. The boron diffusion process chamber furnace door structure according to claim 1, characterized in that: Two square holes (15) are provided on the right inner wall of the cavity (3), and the inner walls of the square holes (15) do not contact the outer sides of the corresponding connecting rods (10).

3. The boron diffusion process chamber furnace door structure according to claim 1, characterized in that: A first circular groove (16) is provided on the right side of the outer furnace door (2), and the inner wall of the first circular groove (16) is in active contact with the outer side of the quartz heat insulation bag (8).

4. The boron diffusion process chamber furnace door structure according to claim 1, characterized in that: A second circular groove (17) is provided on the right side of the outer furnace door (2), and a sealing ring (18) is fixedly connected to the inner wall of the second circular groove (17).

5. The boron diffusion process chamber furnace door structure according to claim 1, characterized in that: Two limiting rods (19) are fixedly connected to one side of the support plate (4), a sliding rod (20) is slidably connected to the limiting rod (19), and an end of the sliding rod (20) is fixedly connected to the other side of the corresponding connecting plate (6).

6. The boron diffusion process chamber furnace door structure according to claim 1, characterized in that: A control switch (21) is fixedly connected to the left side of the outer furnace door (2), and the control switch (21) is electrically connected to the electric push rod (5) through a conductive line.

7. The boron diffusion process chamber furnace door structure according to claim 1, characterized in that: The fixing plate (9) is provided with two positioning holes, and the fixing plate (9) is slidably connected to the corresponding connecting rods (10) via the positioning holes.

8. The boron diffusion process chamber furnace door structure according to claim 5, characterized in that: The sliding rod (20) is provided with a limiting hole, and the sliding rod (20) is slidably connected to the corresponding limiting rod (19) through the limiting hole.

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