Exhaust mechanism and processing equipment

Abstract

The present application provides an exhaust mechanism and processing equipment, the exhaust mechanism is applied to a reactor, the reactor includes a tail exhaust sleeve, the exhaust mechanism includes: an exhaust pipe, the exhaust pipe includes an outer pipe and an inner pipe, the inner pipe is arranged on the inner side of the outer pipe, the outer pipe and the inner pipe are used to enter the reactor through the tail exhaust sleeve, and the inner pipe is used to communicate with the reactor; multiple seals, some of which are sleeved on the outer pipe, and the remaining seals are sleeved on the tail exhaust sleeve; a connecting component, the connecting component is sleeved on the outer pipe and is used to be sleeved on the tail exhaust sleeve, and the connecting component abuts against multiple seals so that each seal fits the outer pipe or the tail exhaust sleeve. Through the exhaust mechanism and processing equipment provided by the embodiment of the present application, when the exhaust gas components attached to the inner wall of the inner pipe expand and cause the inner pipe to rupture, the inner wall of the outer pipe corresponding to the position of the inner pipe rupture can cooperate to form the inner wall of the exhaust gas discharge channel, so that the exhaust pipe can continue to realize the transmission of exhaust gas. The service life of the exhaust mechanism can be improved.

Description

Technical Field

[0001] The present application relates to the technical field of photovoltaic and semiconductor processing, and in particular to an exhaust mechanism and processing equipment. Background Art

[0002] In the production process of photovoltaic and semiconductor products, some sheet materials need to be treated at high temperature in the reactor. When the sheet materials are subjected to low-pressure boron diffusion treatment, waste gas containing boron oxide will be generated in the reactor, and the waste gas can be discharged from the reactor through the tail pipe connected to the reactor. However, during the discharge process, the waste gas will cool down due to leaving the high temperature environment of the reactor, causing part of the boron oxide to condense on the inner wall of the tail pipe. When the expansion coefficient of boron oxide after heating is greater than the expansion coefficient of the tail pipe material after heating, after multiple high-temperature treatments in the reactor cause the tail pipe to experience multiple temperature increases, the expansion of boron oxide will cause the tail pipe to rupture, which leads to the defect of poor service life of the tail pipe. Utility Model Content

[0003] In view of the above, it is necessary to provide an exhaust mechanism and processing equipment to solve the above defects.

[0004] In a first aspect, an embodiment of the present application provides an exhaust mechanism, which is applied to a reactor, wherein the reactor includes a tail exhaust sleeve, and the exhaust mechanism includes: an exhaust pipe, wherein the exhaust pipe includes an outer pipe and an inner pipe, the inner pipe is arranged on the inner side of the outer pipe, the outer pipe and the inner pipe are used to enter the reactor through the tail exhaust sleeve, and the inner pipe is used to communicate with the reactor; a plurality of seals, wherein some of the seals are sleeved on the outer pipe, and the remaining seals are sleeved on the tail exhaust sleeve; a connecting assembly, which is sleeved on the outer pipe and used to be sleeved on the tail exhaust sleeve, and the connecting assembly abuts against the plurality of seals so that each seal fits the outer pipe or the tail exhaust sleeve.

[0005] Optionally, the connecting assembly includes: a connecting ring, which is sleeved on the exhaust pipe and used to be sleeved on the tail exhaust sleeve; a first end cover, which is sleeved on the exhaust pipe and detachably connected to the connecting ring; and a second end cover, which is used to be sleeved on the tail exhaust sleeve and is detachably connected to the connecting ring.

[0006] Optionally, a first receiving groove is opened on the inner side of the first end cover, and the first receiving groove is used to receive part of the structure of the connecting ring, so that the first end cover is sleeved on the connecting ring; part of the sealing component is located in the first receiving groove; the connecting assembly also includes a first pressure ring, the first pressure ring is located in the first receiving groove, and is sleeved on the outer tube, the first pressure ring is used to abut against the inner wall of the first receiving groove, and the first pressure ring is used to cooperate with the connecting ring to clamp the corresponding sealing component.

[0007] Optionally, a second receiving groove is opened on the inner side of the second end cover, and the second receiving groove is used to receive part of the structure of the connecting ring, so that the second end cover is sleeved on the connecting ring; part of the sealing component is located in the second receiving groove; the connecting assembly also includes a second pressure ring, the second pressure ring is located in the second receiving groove, and is used to be sleeved on the tail row sleeve, the second pressure ring is used to abut against the inner wall of the second receiving groove, and the second pressure ring is used to cooperate with the connecting ring to clamp the corresponding seal.

[0008] Optionally, notches are provided at both ends of the connecting ring, and the notches are used to accommodate corresponding seals. The inner wall of each notch abuts against the corresponding seal and is used to cooperate with the outer tube or the tail row sleeve to clamp the seal.

[0009] Optionally, an abutment surface is provided on the inner wall of each notch, and the abutment surface is an inclined surface or an arc surface, and each abutment surface abuts against a corresponding sealing member to press the sealing member onto the outer tube or the tail row sleeve.

[0010] Optionally, the outer tube includes: a first tube body, the first tube body is used to enter the reactor through the tail exhaust sleeve; a first sealing sleeve, the first sealing sleeve is protruding on the outside of the first tube body and surrounds the first tube body, at least one sealing member is sleeved on the first sealing sleeve and abuts against the connecting ring, and the connecting ring and the first sealing sleeve clamp the corresponding sealing member.

[0011] Optionally, the connecting ring includes: a connecting portion, which is detachably connected to the first end cover and the second end cover; an abutting portion, which is protruding on the inner side of the connecting portion, one end of the abutting portion is used to abut with the first sealing sleeve, and the other end is used to abut with the second sealing sleeve, wherein the tail row sleeve includes a second tube body and a second sealing sleeve, and the second sealing sleeve is protruding on the outer side of the second tube body.

[0012] In a second aspect, an embodiment of the present application provides a processing equipment, including: a reactor, the reactor including a furnace body and a tail exhaust sleeve, the tail exhaust sleeve is connected to and communicated with the furnace body; an exhaust mechanism such as any of the above items, the exhaust mechanism is connected to the tail exhaust sleeve, and is communicated with the reactor through the tail exhaust sleeve.

[0013] Optionally, the tail exhaust sleeve includes: a second tube body, part of the exhaust pipe structure of the exhaust mechanism extends into the second tube body; a second sealing sleeve, the second sealing sleeve is convexly arranged on the outside of the second tube body, and the connecting component of the exhaust mechanism is sleeved on the outside of the second tube body.

[0014] Through the exhaust mechanism and processing equipment provided by the present application, when the temperature in the reactor rises and exhaust gas is discharged, some components in the exhaust gas (such as boron oxide) will adhere to the inner wall of the inner tube. After multiple cooling and heating in the reactor, the expansion of the exhaust gas components (such as boron oxide) attached to the inner wall of the inner tube will cause the inner tube to rupture, and the outer tube can block the debris and flowing exhaust gas generated by the rupture of the inner tube from leaking from the outer wall of the exhaust pipe, and the inner wall of the outer tube corresponding to the position of the rupture of the inner tube can cooperate to form the inner wall of the exhaust gas emission channel, so that the exhaust pipe can continue to realize the transmission of exhaust gas. In this way, the service life of the exhaust mechanism can be improved and the frequency of replacement of the exhaust mechanism due to pipeline rupture can be reduced. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] Figure 1 It is a structural schematic diagram of the processing equipment in the embodiment of the present application.

[0016] Figure 2 It is a cross-sectional view of the processing equipment in the embodiment of the present application.

[0017] Figure 3 yes Figure 1 Schematic diagram of the structure of the middle and tail exhaust sleeve and exhaust mechanism.

[0018] Figure 4 yes Figure 2 Cross-sectional view of the mid-tail exhaust sleeve and exhaust mechanism.

[0019] Figure 5 yes Figure 3 Structural disassembly diagram of the middle and tail exhaust sleeve and exhaust mechanism.

[0020] Figure 6 yes Figure 4 Structural disassembly diagram of the middle and tail exhaust sleeve and exhaust mechanism.

[0021] Main component symbols

[0022] Processing equipment 100

[0023] Reactor 101

[0024] Exhaust mechanism 102

[0025] Furnace body 10

[0026] Reaction Space 11

[0027] Tail exhaust casing 20

[0028] Second tube body 21

[0029] Second sealing sleeve 22

[0030] Second Space 221

[0031] Exhaust pipe 30

[0032] Outer tube 31

[0033] First tube body 311

[0034] First sealing sleeve 312

[0035] First Space 313

[0036] The third sealing sleeve 314

[0037] Inner tube 32

[0038] Connecting components 40

[0039] Connecting ring 41

[0040] Connection part 411

[0041] Contact portion 412

[0042] Gap 413

[0043] Abutment surface 414

[0044] First end cover 42

[0045] The first receiving groove 421

[0046] Second end cover 43

[0047] The second receiving groove 431

[0048] First pressure ring 44

[0049] Second pressure ring 45

[0050] Seal 50 DETAILED DESCRIPTION

[0051] The technical solutions in the embodiments of the present application will be described clearly and completely below in conjunction with the drawings in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, rather than all of the embodiments.

[0052] In the present application, the term "plurality" refers to two or more. In addition, it should be understood that in the description of the present application, the terms "first", "second", etc. are only used for the purpose of distinguishing descriptions, and cannot be understood as indicating or implying relative importance, nor can they be understood as indicating or implying an order.

[0053] In the description of the embodiments of the present application, words such as "exemplary" or "for example" are used to indicate examples, illustrations or descriptions. Any embodiment or design described as "exemplary" or "for example" in the embodiments of the present application should not be interpreted as being more preferred or more advantageous than other embodiments or designs. Specifically, the use of words such as "exemplary" or "for example" is intended to present related concepts in a specific way.

[0054] See also Figure 1 and Figure 2 , Figure 1 and Figure 2 A processing device 100 provided by an embodiment of the present application is shown. The processing device 100 can accommodate sheet materials and a carrier loaded with a plurality of sheet materials, and process the plurality of sheet materials by heating the plurality of sheet materials.

[0055] In the embodiments of the present application, the type of sheet material is not specifically limited. For example, the sheet material may be a silicon sheet or a silicon carbide sheet used in photovoltaic products. For another example, the sheet material may be a wafer used in semiconductor products.

[0056] In the embodiment of the present application, the principle of heating the sheet material by the processing device 100 is not specifically limited. For example, the processing device 100 can heat the sheet material by the heating principle of electric heating wire or the principle of magnetoelectric heating.

[0057] In the embodiment of the present application, there is no specific limitation on the processing technology of the sheet material by the processing equipment 100. For example, the processing equipment 100 can perform a low-pressure boron diffusion process on the sheet material.

[0058] like Figure 1 As shown, in an embodiment of the present application, the processing equipment 100 may include a reaction furnace 101, an exhaust mechanism 102 and an exhaust device (not shown). The reaction furnace 101 may include a furnace body 10 and a tail exhaust sleeve 20. A reaction space 11 exists in the furnace body 10. The reaction space 11 can accommodate a carrier loaded with a plurality of sheet materials, and the plurality of sheet materials can be processed in the reaction space 11. A tail exhaust sleeve 20 is extended and welded to one end of the furnace body 10. The tail exhaust sleeve 20 is connected to the reaction space 11.

[0059] Please also read Figure 3 and Figure 4, the exhaust mechanism 102 may include an exhaust pipe 30, a connecting assembly 40 and a plurality of seals 50. Part of the structure of the exhaust pipe 30 may extend into the tail exhaust sleeve 20 and enter the reaction space 11 through the tail exhaust sleeve 20. Part of the seals 50 may be sleeved on the tail exhaust sleeve 20, and the remaining seals 50 may be sleeved on the exhaust pipe 30. The connecting assembly 40 may be connected to the tail exhaust sleeve 20 and the exhaust pipe 30, and abut against the plurality of seals 50 to achieve sealing of the tail exhaust sleeve 20 and the exhaust pipe 30 by the plurality of seals 50. The exhaust pipe 30 may be connected to an exhaust device, and the exhaust device may exhaust the reaction space 11 through the exhaust pipe 30 to extract the waste gas generated after the sheet material is processed from the reaction space 11.

[0060] It can be understood that the inner diameter of the tail exhaust sleeve 20 can be larger than the outer diameter of the structure on the exhaust pipe 30 for entering the reaction space 11 .

[0061] It can be understood that the sealing member 50 is a part with elastic deformation capability. In the embodiment of the present application, there is no specific limitation on the material of the sealing member 50. For example, the material of the sealing member 50 can be, but is not limited to, rubber, silicone, fluororubber, etc.

[0062] In some embodiments, the exhaust pipe 30 may include an outer tube 31 and an inner tube 32. The outer tube 31 may include a first tube body 311 and a first sealing sleeve 312. The outer diameter of the first tube body 311 is smaller than the inner diameter of the tail exhaust sleeve 20. The first tube body 311 and the inner tube 32 are both straight tubes, and the inner diameter of the first tube body 311 is equal to or greater than the outer diameter of the inner tube 32. The inner tube 32 is located inside the first tube body 311 and is fixedly connected to the first tube body 311. The first sealing sleeve 312 is convexly arranged outside the first tube body 311, and the outer diameter of the first sealing sleeve 312 is greater than the inner diameter of the tail exhaust sleeve 20. A first space 313 may be opened in the first sealing sleeve 312, and the first space 313 is located between the outer side wall of the first tube body 311 and the side of the first sealing sleeve 312 facing away from the first tube body 311.

[0063] In the embodiment of the present application, there is no specific limitation on the material of the exhaust pipe 30. For example, the material of the exhaust pipe 30 may be, but is not limited to, quartz.

[0064] In the embodiment of the present application, there is no specific limitation on the location of the first space 313. Figure 3 As shown, the first space 313 may be opened at one end of the first sealing sleeve 312 in the length direction, and penetrates one end of the first sealing sleeve 312 along the length direction of the outer tube 31 .

[0065] It can be understood that a plurality of support members can be fixedly connected to the first sealing sleeve 312 , the plurality of support members can be spaced apart in a direction surrounding the first sealing sleeve 312 , and each support member can be fixedly connected to the outer side of the first tube body 311 and the inner wall of the first space 313 .

[0066] In the embodiments of the present application, there is no specific limitation on the fixing method during the fixed connection. For example, the fixing method may include, but is not limited to, welding fixing, bolt fixing, etc.

[0067] Exemplarily, two ends of the inner tube 32 in the length direction may be respectively welded and fixed to two ends of the first tube body 311 in the length direction.

[0068] It can be understood that when the low-pressure boron diffusion process is performed in the reaction space 11 , the exhaust device can extract the waste gas generated by the process from the reaction space 11 through the exhaust pipe 30 , and the gas in the reaction space 11 can be discharged from the reaction space 11 through the inner tube 32 .

[0069] The exhaust gas components generated by the low-pressure boron diffusion process may include boron oxide, which can flow into the inner tube 32 under the drive of the exhaust device when the reaction space 11 is at a high temperature (for example, the temperature is higher than 450 degrees Celsius). Part of the boron oxide that enters the inner tube 32 will cool down during the flow process because the temperature in the inner tube 32 is lower than the temperature of the reaction space 11, and adhere to the inner wall of the inner tube 32. After the reaction in the reaction space 11 is completed, the temperature of the reaction space 11 decreases, and the temperature of the gas passing through the inner tube 32 decreases. When the low-pressure boron diffusion process is performed again in the reaction space 11, the temperature of the reaction space 11 rises, and the temperature of the gas entering the inner tube 32 rises, causing the inner wall of the inner tube 32 and the boron oxide attached to the inner tube 32 to heat up. Since the thermal expansion coefficient of boron oxide is greater than the thermal expansion coefficient of the material of the inner tube 32 (such as quartz), after multiple process treatments are performed in the reaction space 11, the expansion of the boron oxide attached to the inner wall of the inner tube 32 will cause the inner tube 32 to rupture, and the first tube body 311 can block the debris and flowing exhaust gas generated by the rupture of the inner tube 32 from leaking from the outer wall of the exhaust pipe 30, and the inner wall of the first tube body 311 and the inner wall of the corresponding position of the rupture position of the inner tube 32 can cooperate to form the inner wall of the exhaust gas discharge channel, so that the exhaust pipe 30 can continue to realize the transmission of the exhaust gas containing boron oxide. In this way, the service life of the exhaust mechanism 102 can be improved, and the frequency of replacement of the exhaust mechanism 102 due to pipeline rupture can be reduced.

[0070] In some embodiments, the tail exhaust sleeve 20 may include a second tube body 21 and a second sealing sleeve 22. The second tube body 21 is a straight tube. The second tube body 21 is integrally fixedly connected to the furnace body 10, and the inner diameter of the second tube body 21 is larger than the outer diameter of the first tube body 311, and smaller than the outer diameter of the first sealing sleeve 312. The second sealing sleeve 22 is convexly arranged on the tail exhaust sleeve 20. The connecting assembly 40 can cooperate with the first sealing sleeve 312 and the second sealing sleeve 22 to extrude a plurality of sealing members 50 to achieve sealing between the exhaust pipe 30 and the tail exhaust sleeve 20. A second space 221 can be opened in the second sealing sleeve 22, and the second space 221 is located between the outer side wall of the second tube body 21 and the side of the second sealing sleeve 22 facing away from the second tube body 21.

[0071] In the embodiment of the present application, there is no specific limitation on the location of the second space 221. Figure 3 As shown, the second space 221 may be opened at one end of the second sealing sleeve 22 in the length direction, and penetrates one end of the second sealing sleeve 22 along the length direction of the tail row sleeve 20 .

[0072] It can be understood that multiple support members can be fixedly connected to the second sealing sleeve 22, and the structure and distribution of the multiple support members on the second sealing sleeve 22 can be the same as or similar to the structure and distribution of the multiple support members on the first sealing sleeve 312, which will not be repeated here.

[0073] It can be understood that during the process of executing the process in the reaction space 11, the temperature of the gas discharged from the reaction space 11 is relatively high (for example, higher than 450 degrees Celsius). Under the action of heat transfer, the temperature of the inner tube 32, the first tube body 311 and the second tube body 21 will rise, and the setting of the first space 313 and the second space 221 can block the transfer of heat, reduce the heat transferred from the first tube body 311 to the first sealing sleeve 312, and reduce the heat transferred from the second tube body 21 to the second sealing sleeve 22, thereby reducing the temperature of the first sealing sleeve 312 and the second sealing sleeve 22. In this way, compared with making multiple seals 50 abut against the first tube body 311 and the second tube body 21 to achieve the sealed connection between the exhaust pipe 30 and the tail exhaust sleeve 20, the scheme of making the connection assembly 40 cooperate with the first sealing sleeve 312 and the second sealing sleeve 22 to squeeze multiple seals 50 to achieve sealing can reduce the temperature of the installation position of the seal 50, reduce the influence of high temperature on the structural strength and elasticity of the seal 50, and improve the service life of the seal 50.

[0074] Please also read Figure 5 and Figure 6In some embodiments, the connection assembly 40 may include a connection ring 41, a first end cover 42, a second end cover 43, a first pressure ring 44, and a second pressure ring 45. The connection ring 41 may include a connection portion 411 and an abutment portion 412. The abutment portion 412 is convexly disposed in the middle portion of the inner side of the connection portion 411. The inner diameter of the connection portion 411 is greater than or equal to the outer diameter of the first sealing sleeve 312 and the outer diameter of the second sealing sleeve 22, and the inner diameter of the abutment portion 412 is smaller than the outer diameter of the first sealing sleeve 312 and the outer diameter of the second sealing sleeve 22. One end of the abutment portion 412 in the axial direction of the connection ring 41 may abut against the first sealing sleeve 312, and the other end may abut against the second sealing sleeve 22. The connection portion 411 is sleeved on at least a portion of the structure of the first sealing sleeve 312 and at least a portion of the structure of the second sealing sleeve 22. The connecting portion 411 is provided with notches 413 at two ends of the connecting ring 41 in the axial direction. Each notch 413 penetrates a side of the connecting portion 411 facing the first sealing sleeve 312 or the second sealing sleeve 22 .

[0075] The first end cover 42 is in the shape of a circular ring. The inner diameter of the first end cover 42 may be greater than or equal to the outer diameter of the first sealing sleeve 312. The first end cover 42 may be sleeved on the first sealing sleeve 312. The first end cover 42 may have a first receiving groove 421 on one side of the connecting ring 41 in the axial direction, and one side of the connecting portion 411 may be received in the first receiving groove 421, so that the first end cover 42 is sleeved on the connecting portion 411. The first receiving groove 421 is connected to a notch 413. The first end cover 42 is detachably connected to the connecting portion 411. The first pressure ring 44 is sleeved on the first sealing sleeve 312, and the first pressure ring 44 and part of the sealing member 50 are located in the first receiving groove 421. Part of the structure of the first pressure ring 44 may be located in a notch 413, and the corresponding sealing member 50 may be located in the same notch 413. The inner wall of the notch 413 for receiving the first pressure ring 44 in the radial direction of the connecting ring 41 can abut against the corresponding seal 50, so that the seal 50 is tightly fitted with the first sealing sleeve 312. The first pressure ring 44 can abut against the inner wall of the first receiving groove 421 in the axial direction of the first end cover 42. The inner wall of the notch 413 for receiving the first pressure ring 44 in the axial direction of the connecting ring 41 can cooperate with the first pressure ring 44 to squeeze the corresponding seal 50 to achieve sealing.

[0076] The second end cover 43 is in the shape of a circular ring. The inner diameter of the second end cover 43 may be greater than or equal to the outer diameter of the second sealing sleeve 22. The second end cover 43 may be sleeved on the second sealing sleeve 22. The second end cover 43 may have a second receiving groove 431 on one side of the connecting ring 41 in the axial direction, and one side of the connecting portion 411 may be received in the second receiving groove 431, so that the second end cover 43 is sleeved on the connecting portion 411. The second receiving groove 431 is connected to a notch 413. The second end cover 43 is detachably connected to the connecting portion 411. The second pressure ring 45 is sleeved on the second sealing sleeve 22, and the second pressure ring 45 and part of the sealing member 50 are located in the second receiving groove 431. Part of the structure of the second pressure ring 45 may be located in a notch 413, and the corresponding sealing member 50 may be located in the same notch 413. The inner wall of the notch 413 for receiving the second pressure ring 45 in the radial direction of the connecting ring 41 may abut against the corresponding sealing member 50, so that the sealing member 50 and the second sealing sleeve 22 are tightly fitted. The second pressing ring 45 can abut against the inner wall of the second receiving groove 431 in the axial direction of the second end cover 43. The inner wall of the notch 413 for receiving the second pressing ring 45 in the axial direction of the connecting ring 41 can cooperate with the second pressing ring 45 to squeeze the corresponding sealing member 50 to achieve sealing.

[0077] It can be understood that the axial direction can be the direction of the central axis of a cylinder, ring or cone-shaped object, and the radial direction can be the direction of the diameter on the circular surface of the cylinder, ring or cone-shaped object, and the axial direction of the object is perpendicular to the radial direction.

[0078] The axial directions of the first end cover 42 , the second end cover 43 and the connecting ring 41 may overlap, and all overlap with the length direction of the exhaust pipe 30 and the length direction of the tail exhaust sleeve 20 .

[0079] In the embodiment of the present application, there is no specific limitation on the number of sealing members 50 in the first receiving groove 421 and the second receiving groove 431. For example, there is one sealing member 50 in the first receiving groove 421 and one sealing member 50 in the second receiving groove 431.

[0080] In the embodiments of the present application, the detachable connection method is not specifically limited. For example, the first end cap 42 can be threadedly connected to one side of the connecting portion 411 , and the second end cap 43 can be threadedly connected to the other side of the connecting portion 411 .

[0081] It can be understood that the connecting portion 411 can be provided with external threads on both sides of the connecting ring 41 in the axial direction, and the axial direction of the threads coincides with the axial direction of the connecting ring 41. The inner wall of the first receiving groove 421 and the inner wall of the second receiving groove 431 can be provided with internal threads. The first end cover 42 and the second end cover 43 can be threadedly connected to the connecting portion 411 as nuts.

[0082] During the process of installing the first end cover 42 on the connecting portion 411, the first end cover 42 can rotate and gradually approach the tail row casing 20 in the axial direction. At the same time, the movement of the first end cover 42 can drive the first pressing ring 44 abutting against the inner wall of the first receiving groove 421 to move synchronously in the same direction. The first pressing ring 44 can cooperate with the inner wall of the corresponding notch 413 to clamp and squeeze the corresponding sealing member 50, so that the sealing member 50 undergoes elastic deformation to close the gap between the first pressing ring 44 and the first sealing sleeve 312 and the inner wall of the notch 413. In this way, the sealing of the first sealing sleeve 312 and the connecting assembly 40 can be achieved.

[0083] During the process of installing the second end cover 43 on the connecting portion 411, the second end cover 43 can rotate and gradually approach the tail exhaust sleeve 20 in the axial direction. At the same time, the movement of the second end cover 43 can drive the second pressure ring 45 abutting against the inner wall of the second receiving groove 431 to move synchronously in the same direction. The second pressure ring 45 can cooperate with the inner wall of the corresponding notch 413 to clamp and squeeze the corresponding sealing member 50, so that the sealing member 50 is elastically deformed to close the gap between the second pressure ring 45 and the second sealing sleeve 22 and the inner wall of the notch 413. In this way, the sealing of the second sealing sleeve 22 and the second component can be achieved, thereby achieving a sealed connection between the tail exhaust sleeve 20 and the exhaust pipe 30.

[0084] It can be understood that after the seal 50 is deformed, due to the self-locking function of the threaded connection, the first end cover 42 can remain relatively still with the connecting portion 411 in the absence of external force, and the second end cover 43 can remain relatively still with the connecting portion 411, thereby maintaining the sealed connection between the tail exhaust sleeve 20 and the exhaust pipe 30.

[0085] In some embodiments, each notch 413 is provided with an abutting surface 414 on the inner wall of the connecting ring 41 in the axial direction, and the abutting surface 414 is an inclined surface or an arc surface. Each abutting surface 414 abuts against the corresponding sealing member 50. One abutting surface 414 can cooperate with the first pressing ring 44 to extrude the sealing member 50 while pressing the sealing member 50 on the outer side of the first sealing sleeve 312; the other abutting surface 414 can cooperate with the second pressing ring 45 to extrude the sealing member 50 while pressing the sealing member 50 on the outer side of the second sealing sleeve 22. In this way, the pressure on the sealing member 50 in the radial direction of the connecting ring 41 can be increased while the position of the sealing member 50 is fixed, the fit between the sealing member 50 and the first sealing sleeve 312 or the second sealing sleeve 22 can be increased, the firmness of the sealing member 50 in closing the gap between the first sealing sleeve 312 and the first pressing ring 44 can be increased, and the firmness of the sealing member 50 in closing the gap between the second sealing sleeve 22 and the second pressing ring 45 can be increased.

[0086] It can be understood that the connecting portion 411 can have a first end and a second end in the axial direction of the connecting ring 41, and each abutment surface 414 can have a first end and a second end in the axial direction of the connecting ring 41, and the first end of each abutment surface 414 is an end facing the first end of the connecting portion 411, and the second end is an end facing the second end of the connecting portion 411.

[0087] At the first end of the connecting portion 411, the distance between the first end of the abutting surface 414 and the first sealing sleeve 312 in the radial direction of the connecting ring 41 is greater than the distance between the second end of the abutting surface 414 and the first sealing sleeve 312 in the radial direction of the connecting ring 41. In this way, the abutting surface 414 can press the sealing member 50 onto the first sealing sleeve 312 and the first pressing ring 44 at the same time.

[0088] At the second end of the connecting portion 411, the distance between the second end of the abutting surface 414 and the second sealing sleeve 22 in the radial direction of the connecting ring 41 is greater than the distance between the first end of the abutting surface 414 and the second sealing sleeve 22 in the radial direction of the connecting ring 41. In this way, the abutting surface 414 can press the sealing member 50 onto the second sealing sleeve 22 and the second pressing ring 45 at the same time.

[0089] It can be understood that in some cases, the connecting portion 411 can be relatively fixed with the first sealing sleeve 312 and the second sealing sleeve 22 through friction, the first end cover 42 and the first sealing sleeve 312 can be relatively fixed through friction, and the second end cover 43 and the second sealing sleeve 22 can be relatively fixed through friction.

[0090] In other cases, after the tail exhaust sleeve 20 is sealed and connected to the exhaust pipe 30, the staff can fix the connection assembly 40 to the first sealing sleeve 312 and the second sealing sleeve 22 through a locking structure such as a clamp or a fixing method such as welding.

[0091] In some embodiments, the outer tube 31 may further include a third sealing sleeve 314. The third sealing sleeve 314 is convexly disposed on the first tube body 311 and is located at an end of the first tube body 311 away from the tail exhaust sleeve 20 in the length direction. The outer diameter of the third sealing sleeve 314 is greater than the outer diameter of the first tube body 311. A spacing space may be provided in the third sealing sleeve 314, and the spacing space may be located between the outer side of the third sealing sleeve 314 and the outer side of the first tube body 311. The third sealing sleeve 314 may be connected to the air extraction device.

[0092] It can be understood that the spacing space can block heat transfer, thereby reducing the heat transferred to the third sealing sleeve 314 when the temperature of the first tube body 311 rises, and reducing the probability of affecting the airtightness or firmness of the connection between the exhaust device and the appearance after the temperature of the third sealing sleeve 314 rises.

[0093] In the processing equipment 100 provided in the embodiment of the present application, the exhaust mechanism 102 can be manually installed on the reaction furnace 101 by a worker. Figures 1 to 6 Describe the installation process of the exhaust mechanism 102:

[0094] After one end of the exhaust pipe 30 extends into the reaction space 11 through the tail exhaust sleeve 20, the staff sleeves the second end cover 43 on the exhaust pipe 30 and moves the second end cover 43 so that the second end cover 43 is sleeved on the second sealing sleeve 22; the staff then sleeves the second pressure ring 45 and the corresponding sealing member 50 on the exhaust pipe 30 and moves the second pressure ring 45 and the corresponding sealing member 50 so that the second pressure ring 45 and the corresponding sealing member 50 enter the second receiving groove 451 and the second pressure ring 45 abuts against the inner wall of the second receiving groove 451. Then the staff can rotate the second end cover 43 so that the second end cover 43 is threadedly connected to the connecting portion 411, and the second pressure ring 45 and the corresponding abutting surface 414 press the corresponding sealing member 50 to achieve a sealed connection between the connecting assembly 40 and the tail exhaust sleeve 20.

[0095] Then the staff can move the exhaust pipe 30 to increase the volume of the exhaust pipe 30 entering the reaction space 11, and make the first sealing sleeve 312 abut against the abutment portion 412. Then the staff will sleeve the first pressure ring 44 and the corresponding sealing member 50 on the exhaust pipe 30 and move the first pressure ring 44 and the corresponding sealing member 50 so that the sealing member 50 abuts against the corresponding abutment surface 414. Then the staff will sleeve the first end cover 42 on the exhaust pipe 30 and move the first end cover 42 so that the first end cover 42 is sleeved on the first sealing sleeve 312, and the first pressure ring 44 and the corresponding sealing member 50 enter the first receiving groove 421. Then the staff can rotate the first end cover 42 so that the first end cover 42 is threadedly connected to the connecting portion 411, so that the first pressure ring 44 and the corresponding abutment surface 414 press the corresponding sealing member 50 to achieve a sealed connection between the connecting assembly 40 and the exhaust pipe 30, thereby achieving a sealed connection between the exhaust pipe 30 and the tail exhaust sleeve 20.

[0096] Through the processing equipment 100 and the exhaust mechanism 102 provided by the embodiment of the present application, when the reaction space 11 is in a high temperature state (for example, higher than 450 degrees Celsius) and the waste gas generated by the process is discharged, some components in the waste gas (for example, boron oxide) will adhere to the inner wall of the inner tube 32. After multiple process treatments are performed in the reaction space 11, the expansion of the waste gas components (for example, boron oxide) attached to the inner wall of the inner tube 32 will cause the inner tube 32 to rupture, and the first tube body 311 can block the debris and flowing waste gas generated by the rupture of the inner tube 32 from leaking from the outer wall of the exhaust pipe 30, and the inner wall of the first tube body 311 and the inner wall of the corresponding position of the rupture position of the inner tube 32 can cooperate to form the inner wall of the waste gas discharge channel, so that the exhaust pipe 30 can continue to realize the transmission of waste gas. In this way, the service life of the exhaust mechanism 102 can be improved, and the frequency of replacement of the exhaust mechanism 102 due to pipeline rupture can be reduced.

[0097] It is obvious to those skilled in the art that the present application is not limited to the details of the above exemplary embodiments, and that the present application can be implemented in other specific forms without departing from the spirit or basic features of the present application. Therefore, no matter from which point of view, the above embodiments of the present application should be regarded as exemplary and non-restrictive, and the scope of the present application is defined by the attached claims rather than the above description, and therefore it is intended that all changes falling within the meaning and scope of the equivalent elements of the claims are included in the present application.

Claims

1. An exhaust mechanism, characterized in that: Applied to a reactor, the reactor includes a tail exhaust casing, and the exhaust mechanism includes: An exhaust pipe, the exhaust pipe comprises an outer pipe and an inner pipe, the inner pipe is arranged inside the outer pipe, the outer pipe and the inner pipe are used to enter the reactor through the tail exhaust casing, and the inner pipe is used to communicate with the reactor; A plurality of sealing members, some of which are sleeved on the outer tube, and the remaining sealing members are sleeved on the tail exhaust sleeve; A connecting component is sleeved on the outer tube and used for being sleeved on the tail row sleeve. The connecting component abuts against the multiple sealing members so that each of the sealing members fits the outer tube or the tail row sleeve.

2. The exhaust mechanism according to claim 1, characterized in that: The connection component comprises: A connecting ring, which is sleeved on the exhaust pipe and used to be sleeved on the tail exhaust sleeve; a first end cover, the first end cover being sleeved on the exhaust pipe and detachably connected to the connecting ring; The second end cover is used to be sleeved on the tail row sleeve, and the second end cover is detachably connected to the connecting ring.

3. The exhaust mechanism according to claim 2, characterized in that: A first receiving groove is provided on the inner side of the first end cover, and the first receiving groove is used to receive a part of the structure of the connecting ring, so that the first end cover is sleeved on the connecting ring; a part of the sealing member is located in the first receiving groove; The connecting assembly also includes a first pressure ring, which is located in the first receiving groove and sleeved on the outer tube. The first pressure ring is used to abut against the inner wall of the first receiving groove, and the first pressure ring is used to cooperate with the connecting ring to extrude the corresponding sealing member.

4. The exhaust mechanism according to claim 2, characterized in that: A second receiving groove is provided inside the second end cover, and the second receiving groove is used to receive a part of the structure of the connecting ring, so that the second end cover is sleeved on the connecting ring; part of the sealing member is located in the second receiving groove; The connecting assembly also includes a second pressure ring, which is located in the second receiving groove and is used to be sleeved on the tail row sleeve. The second pressure ring is used to abut against the inner wall of the second receiving groove, and the second pressure ring is used to cooperate with the connecting ring to extrude the corresponding sealing member.

5. The exhaust mechanism according to claim 2, characterized in that: Notches are provided at both ends of the connecting ring, and the notches are used to accommodate the corresponding sealing components. The inner wall of each notch abuts against the corresponding sealing component and is used to cooperate with the outer tube or the tail exhaust sleeve to squeeze the sealing component.

6. The exhaust mechanism according to claim 5, characterized in that: An abutment surface is provided on the inner wall of each notch, and the abutment surface is an inclined surface or an arc surface. Each abutment surface abuts against the corresponding sealing member to press the sealing member onto the outer tube or the tail row sleeve.

7. The exhaust mechanism according to claim 2, characterized in that: The outer tube comprises: A first tube body, the first tube body is used to enter the reactor through the tail exhaust casing; The first sealing sleeve is protruding from the outside of the first tube body and surrounds the first tube body. At least one sealing member is sleeved on the first sealing sleeve and abuts against the connecting ring. The connecting ring and the first sealing sleeve squeeze the corresponding sealing member.

8. The exhaust mechanism according to claim 7, characterized in that: The connecting ring comprises: A connecting portion, the connecting portion being detachably connected to the first end cover and the second end cover; The abutment portion is protruding from the inner side of the connecting portion, one end of the abutment portion is used to abut against the first sealing sleeve, and the other end is used to abut against the second sealing sleeve, wherein the tail row sleeve includes a second tube body and the second sealing sleeve, and the second sealing sleeve is protruding from the outer side of the second tube body.

9. A processing equipment, characterized in that: include: A reactor, the reactor comprising a furnace body and a tail exhaust sleeve, the tail exhaust sleeve being connected and communicated with the furnace body; The exhaust mechanism according to any one of claims 1 to 8, wherein the exhaust mechanism is connected to the tail exhaust sleeve and communicated with the reactor through the tail exhaust sleeve.

10. The processing equipment according to claim 9, characterized in that The tail exhaust casing comprises: a second tube body, into which a portion of the exhaust pipe of the exhaust mechanism extends; The second sealing sleeve is protrudingly arranged on the outside of the second tube body, and the connecting component of the exhaust mechanism is sleeved on the outside of the second tube body.

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