Wafer coating motor with water cooling function

Abstract

The utility model discloses a wafer coating motor with a water cooling function, comprising a motor body, wherein the motor body is formed with a flow channel, and the flow channel is winding on the side surface of the motor body, and a first inlet and outlet water channel and a second inlet and outlet water channel are respectively arranged in pipelines between the flow channel and the motor body, and an external coolant can flow into the flow channel through the first inlet and outlet water channel and circulate on the side surface of the motor body, and a protective shell is provided on the external sealing sleeve of the motor body, and the protective shell and the motor body are fitted together, and the side wall inside the protective shell is fitted to the side of the flow channel, and then through the cooperation between the protective shell and the motor body, the coolant flowing between the protective shell and the motor body can only circulate on the side wall of the motor body along the trajectory of the flow channel.

Description

Technical Field

[0001] The utility model relates to the field of glue-spreading motors, in particular to a wafer glue-spreading motor with a water channel cooling function. Background Art

[0002] A wafer refers to a silicon chip used to make silicon semiconductor circuits. In the wafer lithography technology, photoresist needs to be coated on the surface of the wafer. In the related technology, the wafer is coated with photoresist by placing the wafer on the top of a turntable. A clamping block is provided on the top of the turntable to limit the movement of the wafer. The bottom of the turntable is connected to a coating motor, which drives the disk to rotate and drives the wafer to rotate, and drips photoresist onto the surface of the wafer. The centrifugal force brought by the rotation makes the photoresist diffuse outward and become thinner, and finally completely covers the surface of the wafer to obtain a wafer evenly covered with a photoresist layer. However, the coating motor always keeps high-speed rotation when working, which can easily cause heating inside the coating motor. Over time, it can easily affect the service life and stability of the coating motor. For this reason, a wafer coating motor with a water cooling function is proposed. Utility Model Content

[0003] The utility model aims to overcome the above-mentioned shortcomings and provide a technical solution that can solve the above-mentioned problems.

[0004] A wafer coating motor with a water cooling function comprises a motor body, wherein the motor body is formed with a flow channel, and the flow channel is winding on the side surface of the motor body, and a first inlet and outlet water channel and a second inlet and outlet water channel are respectively arranged in pipelines between the flow channel and the motor body, through which the external coolant can flow into the flow channel and circulate on the side surface of the motor body, the external sealing sleeve of the motor body is provided with a protective shell, and the protective shell and the motor body are fitted together, and the side wall inside the protective shell is fitted to the side of the flow channel, and then through the cooperation between the protective shell and the motor body, the coolant flowing between the protective shell and the motor body can only circulate on the side wall of the motor body along the trajectory of the flow channel.

[0005] Preferably, a top seat and a base are laterally arranged at the upper and lower ends of the motor body, respectively, and the top seat and the base are sealedly connected to the upper and lower ends of the protective shell, and sealing rings are arranged at the connections between the top seat and the base and the protective shell.

[0006] Preferably, the front and rear ends of the outer side of the top seat are respectively provided with a first inlet and outlet water nozzle and a second inlet and outlet water nozzle by pipelines, and the first inlet and outlet water nozzle is connected to the first inlet and outlet water channel by pipeline, and the second inlet and outlet water nozzle is connected to the second inlet and outlet water channel by pipeline.

[0007] Preferably, the motor body includes a stator core and a rotating shaft, and the stator core is vertically located inside the motor body, the rotating shaft is vertically inserted inside the stator core, and the stator core and the rotating shaft rotate coaxially, and the upper and lower ends of the rotating shaft vertically penetrate the top seat and the base respectively.

[0008] Preferably, the connection between the top seat and the base and the rotating shaft is respectively provided with a first ball bearing and a second ball bearing, and the first ball bearing is transversely located in the middle position of the top seat, and the second ball bearing is transversely located in the middle position of the base.

[0009] Preferably, the top of the top seat is covered with a top seat mounting shell, and a rotary encoder is arranged between the top seat mounting shell and the top seat, the rotary encoder is located at one side of the top of the top seat, and a grating disk is electrically arranged on one side of the rotary encoder.

[0010] Preferably, the top seat mounting shell pipeline is provided with an air inlet nozzle, and the air inlet nozzle is vertically located at the top end of the outside of the top seat mounting shell, and a pipeline is connected between the air inlet nozzle and the rotating shaft.

[0011] Compared with the prior art, the beneficial effect of the utility model is that the external coolant can flow into the flow channel through the first inlet and outlet water channel and circulate on the external side of the motor body to dissipate the heat inside the wafer gluing motor. The heat dissipation efficiency is higher, and the temperature of the high-temperature components inside the wafer gluing motor can be effectively reduced, thereby ensuring the stability and reliability of the operation of the wafer gluing motor.

[0012] Additional aspects and advantages of the present invention will be given in part in the following description, and in part will become apparent from the following description, or will be learned through the practice of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS

[0013] In order to more clearly illustrate the embodiments of the utility model or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the utility model. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0014] Figure 1 It is a schematic diagram of the structure of a wafer coating motor with water cooling function;

[0015] Figure 2 Another structural schematic diagram of a wafer coating motor with a water cooling function;

[0016] Figure 3 It is another structural schematic diagram of a wafer coating motor with a water cooling function;

[0017] Figure 4 It is a schematic diagram of the structure of the motor body.

[0018] As shown in the figure: 1. protective shell, 2. base, 3. top seat, 4. top seat mounting shell, 5. air inlet nozzle, 6. rotating shaft, 7. first water inlet and outlet nozzle, 8. second water inlet and outlet nozzle, 9. motor body, 10. rotary encoder, 11. grating disk, 12. first ball bearing, 13. sealing ring, 14. flow channel, 15. stator core, 16. second ball bearing, 17. first water inlet and outlet, 18. second water inlet and outlet. DETAILED DESCRIPTION

[0019] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0020] See also Figure 1-4 In an embodiment of the utility model, a wafer-level glue motor with a water cooling function includes a motor body 9, wherein the motor body 9 is formed with a flow channel 14, and the flow channel 14 is meandering on the side surface of the motor body 9, and the flow channel 14 and the motor body 9 are respectively provided with a first inlet and outlet water channel 17 and a second inlet and outlet water channel 18, and then the first inlet and outlet water channel 17 and the second inlet and outlet water channel 18 allow the external coolant to flow into the flow channel 4 and flow and circulate on the side surface of the motor body 9 to dissipate the heat inside the wafer-level glue motor, with higher heat dissipation efficiency, and can effectively reduce the temperature of the high-temperature components inside the wafer-level glue motor to ensure the stability and reliability of the operation of the wafer-level glue motor, and the motor body 9 is sealed with a protective shell 1 on the outside, and the protective shell 1 and the motor body 9 are fitted together, and the side wall inside the protective shell 1 is fitted to the side of the flow channel 4, and then the protective shell 1 and the motor body 9 cooperate to make the coolant flowing between the protective shell 1 and the motor body 9 can only circulate along the trajectory of the flow channel 4 on the side wall of the motor body 9.

[0021] The upper and lower ends of the motor body 9 are laterally provided with a top seat 3 and a base 2, respectively, and the top seat 3 and the base 2 are sealedly connected to the upper and lower ends of the protective shell 1, and sealing rings 13 are respectively provided at the connections between the top seat 3 and the base 2 and the protective shell 1, so that the coolant flowing into the protective shell 1 and the motor body 9 will not leak.

[0022] The front and rear ends of the outer side of the top seat 3 are respectively provided with a first inlet and outlet water nozzle 7 and a second inlet and outlet water nozzle 8, and the first inlet and outlet water nozzle 7 is connected to the first inlet and outlet water channel 17 by a pipe, and the second inlet and outlet water nozzle 8 is connected to the second inlet and outlet water channel 18 by a pipe, so that when the first inlet and outlet water nozzle 7 is the water inlet, the external coolant continuously enters the first inlet and outlet water channel 17 through the first inlet and outlet water nozzle 7, and then the coolant is guided to the flow channel 14 through the first inlet and outlet water channel 17, and continuously flows from top to bottom inside the flow channel 14 and flows to the second inlet and outlet water channel 18 and then flows out from the second inlet and outlet water nozzle 8, and then the coolant flowing out of the second inlet and outlet water nozzle 8 is directed to the first inlet and outlet water nozzle 7 through the external water cooler, so that the coolant is circulated;

[0023] When the second water inlet and outlet nozzle 8 is the water inlet, the external coolant continuously enters the second water inlet and outlet channel 18 through the second water inlet and outlet nozzle 8, and then guides the coolant to the flow channel 14 through the second water inlet and outlet channel 18 and continuously flows from bottom to top inside the flow channel 14 and flows to the first water inlet and outlet channel 17 and then flows out from the first water inlet and outlet nozzle 7, and then passes through the external water cooler to guide the coolant flowing out of the first water inlet and outlet nozzle 7 to the second water inlet and outlet nozzle 7, thereby circulating the coolant.

[0024] The motor body 9 includes a stator core 15 and a rotating shaft 6, and the stator core 15 is vertically located inside the motor body 9, and the rotating shaft 6 is vertically inserted inside the stator core 15, and the stator core 15 and the rotating shaft 6 rotate coaxially, and the upper and lower ends of the rotating shaft 6 vertically penetrate the top seat 3 and the base 2 respectively, so that the upper and lower ends of the rotating shaft 6 rotate on the top seat 3 and the base 2.

[0025] The connection between the top seat 3 and the base 2 and the rotating shaft 6 is respectively provided with a first ball bearing 12 and a second ball bearing 16, and the first ball bearing 12 is transversely located in the middle position of the top seat 3, and the rotating shaft 6 passes through the first ball bearing 12, and the second ball bearing 16 is transversely located in the middle position of the base 2, and the rotating shaft 6 passes through the second ball bearing 16.

[0026] The top of the top seat 3 is covered with a top seat mounting shell 4, and a rotary encoder 10 is arranged between the top seat mounting shell 4 and the top seat 3, and the rotary encoder 10 is located on one side of the top of the top seat 3, and a grating disk 11 is electrically arranged on one side of the rotary encoder 10, and the rotating shaft 6 passes through the grating disk 11, and the grating disk 11 and the rotating shaft 6 rotate in the same direction, so that the grating disk 11 is driven to rotate by the rotary encoder 10 and the rotating shaft 6 is driven to rotate.

[0027] The top seat mounting shell 4 pipeline is provided with an air inlet nozzle 5, and the air inlet nozzle 5 is vertically located at the top end of the outside of the top seat mounting shell 4, and the air inlet nozzle 5 is connected to the rotating shaft 6 by a pipeline, so that external gas can enter the inside of the rotating shaft 6 through the air inlet nozzle 5.

[0028] It is obvious to those skilled in the art that the present invention is not limited to the details of the exemplary embodiments described above, and that the present invention can be implemented in other specific forms without departing from the spirit or basic features of the present invention. Therefore, no matter from which point of view, the embodiments should be regarded as exemplary and non-restrictive, and the scope of the present invention is defined by the appended claims rather than the above description, and it is intended that all changes falling within the meaning and scope of the equivalent elements of the claims are included in the present invention.

Claims

1. A wafer coating motor with water cooling function, comprising a motor body, characterized in that: The motor body is formed with a flow channel, and the flow channel is winding on the side surface of the motor body, and the first inlet and outlet water channel and the second inlet and outlet water channel are respectively arranged in the pipeline between the flow channel and the motor body, through which the external coolant can flow into the flow channel and circulate on the side surface of the motor body, the external sealing sleeve of the motor body is provided with a protective shell, and the protective shell and the motor body are fitted together, and the side wall inside the protective shell is fitted to the side of the flow channel, and then through the cooperation between the protective shell and the motor body, the coolant flowing between the protective shell and the motor body can only circulate on the side wall of the motor body along the trajectory of the flow channel.

2. The wafer coating motor with water cooling function according to claim 1, characterized in that: The upper and lower ends of the motor body are respectively provided with a top seat and a base laterally, and the top seat and the base are respectively sealed and connected with the upper and lower ends of the protective shell, and sealing rings are respectively provided at the connection between the top seat and the base and the protective shell.

3. The wafer coating motor with water cooling function according to claim 2, characterized in that: The front and rear ends of the outer side of the top seat are respectively provided with a first water inlet and outlet nozzle and a second water inlet and outlet nozzle by pipelines, and the first water inlet and outlet nozzle is connected to the first inlet and outlet water channel by pipeline, and the second water inlet and outlet nozzle is connected to the second inlet and outlet water channel by pipeline.

4. The wafer coating motor with water cooling function according to claim 1, characterized in that: The motor body includes a stator core and a rotating shaft, and the stator core is vertically located inside the motor body, the rotating shaft is vertically inserted inside the stator core, and the stator core and the rotating shaft rotate coaxially, and the upper and lower ends of the rotating shaft vertically penetrate the top seat and the base respectively.

5. The wafer coating motor with water cooling function according to claim 2, characterized in that: The connection between the top seat, the base and the rotating shaft is respectively provided with a first ball bearing and a second ball bearing, and the first ball bearing is transversely located in the middle position of the top seat, and the second ball bearing is transversely located in the middle position of the base.

6. The wafer coating motor with water cooling function according to claim 2, characterized in that: The top of the top seat is covered with a top seat mounting shell, and a rotary encoder is arranged between the top seat mounting shell and the top seat. The rotary encoder is located at one side of the top of the top seat, and a grating disk is electrically arranged on one side of the rotary encoder.

7. The wafer coating motor with water cooling function according to claim 2, characterized in that: The top seat installation shell pipeline is provided with an air inlet nozzle, and the air inlet nozzle is vertically located at the top end of the outside of the top seat installation shell, and the air inlet nozzle is connected to the rotating shaft through a pipeline.

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