A device for heating a diffusion pump using microwaves

Abstract

The utility model relates to the technical field of diffusion pumps, and discloses a device for heating a diffusion pump by using microwaves, comprising an outer shell, a partition assembly is arranged in the cavity of the outer shell, the partition assembly comprises an end cover, a column, a pressure plate and a plug body, two end covers are arranged in the cavity of the outer shell, a plurality of columns are detachably arranged between the two end covers, the top surface and the bottom surface of the outer shell are both opened, the top surface and the bottom surface of the outer shell are both provided with the same pressure plate and the plug body, the cavity of the outer shell is convenient to leak out through the detachable end cover and the column, and thus it is convenient to install and overhaul, the plug body is pressed tightly to the top end of the end cover through the pressure plate, the funnel-shaped plug body can make up the gap between the end cover and the pump shell, so that the cavity of the outer shell is in a relatively sealed environment, so as to reduce interference with the microwave source, such as steam or water infiltration, and at the same time the rubber plug body can ensure insulation between the outer shell and the pump shell, and reduce the probability of sparks during heating.

Description

Technical Field

[0001] The utility model relates to the technical field of diffusion pumps, in particular to a device for heating a diffusion pump by using microwaves. Background Art

[0002] The diffusion pump is a high vacuum obtaining device, and its working principle is mainly based on the diffusion effect of steam jet and pumped gas.

[0003] First, the electric heater (electric furnace) heats the liquid working medium in the pump cavity (oil pan) to turn it into steam. The steam is ejected at high speed through the pump core nozzle installed in the pump cavity to form a low-density, high-speed steam jet.

[0004] When the pumped gases come into contact with these high-speed steam jets, they will enter the steam jets due to diffusion, and then be carried away by the steam jets of the next stage and finally discharged by the front-stage pump. At the same time, the working steam will condense into liquid after coming into contact with the water-cooled pump wall, and then flow back to the oil pan along the pump wall and be reheated into oil vapor, thus forming a cycle.

[0005] In this way, the diffusion pump realizes the continuous extraction and discharge of the pumped gas by continuously cycling this process, thereby maintaining the high vacuum state of the system. It should be noted that the working principle of the diffusion pump is closely related to its structure, including the design and layout of the pump chamber, pump core nozzle, electric heater and other components, which will affect its working effect and performance.

[0006] The disadvantages of the resistance wire heating used in the diffusion pump mainly include two aspects: First, the low heat conversion efficiency: A major problem with resistance wire heating is its relatively low heat conversion efficiency. This means that during the heating process, a large part of the heat will be wasted in the air, and only a small part of the heat is actually used. This low efficiency will not only lead to energy waste, but may also increase the operating costs of the equipment. Second, it is easy to burn out: Since the temperature of the resistance wire will be very high during the heating process, there is a risk of burning out. Once the resistance wire burns out, it needs to be replaced or repaired, which may increase the downtime of the equipment and affect production efficiency and the service life of the equipment. In summary, the resistance wire heating used in the diffusion pump has the problems of low heat conversion efficiency and easy burning out.

[0007] To this end, we propose a device that uses microwaves to heat the diffusion pump. Utility Model Content

[0008] The utility model mainly solves the technical problems existing in the above-mentioned prior art and provides a device for heating a diffusion pump by using microwaves.

[0009] In order to achieve the above-mentioned purpose, the utility model adopts the following technical scheme: a device for heating a diffusion pump using microwaves, comprising an outer shell, the outer shell having a cavity, a microwave source installed in the cavity of the outer shell, a partition assembly provided in the cavity of the outer shell, the partition assembly comprising an end cover, a column, a pressure plate and a plug body, two end covers are arranged in the cavity of the outer shell, a number of columns are detachably arranged between the two end covers, the top and bottom surfaces of the outer shell are both opened, the top and bottom surfaces of the outer shell are both provided with the same pressure plate and plug body, the pressure plate is locked by bolts and presses the plug body to the end of the end cover.

[0010] As a preferred embodiment of the present invention, the end cover forms a circular tube structure, the microwave source is mounted on the inner wall of the outer shell, the end cover forms an annular structure, and the outer diameter of the end cover is equal to the inner diameter of the outer shell.

[0011] As a preferred embodiment of the utility model, the column forms a cylindrical structure, one end of the column is fixedly connected to the end of one of the end covers, and the other end of the column is locked with the other end cover by bolts.

[0012] As a preferred embodiment of the utility model, a threaded hole is provided on the end face of the column, and a plurality of through holes are provided on the end face of the end cover, which are higher than the threaded holes and distributed one by one. Bolts pass through the through holes and connect with the threaded holes to lock and fix the end cover and the column.

[0013] As a preferred embodiment of the utility model, the pressure plate forms an annular structure, the inner diameter of the pressure plate is equal to the inner diameter of the pressure plate, a plurality of mounting holes are opened through the top of the pressure plate, a plurality of internal threaded holes corresponding to the mounting holes are opened on the top surface of the end cover, and bolts pass through the mounting holes and are connected to the internal threaded holes to tighten the pressure plate.

[0014] As a preferred embodiment of the utility model, a plurality of elastic members are provided on the top surface of the pressure plate, and the elastic members include but are not limited to springs, and the bolts pass through the springs and are connected to the end cover.

[0015] As a preferred embodiment of the utility model, the plug body forms a funnel-shaped structure, the smaller port diameter of the plug body is smaller than the inner diameter of the end cover, and the larger port diameter of the plug body is smaller than the outer diameter of the pressure plate.

[0016] Beneficial Effects

[0017] The utility model provides a device for heating a diffusion pump using microwaves. It has the following beneficial effects:

[0018] 1. This device uses microwaves to heat a diffusion pump. Through a detachable end cover and a column, it is easy to leak out the cavity of the outer shell, which is convenient for installation and maintenance. A pressure plate and a plug body are provided. The plug body is pressed against the top of the end cover by the pressure plate. The funnel-shaped plug body can fill the gap between the end cover and the pump shell, so that the cavity of the outer shell is in a relatively sealed environment to reduce interference with the microwave source, such as steam or water infiltration. At the same time, the rubber plug body can ensure insulation between the outer shell and the pump shell, reducing the probability of sparks during heating.

[0019] 2. The device for heating a diffusion pump using microwaves can separate the two end covers by removing the bolts on the end cover wall, and then the two end covers can be taken out from the cavity of the outer shell to install the microwave source, which is easy to assemble and repair.

[0020] 3. This device utilizes microwaves to heat a diffusion pump. Through a funnel-shaped plug body, an elastic member is coordinated between a bolt and a pressure plate. The elastic member is a spring for example. The pressure plate can exert a certain pressure on the plug body. Even if there is a gap between the plug body and the pump casing, the gap can be compensated by the slope of the plug body to achieve the purpose of self-sealing, thereby improving the sealing time and stability of the outer casing chamber. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] Figure 1 This is one of the overall three-dimensional diagrams of the utility model;

[0022] Figure 2 This is the second overall stereogram of the utility model;

[0023] Figure 3 It is a three-dimensional diagram of the end cover and the column of the utility model;

[0024] Figure 4 It is a three-dimensional diagram of the plug body of the utility model.

[0025] Legend: 10, outer shell; 11, end cover; 12, column; 20, pressure plate; 21, plug body. DETAILED DESCRIPTION

[0026] A device for heating a diffusion pump using microwaves, such as Figure 1 and Figure 2 as well as Figure 3As shown, it includes an outer shell 10, the outer shell 10 has a cavity, a microwave source is installed in the cavity of the outer shell 10, a partition assembly is arranged in the cavity of the outer shell 10, and the partition assembly includes an end cover 11, a column 12, a pressure plate 20 and a plug body 21. Two end covers 11 are arranged in the cavity of the outer shell 10, and a plurality of columns 12 are detachably arranged between the two end covers 11. The top and bottom surfaces of the outer shell 10 are both opened, and the top and bottom surfaces of the outer shell 10 are both provided with the same pressure plate 20 and the plug body 21. The pressure plate 20 is locked by bolts and presses the plug body 21 to the end of the end cover 11. The end cover 11 forms a circular tube structure, and the microwave source is installed in the outer shell 11. 0, the end cover 11 forms an annular structure, the outer diameter of the end cover 11 is equal to the inner diameter of the outer shell 10, the plug body 21 forms a funnel-shaped structure, the smaller port diameter of the plug body 21 is smaller than the inner diameter of the end cover 11, and the larger port diameter of the plug body 21 is smaller than the outer diameter of the pressure plate 20. In this scheme, by setting the outer shell 10 and installing a microwave source in the cavity of the outer shell 10, the microwave source includes: a power supply device, which is arranged in the cavity of the outer shell 10; a microwave generating device, which is arranged in the cavity of the outer shell 10 and connected to the power supply device. Of course, there are other electronically controlled components, such as a control board, etc., and the specific models and specifications are not limited too much here.

[0027] The removable end cover 11 and the column 12 can facilitate the leakage of the chamber of the outer shell 10, which is convenient for installation and maintenance. A pressure plate 20 and a plug body 21 are provided, and the plug body 21 is pressed against the top of the end cover 11 by the pressure plate 20. The funnel-shaped plug body 21 can fill the gap between the end cover 11 and the pump casing, so that the chamber of the outer shell 10 is in a relatively sealed environment to reduce interference with the microwave source, such as steam or water infiltration. At the same time, the rubber plug body can ensure insulation between the outer shell 10 and the pump casing, reducing the probability of sparks during heating.

[0028] like Figure 3 As shown, the column 12 forms a cylindrical structure, one end of the column 12 is fixedly connected to the end of one of the end covers 11, and the other end face of the column 12 is locked with the other end cover 11 by bolts. A threaded hole is opened on the end face of the column 12, and a plurality of through holes are opened on the end face of the end cover 11. The through holes are higher than the threaded holes and are distributed one by one. The bolts pass through the through holes and are connected with the threaded holes to lock and fix the end cover 11 and the column 12. Specifically, by removing the bolts on the wall of the end cover 11, the two end covers 11 can be separated, and then the two end covers 11 can be taken out from the cavity of the outer shell 10 to install the microwave source, which has the characteristics of easy assembly and maintenance.

[0029] like Figure 4As shown, the pressure plate 20 forms an annular structure, and the inner diameter of the pressure plate 20 is equal to the inner diameter of the pressure plate 20. A plurality of mounting holes are opened through the top of the pressure plate 20, and a plurality of internal threaded holes corresponding to the mounting holes are opened on the top surface of the end cover 11. Bolts pass through the mounting holes and are connected with the internal threaded holes to tighten the pressure plate 20. A plurality of elastic parts are provided on the top surface of the pressure plate 20. The elastic parts include springs but are not limited to springs. The bolts pass through the springs and are connected to the end cover 11. Through the funnel-shaped plug body 21, the elastic parts between the bolts and the pressure plate 20 are matched. Taking the spring as an example of the elastic part, the pressure plate 20 can apply a certain pressure to the plug body 21. Even if there is a gap between the plug body 21 and the pump casing, the gap is compensated by the slope of the plug body 21 to achieve the purpose of self-sealing, and the sealing time and stability of the chamber of the outer casing 10 are improved.

[0030] The working principle of the utility model is as follows: the bolts on the wall of the end cover 11 are removed to separate the two end covers 11, and then the two end covers 11 can be taken out from the cavity of the outer shell 10 to install the microwave source, through the funnel-shaped plug body 21, in conjunction with the elastic member between the bolt and the pressure plate 20, the elastic member is a spring for example, the pressure plate 20 can apply a certain pressure to the plug body 21, even if there is a gap between the plug body 21 and the pump casing, the gap can be compensated by the slope of the plug body 21, so as to achieve the purpose of self-sealing, and ensure the relative sealing between the outer shell 10 and the pump casing.

[0031] The above shows and describes the basic principle and main features of the utility model and the advantages of the utility model. Those skilled in the art should understand that the utility model is not limited by the above embodiments. The above embodiments and descriptions are only for explaining the principle of the utility model. Without departing from the spirit and scope of the utility model, the utility model may have various changes and improvements, which fall within the scope of the utility model to be protected. The scope of protection of the utility model is defined by the attached claims and their equivalents.

Claims

1. A device for heating a diffusion pump using microwaves, comprising an outer shell (10), the outer shell (10) having a cavity, a microwave source being installed in the cavity of the outer shell (10), characterized in that: A partition assembly is arranged in the cavity of the outer shell (10), and the partition assembly comprises an end cover (11), a column (12), a pressure plate (20) and a plug body (21). Two end covers (11) are arranged in the cavity of the outer shell (10), and a plurality of columns (12) are detachably arranged between the two end covers (11). The top and bottom surfaces of the outer shell (10) are both opened, and the top and bottom surfaces of the outer shell (10) are both provided with the same pressure plate (20) and plug body (21). The pressure plate (20) is locked by bolts and presses the plug body (21) onto the end of the end cover (11).

2. The device for heating a diffusion pump using microwaves according to claim 1, characterized in that: The end cover (11) forms a circular tube structure, the microwave source is mounted on the inner wall surface of the outer shell (10), the end cover (11) forms an annular structure, and the outer diameter of the end cover (11) is equal to the inner diameter of the outer shell (10).

3. The device for heating a diffusion pump using microwaves according to claim 1, characterized in that: The column (12) forms a cylindrical structure, one end of the column (12) is fixedly connected to the end of one of the end covers (11), and the other end surface of the column (12) is locked with the other end cover (11) by means of bolts.

4. The device for heating a diffusion pump using microwaves according to claim 1, characterized in that: The end surface of the column (12) is provided with a threaded hole, and the end surface of the end cover (11) is provided with a plurality of through holes, which are higher than the threaded holes and are distributed one by one. Bolts pass through the through holes and connect with the threaded holes to lock and fix the end cover (11) and the column (12).

5. The device for heating a diffusion pump using microwaves according to claim 1, characterized in that: The pressing plate (20) forms an annular structure, the inner diameter of the pressing plate (20) is equal to the inner diameter of the pressing plate (20), a plurality of mounting holes are formed through the top of the pressing plate (20), a plurality of internal threaded holes corresponding to the mounting holes are formed on the top surface of the end cover (11), and bolts are passed through the mounting holes and connected to the internal threaded holes to tighten the pressing plate (20).

6. The device for heating a diffusion pump using microwaves according to claim 1, characterized in that: The top surface of the pressure plate (20) is provided with a plurality of elastic members, the elastic members including but not limited to springs, and the bolts pass through the springs and are connected to the end cover (11).

7. The device for heating a diffusion pump using microwaves according to claim 1, characterized in that: The plug body (21) forms a funnel-shaped structure, the smaller port diameter of the plug body (21) is smaller than the inner diameter of the end cover (11), and the larger port diameter of the plug body (21) is smaller than the outer diameter of the pressure plate (20).

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