Anode device, plasma generator and plasma water washing waste gas treatment device

Abstract

The utility model provides an anode device, a plasma generator and a plasma water washing waste gas treatment device. The anode device includes: an arc-starting tube, which is provided with an arc channel running through the upper end and the lower end, and the arc channel is used to circulate the ignited working gas; a fixing plate, which is arranged at the lower end of the arc-starting tube and is sealed and connected to the arc-starting tube, and a receiving groove is formed between the fixing plate and the arc-starting tube; a tungsten electrode head is arranged in the receiving groove, which is provided with a through hole running through the upper end and the lower end, and the through hole is connected to the arc channel, and the ignited working gas is ejected from the through hole. The utility model arranges a tungsten electrode head in the anode device, so that the anode device can withstand the impact of high-energy particles in the plasma flame, thereby increasing the service life and reducing the maintenance cost.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor equipment, in particular to an anode device, a plasma generator and a plasma water washing waste gas treatment device. Background Art

[0002] Plasma Scrubber (plasma water washing waste gas treatment device) used in the semiconductor and LCD (liquid crystal display) fields requires a plasma flame, and usually a plasma generator is used to ignite a working gas (such as nitrogen) to spray out a plasma flame.

[0003] The plasma generator includes a cathode device and an anode device, and electric sparks are generated between the cathode device and the anode device to ignite the working gas. The cathode device includes a cathode electrode, and the anode device includes an anode electrode, and the cathode electrode and the anode electrode are arranged in a state of being separated by a specified distance. By extracting the cathode electrode from the plasma power supply and mounting it on the upper end of the anode electrode, the movement direction of the particles in the current is from the cathode to the anode by borrowing the characteristics of the electrode, so that the plasma strikes the cathode electrode and produces electric sparks, so that electric sparks are generated at the connection between the cathode device and the anode device, which has an ignition effect on the nitrogen introduced, thereby igniting the nitrogen introduced on the upper part of the anode device, and at the same time, the flame will be ejected along the direction of the airflow, thereby achieving the effect of plasma flame ejection.

[0004] The existing anode device is an arc-starting tube 1 made of a whole piece of 100% oxygen-free copper, such as Figure 1 As shown in the figure, the arc-starting tube made of 100% oxygen-free copper as the anode device is easy to replace, and the overall processing and assembly can save a lot of assembly and production time.

[0005] However, the current anode device is made of 100% oxygen-free copper and does not have sufficient impact resistance. It will suffer certain losses under the movement of plasma and deformation under high temperature, which will reduce its service life and increase maintenance costs. Utility Model Content

[0006] The utility model aims to provide an anode device, a plasma generator and a plasma water washing waste gas treatment device. By arranging a tungsten electrode head in the anode device, the anode device can withstand the impact of high-energy particles in the plasma flame, thereby increasing the service life and reducing the maintenance cost.

[0007] In order to achieve the above objectives, the utility model is implemented through the following technical solutions:

[0008] An anode device, comprising:

[0009] An arc-starting tube, in which an arc channel is provided running through the upper end and the lower end, and the arc channel is used to circulate the ignited working gas;

[0010] A fixing plate is disposed at the lower end of the arc-starting tube and is sealed and connected to the arc-starting tube, and a receiving groove is formed between the fixing plate and the arc-starting tube;

[0011] The tungsten electrode head is arranged in the accommodating groove, and a through hole penetrating the upper end and the lower end is arranged in the tungsten electrode head, the through hole is communicated with the arc channel, and the ignited working gas is ejected from the through hole.

[0012] Optionally, the fixing plate and the arc-starting tube are made of 100% oxygen-free copper.

[0013] Optionally, the tungsten pole tip is made of thoriated tungsten.

[0014] Optionally, the arc-starting tube and the fixing plate are sealed by a sealing ring.

[0015] Optionally, a first contact area and a second contact area perpendicular to each other are provided between the fixing plate and the arc-starting tube, and a sealing ring is respectively provided in the first contact area and the second contact area.

[0016] Optionally, the tungsten pole head matches the shape of the receiving groove, and the tungsten pole head is confined in the receiving groove.

[0017] Optionally, the upper end of the tungsten pole head has a first annular protrusion radially outward, and the lower end of the fixing plate has a second annular protrusion radially inward of the accommodating groove, and the first annular protrusion matches the second annular protrusion to confine the tungsten pole head within the accommodating groove.

[0018] Optionally, the through hole is coaxially arranged with the arc channel.

[0019] A plasma generator comprises a cathode device and an anode device as described in any one of the above, wherein an electric spark is generated between the cathode device and the anode device to ignite the working gas.

[0020] A plasma water washing waste gas treatment device comprises the plasma generator as described above.

[0021] Compared with the prior art, the utility model has the following technical effects:

[0022] 1. The anode device provided by the utility model adopts an independent modular design, the assembly parts are relatively concise, and the structure is simple;

[0023] 2. The anode device provided by the utility model is a structure in which 100% oxygen-free copper and thoriated tungsten are combined, and thoriated tungsten is used as a generator at the high-temperature flame outlet to reduce the subsequent maintenance cost;

[0024] 3. The anode device provided by the utility model has a compact overall structure and a small overall size, is easy to disassemble, and requires a small operating space;

[0025] 4. The anode device provided by the utility model is driven by nitrogen, which is safe and has low use cost. BRIEF DESCRIPTION OF THE DRAWINGS

[0026] In order to more clearly illustrate the technical solution of the utility model, the following is a brief introduction to the drawings required for the description. Obviously, the drawings described below are an embodiment of the utility model. For ordinary technicians in this field, other drawings can be obtained based on these drawings without creative work:

[0027] Figure 1 is a schematic structural diagram of an existing anode device;

[0028] Figure 2 A schematic structural diagram of an anode device provided in one embodiment of the utility model.

[0029] The accompanying drawings are marked as follows:

[0030] Figure 1 Middle: Arc tube 1

[0031] Figure 2 Middle: arc-starting tube 10 , arc channel 11 , fixing plate 20 , tungsten pole head 30 , through hole 31 , sealing ring 40 , first contact area d1 , second contact area d2 , first annular protrusion 32 , second annular protrusion 21 . DETAILED DESCRIPTION

[0032] The scheme proposed by the utility model is further described in detail below in combination with the accompanying drawings and specific implementation methods. According to the following description, the advantages and features of the utility model will be clearer. It should be noted that the accompanying drawings adopt a very simplified form and use non-precise proportions, which are only used to conveniently and clearly assist in explaining the purpose of the implementation method of the utility model. In order to make the purpose, features and advantages of the utility model more obvious and easy to understand, please refer to the accompanying drawings. It should be noted that the structure, proportion, size, etc. illustrated by the accompanying drawings of this specification are only used to match the content disclosed in the specification, so that people familiar with this technology can understand and read, and are not used to limit the limiting conditions for the implementation of the utility model, so it has no technical substantive significance. Any modification of the structure, change of the proportional relationship or adjustment of the size, without affecting the effect that the utility model can produce and the purpose that can be achieved, should still fall within the scope of the technical content disclosed by the utility model.

[0033] The plasma generator includes a cathode device and an anode device. In order to influence the direction of particles in the current, the cathode is on the top and the anode is on the bottom. Therefore, the anode device is at the bottom of the plasma generator. The plasma flame is formed by the impact of high-energy particles. In order to withstand the impact of high-energy particles, a tungsten pole head is set in the anode device in this embodiment. However, tungsten cannot be in direct contact with the electrode. Therefore, this embodiment uses an arc-starting tube made of 100% oxygen-free copper as a buffer to guide particles from the cathode discharge to the ejection port of the tungsten pole head.

[0034] It can be understood that when the Plasma Scrubber is in operation, the anode device in the plasma generator can support particle impact and ease the relationship between tungsten and the electrode. Especially when the Plasma Scrubber is used for a long time, the characteristics of tungsten with extremely high melting point and mechanical strength and ability to withstand the bombardment of high-energy particles are fully demonstrated.

[0035] like Figure 2 The anode device provided in this embodiment includes: an arc-starting tube 10, which is provided with an arc channel 11 running through the upper end and the lower end, and the arc channel is used to circulate the ignited working gas; a fixing plate 20, which is provided at the lower end of the arc-starting tube 10 and is sealed and connected to the arc-starting tube 10, and a receiving groove is formed between the fixing plate 20 and the arc-starting tube 10; a tungsten electrode head 30, which is provided in the receiving groove, and is provided with a through hole 31 running through the upper end and the lower end, and the through hole 31 is connected with the arc channel 11, and the ignited working gas is ejected from the through hole 31. The working gas used is mainly helium, argon and nitrogen, etc. In this embodiment, nitrogen (N2) is used for illustration.

[0036] The material of the fixing plate 20 and the arc-starting tube 10 is 100% oxygen-free copper. The material of the tungsten pole tip 30 is thoriated tungsten. This embodiment combines 100% oxygen-free copper and thoriated tungsten, and uses the arc-starting tube 10 and the fixing plate 20 made of 100% oxygen-free copper to clamp the tungsten pole tip 30, so that the tungsten pole tip 30 can bear a large amount of heat produced by the flame injection, thereby forming a certain protection for the two parts made of 100% oxygen-free copper. At the same time, the stability of the tungsten pole tip 30 is also guaranteed in this structure without affecting the disassembly and assembly.

[0037] In this embodiment, the arc-starting tube 10 and the fixed plate 20 are sealed by a sealing ring 40 to prevent the incompletely burned gas from leaking and bringing out the flame. Specifically, there is a first contact area d1 and a second contact area d2 perpendicular to each other between the fixed plate 20 and the arc-starting tube 10, and a sealing ring 40 is respectively disposed in the first contact area d1 and the second contact area d2. Figure 2As shown, in the first contact area d1, the arc-starting tube 10 is provided with a sealing groove, and in the second contact area d2, the fixing plate 20 is provided with a sealing groove, and sealing rings 40 are provided in the two sealing grooves. By providing two sealing rings 40, a good sealing effect can be achieved.

[0038] Optionally, the tungsten electrode head 30 can be fixed in the receiving groove by a screw fastener. In a preferred embodiment, the tungsten electrode head 30 matches the shape of the receiving groove, so that the tungsten electrode head 30 is confined in the receiving groove. Specifically, Figure 2 As shown, the upper end of the tungsten electrode head 30 has a first annular protrusion 32 radially outward, and the lower end of the fixing plate 20 has a second annular protrusion 21 radially inward along the receiving groove, and the first annular protrusion 32 matches the second annular protrusion 21, which is used to confine the tungsten electrode head 30 in the receiving groove. During installation, the tungsten electrode head 30 is first placed under the arc-starting tube 10, and then the fixing plate 20 is connected to the arc-starting tube 10 from the bottom of the tungsten electrode head 30 upward and fixed to the arc-starting tube 10, thereby, the second annular protrusion 21 carries the first annular protrusion 32, so that the tungsten electrode head 30 is confined in the receiving groove formed between the fixing plate 20 and the arc-starting tube 10.

[0039] In this embodiment, the through hole 31 is coaxially arranged with the arc channel 11 and has the same size as that of the arc channel 11 , so that the ignited working gas can be smoothly ejected from the tungsten electrode head 30 .

[0040] The main operation process of the anode device provided in this embodiment is as follows: the anode device is mounted on the upper end by extracting the cathode from the plasma power supply. By using the characteristics of the electrode, the movement direction of the particles in the current is from the cathode to the anode, so that the plasma strikes the tungsten electrode head serving as the cathode in the cathode device to generate electric sparks. Nitrogen is introduced into the arc-starting tube 10 through the joint on the upper part of the anode device (not shown, this is a prior art and will not be described here). Since the plasma power supply will generate electric sparks at the connection between the cathode device and the anode device, the introduced nitrogen will be ignited. The nitrogen is ignited at the connection between the cathode device and the anode device. At the same time, the ignited working gas forms a flame that follows the airflow direction in the arc channel 11 and is ejected from the through hole 31, thereby achieving the effect of plasma flame ejection. The flow direction of the nitrogen and the flame is as shown in the figure. Figure 2 Shown by the dashed line.

[0041] Based on the same utility model concept, the utility model also provides a plasma generator, characterized in that it includes a cathode device and an anode device as described above, and an electric spark is generated between the cathode device and the anode device to ignite the working gas.

[0042] The utility model also provides a plasma water-washing waste gas treatment device, which comprises the above-mentioned plasma generator.

[0043] Each embodiment in this specification is described in a related manner, and the same or similar parts between the embodiments can be referenced to each other, and each embodiment focuses on the differences from other embodiments.

[0044] In summary, the anode device, plasma generator and plasma water washing waste gas treatment device provided by the utility model have the following advantages: 1. The anode device provided by the utility model adopts an independent modular design, the assembly parts are relatively concise, and the structure is simple; 2. The anode device provided by the utility model adopts a structural form combining 100% oxygen-free copper and thoriated tungsten, and thoriated tungsten is used as a generator at the high-temperature flame outlet to reduce the subsequent maintenance cost; 3. The anode device provided by the utility model has a compact overall structure, a small overall size, is easy to disassemble, and requires a small operating space; 4. The anode device provided by the utility model is driven by nitrogen, which is safe and has low use cost.

[0045] It should be noted that, in this article, relational terms such as first and second, etc. are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Moreover, the terms "include", "comprise" or any other variants thereof are intended to cover non-exclusive inclusion, so that a process, method, article or device including a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such process, method, article or device. In the absence of further restrictions, the elements defined by the sentence "comprise a ..." do not exclude the existence of other identical elements in the process, method, article or device including the elements.

[0046] Although the content of the utility model has been described in detail through the above preferred embodiments, it should be appreciated that the above description should not be considered as a limitation of the utility model. After reading the above content, various modifications and substitutions of the utility model will be obvious to those skilled in the art. Therefore, the protection scope of the utility model should be limited by the attached claims.

Claims

1. An anode device, characterized in that: include: An arc-starting tube, in which an arc channel is provided running through the upper end and the lower end, and the arc channel is used to circulate the ignited working gas; A fixing plate is disposed at the lower end of the arc-starting tube and is sealed and connected to the arc-starting tube, and a receiving groove is formed between the fixing plate and the arc-starting tube; The tungsten electrode head is arranged in the accommodating groove, and a through hole penetrating the upper end and the lower end is arranged in the tungsten electrode head, the through hole is communicated with the arc channel, and the ignited working gas is ejected from the through hole.

2. The anode device according to claim 1, characterized in that The material of the fixing plate and the arc-starting tube is 100% oxygen-free copper.

3. The anode device according to claim 1, characterized in that The material of the tungsten pole head is thoriated tungsten.

4. The anode device according to claim 1, characterized in that The arc-starting tube and the fixing plate are sealed by a sealing ring.

5. The anode device according to claim 4, characterized in that A first contact area and a second contact area which are perpendicular to each other are provided between the fixing plate and the arc-starting tube, and a sealing ring is respectively provided in the first contact area and the second contact area.

6. The anode device according to claim 1, characterized in that The tungsten pole head matches the shape of the receiving groove, and the tungsten pole head is confined in the receiving groove.

7. The anode device according to claim 6, characterized in that The upper end of the tungsten pole head has a first annular protrusion radially outward, and the lower end of the fixing plate has a second annular protrusion radially inward of the accommodating groove. The first annular protrusion matches the second annular protrusion to confine the tungsten pole head within the accommodating groove.

8. The anode device according to claim 1, characterized in that The through hole is coaxially arranged with the arc channel.

9. A plasma generator, characterized in that: It comprises a cathode device and an anode device as claimed in any one of claims 1 to 8, wherein an electric spark is generated between the cathode device and the anode device to ignite the working gas.

10. A plasma water washing waste gas treatment device, characterized in that: Comprising the plasma generator as claimed in claim 9.

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