A green light splitting and cutting module

Abstract

The utility model relates to the technical field of cutting machines, and in particular to a green light splitting cutting module, comprising a first reflector, a second reflector, a third reflector, a fourth reflector, a fifth reflector, and a splitter. The laser generated by a laser generating device is reflected by the first reflector and the second reflector and then irradiated on the splitter. The laser is at a 45-degree angle to the first reflector. The splitter can split the incident light into two strands and reflect them respectively through the fourth reflector and the third reflector and the fifth reflector. The utility model has the following beneficial effects: by setting a splitter, the laser beam can be split into two strands, and the energy is split. After the splitting, the energy on both sides is equal. Two lasers can be used at the same time, or one laser can be used alone, thereby improving efficiency.

Description

Technical Field

[0001] The utility model relates to the technical field of cutting machines, in particular to a green light splitting cutting module. Background Art

[0002] The traditional method of dividing a semiconductor wafer into multiple wafers is to use a diamond or carbide cutting machine for cutting. However, the above method is prone to damage or even cracking the cut wafer due to physical force, and also increases the cutting amplitude. The existing technology uses laser to cut wafers, which solves the problem of easy damage and cracking of wafers and large cutting amplitude. However, due to the high heat during laser cutting, condensation byproducts are easily generated, and the wafer is easily deformed, resulting in a larger diameter and thinner thickness. To address the above problems, tape is attached to the bottom of the wafer, but it makes cutting more difficult and reduces the cutting speed.

[0003] However, currently laser cutting equipment generally only uses one laser beam to remove a workpiece, which has the defect of low operating efficiency. Utility Model Content

[0004] In order to solve the problems in the above-mentioned background technology, the utility model provides a green light splitting and cutting module, which is used for energy distribution of a cutting machine and solves the energy distribution problem in the prior art.

[0005] The solution adopted by the utility model to solve its technical problem is: a green light splitting cutting module, including a first reflector, a second reflector, a third reflector, a fourth reflector, a fifth reflector, and a beam splitter, wherein the center of the first reflector, the center of the second reflector, the center of the third reflector, the center of the fourth reflector, the center of the fifth reflector, and the center of the beam splitter are all at the same height, the laser generated by the laser generating device is reflected by the first reflector and the second reflector and then irradiated on the beam splitter, the laser is at a 45-degree angle to the first reflector, the first reflector, the second reflector, the third reflector, and the fifth reflector are all parallel to each other, the reflection surface of the first reflector and the reflection surface of the fifth reflector are in the same direction, and the reflection surface of the second reflector and the reflection surface of the third reflector are in the same direction. The reflecting surface of the first reflector is arranged opposite to the reflecting surface of the second reflector, the fourth reflector is perpendicular to the fifth reflector, the reflecting surface of the fourth reflector faces the first engraving head, the reflecting surface of the fifth reflector faces the second engraving head, the centers of the second reflector, the fourth reflector and the beam splitter are collinear, the line connecting the centers of the first reflector and the second reflector is perpendicular to the line connecting the centers of the second reflector and the fourth reflector, the line connecting the centers of the third reflector and the fifth reflector is parallel to the line connecting the centers of the second reflector and the fourth reflector, the line connecting the center of the third reflector and the beam splitter is perpendicular to the line connecting the center of the beam splitter and the fourth reflector, and the beam splitter can split the incident light into two beams and reflect them respectively through the fourth reflector, the third reflector and the fifth reflector.

[0006] The above structure further comprises a lens, which is arranged between the second reflector and the beam splitter, and can diffuse the light beam at equal distances.

[0007] In the above structure, the radius of the first reflector, the radius of the second reflector, the radius of the third reflector, the radius of the fourth reflector, and the radius of the fifth reflector are all 25.4 mm.

[0008] In the above structure, the wavelength of the laser generated by the laser generating device is 532nm.

[0009] In the above structure, the beam splitter is a broadband polarization beam splitter cube with a beam splitting energy ratio of 50:50.

[0010] In the above structure, the radius of the first reflector and the second reflector are split crystals to adjust the light path to 45 degrees of incidence. When dividing the energy, half of the glass slide is rotated to make the energy on both sides equal.

[0011] In the above structure, the light beam passing through the beam splitter and the fourth reflector enters the first engraving head, and the light beam passing through the beam splitter, the third reflector and the fifth reflector enters the second engraving head.

[0012] The utility model has the following beneficial effects: by setting a beam splitter, the laser beam can be divided into two beams, energy splitting, and the energy on both sides is equal after splitting. The two beams of laser can be used at the same time, or one beam of laser can be used alone, thereby improving efficiency.

[0013] The above description is only an overview of the technical solution of the present invention. In order to more clearly understand the technical means of the present invention, it can be implemented in accordance with the contents of the specification. In order to make the above and other purposes, features and advantages of the present invention more obvious and easy to understand, the following preferred embodiments are specifically cited and described in detail with the accompanying drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] Figure 1 It is a three-dimensional diagram of the utility model;

[0015] Figure 2 It is a top view of the utility model;

[0016] Figure 3 for Figure 2 A magnified view of the area within the circle.

[0017] In the figure: 1. first reflector; 2. second reflector; 3. third reflector; 4. fourth reflector; 5. fifth reflector; 6. beam splitter; 7. laser generating device; 8. lens. DETAILED DESCRIPTION

[0018] In order to make the content of the utility model more clearly understood, the utility model is further described below based on specific embodiments in combination with the accompanying drawings.

[0019] It should be noted that the terms "center", "upper", "lower", "front", "back", "left", "right", "inner", "outer" and the like used herein to indicate directions or positional relationships are based on directions or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific direction, be constructed and operated in a specific direction, and therefore cannot be understood as limiting the present invention. Unless otherwise specified, "plurality" means two or more.

[0020] Unless otherwise clearly specified and limited, the terms "installed", "connected" and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in this utility model can be understood by specific circumstances.

[0021] Referring to the accompanying drawings, a green light splitting and cutting module includes a first reflector 1, a second reflector 2, a third reflector 3, a fourth reflector 4, a fifth reflector 5, and a beam splitter 6, wherein the center of the first reflector 1, the center of the second reflector 2, the center of the third reflector 3, the center of the fourth reflector 4, the center of the fifth reflector 5, and the center of the beam splitter 6 are all at the same height, and the laser generated by the laser generating device 7 is reflected by the first reflector 1 and the second reflector 2 and irradiated on the beam splitter 6, the laser is at a 45-degree angle to the first reflector 1, the first reflector 1, the second reflector 2, the third reflector 3, and the fifth reflector 5 are all parallel to each other, the reflection surface of the first reflector 1 and the reflection surface of the fifth reflector 5 are in the same direction, the reflection surface of the second reflector 2 and the reflection surface of the third reflector 3 are in the same direction, and the reflection surface of the first reflector 1 The reflecting surface is arranged opposite to the reflecting surface of the second reflector 2, the fourth reflector 4 is perpendicular to the fifth reflector 5, the reflecting surface of the fourth reflector 4 faces the first engraving head 9, the reflecting surface of the fifth reflector 5 faces the second engraving head 10, the centers of the second reflector 2, the fourth reflector 4, and the center of the beam splitter 6 are collinear, the line connecting the center of the first reflector 1 and the center of the second reflector 2 is perpendicular to the line connecting the center of the second reflector 2 and the center of the fourth reflector 4, the line connecting the center of the third reflector 3 and the center of the fifth reflector 5 is parallel to the line connecting the center of the second reflector 2 and the center of the fourth reflector 4, the line connecting the center of the third reflector 3 and the center of the beam splitter 6 is perpendicular to the line connecting the center of the beam splitter 6 and the center of the fourth reflector 4, and the beam splitter 6 can split the incident light into two beams and reflect them respectively through the fourth reflector 4 and the third reflector 3 and the fifth reflector 5. Figure 3 The dotted line in the figure is the optical path of the laser.

[0022] Furthermore, a lens 8 is included, which is arranged between the second reflector 2 and the beam splitter 6, and the lens 8 can diffuse the light beam equidistantly, that is, the original light beam diameter of 1.00 mm is expanded to 10.00 mm.

[0023] Furthermore, the radius of the first reflector 1 , the radius of the second reflector 2 , the radius of the third reflector 3 , the radius of the fourth reflector 4 , and the radius of the fifth reflector 5 are all 25.4 mm.

[0024] Furthermore, the wavelength of the laser generated by the laser generating device 7 is 532 nm.

[0025] Furthermore, the beam splitter 6 is a broadband polarization beam splitter cube with a beam splitting energy ratio of 50:50 and a height of 25.4 mm. S1 and S2 are two optical shutters.

[0026] Furthermore, the radius of the first reflector 1 and the second reflector 2 are split crystals so as to adjust the light path to 45 degrees of incidence, and rotate half of the glass slide when dividing the energy to make the energy on both sides equal.

[0027] Furthermore, the light beam passing through the beam splitter 6 and the fourth reflector 4 is incident on the first engraving head 9 , and the light beam passing through the beam splitter 6 , the third reflector 3 , and the fifth reflector 5 is incident on the second engraving head 10 .

[0028] The utility model can divide the laser beam into two beams by setting the beam splitter 6, and split the energy. After the splitting, the energy on both sides is equal. The two beams of laser can be used at the same time, or one beam of laser can be used alone, so as to improve the efficiency.

[0029] The embodiments described above are only preferred implementation modes of the present utility model and cannot be used to limit the protection scope of the present utility model. Any non-substantial changes and modifications made by technicians in this field on the basis of the utility model shall fall within the protection scope of the present utility model.

Claims

1. A green light splitting and cutting module, characterized in that: The invention comprises a first reflector, a second reflector, a third reflector, a fourth reflector, a fifth reflector and a beam splitter, wherein the centers of the first reflector, the second reflector, the third reflector, the fourth reflector, the fifth reflector and the beam splitter are at the same height, the laser generated by the laser generating device is reflected by the first reflector and the second reflector and then irradiated on the beam splitter, the laser is at an angle of 45 degrees to the first reflector, the first reflector, the second reflector, the third reflector and the fifth reflector are parallel to each other, the reflection surface of the first reflector is in the same direction as the reflection surface of the fifth reflector, the reflection surface of the second reflector is in the same direction as the reflection surface of the third reflector, the reflection surface of the first reflector is in the same direction as the reflection surface of the second reflector The reflective surfaces are arranged opposite to each other, the fourth reflector is perpendicular to the fifth reflector, the reflective surface of the fourth reflector faces the first engraving head, the reflective surface of the fifth reflector faces the second engraving head, the centers of the second reflector, the fourth reflector and the beam splitter are collinear, the line connecting the center of the first reflector and the center of the second reflector and the line connecting the center of the second reflector and the center of the fourth reflector are perpendicular, the line connecting the center of the third reflector and the center of the fifth reflector and the line connecting the center of the second reflector and the center of the fourth reflector are parallel, the line connecting the center of the third reflector and the center of the beam splitter and the line connecting the center of the beam splitter and the center of the fourth reflector are perpendicular, and the beam splitter can split the incident light into two beams and reflect them respectively through the fourth reflector, the third reflector and the fifth reflector.

2. The green light splitting and cutting module according to claim 1, characterized in that: The device also includes a lens, which is arranged between the second reflector and the beam splitter, and can diffuse the light beam at equal distances.

3. The green light splitting and cutting module according to claim 1, characterized in that: The radius of the first reflector, the radius of the second reflector, the radius of the third reflector, the radius of the fourth reflector, and the radius of the fifth reflector are all 25.4 mm.

4. The green light splitting and cutting module according to claim 1, characterized in that: The wavelength of the laser generated by the laser generating device is 532nm.

5. The green light splitting and cutting module according to claim 1, characterized in that: The beam splitter is a broadband polarization beam splitter cube with a beam splitting energy ratio of 50:

50.

6. The green light splitting and cutting module according to claim 1, characterized in that: The light beam passing through the beam splitter and the fourth reflector enters the first engraving head, and the light beam passing through the beam splitter, the third reflector and the fifth reflector enters the second engraving head.

Images