A parallel detection system for linear guides of ultra-high precision positioning stages

Abstract

The utility model discloses a parallel detection system for a linear guide rail of an ultra-high precision positioning platform, and relates to the technical field of guide rail detection. The utility model includes a base, a guide rail is arranged on the top of the base, a slider is slidably connected to the outer surface of the guide rail, a reflector is fixedly installed on the top of the slider, a base is arranged on the side of the base, a longitudinal adjustment component and a guide component are arranged inside the base, and the tops of the guide components of the longitudinal adjustment component are fixedly connected with a transverse adjustment component. The utility model connects the transverse adjustment component and the collimator, and the collimator is located at the end of the guide rail. The light beam emitted by the collimator can be directly irradiated on the reflector without passing through a refractor. At the same time, when the collimator performs parallelism detection on multiple groups of guide rails, the adjustment component can drive the collimator to move, so that the collimator can move to the end of the guide rail to be detected, and there is no need to push the base as a whole to move the collimator, which is more convenient and labor-saving to use.

Description

Technical Field

[0001] The utility model belongs to the technical field of guide rail detection, and in particular relates to a parallel detection system for a linear guide rail of an ultra-high precision positioning platform. Background Art

[0002] Linear guides are also called linear rails, slide rails, linear guides, and linear slides. They can be divided into three types: roller linear guides, cylindrical linear guides, and ball linear guides. Linear guides are used to support and guide moving parts to make reciprocating linear motion in a given direction. When installing linear guides, it is necessary to ensure the parallelism between multiple guides to avoid skew when the slider moves along the guide rails.

[0003] A linear guide parallelism detection system is disclosed in Chinese patent CN211012878U, which relates to the field of measurement technology. A linear guide parallelism detection system includes: a base, a workpiece mounting surface is provided on the top of which, and the linear guide to be detected is horizontally placed on the workpiece mounting surface; a reflector, which is used to reflect light along the length direction of the linear guide, and has a reflective base detachably connected to the slide rail of the linear guide, and the reflective base and the slide rail of the linear guide form a sliding pair; a refracting mirror, which is used to refract the reflected light of the reflector by ninety degrees in the horizontal direction, and has a refracting base detachably connected to the slide rail of the linear guide; a collimator, which is used to detect the refracted light of the refracting mirror; a computer, which realizes signal connection with the collimator through a data line, establishes a three-dimensional model for the slide rail where the reflector is located according to the detection result of the collimator, and obtains the parallel accuracy of the two slide rails according to the three-dimensional model comparison calculation of the two slide rails on the linear guide.

[0004] In the linear guide rails used in the ball screw type linear module, the two guide rails need to be set in parallel, but there may be errors in the manufacturing process. The parallel accuracy between the guide rails directly affects the accuracy and performance of the linear module. In the above document, a three-dimensional model can be established for the slide rail where the reflector is located according to the detection results of the collimator, so as to obtain the parallel accuracy of the two slide rails, but it still has the following problems: First, the collimator is distributed vertically with the guide rail, and the light beam emitted by the collimator needs to be refracted by a refractor before reaching the reflector, which is costly. At the same time, when another set of guide rails is detected, the refractor needs to be reassembled and disassembled, which is troublesome. If the collimator is placed at one end of the guide rail for detection, after one set of guide rails is detected, the heightening block and the collimator need to be moved to detect the other guide rail, which is laborious; second, the multiple sets of second knobs used to adjust the height of the collimator are located at the bottom of the collimator, and their position is not convenient for the staff to adjust; third, the method of changing the height of the second knob is used to push the collimator for leveling, which is inefficient.

[0005] Currently, no effective solution has been proposed for the problems in the related technologies. Utility Model Content

[0006] In view of the problems in the related technology, the utility model proposes a parallel detection system for a linear guide rail of an ultra-high precision positioning table to overcome the above technical problems existing in the existing related technology.

[0007] In order to solve the above technical problems, the utility model is realized by the following technical solutions:

[0008] The utility model is a parallel detection system for a linear guide rail of an ultra-high precision positioning platform, comprising a base, a guide rail is arranged on the top of the base, a slider is slidably connected to the outer surface of the guide rail, a reflector is fixedly installed on the top of the slider, a base is arranged on the side of the base, a longitudinal adjustment component and a guide component are arranged inside the base, the tops of the longitudinal adjustment component and the guide component are fixedly connected to the transverse adjustment component, the top of the transverse adjustment component is fixedly connected to the rotation component, and the top of the rotation component is fixedly installed with a collimator.

[0009] Furthermore, the longitudinal adjustment component includes a rotating shaft, which is rotatably connected to the inside of the base, and the end of the rotating shaft is fixedly connected to a first bevel gear, the outer surface of the first bevel gear is meshed with a second bevel gear, the outer surface of the second bevel gear is fixedly connected to a longitudinal screw, the outer surface of the longitudinal screw is threadedly connected to a screw barrel, and the screw barrel is fixedly connected to the bottom of the lateral adjustment component.

[0010] Furthermore, the guide assembly includes a guide rod, the lower end of which is fixedly connected to a limit plate, the upper end of which is fixedly connected to the bottom of the lateral adjustment assembly, a circular hole is opened inside the base, and the guide rod and the limit plate are both slidably connected inside the circular hole.

[0011] Furthermore, the lateral adjustment component includes a lifting platform, the bottom of which is fixedly connected with a screw barrel and a guide rod, a sliding groove is provided on the outer surface of the lifting platform, a lateral screw is rotatably connected inside the sliding groove, the outer surface of the lateral screw is threadedly connected with a sliding seat, and the sliding seat is slidably connected inside the sliding groove.

[0012] Furthermore, the rotating assembly includes a fixed roller, which is fixedly connected to the top of the sliding seat, the outer surface of the fixed roller is fixedly connected to a pin shaft, the outer surface of the pin shaft is rotatably connected to a connecting plate, the outer surface of the connecting plate is threadedly connected to a bolt, the top of the connecting plate is fixedly connected to a connecting seat, and the outer surface of the connecting seat is fixedly connected to a spirit level.

[0013] Furthermore, a drawer is slidably connected to the interior of the base, a handle is fixedly connected to the outer surface of the drawer, and a pulley is fixedly installed on the bottom of the base.

[0014] The utility model has the following beneficial effects:

[0015] 1. The utility model connects the lateral adjustment component and the collimator. The collimator is located at the end of the guide rail. The light beam emitted by the collimator can be directly irradiated on the reflector without passing through the refracting mirror. At the same time, when the collimator performs parallelism detection on multiple groups of guide rails, the adjustment component can drive the collimator to move, so that the collimator can be moved to the end of the guide rail to be detected. There is no need to push the base as a whole to move the collimator, which is more convenient and labor-saving to use.

[0016] 2. The utility model connects the longitudinal adjustment component with the transverse adjustment component. The longitudinal adjustment component is located at the bottom of the transverse adjustment component. At the same time, the longitudinal adjustment component is reversed inside the base. The staff can directly rotate the longitudinal adjustment component on the side of the base to raise and lower the transverse adjustment component and the collimator, which is more convenient to use.

[0017] 3. The utility model is connected to the fixed roller by bolts. When one end of the bolt is against the outer surface of the fixed roller, there is a large friction between the bolt and the fixed roller, which can prevent the connection plate and the fixed roller from rotating. When leveling is required, the bolt is rotated to separate it from the fixed roller, and the connection plate can be pushed to rotate around the pin on the fixed roller. When the connection plate and the connection seat rotate, the horizontal angle of the connection seat can be determined by observing the level bubble. To release the limit on the connection seat, you only need to move the bolt slightly away from the fixed roller. It is more convenient to use.

[0018] Of course, any product implementing the present invention does not necessarily need to achieve all of the advantages described above at the same time. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] In order to more clearly illustrate the technical solutions of the utility model embodiments, the drawings required for describing the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the utility model. For ordinary technicians in this field, other drawings can be obtained based on these drawings without creative work.

[0020] Figure 1 It is a schematic diagram of the external contour structure of the utility model;

[0021] Figure 2 This is a schematic diagram of the cross-sectional structure of the base of the utility model;

[0022] Figure 3 For the utility model Figure 1 A schematic diagram of the enlarged structure in the middle.

[0023] In the accompanying drawings, the components represented by the reference numerals are listed as follows:

[0024] 1. Base; 2. Guide rail; 3. Slider; 4. Reflector; 5. Base; 6. Longitudinal adjustment assembly; 601. Rotating shaft; 602. First bevel gear; 603. Second bevel gear; 604. Longitudinal screw; 605. Screw barrel; 7. Guide assembly; 701. Guide rod; 702. Limit plate; 703. Round hole; 8. Transverse adjustment assembly; 801. Lifting plate; 802. Slide groove; 803. Transverse screw; 804. Sliding seat; 9. Rotating assembly; 901. Fixed roller; 902. Pin shaft; 903. Connecting plate; 904. Bolt; 905. Connecting seat; 906. Level bubble; 10. Collimator; 11. Drawer; 12. Handle; 13. Pulley. DETAILED DESCRIPTION

[0025] The following will be combined with the drawings in the utility model embodiments to clearly and completely describe the technical solutions in the utility model embodiments. Obviously, the described embodiments are only part of the utility model embodiments, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0026] In the description of the present utility model, it should be understood that the terms "opening", "upper", "lower", "top", "middle", "inside" and the like indicating orientation or positional relationship are only for the convenience of describing the utility model and simplifying the description, and do not indicate or imply that the components or elements referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the utility model.

[0027] See also Figure 1-Figure 3 As shown, the utility model is a parallel detection system for a linear guide of an ultra-high precision positioning table, comprising a base 1, a guide rail 2 is arranged on the top of the base 1, a slider 3 is slidably connected to the outer surface of the guide rail 2, a reflector 4 is fixedly installed on the top of the slider 3, a base 5 is arranged on the side of the base 1, a longitudinal adjustment component 6 and a guide component 7 are arranged inside the base 5, the tops of the longitudinal adjustment component 6 and the guide component 7 are fixedly connected to a lateral adjustment component 8, the top of the lateral adjustment component 8 is fixedly connected to a rotating component 9, and the top of the rotating component 9 is fixedly installed with a collimator 10.

[0028] First, the guide rail 2 is movably installed on the base 1 so that the guide rail 2 can be adjusted later. The reflector 4 is fixedly installed on the slider 3 on the surface of the guide rail 2. The base 5 is pushed close to the base 1, and the collimator 10 on the base 5 is started. When the base 5 cannot be kept horizontal, the rotating component 9 can be pushed to keep the collimator 10 horizontal, and the longitudinal adjustment component 6 is rotated to adjust the height of the collimator 10 so that the light emitted by the collimator 10 can return to the original path after irradiating the reflector 4 and coincide with the light source point. Based on this, the slider 3 is pushed to drive the reflector 4 to move along the guide rail 2. If the guide rail 2 is skewed, the reflector 4 will be skewed. At this time, the collimator 10 is not skewed. The light emitted by the collimator 10 cannot return to the original path after being irradiated on the reflector 4, and the light reflected by the reflector 4 cannot coincide with the original light source after passing through the objective lens in the collimator 10. Whenever the reflector 4 moves a fixed distance on the guide rail 2, the deviation data is recorded and drawn into an image by a computer to know the parallelism between the guide rail 2 and the light emitted by the collimator 10. Then, the lateral adjustment component 8 is rotated to drive the collimator 10 to move to another guide rail 2, and the detection is performed in the same way. The position of the guide rail 2 is adjusted according to the detected data and image, so that the parallelism error between the guide rails 2 is within an acceptable range.

[0029] The utility model connects the transverse adjustment component 8 and the collimator 10, and the collimator 10 is located at the end of the guide rail 2. The light beam emitted by the collimator 10 can be directly irradiated on the reflector 4 without passing through the refracting mirror. At the same time, when the collimator 10 performs parallelism detection on multiple groups of guide rails 2, the adjustment component 8 can drive the collimator 10 to move, so that the collimator 10 can move to the end of the guide rail 2 to be detected, and there is no need to push the base 5 as a whole to move the collimator 10, which is more convenient and labor-saving when used; through the connection of the longitudinal adjustment component 6 and the transverse adjustment component 8, the longitudinal adjustment component 6 is located at the bottom of the transverse adjustment component 8, and the longitudinal adjustment component 6 is reversed inside the base 5. The staff can directly rotate the longitudinal adjustment component 6 on the side of the base 5 to make the transverse adjustment component 8 and the collimator 10 rise and fall, which is more convenient to use.

[0030] In one embodiment, for the above-mentioned longitudinal adjustment component 6, the longitudinal adjustment component 6 includes a rotating shaft 601, which is rotatably connected to the inside of the base 5, and the end of the rotating shaft 601 is fixedly connected to a first bevel gear 602, the outer surface of the first bevel gear 602 is meshed with a second bevel gear 603, the outer surface of the second bevel gear 603 is fixedly connected to a longitudinal screw 604, the outer surface of the longitudinal screw 604 is threadedly connected to a screw barrel 605, and the screw barrel 605 is fixedly connected to the bottom of the lateral adjustment component 8.

[0031] Rotate the rotating shaft 601, the rotating shaft 601 drives the first bevel gear 602 to rotate in the base 5, the first bevel gear 602 drives the second bevel gear 603 and the longitudinal screw 604 to rotate, the longitudinal screw 604 drives the screw barrel 605 to move up and down, the screw barrel 605 drives the lateral adjustment component 8 and the collimator 10 to move up and down, through the connection between the first bevel gear 602 and the second bevel gear 603, the staff can rotate the rotating shaft 601 and the first bevel gear 602 from the side of the base 5, reserving a larger operating space for the staff, which is convenient for use.

[0032] In one embodiment, for the above-mentioned guide assembly 7, the guide assembly 7 includes a guide rod 701, the lower end of the guide rod 701 is fixedly connected to the limiting plate 702, the upper end of the guide rod 701 is fixedly connected to the bottom of the lateral adjustment assembly 8, and a circular hole 703 is opened inside the base 5, and the guide rod 701 and the limiting plate 702 are both slidably connected inside the circular hole 703.

[0033] When the screw barrel 605 drives the lateral adjustment component 8 to move, the lateral adjustment component 8 drives the guide rod 701 and the limit plate 702 to slide in the circular hole 703. Through the connection between the guide rod 701 and the circular hole 703, the rotation tendency of the screw barrel 605 and the lateral adjustment component 8 will be blocked by the guide rod 701 and the circular hole 703, thereby preventing the screw barrel 605 and the lateral adjustment component 8 from rotating.

[0034] In one embodiment, for the above-mentioned lateral adjustment component 8, the lateral adjustment component 8 includes a lifting platform 801, the bottom of which is fixedly connected with a screw barrel 605 and a guide rod 701, respectively, and a slide groove 802 is provided on the outer surface of the lifting platform 801, and a lateral screw 803 is rotatably connected inside the slide groove 802, and a sliding seat 804 is threadedly connected to the outer surface of the lateral screw 803, and the sliding seat 804 is slidably connected inside the slide groove 802.

[0035] The transverse screw 803 is rotated, and the transverse screw 803 drives the sliding seat 804 to move. The sliding seat 804 slides along the slide groove 802. At the same time, the sliding seat 804 can drive the rotating component 9 and the collimator 10 to move. Through the connection between the slide groove 802 and the sliding seat 804, the slide groove 802 can limit the sliding seat 804 to prevent the sliding seat 804 from rotating.

[0036] In one embodiment, for the above-mentioned rotating component 9, the rotating component 9 includes a fixed roller 901, the fixed roller 901 is fixedly connected to the top of the sliding seat 804, the outer surface of the fixed roller 901 is fixedly connected with a pin shaft 902, the outer surface of the pin shaft 902 is rotatably connected with a connecting plate 903, the outer surface of the connecting plate 903 is threadedly connected with a bolt 904, the top of the connecting plate 903 is fixedly connected with a connecting seat 905, and the outer surface of the connecting seat 905 is fixedly connected with a level bubble 906.

[0037] Rotate the bolt 904 to separate it from the fixed roller 901, release the limit fixation between the fixed roller 901 and the connecting plate 903, and then push the connecting seat 905 to drive the connecting plate 903 to rotate, observe the level bubble 906 on the connecting seat 905, and when the connecting seat 905 is in a horizontal state, reverse the bolt 904 to lock the connecting seat 905 and the connecting plate 903 to prevent the connecting seat 905 from driving the collimator 10 to produce unnecessary rotation.

[0038] In one embodiment, for the above-mentioned base 5 , a drawer 11 is slidably connected inside the base 5 , a handle 12 is fixedly connected to the outer surface of the drawer 11 , and a pulley 13 is fixedly installed on the bottom of the base 5 .

[0039] The handle 12 is pulled to move the drawer 11, and the drawer 11 is pulled out of the base 5, so that tools can be taken or placed in the drawer 11. The pulley 13 not only supports the base 5, but also reduces the friction when the base 5 moves, so as to facilitate the movement of the base 5.

[0040] Through the above technical scheme, 1. Through the connection between the lateral adjustment component 8 and the collimator 10, the collimator 10 is located at the end of the guide rail 2, and the light beam emitted by the collimator 10 can be directly irradiated on the reflector 4 without passing through the refracting mirror. At the same time, when the collimator 10 performs parallelism detection on multiple groups of guide rails 2, the adjustment component 8 can drive the collimator 10 to move, so that the collimator 10 can move to the end of the guide rail 2 to be detected, without pushing the base 5 as a whole to move the collimator 10, which is more convenient and labor-saving when used; 2. Through the connection between the longitudinal adjustment component 6 and the lateral adjustment component 8, the longitudinal adjustment component 6 is located at the bottom of the lateral adjustment component 8, and the longitudinal adjustment component 6 is reversed inside the base 5. The staff can directly rotate the longitudinal adjustment component 6 on the side of the base 5. The lateral adjustment component 8 and the collimator 10 can be raised and lowered, which is more convenient to use; 3. Through the connection between the bolt 904 and the fixed roller 901, when one end of the bolt 904 is against the outer surface of the fixed roller 901, there is a large friction between the bolt 903 and the fixed roller 901, which can prevent the connection plate 903 and the fixed roller 901 from rotating. When leveling is required, the bolt 904 is rotated to separate it from the fixed roller 901, and the connection plate 903 can be pushed to rotate around the pin 902 on the fixed roller 901. When the connection plate 903 and the connection seat 905 rotate, the horizontal angle of the connection seat 905 can be determined by observing the level bubble 906. To release the limit on the connection seat 905, you only need to make the bolt 904 slightly away from the fixed roller 901, which is more convenient to use.

[0041] In the description of this specification, the description with reference to the terms "one embodiment", "example", "specific example", etc. means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the utility model. In this specification, the schematic representation of the above terms does not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described can be combined in any one or more embodiments or examples in a suitable manner.

[0042] The preferred embodiments of the utility model disclosed above are only used to help explain the utility model. The preferred embodiments do not describe all the details in detail, nor do they limit the utility model to the specific implementation methods described. Obviously, many modifications and changes can be made according to the content of this specification. This specification selects and specifically describes these embodiments in order to better explain the principles and practical applications of the utility model, so that technicians in the relevant technical field can well understand and use the utility model. The utility model is limited only by the claims and their full scope and equivalents.

Claims

1. A parallel detection system for a linear guide rail of an ultra-high precision positioning platform, comprising a base platform (1), characterized in that: A guide rail (2) is arranged on the top of the base (1), a slider (3) is slidably connected to the outer surface of the guide rail (2), a reflector (4) is fixedly mounted on the top of the slider (3), a base (5) is arranged on the side of the base (1), a longitudinal adjustment component (6) and a guide component (7) are arranged inside the base (5), the tops of the longitudinal adjustment component (6) and the guide component (7) are fixedly connected to a transverse adjustment component (8), the top of the transverse adjustment component (8) is fixedly connected to a rotating component (9), and the top of the rotating component (9) is fixedly mounted to a collimator (10).

2. The parallel detection system of the linear guide rail of an ultra-high precision positioning stage according to claim 1 is characterized in that: The longitudinal adjustment component (6) comprises a rotating shaft (601), wherein the rotating shaft (601) is rotatably connected to the inside of the base (5), and the end of the rotating shaft (601) is fixedly connected to a first bevel gear (602), and the outer surface of the first bevel gear (602) is meshed with a second bevel gear (603), and the outer surface of the second bevel gear (603) is fixedly connected to a longitudinal screw rod (604), and the outer surface of the longitudinal screw rod (604) is threadedly connected to a screw barrel (605), and the screw barrel (605) is fixedly connected to the bottom of the transverse adjustment component (8).

3. The parallel detection system of the linear guide rail of an ultra-high precision positioning stage according to claim 2, characterized in that: The guide assembly (7) comprises a guide rod (701), the lower end of the guide rod (701) is fixedly connected to a limit plate (702), the upper end of the guide rod (701) is fixedly connected to the bottom of the lateral adjustment assembly (8), a circular hole (703) is provided inside the base (5), and the guide rod (701) and the limit plate (702) are both slidably connected inside the circular hole (703).

4. The parallel detection system of the linear guide rail of an ultra-high precision positioning stage according to claim 3 is characterized in that: The lateral adjustment assembly (8) comprises a lifting platform (801), the bottom of which is fixedly connected to a screw barrel (605) and a guide rod (701), a sliding groove (802) is provided on the outer surface of the lifting platform (801), a lateral screw rod (803) is rotatably connected inside the sliding groove (802), a sliding seat (804) is threadedly connected to the outer surface of the lateral screw rod (803), and the sliding seat (804) is slidably connected inside the sliding groove (802).

5. The parallel detection system of the linear guide rail of an ultra-high precision positioning stage according to claim 4, characterized in that: The rotating assembly (9) comprises a fixed roller (901), wherein the fixed roller (901) is fixedly connected to the top of the sliding seat (804), the outer surface of the fixed roller (901) is fixedly connected to a pin shaft (902), the outer surface of the pin shaft (902) is rotatably connected to a connecting plate (903), the outer surface of the connecting plate (903) is threadedly connected to a bolt (904), the top of the connecting plate (903) is fixedly connected to a connecting seat (905), and the outer surface of the connecting seat (905) is fixedly connected to a level bubble (906).

6. The parallel detection system of the ultra-high precision positioning stage linear guide according to claim 1, characterized in that: The interior of the base (5) is slidably connected to a drawer (11), the outer surface of the drawer (11) is fixedly connected to a handle (12), and the bottom of the base (5) is fixedly mounted with a pulley (13).

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