A fiber-optic multi-wavelength Raman microscope

Abstract

The utility model discloses an optical fiber multi-wavelength micro Raman spectrometer, comprising an incident optical fiber, a first collimating mechanism, a first filtering mechanism, a first reflecting mechanism, an objective lens assembly, a second filtering mechanism, a second reflecting mechanism, a Raman excitation collection module and a microscopic illumination module; the Raman excitation collection module comprises an output optical fiber, the microscopic illumination module comprises a microscopic imaging mechanism, and the second filtering mechanism and the second reflecting mechanism are both connected with a switching mechanism; after the excitation light or the illumination light enters from the incident optical fiber, it passes through the first collimating mechanism, the first filtering mechanism and the first reflecting mechanism in sequence, and then is focused by the objective lens assembly and irradiated onto a sample; when the second filtering mechanism cuts into the optical path, the stimulated light generated by the sample under the irradiation of the excitation light passes through the objective lens assembly, the first reflecting mechanism, the second filtering mechanism and the output optical fiber in sequence, and when the second reflecting mechanism cuts into the optical path, the illumination light scattered by the sample passes through the objective lens assembly, the first reflecting mechanism and the second reflecting mechanism and then enters the microscopic imaging mechanism.

Description

Technical Field

[0001] The utility model relates to a Raman spectrometer, in particular to an optical fiber multi-wavelength microscopic Raman spectrometer, belonging to the technical field of spectrometers. Background Art

[0002] Raman spectroscopy is a non-contact material detection method that is widely used in many fields such as material analysis and component identification. Raman spectroscopy reflects the molecular structure information of the sample by detecting the spectrum of laser-excited anti-Stokes photons. Microscopic Raman spectroscopy can directly observe and adjust the focus and position of Raman samples through microscopic imaging, which improves the accuracy and convenience of sample focusing and detection.

[0003] Existing micro-Raman spectrometers can be stacked in multiple layers. The bottom layer is a microscopic illumination module, and each upper layer is a Raman excitation collection module of one wavelength. Stacking multiple layers can achieve multi-wavelength Raman excitation collection and microscopic observation. This design is widely used in the field of Raman spectroscopy detection due to its easy expansion design.

[0004] However, this stacking design has a problem: when the upper layer is stacked, its weight will cause a slight deformation of the lower structure, which will cause the imaging of the microscopic illumination module to change and become unclear. Moreover, after stacking, the upper layer needs to be removed to adjust the lower layer, which is very inconvenient and will cause the optical path of the upper layer to change. Utility Model Content

[0005] In view of the shortcomings of the prior art, the purpose of the utility model is to provide a fiber-optic multi-wavelength micro-Raman spectrometer that integrates the Raman excitation and collection devices of multi-wavelength lasers on the same optical path through optical fibers and separates the modules of microscopic illumination for easy adjustment.

[0006] In order to achieve the above-mentioned utility model purpose, the technical solution adopted by the utility model includes:

[0007] A fiber-type multi-wavelength micro-Raman spectrometer comprises an incident optical fiber, a first collimation mechanism, a first filtering mechanism, a first reflecting mechanism, an objective lens assembly, a second filtering mechanism, a second reflecting mechanism, a Raman excitation collection module and a microscopic illumination module; the incident optical fiber has a plurality of light incident ends and a light output end, the Raman excitation collection module comprises an output optical fiber, the microscopic illumination module comprises a microscopic imaging mechanism, and the second filtering mechanism and the second reflecting mechanism are both connected to a switching mechanism.

[0008] The excitation light or illumination light emitted by the light source enters the incident optical fiber from at least one of the light incident ends and then exits from the light exit end, and then passes through the first collimation mechanism, the first filtering mechanism and the first reflecting mechanism in sequence, and then is focused by the objective lens assembly and irradiated onto the sample; when the switching mechanism switches the second filtering mechanism into the optical path, the stimulated light generated by the sample under the irradiation of the excitation light passes through the objective lens assembly, the first reflecting mechanism, the second filtering mechanism and the output optical fiber in sequence and then enters the Raman spectrum detection mechanism, and when the switching mechanism switches the second reflecting mechanism into the optical path, the illumination light scattered by the sample passes through the objective lens assembly, the first reflecting mechanism and the second reflecting mechanism in sequence and then enters the microscopic imaging mechanism.

[0009] Furthermore, the incident optical fiber, the Raman excitation collection module, and the microscopic illumination module are respectively arranged in the first area, the second area, and the third area, and any two of the first area, the second area, and the third area are isolated from each other.

[0010] Furthermore, the first reflecting mechanism comprises a perforated reflecting mirror, the center of which has a first through hole, the excitation light or illumination light output from the first filtering mechanism passes through the first through hole of the perforated reflecting mirror and the objective lens assembly in sequence and then irradiates the sample, the stimulated light generated by the sample under the irradiation of the excitation light passes through the objective lens assembly and the perforated reflecting mirror in sequence and then enters the second filtering mechanism, or the illumination light scattered by the sample passes through the objective lens assembly and the perforated reflecting mirror in sequence and then enters the second reflecting mechanism.

[0011] Furthermore, the first reflecting mechanism includes a first reflecting mirror and a third reflecting mirror, the third reflecting mirror is arranged between the first filtering mechanism and the objective lens assembly, the first reflecting mirror is arranged between the objective lens assembly and the second filtering mechanism or the second reflecting mechanism, the excitation light or illumination light output from the first filtering mechanism passes through the third reflecting mirror and the objective lens assembly in sequence and then irradiates the sample, the stimulated light generated by the sample under the irradiation of the excitation light passes through the objective lens assembly and the first reflecting mirror in sequence and then enters the second filtering mechanism, or the illumination light scattered by the sample passes through the objective lens assembly and the first reflecting mirror in sequence and then enters the second reflecting mechanism.

[0012] Furthermore, the first collimating mechanism includes a first off-axis parabolic mirror.

[0013] Furthermore, the objective lens assembly includes a plurality of objective lenses and an objective lens disk for switching the plurality of objective lenses.

[0014] Furthermore, the first filtering mechanism includes a narrowband filter wheel, the narrowband filter wheel includes multiple narrowband filters and a filter switching mechanism, each narrowband filter is matched with a corresponding excitation light, and the filter switching mechanism is connected to multiple narrowband filters for moving and switching different narrowband filters into the light path respectively.

[0015] Furthermore, the second filtering mechanism includes a filter group installed on a filter wheel; the second reflecting mechanism includes a second reflecting mirror, the second reflecting mirror is connected to the filter wheel, and the switching mechanism is at least used to drive the filter wheel to rotate.

[0016] Furthermore, the filter wheel is also provided with a lens adjustment component for adjusting the inclination angle of the filter group or the second reflector.

[0017] Furthermore, the sample is arranged on a movable sample carrying mechanism.

[0018] Furthermore, the Raman excitation collection module also includes a second off-axis parabolic mirror for reflecting the Raman signal.

[0019] Furthermore, the microscopic illumination module further comprises an imaging lens group, and the imaging lens group is arranged between the microscopic imaging mechanism and the second reflector.

[0020] Compared with the prior art, the advantages of the utility model include:

[0021] 1) The utility model provides an optical fiber multi-wavelength micro-Raman spectrometer, which integrates the Raman excitation and collection devices of multi-wavelength lasers on the same optical path through optical fibers, and separates the modules of micro-illumination for easy adjustment, thus solving the problems of deformation of the lower optical path due to the weight of the stacked upper optical path and the need to remove the upper optical path to adjust the lower optical path.

[0022] 2) The optical fiber multi-wavelength Raman microscope provided by the utility model combines multiple optical paths into one by using an all-in-one incident optical fiber, which can simplify the optical path, improve the compactness of the device, and improve the portability of the system. At the same time, it eliminates the trouble of adjusting and calibrating multiple optical paths. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] Figure 1 It is a schematic diagram of the Raman excitation acquisition mode of the first embodiment provided by the utility model;

[0024] Figure 2 It is a schematic diagram of the microscopic illumination mode of the first embodiment provided by the utility model;

[0025] Figure 3 It is a schematic diagram of the light incident end provided by the utility model having three optical fibers incident thereon;

[0026] Figure 4 This is a schematic structural diagram of the first reflection mechanism of the second embodiment provided by the present utility model;

[0027] Figure 5 It is a structural schematic diagram of the second light filtering mechanism provided by the utility model;

[0028] Figure 6 It is a schematic diagram of the positions of the first area, the second area and the third area in a fiber-optic multi-wavelength micro-Raman spectrometer provided by the utility model;

[0029] Explanation of the reference numerals in the accompanying drawings: 1. Input optical fiber; 2. First off-axis parabolic mirror; 3. First filtering mechanism; 4. Perforated reflector; 5. Objective lens unit; 6. Sample; 8. Second off-axis parabolic mirror; 9. Output optical fiber; 10. Imaging lens group; 11. Microscopic imaging mechanism; 12. First reflector; 13. Third reflector; 71. First filter; 72. Second reflector; 73. First filter wheel; 74. Lens adjustment assembly; 75. Switching mechanism; 100. First area; 200. Second area; 300. Third area. DETAILED DESCRIPTION

[0030] In view of the deficiencies in the prior art, the inventor of the present invention has proposed the technical solution of the present invention after long-term research and extensive practice. The technical solution, its implementation process and principle will be further explained as follows.

[0031] The utility model provides an optical fiber multi-wavelength micro Raman spectrometer, comprising an incident optical fiber 1, a first collimation mechanism 2, a first filter mechanism 3, a first reflection mechanism, an objective lens assembly 5, a second filter mechanism, a second reflection mechanism, a Raman excitation collection module and a microscopic illumination module; the incident optical fiber 1 has a plurality of light incident ends and a light output end, the Raman excitation collection module comprises an output optical fiber 9, the microscopic illumination module comprises a microscopic imaging mechanism 11, and the second filter mechanism and the second reflection mechanism are both connected to a switching mechanism;

[0032] The excitation light or illumination light emitted by the light source enters the incident optical fiber 1 from at least one of the light incident ends and then exits from the light output end, and then passes through the first collimation mechanism 2, the first filtering mechanism 3 and the first reflecting mechanism in sequence, and then is focused by the objective lens assembly 5 and irradiated onto the sample; when the switching mechanism switches the second filtering mechanism into the light path, the stimulated light generated by the sample under the irradiation of the excitation light passes through the objective lens assembly, the first reflecting mechanism, the second filtering mechanism and the output optical fiber 9 in sequence and then enters the Raman spectrum detection mechanism, and when the switching mechanism switches the second reflecting mechanism into the light path, the illumination light scattered by the sample passes through the objective lens assembly, the first reflecting mechanism and the second reflecting mechanism in sequence and then enters the microscopic imaging mechanism.

[0033] The incident optical fiber is formed by fusing N multimode optical fibers into one optical fiber. Multiple optical fibers can input lasers and illumination white light of different wavelengths respectively, and the light incident end inputs the combined light into the micro Raman system. Combining multiple optical paths into one can simplify the optical path and improve the compactness of the equipment. At the same time, it eliminates the trouble of adjusting and calibrating multiple optical paths. In the utility model, the incident optical fiber (multiple light incident ends and one light output end), the first collimation mechanism, the first filtering mechanism, the first reflection mechanism, the second filtering mechanism and the Raman acquisition module are assembled on the same layer, which solves the problem of affecting the optical path when the existing design is stacked.

[0034] The optical fibers input at the light incident end can be three, four or more, and more wavelengths of lasers can be added, or multi-channel white light input can be mixed to increase the illumination intensity.

[0035] like Figure 3 Taking three optical fibers as an example, optical fiber 1000 and optical fiber 2000 correspond to two laser inputs of different wavelengths. Lasers are coupled into optical fibers from different fiber lasers and beam-combined into a single end. Optical fiber 3000 is the input end of the illumination light. Broadband illumination light is coupled into the optical fiber and enters the system optical path from the light incident end to achieve illumination.

[0036] like Figure 6 As shown, the incident optical fiber 1, the Raman excitation collection module, and the microscopic illumination module are respectively arranged in the first area 100, the second area 200, and the third area 300, and any two of the first area 100, the second area 200, and the third area 300 are isolated from each other.

[0037] In the utility model, any two of the incident optical fiber, the Raman excitation collection module and the microscopic illumination module are isolated from each other, which is convenient for adjustment and solves the problem that the adjustment needs to be repeatedly disassembled.

[0038] Specifically, in one embodiment, Figure 1 As shown, the first reflection mechanism includes a perforated reflector 4, the center of which has a first through hole. The laser or illumination light output from the first filter mechanism passes through the first through hole of the perforated reflector and the objective lens assembly 5 and then irradiates the sample; the stimulated light generated by the sample under the irradiation of the excitation light passes through the objective lens assembly 5 and the perforated reflector 4 in sequence and then enters the second filter mechanism, or the illumination light scattered by the sample passes through the objective lens assembly 5 and the perforated reflector 4 in sequence and then enters the second reflection mechanism. Since the laser beam is narrow and the scattered Raman signal has a large aperture, it can be reflected by the perforated reflector 4. Preferably, the perforated reflector 4 should be elliptical so as to make full use of the aperture of the optical path.

[0039] Specifically, in another embodiment, Figure 4As shown, the first reflecting mechanism includes a first reflecting mirror 12 and a third reflecting mirror 13, the third reflecting mirror 13 is arranged between the first filtering mechanism 3 and the objective lens assembly 5, and the first reflecting mirror 12 is arranged between the objective lens assembly 5 and the second filtering mechanism or the second reflecting mechanism. The excitation light or illumination light output from the first filtering mechanism 3 passes through the third reflecting mirror 13 and the objective lens assembly 5 in sequence and then irradiates the sample, and the stimulated light generated by the sample under the irradiation of the excitation light passes through the objective lens assembly 5 and the first reflecting mirror 12 in sequence and then enters the second filtering mechanism, or the illumination light scattered by the sample passes through the objective lens assembly 5 and the first reflecting mirror 12 in sequence and then enters the second reflecting mechanism.

[0040] Specifically, the first collimation mechanism is at least used to collimate the laser and / or illumination light input from the light incident end, and to reflect the laser and / or illumination light; specifically, the first collimation mechanism includes a first off-axis parabolic mirror 2 or a reflector, and preferably, the first collimation mechanism includes a first off-axis parabolic mirror 2, because the off-axis parabolic mirror has a more ideal collimation effect than a concave spherical reflector.

[0041] The first filtering mechanism 3 includes a narrowband filter wheel, which includes multiple narrowband filters and a filter switching mechanism. Each narrowband filter is matched with a corresponding excitation light. The filter switching mechanism is connected to multiple narrowband filters and is used to move and switch different narrowband filters into the light path respectively.

[0042] The narrowband filter is at least used to passivate the laser wavelength reflected by the first collimation mechanism, and the filter switching mechanism is at least used to drive the narrowband filter wheel to rotate, so as to passivate the laser wavelength of the passing laser or allow the passing illumination light to pass directly.

[0043] The narrowband filter wheel is provided with a plurality of holes, the narrowband filters are fixed in the holes, at least one of the holes is not provided with a narrowband filter, and the narrowband filter wheel drives the narrowband filter to rotate under the drive of the filter switching mechanism, so that different narrowband filters or empty positions are moved into the optical path. The filter switching mechanism includes a steering gear or a motor, or other structures that can drive the filter wheel to rotate. The empty positions mentioned here are holes where no narrowband filters are installed. The laser reflected by the first collimation mechanism needs to pass through a narrowband filter for laser wavelength passivation, while the illumination light reflected by the first collimation mechanism does not need to pass through a narrowband filter, but directly enters the objective lens unit 5 through the empty positions.

[0044] The utility model can be applicable to lasers of different wavelengths. The filter switching mechanism can passivate lasers of different wavelengths and allow illumination light to pass through, replacing the existing stacked multi-layer laser Raman signal acquisition module, simplifying the structure of the spectrometer, and solving the problem of unclear imaging caused by stacking.

[0045] In some embodiments, the objective lens unit 5 is at least used to focus the incident laser and / or illumination light on the sample 6. Specifically, the objective lens unit 5 includes multiple objective lenses and an objective lens disk for switching multiple objective lenses. The objective lens is used to focus the incident laser or illumination light on the surface of the sample 6. The objective lens disk is used to switch the objective lens. The laser focused on the surface of the sample 6 will excite the Raman signal. A sample carrying mechanism is provided on one side of the sample 6, and the sample carrying mechanism should have the function of moving the sample 6 for focusing and position adjustment of the sample 6.

[0046] In some embodiments, the second filtering mechanism includes a filter group 71 installed on a filter wheel; the filter group includes multiple first filters, at least two of which filter different laser wavelengths, and different first filters correspond to corresponding laser wavelengths, which are used to separate laser and Raman signals. The laser is filtered out after passing through the first filter, and the Raman signal passes through.

[0047] The second reflection mechanism includes a second reflection mirror 72, which is connected to the filter wheel. The switching mechanism is at least used to drive the filter wheel to rotate. Under the drive of the switching mechanism, the first filter or the second reflection mirror corresponding to different wavelengths enters the optical path. The laser reflected by the first reflection mechanism enters the Raman excitation acquisition module through the filter group. The illumination light reflected by the first reflection mechanism enters the microscopic illumination module through the second reflection mirror 72. The filter wheel 73 is provided with a plurality of through holes, and each of the first filters is arranged in a through hole. A switching mechanism 75 for driving the filter wheel 73 to rotate is provided on one side of the filter wheel 73. The switching mechanism 75 includes a steering gear or a motor, and can also be other structures that can drive the filter wheel to rotate.

[0048] On the basis of the above, a lens adjustment component 74 for adjusting the tilt angle of the first filter or the second reflector 72 is provided on the filter wheel 73 , one end of the lens adjustment component 74 is connected to the filter wheel 73 , and the other end is connected to the first filter or the second reflector 72 .

[0049] In some embodiments, the Raman excitation acquisition module also includes a second off-axis parabolic mirror 8 for reflecting the Raman signal. The second off-axis parabolic mirror can eliminate chromatic aberration and improve the focusing / collimation effect. The optical fiber output from the optical fiber output end can be a multimode optical fiber or a fiber bundle. Preferably, it is a circular optical fiber bundle, and the optical fiber bundle is arranged in a circle at the focus of the second off-axis parabolic mirror 8 to improve the signal collection efficiency. The other end is input to the entrance slit of the spectrometer, which is a linear arrangement, and the line is parallel to the entrance slit of the spectrometer. In order to improve the detection efficiency without affecting the spectral detection resolution.

[0050] In some embodiments, the microscopic illumination module further includes an imaging lens group 10 and a polarizer, the imaging lens group 10 is disposed between the microscopic imaging mechanism 11 and the second reflector 72, the imaging lens group 10 and the polarizer are disposed along a selected direction, so that the illumination light reflected by the first reflection mechanism passes through the lens group and the polarizer, the selected direction mentioned here is the direction of propagation of the illumination light, that is, the illumination light reflected by the first reflection mechanism can first pass through the imaging lens group 10 and then pass through the polarizer, and finally enter the microscopic imaging mechanism 11; or the illumination light reflected by the first reflection mechanism can first pass through the polarizer and then pass through the imaging lens group 10, and finally enter the microscopic imaging mechanism 11. Specifically, the microscopic imaging mechanism 11 includes one or both of a camera and an eyepiece.

[0051] Embodiment 1:

[0052] like Figure 1 As shown, a fiber-optic multi-wavelength micro-Raman spectrometer includes an incident optical fiber 1, a first off-axis parabolic mirror 2, a first filtering mechanism 3, a reflector with a hole 4, an objective lens assembly 5, a second filtering mechanism, a second reflecting mechanism, a Raman excitation collection module and a microscopic illumination module; the incident optical fiber 1 has a plurality of light incident ends and a light output end, the Raman excitation collection module includes an output optical fiber 9, the microscopic illumination module includes a microscopic imaging mechanism 11, and the second filtering mechanism and the second reflecting mechanism are both connected to the switching mechanism;

[0053] The excitation light or illumination light emitted by the light source enters the incident optical fiber 1 from the three light incident ends and then exits from the light output end, and then passes through the first collimating mechanism 2, the first filtering mechanism 3 and the holed reflector 4 in sequence, and then is focused by the objective lens assembly 5 and irradiated onto the sample; when the switching mechanism switches the second filtering mechanism into the light path, the stimulated light generated by the sample under the irradiation of the excitation light passes through the objective lens assembly 5, the holed reflector 4, the second filtering mechanism and the output optical fiber 9 in sequence and then enters the Raman spectrum detection mechanism, and when the switching mechanism switches the second reflecting mechanism into the light path, the illumination light scattered by the sample passes through the objective lens assembly 5, the holed reflector 4 and the second reflecting mechanism in sequence and then enters the microscopic imaging mechanism.

[0054] The first filtering mechanism 3 includes a narrowband filter wheel, which includes multiple narrowband filters and a filter switching mechanism. Each narrowband filter is matched with a corresponding excitation light. The filter switching mechanism is connected to multiple narrowband filters and is used to move and switch different narrowband filters into the light path respectively.

[0055] The objective lens unit 5 includes a plurality of objective lenses and an objective lens disk.

[0056] The center of the perforated reflector is provided with a first through hole, and the excitation light or illumination light output from the first filtering mechanism passes through the first through hole of the perforated reflector and the objective lens assembly in sequence and then irradiates the sample, and the stimulated light generated by the sample under the irradiation of the excitation light passes through the objective lens assembly and the perforated reflector in sequence and then enters the second filtering mechanism, or the illumination light scattered by the sample passes through the objective lens assembly and the perforated reflector in sequence and then enters the second reflecting mechanism.

[0057] The first filtering mechanism comprises a filter wheel 73 , which is provided with a plurality of through holes, each of which is provided with a first filter or a second reflector 72 , and a motor for driving the filter wheel 73 to rotate is provided on one side of the filter wheel 73 .

[0058] like Figure 1 As shown, the laser / illumination light enters the spectrometer through the light incident end, the laser or illumination light is collimated by the first off-axis parabolic mirror 2 and reflected downward, the laser wavelength is passivated by a narrow-band filter, and the collimated laser / illumination light is incident downward into the objective lens unit 5 through the central hole of the perforated reflector 4, and the objective lens focuses the incident laser / illumination light on the surface of the sample 6.

[0059] When the laser is incident, Figure 1 As shown, the laser focused on the surface of the sample 6 excites the Raman signal, and the Raman signal returns, is collimated by the objective lens, and then reflected by the holed reflector 4. The motor drives the filter wheel 73 to rotate, so that the first filter of the corresponding wavelength enters the optical path, the laser is filtered out, and the Raman signal enters the output optical fiber 9 after focusing and coupling through the second off-axis parabolic mirror 8.

[0060] like Figure 2As shown, when microscopic imaging is required, the illumination light enters the spectrometer through the light incident end, is collimated by the first off-axis parabolic mirror 2, and is reflected downward. The steering gear drives the narrow-band filter wheel to rotate, so that the empty position moves to the optical path, and the illumination light enters the objective lens 5 through the hole in the center of the perforated reflector 4, and then focuses on the surface of the sample 6. The illumination light scattered by the sample 6 returns and is collimated by the objective lens 5. At this time, the filter wheel 73 switches the second reflector 72 into the optical path. The second reflector 72 is at an angle of 45° with the optical path. The illumination light reflected by the perforated reflector 4 passes through the second reflector 72 and is reflected upward by the second reflector 72, and enters the microscopic imaging mechanism 11 through the imaging lens group 10.

[0061] Embodiment 2:

[0062] like Figure 4 As shown, a fiber-optic multi-wavelength micro-Raman spectrometer includes an incident optical fiber 1, a first off-axis parabolic mirror 2, a first filtering mechanism 3, a third reflecting mirror 13, an objective lens assembly 5, a first reflecting mirror 12, a second filtering mechanism, a second reflecting mechanism, a Raman excitation collection module and a microscopic illumination module; the incident optical fiber 1 has a plurality of light incident ends and a light output end, the Raman excitation collection module includes an output optical fiber 9, the microscopic illumination module includes a microscopic imaging mechanism 11, and the second filtering mechanism and the second reflecting mechanism are both connected to the switching mechanism;

[0063] The excitation light or illumination light emitted by the light source enters the incident optical fiber 1 from the light incident end and then exits from the light exit end, and then passes through the first collimating mechanism 2, the first filtering mechanism 3 and the third reflecting mirror 13 in sequence, and then is focused by the objective lens assembly 5 and irradiated onto the sample; when the switching mechanism switches the second filtering mechanism into the optical path, the stimulated light generated by the sample under the irradiation of the excitation light passes through the objective lens assembly, the first reflecting mirror 12, the second filtering mechanism and the Raman excitation collection module in sequence and then enters the Raman spectrum detection mechanism, and when the switching mechanism switches the second reflecting mechanism into the optical path, the illumination light scattered by the sample passes through the objective lens assembly, the first reflecting mirror 12 and the second reflecting mechanism in sequence and then enters the microscopic imaging mechanism.

[0064] It should be understood that the above embodiments are only for illustrating the technical concept and features of the utility model, and their purpose is to enable people familiar with the technology to understand the content of the utility model and implement it accordingly, and they cannot be used to limit the protection scope of the utility model. Any equivalent changes or modifications made according to the spirit of the utility model should be included in the protection scope of the utility model.

Claims

1. A fiber-optic multi-wavelength Raman microscope, characterized in that: The invention comprises an incident optical fiber (1), a first collimating mechanism (2), a first filtering mechanism (3), a first reflecting mechanism, an objective lens assembly (5), a second filtering mechanism, a second reflecting mechanism, a Raman excitation collection module and a microscopic illumination module; the incident optical fiber (1) has a plurality of light incident ends and a light output end, the Raman excitation collection module comprises an output optical fiber (9), the microscopic illumination module comprises a microscopic imaging mechanism (11), and the second filtering mechanism and the second reflecting mechanism are both connected to a switching mechanism; The excitation light or illumination light emitted by the light source enters the incident optical fiber (1) from at least one of the light incident ends and then exits from the light exit end, and then passes through the first collimating mechanism (2), the first filtering mechanism (3) and the first reflecting mechanism in sequence, and then is focused by the objective lens assembly (5) and irradiated onto the sample; when the switching mechanism switches the second filtering mechanism into the light path, the stimulated light generated by the sample under the irradiation of the excitation light passes through the objective lens assembly, the first reflecting mechanism, the second filtering mechanism and the output optical fiber (9) in sequence and then enters the Raman spectrum detection mechanism; and when the switching mechanism switches the second reflecting mechanism into the light path, the illumination light scattered by the sample passes through the objective lens assembly, the first reflecting mechanism and the second reflecting mechanism in sequence and then enters the microscopic imaging mechanism.

2. The optical fiber multi-wavelength Raman microscope according to claim 1, characterized in that: The incident optical fiber (1), the Raman excitation collection module, and the microscopic illumination module are respectively arranged in a first area (100), a second area (200), and a third area (300), and any two of the first area (100), the second area (200), and the third area (300) are isolated from each other.

3. The optical fiber multi-wavelength Raman microscope according to claim 1, characterized in that: The first reflection mechanism comprises a perforated reflection mirror, wherein the center of the perforated reflection mirror (4) has a first through hole, and the excitation light or illumination light output from the first filter mechanism passes through the first through hole of the perforated reflection mirror (4) and the objective lens assembly (5) in sequence before being irradiated onto the sample, and the stimulated light generated by the sample under the irradiation of the excitation light passes through the objective lens assembly (5) and the perforated reflection mirror (4) in sequence before entering the second filter mechanism, or the illumination light scattered by the sample passes through the objective lens assembly (5) and the perforated reflection mirror (4) in sequence before entering the second reflection mechanism.

4. The optical fiber multi-wavelength Raman microscope according to claim 1, characterized in that: The first reflection mechanism comprises a first reflection mirror (12) and a third reflection mirror (13); the third reflection mirror (13) is arranged between the first filter mechanism (3) and the objective lens assembly (5); the first reflection mirror (12) is arranged between the objective lens assembly (5) and the second filter mechanism or the second reflection mechanism; the excitation light or illumination light output from the first filter mechanism (3) passes through the third reflection mirror (13) and the objective lens assembly (5) in sequence and then irradiates the sample; the stimulated light generated by the sample under the irradiation of the excitation light passes through the objective lens assembly (5) and the first reflection mirror (12) in sequence and then enters the second filter mechanism; or the illumination light scattered by the sample passes through the objective lens assembly (5) and the first reflection mirror (12) in sequence and then enters the second reflection mechanism.

5. The optical fiber multi-wavelength Raman microscope according to claim 1, characterized in that: The first collimating mechanism (2) comprises a first off-axis parabolic mirror; And / or, the objective lens assembly (5) comprises a plurality of objective lenses and an objective lens disk for switching the plurality of objective lenses.

6. The optical fiber multi-wavelength Raman microscope according to claim 1, characterized in that: The first filtering mechanism (3) comprises a narrowband filter wheel, which comprises a plurality of narrowband filters and a filter switching mechanism, each narrowband filter is matched with a corresponding type of excitation light, and the filter switching mechanism is connected to the plurality of narrowband filters and is used to move and switch different narrowband filters into the light path respectively.

7. The optical fiber multi-wavelength Raman microscope according to claim 1, characterized in that: The second filtering mechanism comprises a filter group (71) mounted on a filter wheel; the second reflecting mechanism comprises a second reflecting mirror (72), the second reflecting mirror (72) is connected to the filter wheel, and the switching mechanism is at least used to drive the filter wheel to rotate; And / or, the filter wheel is also provided with a lens adjustment component (74) for adjusting the tilt angle of the filter group (71) or the second reflector (72).

8. The optical fiber multi-wavelength Raman microscope according to claim 1, characterized in that: The sample is arranged on a movable sample supporting mechanism.

9. The optical fiber multi-wavelength Raman microscope according to claim 1, characterized in that: The Raman excitation collection module also includes a second off-axis parabolic mirror (8) for reflecting the Raman signal.

10. The optical fiber multi-wavelength Raman microscope according to claim 7, characterized in that: The microscopic illumination module further comprises an imaging lens group (10), wherein the imaging lens group (10) is arranged between the microscopic imaging mechanism (11) and the second reflecting mirror (72).

Images