Reflection device and semiconductor process equipment

Abstract

The embodiment of the utility model provides a reflection device and semiconductor process equipment, and the reflection device comprises a cylinder body, a cover body, and a flange. A reflecting surface is arranged on the inner wall of the cylinder body, a first convex ring and a second convex ring are arranged on the outer wall of the cylinder body in the height direction of the cylinder body at intervals, the second convex ring is located above the first convex ring, the cover body is arranged outside the first convex ring and the second convex ring in a sleeving mode, and a cooling flow channel is defined by the cover body, the first convex ring, the second convex ring and the cylinder body; the flange is arranged outside the cylinder in a sleeving mode and comprises a first annular part and a second annular part which are connected, the first annular part extends in the height direction of the cylinder, the second annular part extends in the radial direction of the cylinder, and the end, facing the second convex ring, of the first annular part is borne by the second convex ring; and a joint between the first annular part and the second convex ring and a joint between the second convex ring and the cover body are blocked by the first annular welding flux.

Description

Technical Field

[0001] The present application relates to the field of semiconductor technology, and in particular to a reflection device and semiconductor process equipment. Background Art

[0002] In the process of implementing semiconductor technology, it is sometimes necessary to use a reflection device to evenly distribute the infrared light emitted by a heat source to a tray for carrying wafers within a specific range.

[0003] The reflector device includes a reflector tube, a mounting plate is sleeved on the outer side of the reflector tube, the mounting plate is sleeved outside the reflector tube, and the mounting plate and the reflector tube are connected by welding. Then, the reflector device can be installed and fixed by connecting the mounting plate to the installation base.

[0004] In the related art, when the mounting plate and the reflective tube are welded, the mounting plate is easily deformed, thereby causing the reflective tube to also deform, thereby affecting the reflection effect of infrared light. Utility Model Content

[0005] The embodiments of the present application provide a reflection device and a semiconductor process equipment to solve the problems existing in the background technology.

[0006] In a first aspect, an embodiment of the present application provides a reflection device.

[0007] The reflection device provided in the embodiment of the present application includes: a cylinder, a cover body and a flange; the inner wall of the cylinder is provided with a reflection surface, the outer wall of the cylinder is provided with a first convex ring and a second convex ring at intervals along the height direction of the cylinder, the second convex ring is located above the first convex ring, the cover body is sleeved outside the first convex ring and the second convex ring, and the cover body, the first convex ring, the second convex ring and the cylinder form a cooling channel; the flange is sleeved outside the cylinder, the flange includes a first annular portion and a second annular portion connected to each other, the first annular portion extends along the height direction of the cylinder, the second annular portion extends along the radial direction of the cylinder, and the end of the first annular portion facing the second convex ring is supported by the second convex ring; the joint between the first annular portion and the second convex ring, and the joint between the second convex ring and the cover body are both sealed by a first annular solder.

[0008] Optionally, a bearing platform protruding in the radial direction of the cylinder is provided at the lower end of the first convex ring, and the cover body is supported on the bearing platform.

[0009] Optionally, a joint between the cover body and the supporting platform is sealed by a second annular solder.

[0010] Optionally, a protrusion is further provided on the outer wall of the cylinder, and the protrusion is located between the first protruding ring and the second protruding ring, and a surface of the protrusion facing away from the cylinder abuts against the cover body.

[0011] Optionally, the protrusion includes a first extension section, a second extension section and a third extension section; the first extension section extends along the height direction of the cylinder, one end of the first extension section is connected to the first convex ring, and the other end of the first extension section is connected to the second convex ring; the second extension section extends along the height direction of the cylinder, the second extension section is spaced apart from the first extension section, the third extension section extends along the circumference of the cylinder, one end of the second extension section is connected to the second convex ring, the other end of the second extension section is connected to the end of the third extension section, and one end of the third extension section facing away from the second extension section is spaced apart from the side of the first extension section facing away from the second extension section.

[0012] Optionally, the cover body is provided with a first perforation and a second perforation, and the first perforation and the second perforation are both connected to the cooling channel; the cover body is provided with a connecting seat, and the connecting seat is provided with a water inlet and a water outlet, the water inlet is connected to the first perforation, and the water outlet is connected to the second perforation.

[0013] Optionally, a side wall of the second protruding ring facing away from the cylinder is flush with a side wall of the first annular portion facing away from the cylinder.

[0014] Optionally, a position of an end surface of the cover body facing the second annular portion is lower than a position of an end surface of the second convex ring facing the second annular portion.

[0015] Optionally, a distance between an end surface of the cover body facing the second annular portion and an end surface of the second protruding ring facing the second annular portion is 0.4 to 0.6 times the wall thickness of the cover body.

[0016] In a second aspect, an embodiment of the present application provides a semiconductor process equipment.

[0017] The semiconductor process equipment provided by the embodiments of the present application includes: any one of the reflection devices provided by the embodiments of the present application.

[0018] At least one of the above technical solutions adopted in the embodiments of the present application can achieve the following beneficial effects:

[0019] In the embodiment of the present application, since the second annular portion of the flange extends along the radial direction of the cylinder, the flange has a strong anti-deformation ability. Therefore, during the welding of the joint between the first annular portion and the second convex ring, and the joint between the second convex ring and the cover body, the flange can reduce the deformation of the welding part. In turn, the deformation of the cylinder can be reduced to achieve the effect of reducing the deformation of the reflective surface. Therefore, the problem that the reflective surface deformation caused by welding is large and affects the reflection effect of the reflective surface on infrared light can be improved. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] In order to more clearly illustrate the technical solutions in the embodiments of the present application or the related technologies, the drawings required for use in the embodiments or the related technical descriptions are briefly introduced below. Obviously, the drawings described below are only some embodiments recorded in the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative labor.

[0021] Figure 1 A schematic diagram of a reflection device provided in an embodiment of the present application;

[0022] Figure 2 A schematic diagram of a reflection device provided in an embodiment of the present application from another angle;

[0023] Figure 3 An exploded schematic diagram of a reflection device provided in an embodiment of the present application;

[0024] Figure 4 A partial schematic diagram of a cross-sectional view of a reflection device provided in an embodiment of the present application;

[0025] Figure 5 A partial schematic diagram of a reflection device provided in an embodiment of the present application;

[0026] Figure 6 A schematic diagram of a cylinder, flange and other structures of a reflection device provided in an embodiment of the present application;

[0027] Figure 7 A schematic diagram of a reflection device provided in an embodiment of the present application, showing Figure 1 The reflective device shown in the figure has a cover body hidden thereon;

[0028] Figure 8 A schematic diagram of a semiconductor process equipment provided in an embodiment of the present application.

[0029] Description of reference numerals:

[0030] 10-semiconductor process equipment; 100-reflection device; 110-cylinder; 111-reflection surface; 112-first convex ring; 113-second convex ring; 114-carrying platform; 115-protrusion; 1151-first extension section; 1152-second extension section; 1153-third extension section; 120-cover; 130-flange; 131-first annular portion; 132-second annular portion; 140-cooling channel; 151-first annular solder; 152-second annular solder; 160-connecting seat; 161-water inlet; 162-water outlet; 200-infrared heating lamp; 20-wafer tray. DETAILED DESCRIPTION

[0031] In order to make the purpose, technical solution and advantages of the present application clearer, the technical solution of the present application will be clearly and completely described below in combination with the specific embodiments of the present application and the corresponding drawings. Obviously, the described embodiments are only part of the embodiments of the present application, not all of the embodiments. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in this field without making creative work are within the scope of protection of the present application.

[0032] In the description of this application, it should be noted that, unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a direct connection, or an indirect connection through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in this application can be understood according to specific circumstances.

[0033] In addition, although the terms used in this application are selected from well-known and commonly used terms, some terms mentioned in the specification of this application may be selected by the applicant at his or her discretion, and their detailed meanings are explained in the relevant parts of the description of this article.

[0034] Furthermore, it is required that the present application be understood not only by the actual terms used but also by the meanings connoted by each term.

[0035] The technical solutions provided by various embodiments of the present application are described in detail below in conjunction with the accompanying drawings.

[0036] The embodiment of the present application provides a reflection device. Figures 1 to 8 The reflection device 100 provided in the embodiment of the present application includes: a cylinder 110, a cover 120 and a flange 130.

[0037] The inner wall of the cylinder 110 is provided with a reflective surface 111. Exemplarily, the reflective surface 111 can be formed on the inner wall of the cylinder 110 by plating a metal layer on the inner wall of the cylinder 110. Exemplarily, a gold layer can be plated on the inner wall of the cylinder 110.

[0038] Furthermore, the outer wall of the cylinder 110 is provided with a first convex ring 112 and a second convex ring 113 at intervals along the height direction of the cylinder 110. The second convex ring 113 is located above the first convex ring 112. The cover 120 is sleeved outside the first convex ring 112 and the second convex ring 113. Among them, the cover 120 is also annular, so that the cover 120 can be sleeved outside the first convex ring 112 and the second convex ring 113. The cover 120, the first convex ring 112, the second convex ring 113 and the cylinder 110 form a cooling channel 140. In this way, for example, the reflection device 100 can be cooled by conveying a cooling medium to the cooling channel 140 to prevent the cylinder 110 from being deformed due to heat, thereby causing the reflection surface 111 to be deformed.

[0039] Further, the flange 130 is sleeved outside the cylinder 110. The flange 130 includes a first annular portion 131 and a second annular portion 132 connected to each other. The first annular portion 131 extends along the height direction of the cylinder 110, and the second annular portion 132 extends along the radial direction of the cylinder 110. The end of the first annular portion 131 facing the second convex ring 113 is supported by the second convex ring 113. The joint between the first annular portion 131 and the second convex ring 113, and the joint between the second convex ring 113 and the cover body 120 are both blocked by the first annular solder 151. In other words, the joint between the first annular portion 131 and the second convex ring 113 is blocked by the first annular solder 151, and the joint between the second convex ring 113 and the cover body 120 is blocked by the first annular solder 151.

[0040] In this way, in the solution provided by the embodiment of the present application, since the second annular portion 132 of the flange 130 extends along the radial direction of the cylinder 110, the flange 130 has a strong anti-deformation ability. Therefore, during the welding process of the joint between the first annular portion 131 and the second convex ring 113, and the joint between the second convex ring 113 and the cover 120, the flange 130 can play the effect of reducing the deformation of the welding part. In turn, the deformation of the cylinder 110 can be reduced to achieve the effect of reducing the deformation of the reflective surface 111. Therefore, the problem that the deformation of the reflective surface caused by welding is large and affects the reflection effect of the reflective surface on infrared light can be improved.

[0041] refer to Figure 3 and Figure 4In some embodiments, the lower end of the first protruding ring 112 is provided with a bearing platform 114 protruding in the radial direction of the cylinder 110, and the cover 120 is carried on the bearing platform 114. In this way, the bearing platform 114 can be used to limit the cover 120, so as to facilitate welding the cover 120 to the outside of the cylinder 110.

[0042] refer to Figure 4 In some embodiments, the joint between the cover 120 and the carrier 114 is sealed by the second annular solder 152. In other words, the cover 120 and the carrier 114 can be welded. Furthermore, the second annular solder 152 produced by welding can seal the joint between the cover 120 and the carrier 114. In this way, the sealing effect of the cooling channel 140 can be improved.

[0043] refer to Figure 4 and Figure 6 In some embodiments, the outer wall of the cylinder 110 is further provided with a protrusion 115. The protrusion 115 is located between the first protruding ring 112 and the second protruding ring 113. The surface of the protrusion 115 facing away from the cylinder 110 abuts against the cover 120. In this way, the protrusion 115 provided between the first protruding ring 112 and the second protruding ring 113 can be used to guide the cooling medium delivered to the cooling channel 140, so as to facilitate the flexible adjustment of the heat dissipation effect of each area of ​​the reflection device 100 according to actual needs.

[0044] refer to Figure 6 In some embodiments, the protrusion 115 includes a first extension segment 1151 , a second extension segment 1152 , and a third extension segment 1153 .

[0045] Specifically, the first extension section 1151 extends along the height direction of the cylinder 110, one end of the first extension section 1151 is connected to the first convex ring 112, and the other end of the first extension section 1151 is connected to the second convex ring 113. The second extension section 1152 extends along the height direction of the cylinder 110, and the second extension section 1152 is spaced apart from the first extension section 1151. The third extension section 1153 extends along the circumferential direction of the cylinder 110. One end of the second extension section 1152 is connected to the second convex ring 113, and the other end of the second extension section 1152 is connected to the end of the third extension section 1153. One end of the third extension section 1153 that is away from the second extension section 1152 is spaced apart from the side of the first extension section 1151 that is away from the second extension section 1152. In this way, the protrusion 115 can be used to form a circuitous flow channel for the cooling channel 140, which can improve the heat dissipation effect.

[0046] For example, the first protruding ring 112 and the second protruding ring 113 may be integrally formed on the outer circumference of the barrel 110. In addition, the protrusion 115 may also be integrally formed on the outer circumference of the barrel 110. Figure 6A groove can be machined on the outer periphery of the blank of the cylinder by cutting, and the peripheral contours of the protrusions on the peripheral edge of the groove respectively form the first protruding ring 112, the second protruding ring 113 and the protrusion 115. Furthermore, the cover 120 can be sleeved outside the groove, and then the cover 120 and the groove wall of the groove can form a cooling channel 140.

[0047] In some embodiments, the cover 120 is provided with a first through hole and a second through hole, and both the first through hole and the second through hole are connected to the cooling channel 140. Figure 1 and Figure 7 , a connection seat 160 is provided outside the cover body 120. The connection seat 160 is provided with a water inlet 161 and a water outlet 162, the water inlet 161 is connected to the first perforation, and the water outlet 162 is connected to the second perforation. In this way, the external cooling medium can be transported to the cooling channel 140 through the water inlet 161 and the first perforation, and the cooling medium after absorbing heat can be discharged through the second perforation and the water outlet 162.

[0048] refer to Figure 5 In some embodiments, the side wall of the second protruding ring 113 facing away from the cylinder 110 is flush with the side wall of the first annular portion 131 facing away from the cylinder 110. In other words, the outer diameter of the second protruding ring 113 is equal to the outer diameter of the first annular portion 131. In this way, the first annular portion 131 and the second protruding ring 113 are easily welded.

[0049] refer to Figure 5 In some embodiments, the end surface of the cover 120 facing the second annular portion 132 is located lower than the end surface of the second protruding ring 113 facing the second annular portion 132. In this way, the joint between the first annular portion 131 and the second protruding ring 113, and the joint between the second protruding ring 113 and the cover 120 can be sealed by using the first annular solder 151 formed by welding.

[0050] refer to Figure 5 In some embodiments, the distance L between the end surface of the cover body 120 facing the second annular portion 132 and the end surface of the second protruding ring 113 facing the second annular portion 132 is 0.4 to 0.6 times the wall thickness M of the cover body 120. Figure 5 , the distance between the top surface of the cover body 120 and the top surface of the second convex ring 113 is 0.4 to 0.6 times the wall thickness of the cover body 120. Exemplarily, the wall thickness of the cover body 120 is 3 mm, and correspondingly, the distance between the top surface of the cover body 120 and the top surface of the second convex ring 113 can be 1.5 mm.

[0051] In order to facilitate those skilled in the art to understand the solution provided by the implementation of the present application, the structure and assembly method of the reflection device 100 are briefly described below in conjunction with the accompanying drawings.

[0052] refer to Figure 3The reflecting device 100 includes a cylinder 110, a cover 120 and a flange 130. A first convex ring 112 is provided at the lower end of the cylinder 110, and a second convex ring 113 is provided at the cylinder 110. The second convex ring 113 is located above the first convex ring 112. A bearing platform 114 protruding in the radial direction of the cylinder 110 is also provided at the lower end of the cylinder 110 where the first convex ring 112 is provided.

[0053] During the assembly of the reflection device 100, the cover 120 located above the cylinder 110 can be sleeved outside the first convex ring 112 and the second convex ring 113, and the cover 120 can be carried on the support platform 114. Further, the flange 130 can be sleeved outside the cylinder 110, and the flange 130 can be carried on the top of the second convex ring 113. Then, the joint between the first annular portion 131 and the second convex ring 113, and the joint between the second convex ring 113 and the cover 120 can be welded, so that the joint can be blocked by the first annular solder 151 formed by the welding process. In addition, the cover 120 and the support platform 114 can also be welded. Then, the second annular solder 152 produced by welding can block the joint between the cover 120 and the support platform 114. In this way, the sealing effect of the cooling channel 140 can be improved.

[0054] The present application embodiment provides a semiconductor process equipment. Figure 8 The semiconductor process equipment 10 provided in the embodiment of the present application includes any one of the reflection devices 100 provided in the embodiment of the present application. It should be noted that those skilled in the art generally refer to the reflection device 100 as a peripheral reflection screen.

[0055] Furthermore, the semiconductor process equipment 10 also includes an infrared heating lamp 200 . The infrared rays generated by the infrared heating lamp 200 can be reflected by the reflection surface 111 and directed toward the wafer carried on the wafer tray 20 .

[0056] Exemplarily, the semiconductor process equipment 10 may be a silicon epitaxial device. The working mode of the silicon epitaxial device can be understood as follows: based on the principle of chemical vapor deposition (CVD), the reaction gas is transported into the reaction chamber, and the reaction is caused by heating to deposit a layer of compound semiconductor film on the wafer substrate. The specific reaction of the silicon epitaxial reaction is to smoothly transport silicon source reaction gas such as silicon tetrahydride (SiH4) into the reaction chamber, decompose it to generate silicon (Si) atoms in an environment of 600 to 1000 degrees Celsius, and generate a flat epitaxial layer on the wafer substrate that is consistent with the original lattice structure.

[0057] It should be noted that, according to the solution provided in the embodiment of the present application, since the flange 130 includes a first annular portion 131 and a second annular portion 132 that are connected, the first annular portion 131 extends along the height direction of the cylinder 110, and the second annular portion 132 extends along the radial direction of the cylinder 110. In this way, the first annular portion 131 and the second annular portion 132 can play a role in strengthening the flange 130. Therefore, during the welding process, the second annular portion 132 is not easily deformed, and the flatness of the flange 130 can be guaranteed, which can eliminate the frequent assembly defects caused by welding deformation and improve the assembly positioning consistency of the reflection device 100.

[0058] In addition, during the welding process of the joint between the first annular portion 131 and the second convex ring 113, and the joint between the second convex ring 113 and the cover body 120, the flange 130 can reduce the deformation of the welding part. In turn, the deformation of the cylinder 110 can be reduced to achieve the effect of reducing the deformation of the reflecting surface 111. In this way, the problem in the related art that the reflecting surface of the cylinder is easily deformed and the cylindricality of the reflecting surface decreases can be improved. Therefore, by adopting the solution provided in the embodiment of the present application, the reflection effect of the reflecting surface on infrared light can be improved, so that the uniformity of the thermal field is guaranteed.

[0059] In addition, in practice, by adopting the solution provided in the embodiment of the present application, the bad return rate of the reflector 100 is reduced by 80%, and the overall equipment cost is reduced. The thermal deformation and impact deformation of the outer side of the cylinder 110 are basically eliminated.

[0060] It should be noted that, in this article, relational terms such as first and second, etc. are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Moreover, the terms "include", "comprise" or any other variants thereof are intended to cover non-exclusive inclusion, so that a process, method, article or device including a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such process, method, article or device.

[0061] Although the embodiments of the present application have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the embodiments of the present application, and the scope of the embodiments of the present application is defined by the appended claims and their equivalents.

Claims

1. A reflection device (100), characterized in that: include: A cylinder (110), a cover (120) and a flange (130); The inner wall of the cylinder (110) is provided with a reflecting surface (111); the outer wall of the cylinder (110) is provided with a first convex ring (112) and a second convex ring (113) at intervals along the height direction of the cylinder (110); the second convex ring (113) is located above the first convex ring (112); the cover (120) is sleeved outside the first convex ring (112) and the second convex ring (113); the cover (120), the first convex ring (112), the second convex ring (113) and the cylinder (110) form a cooling channel (140); The flange (130) is sleeved outside the cylinder (110), and the flange (130) includes a first annular portion (131) and a second annular portion (132) connected to each other, the first annular portion (131) extends along the height direction of the cylinder (110), and the second annular portion (132) extends along the radial direction of the cylinder (110), and the end of the first annular portion (131) facing the second convex ring (113) is supported by the second convex ring (113); the joint between the first annular portion (131) and the second convex ring (113), and the joint between the second convex ring (113) and the cover body (120) are both sealed by a first annular solder (151).

2. The reflecting device (100) according to claim 1, characterized in that: A bearing platform (114) is provided at the lower end of the first convex ring (112) and protrudes radially along the cylinder (110), and the cover body (120) is supported on the bearing platform (114).

3. The reflecting device (100) according to claim 2, characterized in that: The joint between the cover body (120) and the supporting platform (114) is sealed by a second annular solder (152).

4. The reflecting device (100) according to claim 1, characterized in that: The outer wall of the cylinder (110) is further provided with a protrusion (115), and the protrusion (115) is located between the first protruding ring (112) and the second protruding ring (113), and the surface of the protrusion (115) facing away from the cylinder (110) abuts against the cover (120).

5. The reflecting device (100) according to claim 4, characterized in that: The protrusion (115) comprises a first extension section (1151), a second extension section (1152) and a third extension section (1153); The first extension section (1151) extends along the height direction of the cylinder (110), one end of the first extension section (1151) is connected to the first convex ring (112), and the other end of the first extension section (1151) is connected to the second convex ring (113); The second extension section (1152) extends along the height direction of the cylinder (110), and the second extension section (1152) is spaced apart from the first extension section (1151). The third extension section (1153) extends along the circumferential direction of the cylinder (110), one end of the second extension section (1152) is connected to the second convex ring (113), and the other end of the second extension section (1152) is connected to the end of the third extension section (1153), and one end of the third extension section (1153) facing away from the second extension section (1152) is spaced apart from the side of the first extension section (1151) facing away from the second extension section (1152).

6. The reflecting device (100) according to claim 1, characterized in that: The cover body (120) is provided with a first through hole and a second through hole, and the first through hole and the second through hole are both connected to the cooling channel (140); a connecting seat (160) is provided outside the cover body (120), and the connecting seat (160) is provided with a water inlet (161) and a water outlet (162), the water inlet (161) is connected to the first through hole, and the water outlet (162) is connected to the second through hole.

7. The reflecting device (100) according to claim 1, characterized in that: The side wall of the second protruding ring (113) facing away from the cylinder (110) is flush with the side wall of the first annular portion (131) facing away from the cylinder (110).

8. The reflecting device (100) according to claim 1, characterized in that: The position of the end surface of the cover body (120) facing the second annular portion (132) is lower than the position of the end surface of the second convex ring (113) facing the second annular portion (132).

9. The reflecting device (100) according to claim 8, characterized in that: The distance between the end surface of the cover body (120) facing the second annular portion (132) and the end surface of the second protruding ring (113) facing the second annular portion (132) is 0.4 to 0.6 times the wall thickness of the cover body (120).

10. A semiconductor process equipment, characterized in that: The reflective device (100) comprises any one of claims 1 to 9.

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