Multi-axis wafer transmission equipment

Abstract

The utility model relates to multi-shaft wafer transmission equipment, which comprises a fixed shell, a PLC (Programmable Logic Controller), a plurality of sets of motors, a lead screw, a linear guide rail sliding table, a vacuum arm tooth fork, a rotating cylinder, a driving wheel, a driving belt and a sliding seat, a movable arm is also arranged; the fixed shell, the motor, the lead screw, the linear guide rail sliding table, the vacuum arm tooth fork, the rotating air cylinder, the transmission wheel, the transmission belt, the sliding seat and the movable arm are installed together. In the utility model, the first set of motor can drive the rotary cylinder and the vacuum arm fork to move up and down, and the second set of motor can drive the rotary cylinder and the vacuum arm fork to rotate clockwise or anticlockwise in the horizontal direction. And the third set of motor can control the rotating cylinder and the vacuum arm fork to change the length and the angle in the front-back direction through the four driving wheels A and the two annular driving belts A. According to the technical scheme, a wafer in the previous working procedure can be translated up and down according to needs and can be transferred to the next station through the vacuum arm fork by rotating a proper angle, and the working efficiency is improved. And the displacement requirement of wafer production is fully met.

Description

Technical Field

[0001] The utility model relates to the technical field of wafer production auxiliary equipment, in particular to multi-axis wafer transmission equipment. Background Art

[0002] Wafer refers to the silicon wafer used to make silicon semiconductor circuits. Its raw material is silicon. During production, high-purity polysilicon is dissolved and mixed with silicon crystal seeds, and then slowly pulled out to form a cylindrical single silicon crystal rod. After grinding, polishing, and slicing, the silicon crystal rod forms a silicon wafer, that is, a wafer. In various wafer production processes, it often involves transferring wafers placed from top to bottom in the previous process to the next station. In the prior art, a six-axis robot controlled by a PLC or a host computer is usually used, and the wafer is translated up or down or rotated by a certain angle to the next workstation through a vacuum arm fork or a mechanical clamp installed at the front end of its front robotic arm (the front end of the vacuum arm fork has a "U"-shaped fork, and the interior of the vacuum arm fork is a hollow structure. There is a vacuum suction port at each of the front two ends and the lower rear side of the fork, and a rubber suction cup port that communicates with the interior of the vacuum arm fork is provided under the suction port. There is an air intake pipe in the middle of the lower part of the rear end of the vacuum arm fork, and the air intake pipe and the vacuum pump air intake pipe controlled by the PLC or the host computer are connected through a strong hose. The vacuum arm fork is horizontally installed at the front end of the front robotic arm).

[0003] Although the six-axis robot based on PLC or host computer programming control can meet the actual production, it has the problems of complex structure, high cost (the price is at least tens of thousands of yuan) and large installation space, so it still has certain disadvantages in practical application. In summary, it is very necessary to provide a wafer transfer device that can realize the transfer of the wafer from the previous process to the next station by translation or rotation of a certain angle, and has a relatively simple and compact structure, low cost and relatively small space. Utility Model Content

[0004] In order to overcome the drawbacks of the existing six-axis robots for wafer production and wafer position transfer due to structural limitations as described in the background, the utility model provides a multi-axis wafer transfer device with the advantages of relatively simple and compact structure, low cost and small space. When working, under the joint action of relevant mechanisms, the wafer of the previous process can be translated up and down as needed, and rotated to a suitable angle and transferred to the next workstation through the vacuum arm fork, which fully meets the displacement needs of wafer production.

[0005] The technical solution adopted by the utility model to solve its technical problems is:

[0006] A multi-axis wafer transmission equipment, including a fixed shell, a PLC, a motor, a lead screw, a linear guide slide, a vacuum arm tooth fork, a rotating cylinder, a transmission wheel, a transmission belt, and a sliding seat, wherein there are multiple sets of motors; the characteristic is that it also has a movable arm; the upper end of the fixed shell has an opening, the shell of the linear guide slide is vertically installed at one end of the inner side of the fixed shell, one side of the sliding seat has a thread hole, and the lead screw and the sliding seat thread hole are connected together through threads; the sliding seat and the sliding block of the linear guide slide are installed together, the upper and lower ends of the lead screw are rotatably installed at the upper and lower parts of the other end of the inner side of the fixed shell, and the first set of motors is installed at the lower end of the fixed shell; there are at least two transmission wheels, and the first transmission wheel and the second transmission wheel are respectively installed at the lower ends of the rotating shaft of the first set of motors. , the lower end of the screw rod, the transmission belt ring is sleeved between the outer sides of the first and second transmission wheels, the lower end of the shell of the second set of motors is installed on the upper end of the sliding seat, the upper end of the second set of motors is installed with a fixed ring, and the lower end of the third set of motors is installed on the upper end of the fixed ring; the rotating shaft of the third set of motors is a hollow structure and a bearing is installed in the rotating shaft, the third set of motors is equipped with an upper support platform, and the middle part of the upper support platform is installed on the outer side of the rotating shaft of the third set of motors; the upper part of the rotating shaft of the second set of motors is installed in the inner ring of the bearing of the rotating shaft of the third set of motors and the upper end of the rotating shaft of the second set of motors is higher than the height of the upper support platform; the vacuum arm tooth fork and the rotating cylinder are installed at one end of the movable arm, and the other end of the movable arm is installed together with the upper support platform and the upper part of the rotating shaft of the second set of motors.

[0007] Furthermore, the outer diameters of the second set of motors and the fixing ring, and the third set of motors are smaller than the inner diameter of the opening in the middle of the upper end of the fixing shell.

[0008] Furthermore, the movable arm includes multiple cover shells, multiple transmission wheels A, and two transmission belts A. The lower end of one side of the first cover shell is installed on the outer side of the upper end of the upper support platform, and the first transmission wheel is installed on the rotating shaft of the second set of motors. Two bearings A are installed on the other side of the first cover shell. The shafts at the upper and lower ends of the second transmission wheel A are respectively installed in the inner rings of the two bearings A. The shaft at the upper end of the second transmission wheel A is a hollow structure, and a bearing B is installed inside. A connecting rod is installed in the inner ring of the bearing B. The third transmission wheel A is installed on the connecting rod. The lower end of one side of the second cover shell is installed on the outer side of the shaft at the upper end of the second transmission wheel A. The first transmission belt A is looped around the outer sides of the first transmission wheel A and the second transmission wheel A. Two bearings C are installed on one side of the second cover shell. The shafts at the upper and lower ends of the fourth transmission wheel A are respectively installed in the inner rings of the two bearings C. The second transmission belt A is looped around the outer sides of the third transmission wheel A and the fourth transmission wheel A. One side of the lower end of the third cover shell is installed on the shaft at the upper end of the fourth transmission wheel A.

[0009] Furthermore, the rotary cylinder is transversely mounted on the other side of the lower cover shell, and one end of the vacuum arm tooth fork is mounted together with the rotating shaft of the rotary cylinder.

[0010] The beneficial effects of the utility model are as follows: in the utility model, the first set of motors can drive the rotating cylinder, vacuum arm tooth fork, etc. to move up and down, the second set of motors can drive the rotating cylinder, vacuum arm tooth fork to rotate clockwise or counterclockwise horizontally, and the third set of motors can control the rotating cylinder, vacuum arm tooth fork to change the length and angle in the front and back directions through four transmission wheels A and two annular transmission belts A. Through the above technical scheme, the utility model can translate the wafer of the previous process up and down as needed, and rotate the appropriate angle to transfer it to the next station through the vacuum arm tooth fork, which fully meets the displacement needs of wafer production. Based on the above, the utility model has good application prospects. BRIEF DESCRIPTION OF THE DRAWINGS

[0011] The present invention will be further described below with reference to the accompanying drawings and embodiments.

[0012] Figure 1 , 2 It is a schematic diagram of the overall structure and the partially enlarged structure of the utility model.

[0013] Figure 3 This is an actual photo of the vacuum arm tooth fork used in the utility model. DETAILED DESCRIPTION

[0014] Figure 1 , 2As shown in, a multi-axis wafer transmission equipment includes a fixed shell 1, a PLC or a host computer (not shown in the figure; mature technology does not elaborate on the working principle in this application), a motor, a lead screw 2, a linear guide slide 3 (mature technology does not elaborate on the working principle in this application), a vacuum arm tooth fork 4 (mature technology does not elaborate on the working principle in this application), a rotary cylinder 5 (mature technology does not elaborate on the working principle in this application), a transmission wheel 6, an annular transmission belt 7, a sliding seat 8, a vacuum pump, and an air compressor. The motor has three sets, and the inlet and exhaust pipes at the left and right ends of the rotary cylinder 5 are each connected in series with an electromagnetic valve (not shown in the figure) and an air compressor (not shown in the figure; mature technology does not elaborate on the working principle in this application) The exhaust pipes of the gas storage tank are respectively connected through The hose is connected, and the multi-channel control power output end of the PLC or the upper computer (preferably the PLC) and the three sets of motors, the solenoid valve connected to the air inlet and exhaust pipes at the left and right ends of the rotating cylinder, and the power input end of the vacuum pump (not shown in the figure; the mature technology in this application does not repeat the working principle) are connected by wires respectively; it also has a movable arm; the fixed shell 1 has an opening 101 in the middle of the upper end, and there are two sets of linear guide slides 3. The shells of the two sets of linear guide slides 3 are vertically distributed and respectively installed vertically in the middle of the left and right ends of the fixed shell 1 by bolts. There is a threaded hole 81 that runs through from top to bottom on the right side of the front end of the sliding seat 8, and the lead screw 2 and the sliding seat threaded hole 81 are connected together by threads; the left and right sides of the sliding seat 8 are respectively connected to the two sets of linear guide slides The inner side of the sliding block 31 is bolted together, and a bearing seat 104 and a support seat 102 with open structures at the front and rear ends are bolted to the upper and lower parts of the right side of the front end of the fixed shell 1, and a bearing A103 is tightly installed in the middle of the support seat 102, and the upper and lower ends of the screw rod 2 are tightly sleeved in the bearing of the bearing seat 104 and the inner ring of the bearing A103 respectively; and the lower end of the screw rod 2 is located at the upper end of the support seat 102; a support shell 94 is bolted to the lower end of the shell of the first set of motors 91, and the lower end of the support shell 94 is bolted to the middle of the lower end of the fixed shell 1 and the front end of the support shell 94 is an open structure, there are two transmission wheels, the first transmission wheel 6 and the second transmission 6 are tightly sleeved and installed in the first set of motors 9 1, the lower end of the rotating shaft of the screw rod 8 (and the lower end of the fixed shell 1 is spaced apart), and the transmission belt 7 is tightly sleeved between the outer sides of the first and second transmission wheels 6; the lower end of the housing of the second motor 92 is bolted to the circular fixed platform 82 at the upper end of the sliding seat, and a circular hollow fixed ring 83 is welded to the outer side of the upper end of the housing of the second motor 92, and the lower end of the housing of the third motor 93 is bolted to the upper end of the fixed ring 83; the rotating shaft of the third motor 93 is a hollow structure and a bearing B96 is tightly sleeved on the upper and lower ends of the rotating shaft, respectively, and the third motor is equipped with a circular hollow upper support platform 95, and the middle openings of the upper and lower ends of the upper support platform 95 are respectively welded to the outer side of the rotating shaft of the third motor 93;The upper part of the rotating shaft of the second motor 92 is tightly sleeved inside the inner ring of the bearing B96 of the rotating shaft of the third motor, and the upper end height of the rotating shaft of the second motor 92 is higher than the height of the upper support platform 95; the vacuum arm tooth fork 4 and the rotating cylinder 5 are installed at the front end of the movable arm 10, and the rear end of the movable arm 10 and the upper support platform 95 and the rotating shaft 92 of the second motor are installed together.

[0015] Figure 1 , 2 As shown in the figure, the outer diameters of the second motor 92 and the fixing ring 83, the third motor 93, and the fixing platform 82 are smaller than the inner diameter of the opening 101 in the middle of the upper end of the fixing shell. The movable arm includes three covers, four transmission wheels A, and two annular transmission belts A. The covers are hollow structures, and there are openings A1018 in the middle of the right lower end and the upper and lower sides of the left lower end of the first cover 1011 and the second cover 1012, respectively. The lower right end of the first cover 1011 is bolted to the upper end of the upper support platform 95, and the rotating shaft of the second motor 92 (the outer diameter is smaller than the inner diameter of the opening A1018) is located in the upper inner part of the opening A108 at the lower right end of the first cover. The middle part of the first transmission wheel A1014 is welded to the rotating shaft of the second motor 92. A bearing C1019 is respectively tightly mounted in the openings A at the upper and lower parts of the left end of the first cover 1011. The shafts at the middle parts of the upper and lower ends of the second transmission wheel A1015 are respectively tightly mounted in the inner rings of the two bearings C1019. The shaft at the upper end of the second transmission wheel A1015 is a hollow structure, and a bearing D1110 is respectively mounted at the upper and lower ends of the interior. The inner rings of the two bearings D1110 are A connecting rod 1111 is tightly sleeved in the circle, the middle of the third transmission wheel A1016 is welded to the connecting rod 1111, the opening at the lower end of the right side of the second cover 102 is welded to the outer side of the upper end shaft of the second transmission wheel A1015 and is spaced from the upper end of the upper end bearing C1019, the first annular transmission belt A (not shown in the figure) is tightly sleeved on the outer side of the first transmission wheel A1014 and the second transmission wheel A1015, and the opening A at the upper and lower parts of the left end of the second cover 102 is welded to the outer side of the second transmission wheel A1015. A bearing E1112 is respectively installed in a tight sleeve, and the shafts in the middle of the upper and lower ends of the fourth transmission wheel A1017 are respectively tightly sleeved in the inner rings of the two bearings E1112. The upper shaft of the fourth transmission wheel A1017 is located outside the left part of the upper end of the second cover 1012. The second annular transmission belt A is tightly sleeved on the outside of the third transmission wheel A1016 and the fourth transmission wheel A1017. The middle of the lower end of the third cover 1013 is welded to the shaft of the fourth transmission wheel A1017. The rotating cylinder 5 is transversely bolted to the left end of the third cover 1013, and the rear end of the vacuum arm tooth fork 4 is welded to the rotating shaft of the left end of the rotating cylinder 5.

[0016] Figure 1 , 2As shown, the new type is based on the working mode of PLC or host computer control of electrical equipment. When the vacuum arm tooth fork 4 and the like need to transfer the wafer position during operation, the PLC controls the rotating shaft of the first set of motors 91 to drive the first set of transmission wheels 6 to rotate clockwise or counterclockwise, and the first set of transmission wheels 6 drives the second set of transmission wheels 6 and the lead screw 2 to rotate clockwise or counterclockwise through the transmission belt 7. In this way, the external thread of the lead screw 2 acts on the internal thread of the sliding seat 8, and the sliding seat 8 drives the rotating cylinder, vacuum arm tooth fork, movable arm 10 and the like to rise or fall vertically to a certain height to the working station along the linear guide slide (adjusting the upper or lower position between the vacuum arm tooth fork and the working station). When the PLC controls the rotating shaft of the third set of motors 93 to rotate clockwise or counterclockwise, the rotating shaft of the third set of motors 93 will drive the rotating cylinder, vacuum arm tooth fork, movable arm 10 and the like to rotate horizontally clockwise or counterclockwise to the working station (adjusting the clockwise or counterclockwise angle position between the vacuum arm tooth fork and the working station). When the PLC controls the shaft of the second motor 92 to rotate clockwise or counterclockwise, the shaft of the second motor 92 will drive the second drive wheel A1015 to rotate clockwise or counterclockwise through the first drive wheel A1014 and the first drive belt A, and the second drive wheel A1015 drives the rear end of the second cover shell 1012 to rotate clockwise or counterclockwise, and the rotating cylinder, vacuum arm fork, front part of the second cover shell 1012, etc. rotate clockwise or counterclockwise along the front end of the first cover shell 1011 to the working station (further adjust the clockwise or counterclockwise angle position between the vacuum arm fork, etc. and the working station, and adjust the relative front and rear distance between the vacuum arm fork, etc. and the working station). When the second cover 102 rotates clockwise or counterclockwise, the fourth transmission wheel A1017 rotates clockwise or counterclockwise along the third transmission wheel A1016 via the second transmission belt A, so that the clockwise or counterclockwise angle position between the vacuum arm tooth fork and the work station can be further realized, and the relative forward and backward spacing between the vacuum arm tooth fork and the work station can be adjusted (when the second cover rotates counterclockwise, the third cover and the vacuum arm tooth fork 4 rotate clockwise, and vice versa). When the PLC controls the electromagnetic air valves of the left and right ends of the rotary cylinder 5 to be energized, the rotating shaft of the rotary cylinder will drive the vacuum arm tooth fork 4 to rotate clockwise or counterclockwise in the vertical direction to a certain angle to reach the corresponding work station. When the PLC controls the vacuum arm fork to be horizontally located at the upper end of a corresponding wafer, the PLC controls the vacuum pump to be powered on, so that after the suction cup surface of the lower end of the vacuum arm fork 4 sucks out the uppermost wafer, the wafer can be placed at the next production station in accordance with the above process, and then the PLC controls the vacuum pump to lose power and the corresponding wafer is located at the corresponding next production station. Through the above technical solution, the new type can translate the wafer of the previous process up and down as needed, and rotate it at a suitable angle to transfer it to the next station through the vacuum arm fork, which fully meets the displacement needs of wafer production.It should be noted that the PLC's time-interval control of related electrical equipment is an existing mature control technology, and this application does not provide any protection for this technology. This application protects the equipment, which has the advantages of relatively simple and compact structure, low cost, and small space (cost of about 1,000 yuan) compared to the six-axis robot based on PLC control.

[0017] The above shows and describes the basic principles and main features of the utility model and the advantages of the utility model. For those skilled in the art, it is obvious that the utility model is limited to the details of the above exemplary embodiments, and the utility model can be implemented in other specific forms without departing from the spirit or basic features of the utility model. Therefore, no matter from which point of view, the embodiments should be regarded as exemplary and non-restrictive. The scope of the utility model is defined by the attached claims rather than the above description, and it is intended that all changes that fall within the meaning and scope of the equivalent elements of the claims are included in the utility model.

[0018] In addition, it should be understood that although the present specification is described according to the implementation mode, the implementation mode does not only include an independent technical solution. This narrative method of the specification is only for the sake of clarity. Those skilled in the art should regard the specification as a whole. The technical solutions in the embodiments can also be appropriately combined to form other implementation modes that can be understood by those skilled in the art.

Claims

1. A multi-axis wafer transfer device, comprising a fixed shell, a PLC, a motor, a lead screw, a linear guide slide, a vacuum arm tooth fork, a rotary cylinder, a transmission wheel, a transmission belt, and a sliding seat, wherein there are multiple sets of motors; characterized in that: It also has a movable arm; the upper end of the fixed shell has an opening, the shell of the linear guide slide is vertically installed at one end of the inner side of the fixed shell, one side of the sliding seat has a thread hole, and the lead screw and the sliding seat thread hole are connected together by threads; the sliding seat and the sliding block of the linear guide slide are installed together, the upper and lower ends of the lead screw are rotatably installed on the upper and lower parts of the other end of the inner side of the fixed shell, and the first set of motors is installed at the lower end of the fixed shell; there are at least two transmission wheels, the first transmission wheel and the second transmission wheel are respectively installed at the lower end of the rotating shaft of the first set of motors and the lower end of the lead screw, the transmission belt ring is sleeved between the outer sides of the first and second transmission wheels, and the shell of the second set of motors The lower end of the body is installed on the upper end of the sliding seat, the upper end of the second set of motors is installed with a fixed ring, and the lower end of the third set of motors is installed on the upper end of the fixed ring; the rotating shaft of the third set of motors is a hollow structure and a bearing is installed in the rotating shaft, and the third set of motors is equipped with an upper support platform, and the middle part of the upper support platform is installed on the outside of the rotating shaft of the third set of motors; the upper part of the rotating shaft of the second set of motors is installed in the inner ring of the bearing of the rotating shaft of the third set of motors and the height of the upper end of the rotating shaft of the second set of motors is higher than the height of the upper support platform; the vacuum arm tooth fork and the rotating cylinder are installed at one end of the movable arm, and the other end of the movable arm is installed together with the upper support platform and the upper part of the rotating shaft of the second set of motors.

2. The multi-axis wafer transfer device according to claim 1, characterized in that: The outer diameters of the second set of motors and the fixing ring and the third set of motors are smaller than the inner diameter of the opening in the middle of the upper end of the fixing shell.

3. The multi-axis wafer transfer device according to claim 1, characterized in that: The movable arm includes multiple cover shells, multiple transmission wheels A, and two transmission belts A. The lower end of one side of the first cover shell is installed on the outer side of the upper end of the upper support platform, the first transmission wheel is installed on the rotating shaft of the second set of motors, and two bearings A are installed on the other side of the first cover shell. The shafts at the upper and lower ends of the second transmission wheel A are respectively installed in the inner rings of the two bearings A. The shaft at the upper end of the second transmission wheel A is a hollow structure, and a bearing B is installed inside. A connecting rod is installed in the inner ring of the bearing B. The third transmission wheel A is installed on the connecting rod, and the lower end of one side of the second cover shell is installed on the outer side of the shaft at the upper end of the second transmission wheel A. The first transmission belt A is looped around the outer sides of the first transmission wheel A and the second transmission wheel A, and two bearings C are installed on one side of the second cover shell. The shafts at the upper and lower ends of the fourth transmission wheel A are respectively installed in the inner rings of the two bearings C, the second transmission belt A is looped around the outer sides of the third transmission wheel A and the fourth transmission wheel A, and one side of the lower end of the third cover shell is installed on the shaft at the upper end of the fourth transmission wheel A.

4. The multi-axis wafer transfer device according to claim 3, characterized in that: The rotary cylinder is transversely mounted on the other side of the lower cover shell, and one end of the vacuum arm tooth fork is mounted together with the rotating shaft of the rotary cylinder.

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