A modular component type radio frequency power supply

Abstract

The utility model discloses a modular component type radio frequency power supply, which belongs to the technical field of radio frequency power supply, and includes: a first liquid cooling plate, several power amplifier modules, an input filter rectifying unit, a control unit, several power supply units, and a combining unit arranged in a box; the first liquid cooling plate is placed horizontally, and the box is divided into an upper area and a lower area; in the upper area, the front end of the first liquid cooling plate is provided with an input filter rectifying unit, a control unit, and a combining unit, and the rear end of the first liquid cooling plate is provided with several power amplifier modules arranged vertically; in the lower area, the first liquid cooling plate is provided with several power supply units arranged in parallel. The modular arrangement and regional layout of the functional components in the radio frequency power supply make the structure more compact, and facilitate loading and unloading and maintenance; the liquid cooling plate is used to centrally dissipate the heat of the heat generating parts such as the power supply unit, and the power amplifier units are arranged on both sides of the liquid cooling plate, which effectively improves the heat dissipation effect and further reduces the volume of the radio frequency power supply.

Description

Technical Field

[0001] The utility model relates to the technical field of radio frequency power supplies, in particular to a modular component type radio frequency power supply. Background Art

[0002] RF power supplies can be widely used in semiconductor processes, plasma cleaning, vacuum coating and other fields. Existing RF power supplies mostly adopt a stacked layout, using upper and lower water cooling plates to layer the power supply box, and arranging multiple power amplifier modules on different layers. Multiple modules are placed in staggered layers, and the internal wiring is messy, which is not convenient for assembly and maintenance. As for the power amplifier module in the RF power supply, the existing patent (publication number CN205142774U, a single power amplifier module cooling plug-in box for power) adopts a plug-in box structure layout, which is beneficial to the installation and maintenance of the circuit board to a certain extent, but does not adopt centralized power supply and cooling. In terms of power supply, each power amplifier module requires a separate external power supply, and the cooling pipe connection for heat dissipation is also relatively complicated. Based on this, it is necessary to provide an RF power supply with a compact structure, good heat dissipation effect, and easy loading and unloading and maintenance. Utility Model Content

[0003] The purpose of the utility model is to overcome the above-mentioned deficiencies in the prior art and provide a modular component type radio frequency power supply.

[0004] In order to achieve the above-mentioned utility model purpose, the utility model provides the following technical solutions:

[0005] A modular component-type radio frequency power supply comprises: a first liquid cooling plate, a plurality of power amplifier modules, an input filter rectifying unit, a control unit, a plurality of power supply units, and a combining unit arranged in a box; the first liquid cooling plate is placed horizontally, dividing the box into an upper area and a lower area; in the upper area, the front end of the first liquid cooling plate is provided with an input filter rectifying unit, a control unit, and a combining unit, and the rear end of the first liquid cooling plate is provided with a plurality of vertically arranged power amplifier modules; in the lower area, the first liquid cooling plate is provided with a plurality of parallelly arranged power supply units, the output end of the power supply unit is electrically connected to the input end of the power amplifier module via a conductive member, and the output end of the power amplifier module is electrically connected to the combining unit.

[0006] Preferably, each of the power amplifier modules includes a second liquid cooling plate with a wide surface arranged vertically, and a power amplifier unit arranged on a wide side surface of the second liquid cooling plate, wherein an input end of the power amplifier unit is electrically connected to a power supply unit, and an output end is electrically connected to a combining unit.

[0007] Preferably, the power amplifier module further comprises a shell, and power amplifier units are correspondingly arranged on two wide sides of the second liquid cooling plate in the shell.

[0008] Preferably, the rectifying part in the input filtering and rectifying unit is closely mounted on the first liquid cooling plate, and the rectifying part, the control unit and the combining unit are spatially stacked.

[0009] Preferably, a first partition is provided between the rectifying part and the control unit, and a second partition is provided between the control unit and the combining unit; the filter device and the control unit in the input filtering and rectifying unit are installed on the first partition, and the combining unit is installed on the second partition.

[0010] Preferably, in the upper region, an auxiliary power supply unit is also provided at the front end of the first liquid cooling plate, which supplies power to the power amplifier module.

[0011] Preferably, it further comprises a plurality of fans, each of which is arranged at one end of the plurality of power amplifier modules and is used for dissipating heat and cooling the components in the power amplifier unit.

[0012] Preferably, the input filter rectifier unit further comprises a power input terminal and an air switch which are electrically connected in sequence, and the air switch is electrically connected to the rectifier part via the filter element. The operating end of the air switch is exposed to the outer side wall of the box body.

[0013] Preferably, the first liquid cooling plate and the second liquid cooling plate are both water cooling plates, and a plurality of the second liquid cooling plates are divided into a plurality of groups. The second liquid cooling plates in each group are connected in series and then connected in parallel with the first liquid cooling plates respectively.

[0014] Compared with the prior art, the utility model has the following beneficial effects: the functional components in the RF power supply are modularly arranged and arranged in different areas, making the structure more compact and convenient for loading, unloading and maintenance; a liquid cooling plate is used to centrally dissipate heat for the heat-generating parts such as the power supply unit, and the power amplifier unit is arranged on both sides of the liquid cooling plate, which effectively improves the heat dissipation effect and further reduces the volume of the RF power supply. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] Figure 1 This is a structural block diagram of a modular component-type radio frequency power supply described in Example 1 of the utility model;

[0016] Figure 2 This is a schematic diagram of the overall structure of a modular component-type radio frequency power supply according to Embodiment 1 of the present utility model;

[0017] Figure 3 This is a schematic structural diagram of a modular component-type radio frequency power supply described in Example 1 of the utility model.

[0018] Markings in the figure: 1-box, 2-first liquid cooling plate, 3-power supply unit, 4-fan, 5-power amplifier module, 6-first partition, 7-second partition, 8-input filter rectifier unit, 9-control unit, 10-combining unit, 11-fixed structure, 12-shell, 13-second liquid cooling plate, 14-power amplifier unit, 15-rectifier part, 16-filter device, 17-power input end, 18-air switch, 19 conductive part, 20-auxiliary power supply unit. DETAILED DESCRIPTION

[0019] The present invention is further described in detail below in combination with test examples and specific implementation methods. However, this should not be understood as the scope of the above subject matter of the present invention being limited to the following embodiments, and all technologies realized based on the content of the present invention belong to the scope of the present invention. Example

[0020] A modular component type RF power supply, such as Figure 1 and Figure 2 As shown, it includes: a first liquid cooling plate 2, a plurality of power amplifier modules 5, an input filter rectifying unit 8, a control unit 9, a plurality of power supply units 3, and a combining unit 10 arranged in a box body 1; the first liquid cooling plate 2 is placed horizontally, and the box body 1 is divided into an upper area and a lower area; in the upper area, the front end of the first liquid cooling plate 2 is provided with an input filter rectifying unit 8, a control unit 9, and a combining unit 10, and the rear end of the first liquid cooling plate 2 is provided with a plurality of vertically arranged power amplifier modules 5; in the lower area, the first liquid cooling plate 2 is provided with a plurality of power supply units 3 arranged in parallel, and the output end of the power supply unit 3 is electrically connected to the input end of the power amplifier module 5 via a conductive member 19, and the output end of the power amplifier module 5 is electrically connected to the combining unit 10.

[0021] Each of the power amplifier modules 5 includes a second liquid cooling plate 13 with a wide surface arranged vertically, and a power amplifier unit 14 arranged on a wide side surface of the second liquid cooling plate 13 . The input end of the power amplifier unit 14 is electrically connected to the power supply unit 3 , and the output end is electrically connected to the combining unit 10 .

[0022] The power amplifier module 5 further includes a housing 12 , and power amplifier units 14 are correspondingly arranged on two wide sides of the second liquid cooling plate 13 in the housing 12 .

[0023] The plurality of power amplifier modules 5 are fixedly connected via a fixing structure 11 .

[0024] like Figure 3 As shown, the rectifying part 15 in the input filtering and rectifying unit 8 is closely mounted on the first liquid cooling plate 2, and the rectifying part 15, the control unit 9, and the combining unit 10 are spatially stacked.

[0025] A first partition plate 6 is provided between the rectifying part 15 and the control unit 9 , and a second partition plate 7 is provided between the control unit 9 and the combining unit 10 ; the filter device 16 and the control unit 9 in the input filtering rectifying unit 8 are installed on the first partition plate 6 , and the combining unit 10 is installed on the second partition plate 7 .

[0026] The partition is a sheet metal part, and the sheet metal part can also be formed into a box-shaped structure for shielding the electromagnetic interference of the input filter and rectifier unit 8.

[0027] In the upper region, an auxiliary power supply unit 20 is further provided at the front end of the first liquid cooling plate 2, which supplies power to the power amplifier module 5, wherein the positions of the rectifying part 15 and the auxiliary power supply unit 20 are interchangeable.

[0028] It also includes a plurality of fans 4 , which are all arranged at one end of the plurality of power amplifier modules 5 and are used to dissipate heat and cool the components in the power amplifier unit 14 .

[0029] The input filter rectifier unit 8 further includes a power input terminal 17 and an air switch 18 which are electrically connected in sequence; the air switch 18 is electrically connected to the rectifier part 15 via a filter element 16 , and the operating end of the air switch 18 is exposed to the outer wall of the box body 1 .

[0030] The first liquid cooling plate 2 and the second liquid cooling plate 13 are both water cooling plates. A plurality of the second liquid cooling plates 13 are divided into a plurality of groups. The second liquid cooling plates 13 in each group are connected in series and then connected in parallel with the first liquid cooling plate 2 .

[0031] The modularization and regional layout of the functional components in the RF power supply make the structure more compact and convenient for loading, unloading and maintenance. A liquid cooling plate is used to centrally dissipate the heat of the power supply unit and other heat-generating parts. At the same time, the power amplifier unit is arranged on both sides of the liquid cooling plate, which effectively improves the heat dissipation effect and further reduces the size of the RF power supply.

[0032] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent substitutions and improvements made within the spirit and principles of the present invention should be included in the protection scope of the present invention.

Claims

1. A modular component type radio frequency power supply, characterized in that: include: A first liquid cooling plate (2), a plurality of power amplifier modules (5), an input filter rectifying unit (8), a control unit (9), a plurality of power supply units (3), and a combining unit (10) are arranged in a box (1); the first liquid cooling plate (2) is placed horizontally, dividing the box (1) into an upper area and a lower area; in the upper area, the front end of the first liquid cooling plate (2) is provided with an input filter rectifying unit (8), a control unit (9), and a combining unit (10), and the rear end of the first liquid cooling plate (2) is provided with a plurality of power amplifier modules (5) arranged vertically; in the lower area, the first liquid cooling plate (2) is provided with a plurality of power supply units (3) arranged in parallel, the output end of the power supply unit (3) is electrically connected to the input end of the power amplifier module (5) via a conductive member (19), and the output end of the power amplifier module (5) is electrically connected to the combining unit (10).

2. A modular component type radio frequency power supply according to claim 1, characterized in that: Each of the power amplifier modules (5) comprises a second liquid cooling plate (13) with a wide surface arranged vertically, and a power amplifier unit (14) arranged on a wide side surface of the second liquid cooling plate (13); the input end of the power amplifier unit (14) is electrically connected to the power supply unit (3), and the output end is electrically connected to the combining unit (10).

3. A modular component type RF power supply according to claim 2, characterized in that: The power amplifier module (5) further comprises a shell (12), and power amplifier units (14) are correspondingly arranged on two wide sides of the second liquid cooling plate (13) in the shell (12).

4. A modular component type radio frequency power supply according to claim 2, characterized in that: The rectifying part (15) in the input filtering rectifying unit (8) is closely mounted on the first liquid cooling plate (2), and the rectifying part (15), the control unit (9), and the combining unit (10) are spatially stacked.

5. A modular component type radio frequency power supply according to claim 4, characterized in that: A first partition (6) is provided between the rectifying part (15) and the control unit (9), and a second partition (7) is provided between the control unit (9) and the combining unit (10); the filter element (16) and the control unit (9) in the input filtering rectifying unit (8) are mounted on the first partition (6), and the combining unit (10) is mounted on the second partition (7).

6. A modular component type radio frequency power supply according to claim 5, characterized in that: In the upper region, an auxiliary power supply unit (20) is also provided at the front end of the first liquid cooling plate (2), which supplies power to the power amplifier module (5).

7. A modular component type radio frequency power supply according to claim 6, characterized in that: It also comprises a plurality of fans (4), each of which is arranged at one end of the plurality of power amplifier modules (5) and is used to dissipate heat and cool the components in the power amplifier unit (14).

8. A modular component type radio frequency power supply according to claim 7, characterized in that: The input filter rectifier unit (8) further comprises a power input terminal (17) and an air switch (18) which are electrically connected in sequence; the air switch (18) is electrically connected to the rectifier part (15) via the filter element (16), and the operating end of the air switch (18) is exposed to the outer wall of the box body (1).

9. A modular component type radio frequency power supply according to claim 8, characterized in that: The first liquid cooling plate (2) and the second liquid cooling plate (13) are both water cooling plates, and a plurality of the second liquid cooling plates (13) are divided into a plurality of groups. The second liquid cooling plates (13) in each group are connected in series and then respectively connected in parallel with the first liquid cooling plate (2).

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