A high-temperature viscous waste gas discharge pipe

Abstract

The utility model relates to the technical field of exhaust gas emission, and discloses a high-temperature viscous exhaust gas emission pipeline, including an exhaust pipe, one end of which is provided with at least one air inlet, and the other end of which is provided with at least one air outlet; the middle section of the exhaust pipe is provided with a plurality of baffles along the exhaust gas discharge direction, the baffles are used to enclose an S-shaped flow channel to extend the gas flow path, at least one spray port is provided in the S-shaped flow channel, the spray port is used to spray condensed water to the exhaust gas to condense and liquefy the exhaust gas, and at least one waste liquid port is provided at the bottom end of the exhaust pipe, the waste liquid port is used to discharge the waste liquid formed after the exhaust gas is liquefied. The exhaust pipe is provided with an S-shaped flow channel for extending the air flow path, and a spray port is provided in the S-shaped flow channel to spray and cool the exhaust gas, so that the exhaust gas is rapidly liquefied, and the waste liquid formed by the liquefaction of the exhaust gas is discharged from the waste liquid port at the bottom end of the exhaust pipe, thereby effectively avoiding the viscous waste liquid from clogging the exhaust pipe.

Description

Technical Field

[0001] The utility model relates to the technical field of waste gas emission, and more specifically to a high-temperature viscous waste gas emission pipeline. Background Art

[0002] The exhaust gas discharged by semiconductor cleaning equipment contains a large amount of high-temperature sulfuric acid gas. After entering the exhaust gas discharge pipe, the high-temperature sulfuric acid gas gradually condenses and liquefies. The liquefied viscous sulfuric acid liquid adheres to the inner wall of the exhaust gas discharge pipe, causing the diameter of the exhaust gas discharge pipe to become smaller and smaller until it is completely blocked. If the exhaust gas discharge pipe is completely blocked, the exhaust gas will flow back and pollute the entire cleaning equipment.

[0003] In summary, how to avoid the pipeline blockage problem caused by high-temperature viscous exhaust gas such as high-temperature sulfuric acid gas is an urgent problem to be solved by technical personnel in this field. Utility Model Content

[0004] In view of this, the purpose of the utility model is to provide a high-temperature viscous exhaust gas discharge pipe, in which an S-shaped flow channel is provided in the exhaust pipe, and a spray port is provided in the S-shaped flow channel to spray and cool the exhaust gas, and the liquefied waste liquid can be discharged from the waste liquid port at the bottom of the exhaust pipe, thereby effectively avoiding the viscous waste liquid from clogging the exhaust pipe.

[0005] In order to achieve the above purpose, the utility model provides the following technical solutions:

[0006] A high-temperature viscous exhaust gas discharge pipeline comprises an exhaust pipe, one end of which is provided with at least one air inlet, and the other end of which is provided with at least one air outlet;

[0007] The middle section of the exhaust pipe is provided with a plurality of baffles along the exhaust gas discharge direction, and the baffles are used to enclose an S-shaped flow channel to extend the gas flow path. At least one spray port is provided in the S-shaped flow channel, and the spray port is used to spray condensed water onto the exhaust gas to condense and liquefy the exhaust gas. The bottom end of the exhaust pipe is provided with at least one waste liquid port, and the waste liquid port is used to discharge the waste liquid formed after the exhaust gas is liquefied.

[0008] Preferably, the waste liquid port includes a waste liquid connecting pipe for connecting to the waste liquid pipe and a mounting flange arranged on the outer edge of the waste liquid connecting pipe, the waste liquid connecting pipe is inserted into the waste liquid mounting hole at the bottom of the waste gas pipe, and the mounting flange is bolted to the waste gas pipe.

[0009] Preferably, the waste liquid outlet is arranged at 1 / 2 of the length of the S-shaped flow channel in the extension direction of the exhaust pipe.

[0010] Preferably, the waste gas pipe is arranged to be inclined downward at the waste liquid outlet so that the liquefied waste liquid flows into the waste liquid outlet under the action of gravity.

[0011] Preferably, the spray port is arranged on a side of the S-shaped flow channel relatively close to the bottom end of the exhaust pipe.

[0012] Preferably, a first temperature sensor for detecting the exhaust gas temperature is provided in the exhaust gas pipe, and the first temperature sensor is arranged in front of the S-shaped flow channel. When the exhaust gas temperature measured by the first temperature sensor is greater than a preset temperature, the spray port is controlled to open to spray and cool the exhaust gas, and the waste liquid port is controlled to open to discharge the waste liquid.

[0013] Preferably, the spray port is connected to a condensate water pipe, and a flow regulating valve for regulating the flow of condensate water is provided between the spray port and the condensate water pipe.

[0014] Preferably, it further comprises a second temperature sensor, which is arranged at the rear of the S-shaped flow channel, and is used to detect whether the spray port (5) is operating normally.

[0015] The utility model provides a high-temperature viscous exhaust gas discharge pipe, in which an S-shaped flow channel for extending the airflow path is provided, and a spray port is provided in the S-shaped flow channel to spray and cool the exhaust gas, so that the exhaust gas is quickly liquefied, and the waste liquid formed by the liquefaction of the exhaust gas is discharged from the waste liquid port at the bottom end of the exhaust pipe, thereby effectively avoiding the viscous waste liquid from clogging the exhaust pipe. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] In order to more clearly illustrate the embodiments of the utility model or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings in the following description are only embodiments of the utility model. For ordinary technicians in this field, other drawings can be obtained based on the provided drawings without paying creative work.

[0017] Figure 1 This is a schematic diagram of the main view of the high-temperature viscous exhaust gas discharge pipeline provided by the utility model;

[0018] Figure 2 for Figure 1 A schematic cross-sectional view in the rearward direction;

[0019] Figure 3 for Figure 1 Schematic diagram from top view.

[0020] Figure 1-Figure 3 middle:

[0021] 1-air inlet; 2-exhaust pipe; 3-air outlet; 4-baffle; 5-spray outlet; 6-waste liquid outlet; 7-first temperature sensor. DETAILED DESCRIPTION

[0022] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0023] The core of the utility model is to provide a high-temperature viscous waste gas discharge pipe, in which an S-shaped flow channel is arranged, and a spray port is arranged in the S-shaped flow channel to spray and cool the waste gas, and the liquefied waste liquid can be discharged from the waste liquid port at the bottom of the waste pipe, thereby effectively avoiding the viscous waste liquid from clogging the waste pipe.

[0024] The high-temperature viscous exhaust gas discharge pipeline provided by the utility model comprises an exhaust gas pipe 2, one end of the exhaust gas pipe 2 is provided with at least one air inlet 1, and the other end of the exhaust gas pipe 2 is provided with at least one air outlet 3;

[0025] A plurality of baffles 4 are provided in the middle section of the exhaust pipe 2 along the exhaust gas discharge direction, and the baffles 4 are used to enclose an S-shaped flow channel to extend the gas flow path. At least one spray port 5 is provided in the S-shaped flow channel, and the spray port 5 is used to spray condensed water onto the exhaust gas to condense and liquefy the exhaust gas. At least one waste liquid port 6 is provided at the bottom end of the exhaust pipe 2, and the waste liquid port 6 is used to discharge the waste liquid formed after the exhaust gas is liquefied.

[0026] Please refer to Figure 1 , the exhaust pipe 2 can be set as a circular pipe, a rectangular pipe, etc., and its specific shape, structure and size are determined according to the exhaust gas flow rate generated in actual production;

[0027] An air inlet 1 is provided at one end of the exhaust pipe 2, and the air inlet 1 can be connected to a chemical tank, a discharge tank, an equipment space, etc. An air outlet 3 is provided at the other end of the exhaust pipe 2. To ensure the smooth discharge of exhaust gas, an exhaust fan is usually provided at the air outlet 3 to create a negative pressure gradient. The specific number, structure and distribution of the air inlet 1 and the air outlet 3 are determined according to the number of equipment in the workshop and the layout of each equipment in actual production.

[0028] A baffle plate 4 is provided in the middle section of the exhaust pipe 2, which is used to form an S-shaped flow channel to extend the gas flow path, so that as much exhaust gas as possible can be liquefied in the S-shaped flow channel and the waste liquid can be discharged through the waste liquid port 6 to prevent it from adhering to the inner wall surface of other sections of the exhaust pipe 2 and blocking the pipeline.

[0029] The baffle plate 4 can be arranged along the extension direction of the exhaust pipe 2, or can be arranged perpendicular to the extension direction of the exhaust pipe 2; however, if the baffle plate 4 is arranged perpendicular to the extension direction of the exhaust pipe 2, the S-shaped flow channel will divide the exhaust pipe 2 into several spaces that are not connected at the bottom along the extension direction, and each space needs to be provided with a waste liquid port 6 for discharging waste liquid, which has a complex structure and high manufacturing and maintenance costs. Therefore, the baffle plate 4 is usually arranged along the extension direction of the exhaust pipe 2, such as Figure 3 shown.

[0030] The baffle plate 4 is usually connected to the inner wall of the exhaust pipe 2 by welding or bolting to ensure the stability of the connection between the two. Since the baffle plate 4 will come into contact with the liquefied waste liquid, and the sulfuric acid liquid formed by high-temperature viscous gas such as high-temperature sulfuric acid gas is highly corrosive, the baffle plate 4 is usually made of highly corrosion-resistant materials, such as PDFE materials and other plastic materials.

[0031] A spray port 5 for spraying and cooling the exhaust gas is provided in the S-shaped flow channel. The spray port 5 is connected to a condensate pipe. The condensate therein can be tap water or recycled ordinary waste water. Of course, the condensate can also be provided with substances such as oxidants that react chemically with the exhaust gas.

[0032] In order to reduce the flow path of the waste liquid formed after the exhaust gas condenses, the spray port 5 is usually arranged on one side of the S-shaped flow channel relatively close to the bottom end of the exhaust pipe 2, such as Figure 3 As shown, the spray port 5 relatively close to the air inlet 1 is arranged in the middle flow channel surrounded by the two baffles 4.

[0033] The waste liquid port 6 is arranged at the bottom end of the waste gas pipe 2, and it can be connected to a waste liquid recovery device such as a waste liquid pipe or a waste liquid tank to discharge the liquefied waste liquid; the waste liquid port 6 can be integrally arranged with the waste gas pipe 2, or it can be connected to the waste gas pipe 2 by a detachable connection method such as a threaded connection or a bolt connection, so that the waste liquid port 6 that has the most contact with the waste liquid and has the shortest life can be replaced in time.

[0034] Preferably, a waste liquid port 6 can be provided including a waste liquid connecting pipe for connecting to a waste liquid pipe and a mounting flange arranged on the outer edge of the waste liquid connecting pipe. The waste liquid connecting pipe is inserted into the waste liquid mounting hole at the bottom of the waste gas pipe 2, and the mounting flange is bolted to the waste gas pipe 2. The connection strength is high, the connection structure is simple, and it is easy to disassemble and assemble.

[0035] Of course, a sealing member such as a sealing ring may be provided between the waste liquid connecting pipe and the waste liquid mounting hole to ensure the sealing performance of the connection between the waste liquid port 6 and the waste gas pipe 2 and prevent the waste liquid from dripping from the gap between the two.

[0036] The number of waste liquid ports 6 is related to the size of the waste liquid ports 6, the length of the S-shaped flow channel, and the spacing between the spray ports 5:

[0037] When the size of the waste liquid port 6 is large, the number of the waste liquid ports 6 may be reduced as appropriate due to the large waste liquid flow rate of the waste liquid port 6. On the contrary, when the size of the waste liquid port 6 is small, the number of the waste liquid ports 6 may be increased as appropriate.

[0038] When the length of the S-shaped flow channel in the extension direction of the exhaust pipe 2 is long, in order to shorten the flow path of the waste liquid, the number of waste liquid ports 6 can be increased as appropriate. Conversely, when the length of the S-shaped flow channel in the extension direction of the exhaust pipe 2 is short, the number of waste liquid ports 6 can be reduced as appropriate.

[0039] When the distance between the spray ports 5 is relatively far, in order to prevent the viscous waste liquid from having a long flow path and causing it to adhere to the waste gas pipe 2, each spray port 5 is usually provided with a corresponding waste liquid port 6, such as Figure 3 As shown; on the contrary, when the distance between the spray ports 5 is close, two or more spray ports 5 can correspond to the same waste liquid port 6.

[0040] When there is only one waste liquid port 6, the waste liquid port 6 can be set at 1 / 2 of the length of the S-shaped flow channel in the extension direction of the exhaust gas pipe 2; when the number of waste liquid ports 6 is two or more, the position of the waste liquid port 6 needs to be reasonably set according to the position of the spray port 5 to shorten the total flow path of the waste liquid.

[0041] In this embodiment, an S-shaped flow channel for extending the air flow path is provided in the exhaust pipe 2, and a spray port 5 is provided in the S-shaped flow channel to spray and cool the exhaust gas, so that the exhaust gas is quickly liquefied, and the waste liquid formed by the liquefaction of the exhaust gas is discharged from the waste liquid port 6 at the bottom end of the exhaust pipe 2, thereby effectively avoiding the viscous waste liquid from clogging the exhaust pipe 2.

[0042] Preferably, in order to reduce the number of waste liquid ports 6 and simplify the pipeline structure, the waste gas pipe 2 can be arranged to be inclined downward at the waste liquid port 6. The inclination angle at the waste liquid port 6 is usually set to 1-3°, so that the liquefied waste liquid flows into the waste liquid port 6 under the action of gravity. Not only is the structure simple, but it also ensures that all waste liquid is discharged.

[0043] On the basis of the above embodiment, in order to reduce energy consumption, a first temperature sensor 7 for detecting the exhaust gas temperature may be provided in the exhaust pipe 2. The first temperature sensor 7 is provided in front of the S-shaped flow channel. When the exhaust gas temperature measured by the first temperature sensor 7 is greater than the preset temperature, the spray port 5 is controlled to open to spray and cool the exhaust gas, and the waste liquid port 6 is controlled to open to discharge the waste liquid.

[0044] When the content of high-temperature viscous exhaust gas in the exhaust gas is low, the exhaust gas temperature measured by the first temperature sensor 7 is lower than or equal to the preset temperature, and the exhaust gas passes through the S-shaped flow channel and is discharged from the exhaust port 3;

[0045] When the content of high-temperature viscous gas in the exhaust gas is high, the exhaust gas temperature measured by the first temperature sensor 7 is higher than the preset temperature. The exhaust gas is sprayed and cooled by the spray port 5 when passing through the S-shaped flow channel, and is quickly liquefied into waste liquid and discharged through the waste liquid port 6.

[0046] Therefore, the composition of the exhaust gas can be determined by the first temperature sensor 7. When the exhaust gas is conventional exhaust gas with a low content of high-temperature viscous exhaust gas, it can be discharged normally through the exhaust pipe 2 without the need for spraying and cooling through the spray port 5. When the content of high-temperature viscous exhaust gas in the exhaust gas is high, the high-temperature viscous exhaust gas can be sprayed and cooled through the spray port 5, and the condensed and liquefied waste liquid can be discharged through the waste liquid port 6. The structure is universal and the energy consumption is low.

[0047] Preferably, in order to further reduce energy consumption, a spray port 5 can be connected to a condensate pipe, and a flow regulating valve for adjusting the condensate flow rate is provided between the spray port 5 and the condensate pipe, so as to adjust the condensate flow rate according to the difference between the exhaust gas temperature and the preset temperature.

[0048] When the difference between the exhaust gas temperature and the preset temperature is small, the flow control valve can be adjusted to reduce the condensed water flow rate; and when the difference between the exhaust gas temperature and the preset temperature is large, the flow control valve can be adjusted to increase the condensed water flow rate.

[0049] The flow regulating valve is preferably configured as a solenoid valve, and the solenoid valve is connected to the first temperature sensor 7 signal so as to automatically adjust the opening of the flow regulating valve in real time to adjust the flow of condensed water, with a high degree of intelligence and fast regulation response.

[0050] On the basis of the above embodiment, a second temperature sensor may be further included. The second temperature sensor is arranged at the rear of the S-shaped flow channel. The second temperature sensor is used to detect whether the spray port 5 is working normally.

[0051] The specific types and models of the first temperature sensor 7 and the second temperature sensor are determined according to the types and temperature ranges of the exhaust gas discharged in actual production, so as to have more accurate measurement results and longer service life.

[0052] When the content of high-temperature viscous exhaust gas in the exhaust gas is high, the high-temperature viscous components in the exhaust gas are sprayed through the spray port 5 to cool down and liquefy for discharge, and the remaining components are discharged through the outlet 3. If the air temperature measured by the second temperature sensor is higher than the preset discharge temperature, it means that there is still a high content of high-temperature viscous exhaust gas in the discharged exhaust gas, indicating that the spray port 5 is faulty or the unit flow rate of the spray port 5 is too low; otherwise, it indicates that the spray port 5 is working normally.

[0053] It should be noted that the first and second in the first temperature sensor 7 and the second temperature sensor mentioned in the present application document are only used to distinguish the difference in position and do not contain any limitation on the order.

[0054] The various embodiments in this specification are described in a progressive manner, and each embodiment focuses on the differences from other embodiments. The same or similar parts between the various embodiments can be referenced to each other.

[0055] The above is a detailed introduction to the high-temperature viscous exhaust gas discharge pipe provided by the utility model. This article uses specific examples to illustrate the principle and implementation method of the utility model. The description of the above embodiment is only used to help understand the method and core idea of ​​the utility model. It should be pointed out that for ordinary technicians in this technical field, without departing from the principle of the utility model, the utility model can also be improved and modified, and these improvements and modifications also fall within the scope of protection of the claims of the utility model.

Claims

1. A high-temperature viscous waste gas discharge pipeline, characterized in that: It comprises an exhaust pipe (2), one end of the exhaust pipe (2) being provided with at least one air inlet (1), and the other end of the exhaust pipe (2) being provided with at least one air outlet (3); A plurality of baffles (4) are provided in the middle section of the exhaust pipe (2) along the exhaust gas discharge direction, the baffles (4) are used to enclose an S-shaped flow channel to extend the gas flow path, at least one spray port (5) is provided in the S-shaped flow channel, the spray port (5) is used to spray condensed water onto the exhaust gas to condense and liquefy the exhaust gas, and at least one waste liquid port (6) is provided at the bottom end of the exhaust pipe (2), the waste liquid port (6) is used to discharge waste liquid formed after the exhaust gas is liquefied.

2. The high-temperature viscous exhaust gas discharge pipeline according to claim 1, characterized in that: The waste liquid port (6) comprises a waste liquid connecting pipe for connecting to a waste liquid pipe and a mounting flange arranged on the outer edge of the waste liquid connecting pipe, the waste liquid connecting pipe is inserted into the waste liquid mounting hole at the bottom of the waste gas pipe (2), and the mounting flange is bolted to the waste gas pipe (2).

3. The high-temperature viscous exhaust gas discharge pipeline according to claim 1, characterized in that: The waste liquid port (6) is arranged at 1 / 2 of the length of the S-shaped flow channel in the extension direction of the waste gas pipe (2).

4. The high-temperature viscous exhaust gas discharge pipeline according to claim 1, characterized in that: The waste gas pipe (2) is arranged at an angle downward at the waste liquid outlet (6) so that the liquefied waste liquid flows into the waste liquid outlet (6) under the action of gravity.

5. The high-temperature viscous exhaust gas discharge pipeline according to any one of claims 1 to 4, characterized in that: The spray port (5) is arranged on a side of the S-shaped flow channel relatively close to the bottom end of the exhaust pipe (2).

6. The high-temperature viscous exhaust gas discharge pipeline according to any one of claims 1 to 4, characterized in that: A first temperature sensor (7) for detecting the temperature of the exhaust gas is provided in the exhaust gas pipe (2). The first temperature sensor (7) is provided in front of the S-shaped flow channel. When the exhaust gas temperature measured by the first temperature sensor (7) is greater than a preset temperature, the spray port (5) is controlled to open to spray and cool the exhaust gas, and the waste liquid port (6) is controlled to open to discharge the waste liquid.

7. The high-temperature viscous exhaust gas discharge pipeline according to claim 6, characterized in that: The spray port (5) is connected to a condensed water pipe, and a flow regulating valve for regulating the flow of condensed water is provided between the spray port (5) and the condensed water pipe.

8. The high-temperature viscous exhaust gas discharge pipeline according to claim 7, characterized in that: It also includes a second temperature sensor, which is arranged behind the S-shaped flow channel and is used to detect whether the spray port (5) is operating normally.

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