A vertical furnace

Abstract

The present application discloses a vertical furnace, comprising: a cavity and a furnace body for forming the cavity, the furnace body comprising a protective layer arranged on the outside, a heat-insulating layer arranged on the inside and a heating interlayer arranged between the protective layer and the heat-insulating layer; a plurality of first heating control areas are arranged in sequence from top to bottom in the heating interlayer corresponding to the side of the furnace body, wherein the first heating control area is used to heat the side wall of the cavity; and a second heating control area is arranged in the heating interlayer corresponding to the top of the furnace body, wherein the second heating control area is used to heat the top of the cavity.

Description

Technical Field

[0001] The present application relates to the technical field of semiconductor high-end equipment manufacturing, and in particular to a vertical furnace. Background Art

[0002] In semiconductor wafer manufacturing, thin film growth is an important manufacturing process. In the thin film growth manufacturing process, the reaction gas needs to be introduced into the reactor, so that the gas will undergo chemical processes such as dissociation, reaction and deposition under a preset temperature and preset pressure environment. And under this chemical process, the required thin film structure is gradually generated. Among them, the preset temperature conditions will have a certain impact on the type, density and speed of the thin film structure.

[0003] Figure 1 This is a schematic diagram of the temperature control area of ​​an existing vertical furnace. Figure 1 As shown, a heating wire is vertically wrapped around the insulation cavity of the existing vertical furnace. Figure 1 The vertical furnace shown has five different temperature control and monitoring zones set in the vertical direction. Figure 1 The heating control area 1 shown in Figure 1 S1 in), heating control area 2 ( Figure 1 S2 in), heating control area 3 ( Figure 1 S3 in), heating control area 4 ( Figure 1 S4 in) and heating control area 5 ( Figure 1 S5 in the figure). The heating control areas S1 to S5 are arranged in sequence from top to bottom, and the heating control areas S1 to S5 realize independent temperature control. Each heating control area S1 to S5 is connected to an independent PID temperature control system, and the PID temperature control system is used to control the temperature of the heating control area S1 to S5 respectively, so that the temperature in the vertical furnace can quickly reach the set value.

[0004] Common vertical furnaces can be mainly divided into atmospheric pressure vertical furnaces and low-pressure chemical vapor deposition vertical furnaces. The heat loss at the top of the atmospheric pressure vertical furnace is mainly due to cold gas. When the cold gas enters the cavity from the top of the atmospheric pressure vertical furnace, the cold gas fails to be fully heated, so that the top of the atmospheric pressure vertical furnace is always at a relatively low temperature, which leads to major defects in the process reaction at the top of the atmospheric pressure vertical furnace. In severe cases, the required film structure may not be generated.

[0005] Since the top area of ​​the low-pressure chemical vapor deposition furnace is large and the gas flows at a high speed, the heat at the top of the low-pressure chemical vapor deposition furnace will also be dissipated, which may result in failure to generate the required thin film structure.

[0006] With regard to the technical problem existing in the above-mentioned prior art, since heat loss usually occurs at the top of the furnace body of the existing vertical furnace, and the top of the furnace body is always kept at a relatively low temperature, this may cause major defects in the process reaction at the top of the furnace body, and in severe cases may cause uneven film structure, no effective solution has been proposed so far. Utility Model Content

[0007] The utility model provides a vertical furnace to at least solve the technical problem existing in the prior art that heat loss usually occurs at the top of the furnace body of the existing vertical furnace, and the top of the furnace body is always in a relatively low temperature state, which may cause major defects in the process reaction at the top of the furnace body and may even cause an uneven film structure in severe cases.

[0008] According to one aspect of the present application, a vertical furnace is provided, comprising: a cavity and a furnace body for forming the cavity, the furnace body comprising a protective layer arranged on the outside, a thermal insulation layer arranged on the inside, and a heating interlayer arranged between the protective layer and the thermal insulation layer; a plurality of first heating control areas are arranged in sequence from top to bottom in the heating interlayer corresponding to the side of the furnace body, wherein the first heating control area is used to heat the side wall of the cavity; and a second heating control area is arranged in the heating interlayer corresponding to the top of the furnace body, wherein the second heating control area is used to heat the top of the cavity.

[0009] Optionally, multiple first heating control areas are sequentially provided with a first heating unit and multiple second heating units from top to bottom, and the first heating unit and multiple second heating units are arranged around the cavity; and the first heating unit extends into the second heating control area corresponding to the top of the furnace body.

[0010] Optionally, the first heating unit is centered on the axis of the cavity and is arranged in multiple layers in a second heating control area corresponding to the top of the furnace body.

[0011] Optionally, the first heating unit and the plurality of second heating units are resistance wires.

[0012] Optionally, the resistance wire is made of an iron-chromium-aluminum-niobium alloy.

[0013] Optionally, a zirconium oxide shell is disposed outside the first heating unit and the plurality of second heating units.

[0014] Optionally, multiple first cooling water systems are arranged in each first heating control area corresponding to the side of the furnace body; and a second cooling water system is arranged in the second heating control area corresponding to the top of the furnace body, and the second cooling water system corresponds to the first heating unit.

[0015] Optionally, the heating sandwich is provided with a filling medium.

[0016] Optionally, it also includes: multiple temperature monitoring units for feeding back temperature information to the PID temperature control system, wherein the multiple temperature monitoring units are fixed to the side walls of the protective layer, and each temperature monitoring unit corresponds to multiple first heating control areas and second heating control areas respectively.

[0017] Optionally, the temperature monitoring unit is a thermocouple.

[0018] Optionally, the inner wall of the thermal insulation layer is coated with a thermal insulation coating.

[0019] The present application provides a vertical furnace. And the vertical furnace includes a protective layer arranged on the outside, a heat-insulating layer arranged on the inside, and a heating interlayer arranged between the protective layer and the heat-insulating layer. Among them, the heating interlayer corresponding to the side of the furnace body is provided with a plurality of first heating control areas from top to bottom. Among them, the first heating control area is used to heat the side wall of the cavity. And the heating interlayer 230 corresponding to the top of the furnace body 20 is provided with a second heating control area 236. Among them, the second heating control area 236 is used to heat the top of the cavity 10.

[0020] Since the present application is not only provided with multiple first heating control areas for heating the side walls of the cavity 10, but also provided with a second heating area for heating the top of the cavity, it is different from the prior art in which multiple heating control areas are only provided in the heating interlayer corresponding to the side of the furnace body. In this application, the second heating control area can heat the top of the cavity, thereby effectively preventing the loss of heat from the top of the vertical furnace, improving the temperature uniformity of the entire vertical furnace, and improving the production quality of the product.

[0021] This solves the technical problem in the prior art that heat loss usually occurs at the top of the furnace body of the existing vertical furnace, causing the top of the furnace body to always be in a relatively low temperature state, which may cause major defects in the process reaction at the top of the furnace body and may even cause an uneven film structure in severe cases.

[0022] Based on the detailed description of the specific embodiments of the present application in combination with the accompanying drawings below, those skilled in the art will become more aware of the above and other purposes, advantages and features of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] Hereinafter, some specific embodiments of the present application will be described in detail in an exemplary and non-limiting manner with reference to the accompanying drawings. The same reference numerals in the accompanying drawings indicate the same or similar components or parts. It should be understood by those skilled in the art that these drawings are not necessarily drawn to scale. In the accompanying drawings:

[0024] Figure 1 is a schematic diagram of the temperature control area of ​​an existing vertical furnace;

[0025] Figure 2 It is a schematic diagram of the external structure of the vertical furnace described in the embodiment of the present application;

[0026] Figure 3 is a schematic diagram of the temperature control area of ​​the vertical furnace according to an embodiment of the present application;

[0027] Figure 4 is a cross-sectional view of the vertical furnace described in the embodiment of the present application;

[0028] Figure 5 Schematic diagram of wafer film thickness at the top of an existing cavity;

[0029] Figure 6 is a schematic diagram of the wafer film thickness at the top of the cavity according to an embodiment of the present application;

[0030] Figure 7 It is a schematic diagram of the arrangement of the first heating unit described in an embodiment of the present application in the second heating control area corresponding to the top of the furnace body. DETAILED DESCRIPTION

[0031] It should be noted that, in the absence of conflict, the embodiments and features of the embodiments of the present invention can be combined with each other. The present invention will be described in detail below with reference to the accompanying drawings and in combination with the embodiments.

[0032] In order to enable those skilled in the art to better understand the solution of the utility model, the technical solution in the embodiment of the utility model will be clearly and completely described below in conjunction with the drawings in the embodiment of the utility model. Obviously, the described embodiment is only a part of the embodiment of the utility model, not all of the embodiments. Based on the embodiment of the utility model, all other embodiments obtained by ordinary technicians in this field without creative work should fall within the scope of protection of the utility model.

[0033] It should be noted that the terms "first", "second", etc. in the specification and claims of the present invention and the above-mentioned drawings are used to distinguish similar objects, and are not necessarily used to describe a specific order or sequence. It should be understood that the terms used in this way can be interchanged where appropriate, so as to describe the embodiments of the present invention described herein. In addition, the terms "including" and "having" and any of their variations are intended to cover non-exclusive inclusions, for example, a process, method, system, product or device that includes a series of steps or units is not necessarily limited to those steps or units that are clearly listed, but may include other steps or units that are not clearly listed or inherent to these processes, methods, products or devices.

[0034] It should be noted that the terms used herein are only for describing specific embodiments and are not intended to limit the exemplary embodiments according to the present application. As used herein, unless the context clearly indicates otherwise, the singular form is also intended to include the plural form. In addition, it should be understood that when the terms "comprise" and / or "include" are used in this specification, it indicates the presence of features, steps, operations, devices, components and / or combinations thereof.

[0035] Figure 2 It is a schematic diagram of the external structure of the vertical furnace described in the embodiment of the present application. Figure 3 It is a schematic diagram of the temperature control area of ​​the vertical furnace according to the embodiment of the present application. Figure 4 2 is a cross-sectional view of a vertical furnace according to an embodiment of the present application. Figure 2 , Figure 3 as well as Figure 4 As shown, a vertical furnace includes: a cavity 10 and a furnace body 20 for forming the cavity 10, the furnace body 20 includes a protective layer 210 arranged on the outside, a thermal insulation layer 220 arranged on the inside and a heating interlayer 230 arranged between the protective layer 210 and the thermal insulation layer 220; in the heating interlayer 230 corresponding to the side of the furnace body 20, a plurality of first heating control areas 231 to 235 are arranged in sequence from top to bottom, wherein the first heating control areas 231 to 235 are used to heat the side wall of the cavity 10; and in the heating interlayer 230 corresponding to the top of the furnace body 20, a second heating control area 236 is arranged, wherein the second heating control area 236 is used to heat the top of the cavity 10.

[0036] As described in the background technology, currently common vertical furnaces can be mainly divided into normal pressure vertical furnaces and low pressure chemical vapor deposition vertical furnaces. The heat loss at the top of the furnace body of the normal pressure vertical furnace is mainly due to cold gas. When the cold gas enters the cavity from the top of the furnace body of the normal pressure vertical furnace, the cold gas fails to be fully heated, so that the top of the furnace body of the normal pressure vertical furnace is always in a relatively low temperature state, which leads to major defects in the process reaction at the top of the furnace body of the normal pressure vertical furnace, which may lead to the failure to generate the required film structure in severe cases.

[0037] Since the top area of ​​the low-pressure chemical vapor deposition furnace is large and the gas flows at a high speed, the heat at the top of the low-pressure chemical vapor deposition furnace will also be dissipated, which may result in failure to generate the required thin film structure.

[0038] In view of this, the present application provides a vertical furnace. Figure 2 and Figure 4 As shown, the external structure of the vertical furnace in the present application can be, for example, a cylindrical structure. The top of the vertical furnace is closed, and the bottom is an open structure. And the bottom of the vertical furnace is connected with a flange structure and a corresponding exhaust device. During the process reaction, the wafer boat moves into the chamber 10, and the base at the bottom of the wafer boat is connected to the flange at the bottom of the vertical furnace, thereby forming a closed structure, so that the wafer boat reacts in the closed chamber 10.

[0039] Further, refer to Figure 4 As shown, the furnace body 20 of the vertical furnace includes an outer protective layer 210 , an inner heat-insulating layer 220 , and a heating interlayer 230 disposed between the protective layer 210 and the heat-insulating layer 220 .

[0040] In addition, a plurality of first heating control areas 231 to 235 are sequentially arranged from top to bottom in the heating interlayer 230 corresponding to the side surface of the furnace body 20. The first heating control areas 231 to 235 are used to heat the side wall of the cavity 10. Figure 3 and Figure 4 As shown, for example, in this embodiment, the heating interlayer 230 can be divided into 5 different heating control areas from top to bottom. That is, the first heating control area 231 at the upper part of the heating interlayer 230, the first heating control area 232 at the upper middle part of the heating interlayer 230, the first heating control area 233 at the middle part of the heating interlayer 230, the first heating control area 234 at the lower middle part of the heating interlayer 230, and the first heating control area 235 at the lower part of the heating interlayer 230. Each of the first heating control areas 231 to 235 is relatively independent, and heats the corresponding position of the side wall of the cavity 10 respectively.

[0041] In addition, it is worth noting that reference Figure 4As shown, a second heating area 236 is further provided in the heating interlayer 230 corresponding to the top of the furnace body 20. The second heating area 236 is used to heat the top of the cavity 10. Thus, while the first heating control areas 231 to 235 corresponding to the side of the furnace body 20 heat the side wall of the cavity 10, the second heating control area 236 corresponding to the top of the furnace body 20 also heats the top of the cavity 10.

[0042] For an atmospheric pressure vertical furnace, after the top of the furnace body 20 is heated, the cold air entering from the top of the atmospheric pressure vertical furnace can be preheated to a certain extent, so that the temperature of the top of the cavity 10 is relatively stable. For a low-pressure chemical vapor deposition vertical furnace, after the top of the furnace body 20 is heated, the temperature affected by the airflow can be compensated, so that the heat radiation of the top of the cavity 10 is improved.

[0043] Furthermore, regardless of the existing vertical furnace, since a second heating control area 236 is provided in the heating interlayer 230 corresponding to the top of the furnace body 20 in the present application, when the second heating control area 236 works normally, it can effectively prevent the heat loss at the top of the cavity 10, improve the temperature uniformity of the entire vertical furnace, and improve the production quality of the product.

[0044] also, Figure 5 Schematic diagram of wafer film thickness at the top of an existing cavity. Figure 6 Schematic diagram of the wafer film thickness at the top of the cavity according to the embodiment of the present application. Figure 5 and Figure 6 It can be seen that using the vertical furnace provided in this application to produce wafer films can significantly improve the uniformity of the wafer films on the top of the cavity 10, and can also reduce the power output of the heating control area, which is beneficial to increasing the service life of the heating elements in the heating control area.

[0045] This solves the technical problem in the prior art that heat loss usually occurs at the top of the furnace body of the existing vertical furnace, causing the top of the furnace body to always be in a relatively low temperature state, which may cause major defects in the process reaction at the top of the furnace body and may even cause an uneven film structure in severe cases.

[0046] Optionally, multiple first heating control areas 231~235 are sequentially provided with a first heating unit 23111 and multiple second heating units 2312 from top to bottom, and the first heating unit 23111 and the multiple second heating units 2312 are arranged around the cavity 10; and the first heating unit 23111 extends to the second heating control area 236 corresponding to the top of the furnace body 20.

[0047] Specifically, refer to Figure 3 and Figure 4 As shown, the first heating control areas 231-235 are sequentially provided with a first heating unit 2311 and a plurality of second heating units 2312 from top to bottom. The first heating unit 2311 is arranged around the cavity 10, and the plurality of second heating units 2312 are also arranged around the cavity 10. Thus, the first heating unit 2311 can heat the side wall of the corresponding part of the cavity 10, and each second heating unit 2312 can also heat the side wall of the corresponding part of the cavity 10.

[0048] Furthermore, the first heating unit 2311 also extends to the second heating control area 236 corresponding to the top of the furnace body 20. Since the first heating unit 2311 is not only arranged in the first heating control area 231 corresponding to the side of the furnace body 20, but also extends to the second heating control area 232 corresponding to the top of the furnace body 20, the first heating unit 2311 will not only heat the side wall of the cavity 10, but also heat the top of the cavity 10.

[0049] Therefore, since the present application does not set an additional heating unit on the top of the furnace body 20, but extends the first heating unit 2311 to the second heating control area 236 corresponding to the top of the furnace body 20, the first heating control area 231 and the second heating control area 236 can be controlled in a coordinated manner, thereby further ensuring that the side wall of the cavity 10 corresponding to the first heating control area 231 and the top of the cavity 10 corresponding to the second heating control area 236 are the same, thereby ensuring the structural uniformity of the produced wafer film.

[0050] Optionally, the first heating unit 240 is centered on the axis of the cavity 10 and is disposed in multiple layers in the second heating control area 236 corresponding to the top of the furnace body 20 .

[0051] Specifically, Figure 7 Schematic diagram of the arrangement of the first heating unit in the second heating control area corresponding to the top of the furnace body according to the embodiment of the present application. Figure 7 As shown, the first heating unit 2311 extending to the inside of the second heating control area 236 corresponding to the top of the furnace body 20 forms a plurality of evenly arranged circles around the axis of the cavity 10 as the center.

[0052] Furthermore, with the axis of the cavity 10 as the center, the area to be heated becomes larger from the inside to the outside, so the radius of the circle formed by the first heating unit 2311 becomes larger from the inside to the outside, so that the top of the cavity 10 can be heated evenly.

[0053] Thus, by extending the first heating unit 2311 into the second heating control area 236 corresponding to the top of the furnace body 20, and forming a plurality of evenly arranged circles with the axis of the cavity 20 as the center, it is possible to achieve the technical effect of evenly heating the top of the furnace body 20, thereby ensuring the uniformity of the product structure.

[0054] In addition, it is worth noting that the above is only an exemplary example of the first heating unit 2311 surrounding to form a plurality of evenly arranged circles, and the actual situation is not limited to this.

[0055] Optionally, the first heating unit 2311 and the plurality of second heating units 2312 are resistance wires. Further optionally, the resistance wires are made of an iron-chromium-aluminum-niobium alloy.

[0056] Specifically, refer to Figure 4 As shown, the first heating unit 2311 and the plurality of second heating units 2312 may be resistance wires.

[0057] And because the iron-chromium-aluminum-niobium alloy has a high operating temperature (the maximum operating temperature can reach 1400°C), a long service life, a high surface load, good oxidation resistance and high resistivity, the material used to make the resistance wire in this application is the iron-chromium-aluminum-niobium alloy. In addition, because the iron-chromium-aluminum-niobium alloy is relatively cheap, even if the first heating unit 2311 corresponding to the top of the furnace body 20 is added, it will not increase the cost.

[0058] Optionally, a zirconium oxide shell is disposed outside the first heating unit 2311 and the plurality of second heating units 2312 .

[0059] Specifically, the outer shells of the first heating unit 2311 and each second heating unit 2312 are integrally formed with high-temperature zirconium oxide material, and the first heating unit 2311 and each second heating unit 2312 are embedded in the high-temperature zirconium oxide cavity. The embedded structure fixes the heating element, solving the disadvantage that the iron-chromium-aluminum-niobium alloy is prone to deformation at high temperatures. In addition, high-temperature zirconium oxide can better isolate the external environment, reduce the heat loss of the first heating unit 2311 and each second heating unit 2312, and can play a good role in heat preservation.

[0060] Optionally, a plurality of first cooling water systems 2313 are provided in each of the first heating control areas 231 to 235 corresponding to the side of the furnace body 20 ; and a second cooling water system 2314 is provided in the second heating control area 236 corresponding to the top of the furnace body 20 .

[0061] Specifically, refer to Figure 3 and Figure 4As shown, a plurality of first cooling water systems 2313 corresponding to the first heating unit 2311 and each second heating unit 2312 are disposed inside each first heating control area 231-235 corresponding to the side of the furnace body 20. A second cooling water system 2314 corresponding to the first heating unit 2311 is disposed inside the second heating control area 236 corresponding to the top of the furnace body 20.

[0062] Among them, the multiple first cooling water systems 2313 and the second cooling water systems 2314 are mainly used to protect the vertical furnace, extend the service life of the vertical furnace, and ensure the normal operation of the vertical furnace.

[0063] Optionally, the heating interlayer 230 is provided with a filling medium 237 .

[0064] Optionally, it further includes: a plurality of temperature monitoring units 30 for feeding back temperature information to the PID temperature control system, wherein the plurality of temperature monitoring units 30 are fixed to the side wall of the protective layer 210, and each temperature monitoring unit 30 corresponds to a plurality of first heating control areas 231-235 and a second heating control area 236. Further optionally, the temperature monitoring unit 30 is a thermocouple.

[0065] Specifically, referring to the above contents, in this embodiment, the heating interlayer 230 corresponding to the side of the furnace body 20 can be divided into 5 different heating control areas (i.e., the first heating control area 231 to the first heating control area 235) from top to bottom. And wherein, the first heating control area 231 to the first heating control area 235 are correspondingly provided with a temperature monitoring unit 30. Each temperature monitoring unit 30 is fixed to the side wall of the protective layer 210, and is used to monitor the temperature change of the first heating control area 231 to the first heating control area 235.

[0066] In addition, each temperature monitoring unit 30 is respectively connected to the PID temperature control system, so that the PID control system can control the corresponding first heating unit 2311 and each second heating unit 2312 based on the temperature changes corresponding to the first heating control area 231 to the first heating control area 235 sent by each temperature monitoring unit 30, and make the temperature inside the cavity 10 always in a relatively stable state.

[0067] Further, it is worth noting that the first heating unit 2311 corresponding to the side of the furnace body 20 and the first heating unit 2311 corresponding to the top of the furnace body 20 are connected to the same temperature monitoring unit 30 .

[0068] Therefore, by setting up respective temperature monitoring units 30 corresponding to the first heating control area 231 to the first heating control area 235, the temperature changes of the first heating control area 231 to the first heating control area 235 and the second heating control area 236 can be monitored, thereby ensuring the technical effect of the stability of the temperature in the cavity 10.

[0069] Preferably, the temperature monitoring unit 30 may be, for example, a thermocouple.

[0070] Optionally, the inner wall of the thermal insulation layer 220 is coated with a thermal insulation coating.

[0071] Specifically, refer to Figure 4 As shown, the inner side of the thermal insulation layer 220 is the cavity 10 structure, so coating the inner wall of the thermal insulation layer 220 with a thermal insulation coating can better ensure the stability of the temperature inside the cavity.

[0072] Unless otherwise specifically stated, the relative arrangement, numerical expressions and numerical values ​​of the parts and steps described in these embodiments do not limit the scope of the utility model. At the same time, it should be understood that, for ease of description, the sizes of the various parts shown in the accompanying drawings are not drawn according to the actual proportional relationship. The technology, methods and equipment known to ordinary technicians in the relevant field may not be discussed in detail, but in appropriate cases, the technology, methods and equipment should be regarded as a part of the authorization specification. In all examples shown and discussed here, any specific value should be interpreted as merely exemplary, rather than as a limitation. Therefore, other examples of exemplary embodiments may have different values. It should be noted that similar reference numerals and letters represent similar items in the following drawings, so once a certain item is defined in one drawing, it does not need to be further discussed in subsequent drawings.

[0073] For ease of description, spatially relative terms such as "above", "above", "on the upper surface of", "above", etc. may be used here to describe the spatial positional relationship between a device or feature and other devices or features as shown in the figure. It should be understood that spatially relative terms are intended to include different orientations of the device in use or operation in addition to the orientation described in the figure. For example, if the device in the accompanying drawings is inverted, the device described as "above other devices or structures" or "above other devices or structures" will be positioned as "below other devices or structures" or "below other devices or structures". Thus, the exemplary term "above" can include both "above" and "below". The device can also be positioned in other different ways (rotated 90 degrees or in other orientations), and the spatially relative descriptions used here are interpreted accordingly.

[0074] In the description of the present utility model, it needs to be understood that the directions or positional relationships indicated by directional words such as "front, back, up, down, left, right", "lateral, vertical, perpendicular, horizontal" and "top, bottom" are usually based on the directions or positional relationships shown in the drawings, and are only for the convenience of describing the present utility model and simplifying the description. Unless otherwise specified, these directional words do not indicate or imply that the device or element referred to must have a specific direction or be constructed and operated in a specific direction, and therefore cannot be understood as limiting the scope of protection of the present utility model; the directional words "inside and outside" refer to the inside and outside relative to the contours of each component itself.

[0075] The above is only a preferred specific implementation of the present application, but the protection scope of the present application is not limited thereto. Any changes or substitutions that can be easily thought of by a person skilled in the art within the technical scope disclosed in the present application should be included in the protection scope of the present application. Therefore, the protection scope of the present application should be based on the protection scope of the claims.

Claims

1. A vertical furnace comprising: A cavity (10) and a furnace body (20) used to form the cavity (10), characterized in that the furnace body (20) comprises a protective layer (210) arranged on the outside, a heat-insulating layer (220) arranged on the inside, and a heating interlayer (230) arranged between the protective layer (210) and the heat-insulating layer (220); A plurality of first heating control areas (231-235) are sequentially arranged in the heating interlayer (230) corresponding to the side surface of the furnace body (20) from top to bottom, wherein the first heating control areas (231-235) are used to heat the side wall of the cavity (10); and A second heating control area (236) is provided in the heating interlayer (230) corresponding to the top of the furnace body (20), wherein the second heating control area (236) is used to heat the top of the cavity (10).

2. The vertical furnace according to claim 1, characterized in that: The plurality of first heating control areas (231-235) are sequentially provided with a first heating unit (2311) and a plurality of second heating units (2312) from top to bottom, and the first heating unit (2311) and the plurality of second heating units (2312) are arranged around the cavity (10); and The first heating unit (2311) extends into the second heating control area (236) corresponding to the top of the furnace body (20).

3. The vertical furnace according to claim 1, characterized in that: The first heating unit (2311) is centered on the axis of the cavity (10) and is arranged in multiple layers in the second heating control area (236) corresponding to the top of the furnace body (20).

4. The vertical furnace according to claim 2 or 3, characterized in that: The first heating unit (2311) and the plurality of second heating units (2312) are resistance wires.

5. The vertical furnace according to claim 4, characterized in that: The resistance wire is made of an iron-chromium-aluminum-niobium alloy.

6. The vertical furnace according to claim 5, characterized in that: A zirconium oxide shell is disposed outside the first heating unit (2311) and the plurality of second heating units (2312).

7. The vertical furnace according to claim 1, characterized in that: A first cooling water system (2313) is provided in each first heating control area (231-235) corresponding to the side surface of the furnace body (20); and A second cooling water system (2314) is provided in the second heating control area (236) corresponding to the top of the furnace body (20).

8. The vertical furnace according to claim 1, characterized in that: A filling medium (237) is provided in the heating interlayer (230).

9. The vertical furnace according to claim 1, characterized in that: Also includes: A plurality of temperature monitoring units (30) for feeding back temperature information to a PID temperature control system, wherein The plurality of temperature monitoring units (30) are fixed to the side wall of the protective layer (210), and each temperature monitoring unit (30) corresponds to the plurality of first heating control areas (231-235) and the second heating control area (236), respectively. The temperature monitoring unit (30) is a thermocouple.

10. The vertical furnace according to claim 1, characterized in that: The inner wall of the thermal insulation layer (220) is coated with a thermal insulation coating.

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