Auxiliary heating mechanism and reaction device

Abstract

The utility model provides an auxiliary heating mechanism and a reaction device, the auxiliary heating mechanism is arranged in a reaction furnace, and the auxiliary heating mechanism comprises an auxiliary heating pipe; the supporting rod is used for being connected with a reaction furnace; and the bearing frame is connected with the supporting rod, the bearing frame is used for bearing the auxiliary heating pipe, and the bearing frame is located between the two ends of the auxiliary heating pipe. According to the auxiliary heating mechanism and the reaction device, the gravity of the auxiliary heating pipe is dispersed to the supporting rod through the multiple bearing frames, and the supporting rod supports the pipe body of the auxiliary heating pipe. In this way, the situation that the part, located between the two ends, of the auxiliary heat pipe is broken due to the fact that the auxiliary heat pipe cannot be supported can be reduced, and the service life of the auxiliary heat pipe can be prolonged.

Description

Technical Field

[0001] The present application relates to the technical field of photovoltaic and semiconductor product processing, and in particular to an auxiliary heating mechanism and a reaction device. Background Art

[0002] In the process of photovoltaic and semiconductor product production, sheet materials need to be heated in a reactor and then subjected to coating processing. The electric heating wires arranged around the reactor wall and the auxiliary heating pipes arranged in the reactor can heat the sheet materials in the reactor.

[0003] The two ends of the auxiliary heating tube can be connected to the two ends of the reactor, but due to the lack of support at the tube body of the auxiliary heating tube, some large-sized auxiliary heating tubes may break. Utility Model Content

[0004] In view of the above, it is necessary to provide an auxiliary heating mechanism and a reaction device to solve the above defects.

[0005] In a first aspect, an embodiment of the present application provides an auxiliary heating mechanism, which is arranged in a reaction furnace, and the auxiliary heating mechanism includes: an auxiliary heating pipe; a support rod, the support rod is used to connect to the reaction furnace; a support bracket, the support bracket is connected to the support rod, the support bracket is used to receive the auxiliary heating pipe, and the support bracket is located between the two ends of the auxiliary heating pipe.

[0006] Optionally, the support bracket includes: a buckling portion, which is used to be sleeved on the support rod; and a supporting portion, which is connected to the buckling portion and is used to receive the auxiliary heat pipe.

[0007] Optionally, the support frame includes: a snap-fitting portion, which is used to be sleeved on a support rod; a supporting portion, which is connected to the snap-fitting portion and is used to receive the auxiliary heat pipe; and a lap portion, which is connected to the supporting portion, the lap portion and the snap-fitting portion are spaced apart, and is used to support against another support rod.

[0008] Optionally, the support frame further includes: a partition portion, which is protruding from the supporting portion and is used to separate a plurality of auxiliary heat pipes supported on the supporting portion.

[0009] Optionally, a plurality of supporting grooves are provided on the supporting frame, and the plurality of supporting grooves are used to be spaced apart in the width direction of the reaction furnace, and each supporting groove is used to accommodate at least a part of the structure of the corresponding auxiliary heat pipe.

[0010] Optionally, the support bracket includes: a first clamping part, the first clamping part is supported on the support rod, and multiple supporting grooves are opened on the first clamping part; a second clamping part, the second clamping part is detachably connected to the first clamping part, and the first clamping part and the second clamping part are used to clamp the support rod.

[0011] Optionally, the auxiliary heating mechanism further includes: a limiting hoop, which is arranged on the support rod and is used to abut against the support bracket to limit the movement of the support bracket in the length direction of the support rod.

[0012] Optionally, there are multiple support rods, and the multiple support rods are used to be arranged at intervals in the width direction of the reaction furnace and to avoid the auxiliary heat pipes in the width direction of the reaction furnace.

[0013] In a second aspect, an embodiment of the present application provides a reaction device, comprising: a reaction furnace; and an auxiliary heating mechanism such as any of the above items, wherein the auxiliary heating mechanism is disposed in the reaction furnace.

[0014] Optionally, the reaction furnace includes: a furnace tube, the auxiliary heating mechanism is arranged in the furnace tube; two flanges, the two flanges are respectively arranged at both ends of the furnace tube, and both ends of the support rod of the auxiliary heating mechanism are respectively connected to the two flanges.

[0015] Optionally, each flange is provided with a receiving seat, a receiving groove is provided on the receiving seat, the receiving groove is used to accommodate the end of the corresponding support rod, and the inner wall of the receiving groove is used to abut the end of the corresponding support rod to limit the movement of the corresponding support rod in its length direction.

[0016] Through the auxiliary heating mechanism and reaction device provided in the present application, the gravity of the auxiliary heating pipe is dispersed to the support rod through multiple support brackets, so that the support rod can support the auxiliary heating pipe body. In this way, the support for the auxiliary heating pipe body can be strengthened, the auxiliary heating pipe breakage can be reduced, and the service life of the auxiliary heating pipe can be increased. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 It is a schematic diagram of the partial structure of the reaction device in the embodiment of the present application.

[0018] Figure 2 yes Figure 1 Enlarged view of point II in the middle.

[0019] Figure 3 yes Figure 1 Back view of the reaction device.

[0020] Figure 4 It is a schematic diagram of the structure of the receiving seat in the embodiment of the present application.

[0021] Figure 5 It is a schematic diagram of the structure of the support bracket in the first embodiment of the present application.

[0022] Figure 6 It is a schematic diagram of the structure of the support bracket in the second embodiment of the present application.

[0023] Figure 7 It is a schematic diagram of the structure of the support bracket in the third embodiment of the present application.

[0024] Description of main component symbols:

[0025] 100. reaction device; 101. flange; 102. auxiliary heating mechanism; 103. receiving seat; 1031. receiving groove; 10. auxiliary heating pipe; 20. support rod; 30. supporting bracket; 31. buckling part; 32. supporting part; 33. overlapping part; 34. partitioning part; 35. first clamping part; 36. second clamping part; 37. supporting groove; 38. positioning hole; 40. limiting hoop. DETAILED DESCRIPTION

[0026] The technical solutions in the embodiments of the present application will be described clearly and completely below in conjunction with the drawings in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, rather than all of the embodiments.

[0027] In the present application, the term "plurality" refers to two or more. In addition, it should be understood that in the description of the present application, the terms "first", "second", etc. are only used for the purpose of distinguishing descriptions, and cannot be understood as indicating or implying relative importance, nor can they be understood as indicating or implying an order.

[0028] In the description of the embodiments of the present application, words such as "exemplary" or "for example" are used to indicate examples, illustrations or descriptions. Any embodiment or design described as "exemplary" or "for example" in the embodiments of the present application should not be interpreted as being more preferred or more advantageous than other embodiments or designs. Specifically, the use of words such as "exemplary" or "for example" is intended to present related concepts in a specific way.

[0029] See also Figure 1 , Figure 1 A reaction device 100 provided by the present application is shown. The reaction device 100 can accommodate sheet materials and perform coating processing on the sheet materials.

[0030] In the embodiments of the present application, the type of sheet material is not specifically limited. For example, the sheet material may be, but is not limited to, a silicon sheet, a silicon carbide sheet, a wafer, and the like.

[0031] In the embodiments of the present application, there is no specific limitation on the principle of coating the sheet material by the reaction device 100. For example, the reaction device 100 may perform a plasma enhanced chemical vapor deposition (PECVD) process to coat the sheet material.

[0032] In an embodiment of the present application, the reaction device 100 may include a reaction furnace. The length direction of the reaction furnace may be defined as a first direction, the width direction as a second direction, and the height direction as a third direction. For example, the first direction may be as follows: Figure 1 The X direction and its reverse direction shown, the second direction can be as follows Figure 1 The Y direction and its reverse direction shown, the third direction can be as follows Figure 1 The Z direction and its opposite direction are shown.

[0033] The reaction furnace may include a furnace tube (not shown) and two flanges 101. The furnace tube extends along a first direction, and is a tube body with two ends in the first direction passing through. One flange 101 is fixedly connected to one end of the furnace tube in the first direction, and the other flange 101 is fixedly connected to the other end of the furnace tube in the first direction.

[0034] In the embodiments of the present application, there is no specific limitation on the fixing method during the fixed connection and fixed installation. For example, the fixing method may include, but is not limited to, welding fixing, bolt fixing, snap fixing, integral molding fixing, etc.

[0035] It can be understood that the reactor can also include two end covers (not shown). The two end covers correspond to the two flanges 101 one by one. Each flange 101 can be detachably connected to the corresponding end cover. The two end covers can achieve the closure of the two ends of the reactor.

[0036] In the embodiments of the present application, the detachable connection method is not specifically limited. For example, the detachable connection method may include bolt connection, snap connection, etc.

[0037] It is understood that the sheet material can enter the furnace tube through one end of the furnace tube. A heating mechanism can be arranged inside or outside the furnace tube, and the heating mechanism can be arranged around the furnace tube, and the heating mechanism can heat the sheet material.

[0038] In the embodiments of the present application, the type of the heating mechanism is not specifically limited. For example, the heating mechanism may be an electric heating wire, which can generate heat to heat the sheet material after being energized.

[0039] Please also read Figure 2 In the embodiment of the present application, the reaction furnace may further include an auxiliary heating mechanism 102 . The auxiliary heating mechanism 102 is disposed in the furnace tube and may be connected to the two flanges 101 .

[0040] The auxiliary heating mechanism 102 may include an auxiliary heating pipe 10, a support rod 20 and a support bracket 30. The length directions of the auxiliary heating pipe 10 and the support rod 20 coincide with the first direction. The auxiliary heating pipe 10 can generate heat to increase the temperature in the furnace tube and heat the sheet material in the furnace tube. In the first direction, one end of the support rod 20 is connected to a flange 101, and the other end is connected to another flange 101. The support rod 20 is relatively fixed to the reactor by connecting with the two flanges 101. The support rod 20 and the auxiliary heating pipe 10 are arranged in an arranged manner in the second direction. The support bracket 30 can be fixedly mounted on the support rod 20 and receive the auxiliary heating pipe 10 from the bottom.

[0041] It can be understood that the auxiliary heat pipe 10 can cooperate with the heating mechanism to increase the temperature in the furnace tube to heat the sheet material so that the temperature of the sheet material can meet the requirements of the coating process.

[0042] In the embodiments of the present application, there is no specific limitation on the type of the auxiliary heat pipe 10. For example, the auxiliary heat pipe 10 may include a heating wire and a sleeve, wherein the heating wire is contained in the sleeve, and the sleeve may be made of quartz; the heating wire may generate heat after being energized to heat the sheet material.

[0043] It can be understood that the auxiliary heat pipe 10 can be provided with at least one flange 101. One end of the auxiliary heat pipe 10 provided with the flange 101 can be connected to an electric wire, so that the auxiliary heat pipe 10 can be powered on and heat the sheet material. The auxiliary heat pipe 10 can be connected to or not connected to the flange 101 provided therewith, and the embodiments of the present application are not limited thereto.

[0044] It can be understood that the two flanges 101 realize support with the support rod 20, and the support rod 20 realizes support for the portion between the two flanges 101 on the auxiliary heat pipe 10 through the support bracket 30. In this way, the portion between the two ends of the auxiliary heat pipe 10 can be supported, and the situation that the portion between the two ends of the auxiliary heat pipe 10 is broken due to being unable to support the weight of the auxiliary heat pipe 10 can be reduced. Compared with the design of directly connecting the auxiliary heat pipe 10 to the two flanges 101 in the related art, the service life of the auxiliary heat pipe 10 can be increased.

[0045] In the embodiment of the present application, there is no specific limitation on the material of the support rod 20. For example, the material of the support rod 20 may be, but is not limited to, silicon carbide.

[0046] Please also read Figure 3 and Figure 4 In some embodiments, the reaction device 100 may further include a plurality of receiving seats 103, wherein some receiving seats 103 are fixedly mounted on one flange 101, and the remaining receiving seats 103 are fixedly mounted on another flange 101. Each receiving seat 103 is used to receive one end of the support rod 20 in the first direction.

[0047] Each receiving seat 103 has a receiving groove 1031 on one side facing the furnace tube, and the receiving groove 1031 can pass through the top of the receiving seat 103. Each receiving groove 1031 can accommodate one end of a support rod 20 in the first direction to receive the support rod 20 from the bottom. The inner walls on both sides of each receiving groove 1031 in the second direction can abut against a support rod 20 and limit the movement of the support rod 20 in the second direction. At the same time, the inner wall of each receiving groove 1031 in the first direction can stop against one end of the support rod 20 in the first direction to limit the movement of the support rod 20 in the first direction.

[0048] For example, two receiving seats 103 may be symmetrically arranged on each flange 101 , and each receiving seat 103 may receive a support rod 20 .

[0049] It can be understood that the receiving seat 103 can realize the connection between the support rod 20 and the flange 101, and can limit the movement of the support rod 20 to achieve the relative fixation of the support rod 20 and the reaction furnace.

[0050] It is understood that the number of the support rods 20 can be one or more, and the embodiments of the present application are not limited to this. Figure 2 and Figure 3 As shown, the number of the support rods 20 can be two, and the two support rods 20 are spaced apart in the second direction; the two support rods 20 are respectively located on both sides of the auxiliary heat pipe 10 in the second direction, and are spaced apart from the auxiliary heat pipe 10 in the second direction to avoid the auxiliary heat pipe 10. Correspondingly, the number of the receiving seats 103 can be four, and each receiving seat 103 corresponds to a support rod 20 and is used to receive the corresponding support rod 20.

[0051] It is understood that when there are multiple support rods 20, the multiple support rods 20 are spaced apart in the second direction and avoid the auxiliary heat pipe 10 in the second direction. In this way, the support rods 20 can reduce the obstruction of the heat generated by the auxiliary heat pipe 10 during the transfer, thereby improving the heating efficiency of the sheet material.

[0052] It is understood that the number of the auxiliary heat pipes 10 can be one or more, and the embodiments of the present application are not limited to this. Figure 2 As shown, the number of the auxiliary heat pipes 10 may be three, and the three auxiliary heat pipes 10 may be arranged at intervals in the second direction and are all located between the two support rods 20 .

[0053] It is understandable that the number of the support brackets 30 can be one or more, and the embodiments of the present application do not limit this. When the number of the support brackets 30 is multiple, the multiple support brackets 30 are spaced apart in the first direction, and each support bracket can be fixedly connected to at least one support rod 20 and receive all the auxiliary heat pipes 10.

[0054] Please also read Figure 5 In the first embodiment, the support bracket 30 may include a buckle portion 31 and a supporting portion 32. The number of the buckle portions 31 may be two, and the two buckle portions 31 may be spaced apart in the second direction. The supporting portion 32 extends along the second direction. The supporting portion 32 is located between the two buckle portions 31 and is fixedly connected to the two buckle portions 31. The supporting portion 32 may receive the auxiliary heat pipe 10 from the bottom.

[0055] It can be understood that the support rod 20 can be a round rod, and the buckle part 31 can be in an incomplete ring shape. Under the action of external force, the opening on the circumference of the buckle part 31 can be expanded, so that the support rod 20 can enter the center of the buckle part 31 through the opening, and then the buckle part 31 returns to its original shape under the action of its own elastic force, so that the buckle part 31 is sleeved on the support rod 20. The inner wall of the buckle part 31 can abut against the peripheral wall of the support rod 20 to limit the movement of the support rod 20 and the buckle part 31 in the second direction of the support rod 20.

[0056] It can be understood that after the two buckling parts 31 are respectively sleeved on the two support rods 20, the supporting part 32 is relatively fixed to the two support rods 20. Each auxiliary heat pipe 10 can be abutted against the supporting part 32, so that the supporting part 32 can receive each auxiliary heat pipe 10.

[0057] It can be understood that the supporting portion 32 and the buckling portion 31 can be manufactured in one piece to achieve a fixed connection between the supporting portion 32 and the buckling portion 31 .

[0058] Please also read Figure 6 In the second embodiment, the number of the buckling portion 31 in the support bracket 30 is one, and the support bracket 30 further includes an overlap portion 33. The overlap portion 33 and the buckling portion 31 are spaced apart in the second direction, and the supporting portion 32 is located between the buckling portion 31 and the overlap portion 33, and is fixedly connected to the buckling portion 31 and the overlap portion 33. The buckling portion 31 can be sleeved on one support rod 20 to be fixedly connected to the support rod 20. The overlap portion 33 can be supported on another support rod 20. The other support rod 20 can support the overlap portion 33 from the bottom, so that the two support rods 20 support the support bracket 30.

[0059] It can be understood that the supporting portion 32 , the buckling portion 31 and the overlapping portion 33 can be manufactured in one piece to achieve fixed connection among the supporting portion 32 , the buckling portion 31 and the overlapping portion 33 .

[0060] In the first embodiment and the second embodiment, the support frame 30 may further include a partition 34. The partition 34 may be protruding from the support portion 32. The partition 34 may separate the plurality of auxiliary heat pipes 10 supported by the support portion 32, so that the plurality of auxiliary heat pipes 10 are arranged at intervals in the second direction. In this way, the accumulation of heat generated by the plurality of auxiliary heat pipes 10 may be reduced, so that the heat generated by the auxiliary heat pipes 10 may be dispersed and radiated to the position of the sheet material.

[0061] It is understood that the number of the partitions 34 can be one or more, and the embodiments of the present application do not limit this. When the number of the partitions 34 is multiple, the multiple partitions 34 can be spaced apart in the second direction, and each partition 34 is located between two auxiliary heat pipes 10.

[0062] Please also read Figure 7 In the third embodiment, the support bracket 30 may include a first clamping portion 35 and a second clamping portion 36. The first clamping portion 35 and the second clamping portion 36 are arranged in a third direction, and the first clamping portion 35 and the second clamping portion 36 are detachably connected. The first clamping portion 35 and the second clamping portion 36 can clamp all the support rods 20. A plurality of supporting grooves 37 may be provided on the side of the first clamping portion 35 away from the second clamping portion 36. The plurality of supporting grooves 37 are spaced apart in the second horizontal direction. Each supporting groove 37 may correspond to an auxiliary heat pipe 10 and is used to accommodate a partial structure of the corresponding auxiliary heat pipe 10. In this way, the plurality of auxiliary heat pipes 10 can be kept spaced apart in the second direction.

[0063] It can be understood that the first clamping portion 35 and the second clamping portion 36 can cooperate to form two positioning holes 38, and the two positioning holes 38 correspond to the two support rods 20 one by one, and each support rod 20 can be penetrated with a corresponding positioning hole 38. The staff can realize the positioning of the first clamping portion 35 and the second clamping portion 36 on the positioning rod by making the support rod 20 penetrate the positioning hole 38, and then assemble the first clamping portion 35 and the second clamping portion 36.

[0064] In the embodiment of the present application, there is no specific limitation on the number of the support brackets 30. When there are multiple support brackets 30, the multiple support brackets 30 can be arranged at intervals in the first direction, and each support bracket 30 supports all auxiliary heat pipes 10.

[0065] It can be understood that when there are multiple support brackets 30, the multiple support brackets 30 can all be support brackets 30 in the first embodiment, the second embodiment or the third embodiment, or the multiple support brackets 30 can include at least one support bracket 30 in the first embodiment, at least one support bracket 30 in the second embodiment and at least one support bracket 30 in the third embodiment, or the multiple support brackets 30 can include support brackets 30 in two of the first embodiment, the second embodiment and the third embodiment.

[0066] In some embodiments, the auxiliary heating mechanism 102 may further include a limiting hoop 40. There are multiple limiting hoops 40. Each limiting hoop 40 may be clamped on the corresponding support rod 20 to achieve a fixed connection with the support rod 20. Each limiting hoop 40 corresponds to a support bracket 30 and is located on one side of the corresponding support bracket 30 in the first direction. Each limiting hoop 40 is used to abut against the corresponding support bracket 30, thereby limiting the movement of the corresponding support bracket 30 in the first direction.

[0067] It can be understood that the limiting hoop 40 can be a throat hoop, and after the limiting hoop 40 is clamped on the corresponding support rod 20, the movement of the limiting hoop 40 in the first direction can be limited by the friction between the limiting hoop 40 and the support rod 20. On a support rod 20, a limiting hoop 40 is respectively arranged on both sides of each support frame in the first direction, so as to limit the movement of the support frame in the positive direction and the reverse direction of the first direction.

[0068] It can be understood that the limiting hoop 40 can abut against the buckling portion 31 , the overlapping portion 33 , the first clamping portion 35 or the second clamping portion 36 to limit the movement of the supporting bracket 30 .

[0069] During the assembly process of the auxiliary heating mechanism 102 proposed in the embodiment of the present application, the staff first fixes the support bracket 30 on the support rod 20, and then receives the support rod 20 on the corresponding receiving seats 103 on the two flanges 101, and then extends the auxiliary heating tube 10 into the furnace tube from one of the flanges 101, so that the auxiliary heating tube 10 moves on the support bracket 30, and the inner wall of the supporting portion 32 or the supporting groove 37 can receive the auxiliary heating tube 10 from the bottom.

[0070] During the operation of the reaction device 100 and the auxiliary heat mechanism 102 proposed in the embodiment of the present application, the gravity of the auxiliary heat pipe 10 is dispersed to the two support rods 20 through the multiple support brackets 30, and the multiple receiving seats 103 receive the two support rods 20, thereby supporting multiple parts of the auxiliary heat pipe 10. In this way, by strengthening the support for the auxiliary heat pipe 10, the fracture of the part between the two ends of the auxiliary heat pipe 10 can be reduced, and the service life of the auxiliary heat pipe 10 can be increased.

[0071] It is obvious to those skilled in the art that the present application is not limited to the details of the above exemplary embodiments, and that the present application can be implemented in other specific forms without departing from the spirit or basic features of the present application. Therefore, no matter from which point of view, the above embodiments of the present application should be regarded as exemplary and non-restrictive, and the scope of the present application is defined by the attached claims rather than the above description, and therefore it is intended that all changes falling within the meaning and scope of the equivalent elements of the claims are included in the present application.

Claims

1. An auxiliary heating mechanism, arranged in a reaction furnace, characterized in that: The auxiliary heating mechanism comprises: Auxiliary heat pipe; A support rod, the support rod is used to connect with the reaction furnace; A support bracket is connected to the support rod, the support bracket is used to receive the auxiliary heating pipe, and the support bracket is located between the two ends of the auxiliary heating pipe.

2. The auxiliary heating mechanism according to claim 1, characterized in that: The support bracket comprises: A buckle portion, the buckle portion is used to be sleeved on the support rod; A supporting portion, the supporting portion is connected to the buckling portion, and the supporting portion is used to receive the auxiliary heat pipe.

3. The auxiliary heating mechanism according to claim 1, characterized in that: The support bracket comprises: A buckling portion, the buckling portion is used to be sleeved on one of the support rods; A supporting portion, the supporting portion is connected to the buckle portion, and the supporting portion is used to receive the auxiliary heat pipe; The overlapping portion is connected to the supporting portion, the overlapping portion and the buckling portion are arranged at intervals, and the overlapping portion is used to abut against the other support rod.

4. The auxiliary heating mechanism according to claim 2 or 3, characterized in that: The support bracket also includes: A partition part is protrudingly arranged on the supporting part, and is used to separate a plurality of auxiliary heat pipes supported on the supporting part.

5. The auxiliary heating mechanism according to claim 1, characterized in that: The support frame is provided with a plurality of support grooves, and the plurality of support grooves are used to be spaced apart in the width direction of the reaction furnace, and each of the support grooves is used to accommodate at least a part of the structure of the corresponding auxiliary heat pipe.

6. The auxiliary heating mechanism according to claim 5, characterized in that: The support bracket comprises: A first clamping portion, the first clamping portion is held against the support rod, and a plurality of the supporting grooves are provided on the first clamping portion; The second clamping portion is detachably connected to the first clamping portion, and the first clamping portion and the second clamping portion are used to clamp the support rod.

7. The auxiliary heating mechanism according to claim 1, characterized in that: The auxiliary heating mechanism also includes: A limiting hoop is arranged on the support rod, and the limiting hoop abuts against the support bracket to limit the movement of the support bracket in the length direction of the support rod.

8. The auxiliary heating mechanism according to claim 1, characterized in that: There are multiple support rods, and the multiple support rods are used to be arranged at intervals in the width direction of the reaction furnace and to avoid the auxiliary heat pipes in the width direction of the reaction furnace.

9. A reaction device, characterized in that: include: Reactor; The auxiliary heating mechanism according to any one of claims 1 to 8, wherein the auxiliary heating mechanism is arranged in the reaction furnace.

10. The reaction device according to claim 9, characterized in that: The reactor comprises: A furnace tube, wherein the auxiliary heating mechanism is arranged in the furnace tube; Two flanges are respectively arranged at two ends of the furnace tube, and two ends of the support rod of the auxiliary heating mechanism are respectively connected to the two flanges.

11. The reaction device according to claim 10, characterized in that: A receiving seat is provided on each flange, and a receiving groove is provided on the receiving seat. The receiving groove is used to accommodate the end of the corresponding support rod, and the inner wall of the receiving groove is used to abut the end of the corresponding support rod to limit the movement of the corresponding support rod in its length direction.

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