Graphite boat cleaning equipment

Abstract

The utility model discloses graphite boat cleaning equipment, relates to the technical field of solar cell production equipment, and aims to solve the problem that a graphite boat carries acid liquor in the cleaning process. The cleaning equipment comprises a tank body and a cleaning device, wherein the tank body is provided with a tank opening and used for containing pickling liquid; the basket is used for placing graphite boats; the lifting mechanism is used for moving the flower basket into or out of the groove body; the first purging pipeline is arranged on the edge of the notch, and a first air hole is formed in the first purging pipeline and used for purging the graphite boat in the process that the flower basket is moved out of the groove body. The lifting mechanism moves the flower basket into the tank body to soak and clean the graphite boat, after cleaning is completed, the lifting mechanism moves the flower basket out of the tank body, in the process, the first purging pipeline arranged on the edge of the tank opening purges the graphite boat in the flower basket through the first air holes, and acid liquid residues on the surface of the graphite boat are reduced.

Description

Technical Field

[0001] The utility model relates to the technical field of solar cell production equipment, in particular to graphite boat cleaning equipment. Background Art

[0002] Plasma chemical vapor deposition technology is used to prepare SiNx film in the production process of photovoltaic cells. Graphite boats made of graphite are used as carriers in the preparation of silicon nitride films. Silicon wafers are loaded into the graphite boats, and the graphite boats enter the furnace tubes for processing. This has been widely used in the existing industry. During the use of the graphite boats, a large amount of silicon nitride will be deposited on the surface of the graphite boats because the graphite boats and the wafer sources are processed together. After being used a certain number of times, the increased thickness of the silicon nitride will affect the coating effect of the silicon wafers. It is necessary to clean the silicon nitride on the surface of the graphite boats before reuse. A graphite boat cleaning device is used to clean the silicon nitride film on the surface of the graphite boats. The graphite boat cleaning equipment is divided into an acid tank and a water tank. The graphite boat is first placed in the acid tank to clean the surface silicon nitride, and then enters the water tank to clean the acid residue on the surface.

[0003] During the graphite boat cleaning process, the graphite boat will carry a lot of acid, resulting in an increase in the acid concentration in the water tank after entering the water tank from the acid tank, making the cleaning effect of the graphite boat worse and worse. Utility Model Content

[0004] The utility model aims to provide a graphite boat cleaning device, which is used for reducing the acid residue on the graphite boat.

[0005] In order to achieve the above purpose, the utility model provides the following technical solutions: The graphite boat cleaning equipment includes:

[0006] A tank body having a notch, and the tank body is used for placing a pickling liquid;

[0007] Flower basket for placing graphite boats;

[0008] A lifting mechanism, used to move the flower basket into or out of the trough;

[0009] The first purge pipeline is arranged at the edge of the slot, and the first purge pipeline is provided with a first air hole, and the first air hole is used to purge the graphite boat when the flower basket is moved out of the slot body.

[0010] When the above technical solution is adopted, the graphite boat is first placed in the flower basket, and then the lifting mechanism is started to move the flower basket into the tank body, so that the pickling liquid in the tank body soaks and cleans the graphite boat placed in the flower basket. After the cleaning is completed, the lifting mechanism moves the flower basket out of the tank body. During this process, the first purge pipeline located at the edge of the slot continuously purges the graphite boat in the flower basket through the first air hole, without the need to frequently replace the water tank or increase the pickling time and liquid. Under the premise of ensuring the cleaning effect of the graphite boat, the residual acid on the surface of the graphite boat is reduced.

[0011] In some possible implementations, a plurality of first air holes are provided, and the plurality of first air holes are arranged at intervals along the axial direction of the first purge pipeline. In this way, the first air holes increase the coverage area when the graphite boat is purged, and reduce the acid residue on the surface of the graphite boat.

[0012] In some possible implementations, the first purge pipeline is arranged at the edge of the slot perpendicular to the plate surface of the graphite boat. With such an arrangement, after the graphite boat is cleaned in the slot, since the first purge pipeline is arranged perpendicular to the plate surface of the graphite boat, during the lifting and transmission of the flower basket, the purge direction of the purge gas can be parallel to the plate surface of the graphite boat, and one air hole can purge the gaps between multiple graphite boat sheets, thereby reducing the purge resistance, improving the cleaning effect of the first purge pipeline, and reducing the acid residue on the surface of the graphite boat.

[0013] In some possible implementations, the blowing direction of the first air hole is perpendicular to the axis of the first blowing pipeline, and the blowing direction is inclined downward relative to the horizontal direction. In this way, during the lifting and transportation of the flower basket, the first air hole continuously blows downward at an angle, and the residual acid liquid quickly separates from the graphite boat sheet under the action of its own gravity and the effect of the downward blowing at an angle, thereby improving the cleaning effect and blowing efficiency of the first blowing pipeline and reducing the acid liquid residue on the surface of the graphite boat.

[0014] In some possible implementations, the first purge pipeline is a corrosion-resistant pipe. In this configuration, the first purge pipeline adopts a corrosion-resistant pipe, which has good corrosion resistance. When the first purge pipeline performs a purge operation, the first purge pipeline is prevented from being corroded by splashing acid, etc., thereby extending the service life of the first purge pipeline.

[0015] In some possible implementations, the first purge pipeline and the tank body are an integrally formed structure. Such a configuration can reduce the installation process; or, the first purge pipeline and the tank body are fixedly connected to facilitate adjustment and fixation of the first purge pipeline and the tank body, thereby improving the flexibility of installation and disassembly between the first purge pipeline and the tank body.

[0016] In some possible implementations, a second purge pipeline is further included. The second purge pipeline is arranged at the top edge of the flower basket. The second purge pipeline is provided with a second air hole. The second air hole is used to purge the graphite boat when the flower basket is moved out of the tank body.

[0017] When the above technical solution is adopted, after the cleaning of the graphite boat in the flower basket is completed, the lifting mechanism moves the flower basket out of the tank body. During this process, the second purge pipeline located at the top edge of the flower basket continuously purges the graphite boat in the flower basket through the second air hole, further reducing the residual acid on the surface of the graphite boat.

[0018] In some possible implementations, the projections of the purge direction of the second air hole and the purge direction of the first air hole on the horizontal plane are perpendicular to each other. In this way, the purge direction of the first air hole is different from the purge direction of the second air hole, and the graphite boat is purged from different angles, which increases the coverage area of ​​the purge work, improves the purge efficiency, and reduces the acid residue on the surface of the graphite boat.

[0019] In some possible implementations, the purge direction of the second air hole is perpendicular to the axis of the second purge pipeline, and the purge direction is inclined downward relative to the horizontal direction. In this way, during the lifting and transportation of the flower basket, the second air hole continuously purges downward, and the residual acid liquid quickly separates from the graphite boat sheet under the action of its own gravity and the action of the inclined downward purge, further improving the cleaning effect and purge efficiency of the second purge pipeline, and reducing the acid liquid residue on the surface of the graphite boat.

[0020] In some possible implementations, the second purge pipeline and the flower basket are an integrally formed structure, which can reduce the installation process; or, the second purge pipeline is fixed to the top edge of the flower basket to facilitate adjustment and fixation of the second purge pipeline and the flower basket, thereby improving the flexibility of installation and removal between the second purge pipeline and the flower basket.

[0021] In some possible implementations, the lifting mechanism includes:

[0022] A hook, one end of which is used to hang the flower basket;

[0023] A driving component, wherein a driving end of the driving component is connected to the other end of the hook, and the driving component is used to drive the hook to drive the flower basket to move in a vertical direction.

[0024] When the above technical solution is adopted, the lifting mechanism is connected through a hook and a driving component. After the hook is hung on the flower basket, the driving component drives the hook to drive the flower basket to move in a vertical direction, thereby completing the work of moving the flower basket into or out of the trough body, thereby improving the use flexibility of the graphite boat cleaning equipment and facilitating operation.

[0025] In some possible implementations, a third purge pipeline is further included. The third purge pipeline is arranged at the lower end of the hook. The third purge pipeline is provided with a third air hole. The third air hole is used to purge the graphite boat when the hook lifts the flower basket.

[0026] When the above technical solution is adopted, the hook passes through the long end of the flower basket to lift the flower basket. After the cleaning of the graphite boat in the flower basket is completed, the hook moves the flower basket out of the tank body. During this process, the third purge pipeline located at the lower end of the hook continuously purges the graphite boat in the flower basket through the third air hole, that is, the axial direction of the third purge pipeline is perpendicular to the plate surface of the graphite boat, and the axial direction of the third purge pipeline is parallel to the edge of the long end of the flower basket. During the purge process, the third purge pipeline at the lower end of the hook continuously purges vertically downward, and the residual acid liquid quickly separates from the graphite boat sheet under the action of its own gravity and the action of vertical downward purge, thereby further reducing the residual acid liquid on the surface of the graphite boat. BRIEF DESCRIPTION OF THE DRAWINGS

[0027] The drawings described herein are used to provide a further understanding of the present invention and constitute a part of the present invention. The exemplary embodiments of the present invention and their descriptions are used to explain the present invention and do not constitute an improper limitation on the present invention. In the drawings:

[0028] Figure 1 This is a schematic diagram of the overall structure of a graphite boat cleaning device provided in an embodiment of the utility model;

[0029] Figure 2 for Figure 1 A partial enlarged view of middle A;

[0030] Figure 3 for Figure 1 Side view of center A.

[0031] Reference numerals:

[0032] 1-tank body; 2-first purge pipeline; 21-first air hole; 3-third purge pipeline; 31-third air hole;

[0033] 4-flower basket; 5-hook. DETAILED DESCRIPTION

[0034] In order to make the technical problems, technical solutions and beneficial effects to be solved by the present invention more clearly understood, the present invention is further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present invention and are not used to limit the present invention.

[0035] It should be noted that when an element is referred to as being "fixed to" or "disposed on" another element, it can be directly on the other element or indirectly on the other element. When an element is referred to as being "connected to" another element, it can be directly connected to the other element or indirectly connected to the other element.

[0036] In addition, the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first" and "second" may explicitly or implicitly include one or more of the features. In the description of the present utility model, the meaning of "multiple" is two or more, unless otherwise clearly and specifically defined. The meaning of "several" is one or more, unless otherwise clearly and specifically defined.

[0037] In the description of the present invention, it should be understood that the terms "upper", "lower", "front", "back", "left", "right", etc. indicate directions or positional relationships based on the directions or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific direction, be constructed and operated in a specific direction, and therefore should not be understood as a limitation on the present invention.

[0038] In the description of the present utility model, it should be noted that, unless otherwise clearly specified and limited, the terms "installation", "connection" and "connection" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements. For ordinary technicians in this field, the specific meanings of the above terms in the present utility model can be understood according to specific circumstances.

[0039] like Figure 1-Figure 3 As shown, a graphite boat cleaning device provided by an embodiment of the utility model includes: a tank body 1, a basket 4, a lifting mechanism and a first purge pipeline 2.

[0040] Among them, the tank body 1 has a notch, and the tank body 1 is used to place the pickling liquid; the flower basket 4 is used to place the graphite boat; the lifting mechanism is used to move the flower basket 4 into or out of the tank body 1; the first purge pipeline 2 is arranged at the edge of the notch, and the first purge pipeline 2 is provided with a first air hole 21, and the first air hole 21 is used to purge the graphite boat when the flower basket 4 is moved out of the tank body 1.

[0041] When implementing it, Figure 3As shown, firstly, the graphite boat is placed in the flower basket 4, and then the lifting mechanism is started to move the flower basket 4 into the tank body 1, so that the pickling liquid in the tank body 1 soaks and cleans the graphite boat placed in the flower basket 4. After the cleaning is completed, the lifting mechanism moves the flower basket 4 out of the tank body 1. During this process, the first purge pipeline 2 located at the edge of the slot continuously purges the graphite boat in the flower basket 4 through the first air hole 21, without frequently changing the water tank or increasing the pickling time and liquid. Under the premise of ensuring the cleaning effect of the graphite boat, the residual acid on the surface of the graphite boat is reduced.

[0042] like Figure 1 As shown, specifically, in this embodiment, a plurality of first air holes 21 are provided, and the plurality of first air holes 21 are arranged at intervals along the axial direction of the first purge pipeline 2. A plurality of first air holes 21 are provided on the first purge pipeline 2, which increases the coverage area when purging the graphite boat and reduces the acid residue on the surface of the graphite boat. Exemplarily, 2, 5, 8, 11, 16, etc., a plurality of first air holes 21 can be provided on the first purge pipeline 2. The number of the first air holes 21 is not specifically limited here. In specific implementation, the operator arranges and adjusts the number and position of the first air holes 21 according to the actual purge effect and the number of graphite boats. The more the number of first air holes 21, the tighter the arrangement between two adjacent first air holes 21, and the larger the purge coverage area that the first purge pipeline 2 can provide, the better the cleaning efficiency.

[0043] Specifically, in this embodiment, the first purge pipeline 2 is arranged at the edge of the notch perpendicular to the plate surface of the graphite boat. After the graphite boat is cleaned in the tank body 1, since the first purge pipeline 2 is arranged perpendicular to the plate surface of the graphite boat, during the lifting and transportation of the flower basket 4, the purge direction of the purge gas can be parallel to the plate surface of the graphite boat, and one air hole can purge the gaps between multiple graphite boat sheets, reducing the purge resistance, improving the cleaning effect of the first purge pipeline 2, and reducing the acid residue on the surface of the graphite boat.

[0044] In other embodiments, the first purge pipeline 2 is arranged at the edge of the slot parallel to the plate surface of the graphite boat. After the graphite boat is cleaned in the slot body 1, since the first purge pipeline 2 is arranged parallel to the plate surface of the graphite boat, during the lifting and transportation of the flower basket 4, the purge direction of the purge gas can be perpendicular to the plate surface of the graphite boat at both ends of the flower basket 4, and the graphite boat plate surface near the two ends of the flower basket 4 is purged, which increases the coverage area of ​​the purge, improves the cleaning effect of the first purge pipeline 2, and reduces the acid residue on the surface of the graphite boat.

[0045] Specifically, in the present embodiment, the blowing direction of the first air hole 21 is perpendicular to the axis of the first blowing pipeline 2, and the blowing direction is inclined downward relative to the horizontal direction. During the lifting and transportation of the flower basket 4, the first air hole 21 is continuously slanted downward, and the residual acid liquid quickly separates from the graphite boat sheet under the action of its own gravity and the action of the inclined downward blowing, thereby improving the cleaning effect of the first blowing pipeline 2 and reducing the acid liquid residue on the surface of the graphite boat. Among them, the blowing direction of the first blowing pipeline 2 can be inclined downward relative to the horizontal direction at an angle of 10° to 35°. For example, the blowing direction can be inclined downward relative to the horizontal direction at an angle of 10°, 15°, 26°, 30°, etc. The inclination angle of the blowing direction is not specifically limited here, as long as the blowing direction of the first air hole 21 satisfies the requirement of being inclined downward relative to the horizontal direction.

[0046] Specifically, in this embodiment, the first purge pipeline 2 is a corrosion-resistant pipe. The first purge pipeline 2 adopts a corrosion-resistant pipe, which has good corrosion resistance. The first purge pipeline 2 can be a plastic pipe, a stainless steel pipe or a pipe of other materials. The material of the first purge pipeline 2 is not specifically limited here, as long as the material of the first purge pipeline 2 is corrosion-resistant. When the first purge pipeline 2 performs the purge work, the corrosion of the first purge pipeline 2 caused by splashing acid and the like can be avoided, thereby extending the service life of the first purge pipeline 2.

[0047] In some embodiments, the first purge pipeline 2 and the tank body 1 are an integrally formed structure, which is more convenient when manufacturing the component structure and reduces the installation process.

[0048] In other embodiments, the first purge pipeline 2 and the tank body 1 are fixedly connected to facilitate adjustment and fixation of the first purge pipeline 2 and the tank body 1 , thereby improving the flexibility of installation and removal between the first purge pipeline 2 and the tank body 1 .

[0049] Specifically, in this embodiment, the graphite boat cleaning device also includes a second purge pipeline, which is arranged at the top edge of the flower basket 4, and the second purge pipeline is provided with a second air hole, and the second air hole is used to purge the graphite boat in the process of the flower basket 4 being moved out of the tank body 1. In specific implementation, the graphite boat cleaning device can be provided with only the first purge pipeline 2 or the second purge pipeline, or the first purge pipeline 2 and the second purge pipeline are provided at the same time. The first purge pipeline 2 and the second purge pipeline are not specifically limited here, as long as the second purge pipeline and / or the first purge pipeline 2 are provided to meet the purge work of the graphite boat. When the cleaning of the graphite boat in the flower basket 4 is completed, the lifting mechanism moves the flower basket 4 out of the tank body 1. During this process, the second purge pipeline located at the top edge of the flower basket 4 can continuously purge the graphite boat in the flower basket 4 through the second air hole, thereby reducing the acid residue on the surface of the graphite boat.

[0050] Specifically, in this embodiment, the projections of the purging direction of the second air hole and the purging direction of the first air hole 21 on the horizontal plane are perpendicular to each other. That is, the second purging pipeline is arranged at the top edge of the flower basket 4 parallel to the plate surface of the graphite boat. When projected on the horizontal plane, the purging direction of the first air hole 21 is different from the purging direction of the second air hole, and the graphite boat is purged from different angles, so that after the graphite boat is cleaned in the tank body 1, since the setting position of the second purging pipeline is parallel to the plate surface of the graphite boat, during the movement of the flower basket 4, the purging direction of the purging gas can be perpendicular to the plate surface of the graphite boat at both ends of the flower basket 4, and the plate surface of the graphite boat near the two ends of the flower basket 4 is purged, which increases the coverage area of ​​the purging work, improves the cleaning effect and purging efficiency of the second purging pipeline, and reduces the acid residue on the surface of the graphite boat.

[0051] In other embodiments, the second purge pipeline is arranged at the edge of the flower basket 4 which is perpendicular to the plate surface of the graphite boat. After the graphite boat is cleaned in the tank body 1, since the second purge pipeline is arranged at a position perpendicular to the plate surface of the graphite boat, during the lifting and transportation of the flower basket 4, the purge direction of the purge gas can be parallel to the plate surface of the graphite boat, and one air hole can purge the gaps between multiple graphite boat sheets in the flower basket 4, thereby reducing the purge resistance, improving the cleaning effect of the first purge pipeline 2, and reducing the acid residue on the surface of the graphite boat.

[0052] In some possible implementations, the purge direction of the second air hole is perpendicular to the axis of the second purge pipeline, and the purge direction is inclined downward relative to the horizontal direction. During the lifting and transportation of the flower basket 4, the second air hole is continuously slanted downward, and the residual acid liquid quickly detaches from the graphite boat sheet under the action of its own gravity and the action of the inclined downward purge, further improving the cleaning effect and purge efficiency of the second purge pipeline, and reducing the acid liquid residue on the surface of the graphite boat. Among them, the purge direction of the second purge pipeline can be inclined downward relative to the horizontal direction at an angle of 5° to 40°. For example, the purge direction is inclined downward relative to the horizontal direction at an angle of 5°, 12°, 20°, 35°, 40°, etc. The inclination angle of the purge direction of the second purge pipeline is not specifically limited here, as long as the purge direction of the second air hole satisfies the requirement of being inclined downward relative to the horizontal direction. In some embodiments, the second purge pipeline and the flower basket 4 are an integrated structure, which is more convenient when manufacturing the component structure and reduces the installation process.

[0053] In other embodiments, the second purge pipeline is fixed to the top edge of the flower basket 4 to facilitate adjustment and fixation of the second purge pipeline and the flower basket 4 , thereby improving the flexibility of installation and removal between the second purge pipeline and the flower basket 4 .

[0054] Specifically, in this embodiment, the lifting mechanism includes: a hook 5 and a driving component, one end of the hook 5 is used to hang with the flower basket 4; the driving end of the driving component is connected to the other end of the hook 5, and the driving component is used to drive the hook 5 to drive the flower basket 4 to move in the vertical direction.

[0055] During operation, the lifting mechanism is connected to the driving component through the hook 5. After the hook 5 is hung with the flower basket 4, the driving component drives the hook 5 to drive the flower basket 4 to move in the vertical direction, thereby completing the work of moving the flower basket 4 into or out of the tank body 1, thereby improving the use flexibility of the graphite boat cleaning equipment and facilitating operation.

[0056] like Figure 2 As shown, specifically, in this embodiment, the graphite boat cleaning equipment also includes a third purge pipeline 3, the third purge pipeline 3 is arranged at the edge of the hook 5 close to the flower basket 4, the third purge pipeline 3 is provided with a third air hole 31, and the third air hole 31 is used to purge the graphite boat when the hook 5 lifts the flower basket 4.

[0057] During operation, the hook 5 passes through the long end of the flower basket 4 to lift the flower basket 4. When the cleaning of the graphite boat in the flower basket 4 is completed, the hook 5 moves the flower basket 4 out of the tank body 1. During this process, the third purge pipeline 3 located at the lower end of the hook 5 continuously purges the graphite boat in the flower basket 4 through the third air hole 31, that is, the purge direction of the third air hole 31 is parallel to the plate surface of the graphite boat, the axial direction of the third purge pipeline 3 is perpendicular to the plate surface of the graphite boat, and the axial direction of the third purge pipeline 3 is parallel to the edge of the long end of the flower basket 4; during the purge process, the third purge pipeline 3 at the lower end of the hook 5 continuously purges vertically downward, and the residual acid liquid quickly separates from the graphite boat sheet under the action of its own gravity and the action of vertical downward purge, further reducing the residual acid liquid on the surface of the graphite boat. Among them, the third air holes 31 can be provided with 1, 2, 4, 7, etc., and the number of the third air holes 31 is not specifically limited. In specific implementation, the operator adjusts the number and the setting position of the third air holes 31 according to the actual purging effect and the number of graphite boats, as long as the third air holes 31 meet the requirements of purging the graphite boats in the flower basket 4. At the same time, when multiple third air holes 31 are provided, the closer the arrangement between two adjacent third air holes 31, the larger the purging coverage area that can be provided by the third purging pipeline 3, and the cleaning efficiency is improved.

[0058] In the description of the above embodiments, specific features, structures, materials or characteristics may be combined in a suitable manner in any one or more embodiments or examples.

[0059] The above is only a specific implementation of the utility model, but the protection scope of the utility model is not limited thereto. Any technician familiar with the technical field can easily think of changes or substitutions within the technical scope disclosed by the utility model, which should be included in the protection scope of the utility model. Therefore, the protection scope of the utility model should be based on the protection scope of the claims.

Claims

1. A graphite boat cleaning device, characterized in that: include: A tank body having a notch, wherein the tank body is used for placing a pickling liquid; Flower basket for placing graphite boats; A lifting mechanism, used for moving the flower basket into or out of the trough; The first purge pipeline is arranged at the edge of the slot, and the first purge pipeline is provided with a first air hole, and the first air hole is used to purge the graphite boat when the flower basket moves out of the slot body.

2. The graphite boat cleaning equipment according to claim 1, characterized in that: A plurality of the first air holes are provided, and the plurality of first air holes are arranged at intervals along the axial direction of the first purge pipeline.

3. The graphite boat cleaning equipment according to claim 1, characterized in that: The first purge pipeline is arranged at an edge of the notch which is perpendicular to the plate surface of the graphite boat.

4. The graphite boat cleaning equipment according to claim 3, characterized in that: The purge direction of the first air hole is perpendicular to the axis of the first purge pipeline, and the purge direction is inclined downward relative to the horizontal direction.

5. The graphite boat cleaning equipment according to claim 1, characterized in that: The first purge pipeline and the tank body are an integrally formed structure; Alternatively, the first purge pipeline and the tank body are fixedly connected.

6. The graphite boat cleaning device according to any one of claims 1 to 5, characterized in that: It also includes a second purge pipeline, which is arranged at the top edge of the flower basket. The second purge pipeline is provided with a second air hole, and the second air hole is used to purge the graphite boat when the flower basket is moved out of the trough body.

7. The graphite boat cleaning equipment according to claim 6, characterized in that: Projections of the sweeping direction of the second air hole and the sweeping direction of the first air hole on a horizontal plane are perpendicular to each other.

8. The graphite boat cleaning equipment according to claim 6, characterized in that: The purge direction of the second air hole is perpendicular to the axis of the second purge pipeline, and the purge direction is inclined downward relative to the horizontal direction.

9. The graphite boat cleaning equipment according to claim 1, characterized in that: The lifting mechanism comprises: A hook, one end of which is used to be hung with the flower basket; A driving component, wherein a driving end of the driving component is connected to the other end of the hook, and the driving component is used to drive the hook to drive the flower basket to move in a vertical direction.

10. The graphite boat cleaning equipment according to claim 9, characterized in that: It also includes a third purge pipeline, which is arranged at the lower end of the hook. The third purge pipeline is provided with a third air hole, and the third air hole is used to purge the graphite boat when the hook lifts the flower basket.

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