Forming device of grinding wheel with groove shape

Abstract

The utility model relates to the field of grinding wheel machining and forming tools, in particular to a forming device for a grooved grinding wheel, which comprises a forming die frame and a pressing mechanism, the forming die frame is formed by arranging and splicing a plurality of assemblies along the circumferential direction, a pressing cavity is arranged in the forming die frame, and the pressing mechanism is arranged in the pressing cavity. The pressing mechanism comprises an upper pressing piece, a lower pressing piece and a mandrel, the mandrel is arranged between the upper pressing piece and the lower pressing piece, the outer end face of the mandrel, the lower end face of the upper pressing piece, the upper end face of the lower pressing piece and the inner end face of the pressing cavity form a grinding wheel forming cavity, and the pressing cavity is provided with a groove type forming mechanism corresponding to the inner end face in the grinding wheel forming cavity. When the grinding wheel is pressed and formed in the pressing cavity, the groove profile is machined in the outer end face of the material layer of the grinding wheel, only the grinding wheel needs to be ground and trimmed in the follow-up machining process, the machining time is shortened, and the production efficiency is improved.

Description

Technical Field

[0001] The utility model relates to the field of grinding wheel processing and forming tooling, in particular to a forming device for a grooved grinding wheel. Background Art

[0002] Semiconductor chips are the core components of electronic products, and the chip manufacturing process is extremely complex. Among them, the precision grinding process of wafer chamfering and edge grinding is of great significance for improving the heat dissipation performance of the wafer and reducing the damage layer and surface residual stress that affect the chip quality. Wafer materials include silicon, sapphire, silicon carbide, etc., which are difficult to process with high hardness and brittleness. During the edge chamfering and edge grinding process, problems such as edge collapse, fragmentation, and scratches are very likely to occur. However, the quality of wafer grinding is extremely high, including special arc surface design of chamfering and edge grinding, consistent precision, high efficiency (150ummin), and precision (TTV5um, roughness Ra≤0.2um), so the processing is extremely difficult; at the same time, with the development trend of large-scale wafers (diameter 300mm), the quality requirements for grinding wheels are getting higher and higher.

[0003] At present, the applicant has developed a super-hard resin grinding wheel that can effectively grind the edges and chamfers of semiconductor wafers for precision grinding. The characteristics of this grinding wheel are: (1) the arc bottom groove / trapezoidal bottom groove is highly consistent with the special arc surface of the wafer, and the size deviation of the grinding wheel bottom groove is within 0.02mm; (2) the abrasive particle size can reach 2000#, and the grinding roughness Ra≤0.1μm; (3) the grinding wheel has good toughness and can effectively reduce the problems of chipping, fragmentation, scratches, etc. that occur in the wafer during processing; (4) good sharpness and strong holding force.

[0004] Due to the high requirements for grinding wheel quality, the requirements for grinding wheel molding processing are getting higher and higher. If a grinding wheel without a groove is molded, and the groove of the arc bottom groove / trapezoidal bottom groove is trimmed little by little by using a grinding wheel / dressing roller in the later stage, the efficiency is too low and cannot meet the actual production needs.

[0005] Therefore, the applicant has studied a molding device suitable for a grooved grinding wheel to solve the technical problems of difficulty and low efficiency in manufacturing such a grinding wheel. Utility Model Content

[0006] The technical problem to be solved by the utility model is to provide a forming device for a grinding wheel with a groove, by using a forming mold, a groove is formed at the material layer of the grinding wheel in the grinding wheel forming stage, and then it can be ground and trimmed later, thereby shortening the processing time and improving the production efficiency.

[0007] In order to solve the above technical problems, the technical solution adopted by the utility model is as follows: a forming device for a grooved grinding wheel, including a forming mold frame and a pressing mechanism, a pressing cavity is arranged inside the forming mold frame, a pressing mechanism is arranged inside the pressing cavity, the pressing mechanism includes an upper pressing part, a lower pressing part and a mandrel, the mandrel is arranged between the upper pressing part and the lower pressing part, and the outer end face of the mandrel, the lower end face of the upper pressing part, the upper end face of the lower pressing part and the inner end face of the pressing cavity constitute a grinding wheel forming cavity, and the pressing cavity corresponds to the inner end face of the grinding wheel forming cavity and is provided with a groove forming mechanism. The pressing mechanism forms a grinding wheel forming cavity in the pressing cavity, and a groove forming mechanism is arranged at the grinding wheel forming cavity in the pressing cavity. When the pressing mechanism cooperates with the forming mold frame to press and form the grinding wheel, the outer end face of the material layer of the grinding wheel forms a groove, thereby improving the processing efficiency of the grinding wheel with a groove.

[0008] As an optional solution, the groove forming mechanism includes groove bosses, each of which is arranged on the inner end surface of the pressing cavity and extends in a ring shape along the circumferential direction.

[0009] As an optional solution, the forming mold frame includes at least two components, the inner end faces of the components are provided with bosses, the components are sequentially butted and the inner end faces of the components are combined to form a pressing cavity, the bosses of the components are sequentially butted and form a groove-shaped boss; the outer end faces of the components are provided with external shaping mating surfaces, the outer sleeve of the forming mold frame is provided with a mold frame shaping piece, and the inner end faces of the mold frame shaping piece are in contact with the outer shaping mating surfaces of the components. The forming mold frame is spliced ​​by a plurality of components, and the components are separated after the grinding wheel is pressed and formed, so that the grinding wheel can be quickly unmolded.

[0010] As an optional solution, the components are butted in sequence and the external shaping surfaces are combined to form an external cone, the inner end surface of the mold frame shaping piece is set as an inner cone, and the inner cone is in contact with the outer cone. When the components are butted to form a molding mold frame, the external shaping surfaces of the components form an external cone suitable for matching with the mold frame shaping piece.

[0011] As an optional solution, the molding mold frame includes 2-4 components.

[0012] As an optional solution, the outer end surface of the mold frame forming part is provided with a hand-holding groove.

[0013] As an optional solution, both the upper pressing piece and the lower pressing piece are provided with a mandrel hole, and the mandrel is arranged through the mandrel hole. The mandrel is fixed by the mandrel hole of the upper pressing piece and the mandrel hole of the lower pressing piece, which is conducive to positioning and prevents deviation during the grinding wheel pressing and forming process.

[0014] As an optional solution, the upper pressing piece includes a core mold and a pressing ring, the core mold is provided with a core shaft hole, the core mold is arranged in the pressing cavity and a pressing ring gap is arranged between the outer end face of the core mold and the inner end face of the pressing cavity, the pressing ring sleeve is arranged outside the core mold and located in the pressing ring gap, the lower end face of the pressing ring is provided with a material layer pressing end face, and the lower end face of the core mold is provided with a grinding wheel base pressing end face. The upper pressing piece includes a core mold and a pressing ring, the core mold is used to press the base of the grinding wheel, and the pressing ring is used to press the material layer of the outer ring of the grinding wheel.

[0015] As an optional solution, an operating portion is provided on the pressing ring, and the operating portion is above the molding mold frame and outside the pressing cavity.

[0016] As an optional solution, a power connection portion is provided on the core mold.

[0017] Compared with the prior art, the utility model has the following beneficial effects: the molding device of the utility model introduces a grooved boss consistent with the groove of the grinding wheel material layer on the molding mold frame, so that the grinding wheel itself has a groove after being pressed and molded, and subsequently micro-grinding by a high-precision diamond dressing roller greatly reduces the grinding allowance, shortens the processing time, and improves production efficiency; the molding mold frame adopts a combined form, which is conducive to the rapid demolding of the grinding wheel after molding, and the cooperation with the mold frame forming parts is also conducive to the rapid combination of the molding mold frame. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] In order to more clearly illustrate the embodiments of the utility model or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the utility model. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0019] Figure 1 It is a schematic diagram of the structure of the molding device and the grinding wheel during the pressing and molding of the grinding wheel;

[0020] Figure 2 for Figure 1 The enlarged schematic diagram of point A in the middle;

[0021] Figure 3 for Figure 1 The structural diagram of the grinding wheel is omitted;

[0022] Figure 4 It is a structural schematic diagram of the molding mold frame;

[0023] Figure 5 It is a schematic diagram of the structure of a grinding wheel with grooves;

[0024] In the figure: 1, forming mold frame, 2, lower pressing part, 3, mandrel, 4, groove boss, 5, mold frame forming part, 6, core mold, 7, pressure ring, 8, grinding wheel. DETAILED DESCRIPTION

[0025] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model. Example

[0026] like Figure 1-Figure 4 As shown, a forming device for a grooved grinding wheel comprises a forming mold frame 1 and a pressing mechanism. A pressing cavity is arranged inside the forming mold frame 1, and the pressing cavity is a cylindrical chamber adapted to a disc-shaped grinding wheel 8; the pressing mechanism is arranged in the pressing cavity, and the pressing mechanism comprises an upper pressing piece, a lower pressing piece 2 and a core shaft 3. Both the upper pressing piece and the lower pressing piece 2 are arranged in the pressing cavity, and their outer end faces are in abutment with the inner wall of the pressing cavity. The core shaft 3 is vertically arranged between the upper pressing piece and the lower pressing piece 2, and the core shaft 3 is coaxial with the pressing cavity. The core shaft 3 is used to form a middle hole in the middle of the grinding wheel 8 when the grinding wheel 8 is pressed and formed. The outer end face of the core shaft 3, the lower end face of the upper pressing piece, the upper end face of the lower pressing piece 2 and the inner end face of the pressing cavity constitute a grinding wheel forming cavity. The upper pressing piece approaches the lower pressing piece 2 to press the grinding wheel 8 matrix and the material layer in the grinding wheel forming cavity into a grinding wheel 8.

[0027] The pressing cavity is provided with a groove forming mechanism on the inner end surface of the grinding wheel forming cavity. When the grinding wheel 8 is pressed and formed, the groove forming mechanism forms a groove on the outer end surface of the grinding wheel 8 material layer. Figure 5 As shown, since the outer end surface of the material layer is pre-grooved with a groove when the grinding wheel 8 is formed, only micro-grinding by a high-precision diamond dressing roller is required in the subsequent processing process, which greatly reduces the grinding allowance, shortens the processing time, and improves production efficiency.

[0028] The groove forming mechanism includes a groove boss 4, which is arranged on the inner end surface of the pressing cavity and extends into a ring shape along the circumference of the pressing cavity. When the grinding wheel 8 is formed, the groove boss 4 is in contact with the outer end surface of the material layer of the grinding wheel 8 and forms a groove on the outer end surface of the material layer. The groove boss 4 is arranged in plurality and distributed along the axial direction of the pressing cavity.

[0029] In a further embodiment, in order to facilitate the demolding of the grinding wheel 8, the molding mold frame 1 includes at least two components, each component is sequentially butted along the circumferential direction and the inner end faces of each component are combined to form a pressing cavity, and the inner end faces of the components are provided with bosses, and when each component is sequentially butted, the bosses of each component are also sequentially butted to form an annular groove-shaped boss 4. After the grinding wheel 8 is formed, the assembly can be disassembled to achieve rapid demolding of the grinding wheel 8, and the grinding wheel 8 can be conveniently demolded.

[0030] The outer end faces of the components are provided with external shaping mating surfaces, and the outer part of the molding mold frame 1 is sleeved with a mold frame shaping piece 5. When the grinding wheel 8 is pressed and molded, the mold frame shaping piece 5 is sleeved on the outside of the molding mold frame 1, and the inner end faces of the mold frame shaping piece 5 are in contact with the external shaping mating surfaces of each component, so that each component is docked into the molding mold frame 1, and the molding mold frame 1 can be prevented from dispersing during the pressing and molding process of the grinding wheel 8.

[0031] In order to achieve a better shaping effect on the molding mold frame 1, after the components are connected in sequence, the external shaping mating surfaces are connected and combined to form an external cone surface, and the inner end surface of the mold frame shaping piece 5 is set as an inner cone surface. When the mold frame shaping piece 5 is nested outside the molding mold frame 1, the inner cone surface and the outer cone surface are in contact with each other. In order to facilitate the mold frame shaping piece 5 to be put on the outside of the molding mold frame 1 or to facilitate the mold frame shaping piece 5 to be removed from the molding mold frame 1, the outer end surface of the mold frame shaping piece 5 is provided with a hand-held groove, and the mold frame shaping piece 5 can be conveniently operated through the hand-held groove.

[0032] For the convenience of production and use, the molding mold frame 1 is composed of 2-4 components. In a preferred embodiment, the molding mold frame 1 is composed of 4 components.

[0033] See also Figure 1 and Figure 3 The pressing mechanism includes an upper pressing piece, a lower pressing piece 2 and a core shaft 3. The upper pressing piece and the lower pressing piece 2 are both provided with core shaft 3 holes. The top and bottom of the core shaft 3 pass through two core shaft 3 holes respectively. The two core shaft 3 holes are not only conducive to the rapid positioning and installation of the core shaft 3, but also can avoid the position displacement of the core shaft 3 during the pressing and molding process of the grinding wheel 8.

[0034] The upper pressing piece includes a core mold 6 and a pressure ring 7. The core shaft 3 hole of the upper pressing piece is arranged on the core mold 6. The core mold 6 is disc-shaped. The lower end face of the core mold 6 is provided with a grinding wheel 8 base pressing end face. When the upper pressing piece is arranged in the pressing cavity, the core mold 6 is in the pressing cavity and is coaxial with the pressing cavity. A pressure ring 7 gap is provided between the outer end face of the core mold 6 and the inner wall of the pressing cavity. The pressure ring 7 is annular. The pressure ring 7 is sleeved on the outside of the core mold 6 and the pressure ring 7 is located in the pressure ring 7 gap. The inner end face of the pressure ring 7 contacts and cooperates with the outer end face of the core mold 6, and the outer end face of the pressure ring 7 contacts and cooperates with the inner end face of the pressing cavity. The bottom end of the pressure ring 7 is provided with a material layer pressing end face.

[0035] The lower end surface of the upper pressing part includes two parts: the pressing end surface of the grinding wheel 8 base and the pressing end surface of the material layer. When the pressing mechanism presses the grinding wheel 8, the pressing end surface of the grinding wheel 8 base on the bottom surface of the core mold 6 is pressed on the base part of the grinding wheel 8, and the pressing end surface of the material layer on the bottom surface of the pressure ring 7 is pressed on the material layer part of the grinding wheel 8.

[0036] In order to facilitate the removal of the pressing ring 7 or perform other necessary operations on the pressing ring 7, an operating part is provided on the pressing ring 7. The operating part is above the molding mold frame 1 and outside the pressing cavity. When the pressing mechanism presses the grinding wheel 8, the operating part is outside the pressing cavity.

[0037] The core mold 6 is provided with a power connection part, which is a connection protrusion or a connection groove. The power connection part is used to connect the pressing drive mechanism, which is a power component such as a hydraulic cylinder that drives the upper pressing piece to move axially along the pressing cavity.

[0038] The lower pressing piece 2 is a disc-shaped plate, the outer end surface of the lower pressing piece 2 abuts against the inner wall of the pressing cavity, the lower pressing piece 2 is not fixedly connected to the pressing cavity, and the lower pressing piece 2 can be separated from the forming mold frame 1 to facilitate the demolding of the grinding wheel 8.

[0039] In the description of this specification, the description of reference terms such as "one embodiment", "example", "specific example", etc. means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the utility model. In this specification, the schematic representation of the above terms does not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described can be combined in any one or more embodiments or examples in a suitable manner.

[0040] The above description is only a preferred specific implementation manner of the present invention, but the protection scope of the present invention is not limited thereto. Any technician familiar with the technical field can make equivalent replacements or changes within the technical scope disclosed by the present invention according to the technical scheme and the utility model concept of the present invention, which should be covered by the protection scope of the present invention.

Claims

1. A forming device for a grooved grinding wheel, characterized in that: The invention comprises a molding mold frame (1) and a pressing mechanism, wherein a pressing cavity is arranged inside the molding mold frame (1), and a pressing mechanism is arranged inside the pressing cavity. The pressing mechanism comprises an upper pressing piece, a lower pressing piece (2) and a mandrel (3), wherein the mandrel (3) is arranged between the upper pressing piece and the lower pressing piece (2), and the outer end surface of the mandrel (3), the lower end surface of the upper pressing piece, the upper end surface of the lower pressing piece (2) and the inner end surface of the pressing cavity constitute a grinding wheel molding cavity, and the pressing cavity is provided with a groove-shaped molding mechanism on the inner end surface of the grinding wheel molding cavity corresponding to the pressing cavity.

2. A grooved grinding wheel forming device according to claim 1, characterized in that: The groove forming mechanism comprises groove bosses (4), each groove boss (4) being arranged on the inner end surface of the pressing cavity and extending in a circumferential direction to form a ring.

3. A forming device for a grooved grinding wheel according to claim 2, characterized in that: The forming mold frame (1) comprises at least two components, the inner end surfaces of the components are provided with bosses, the components are connected in sequence and the inner end surfaces of the components are combined to form a pressing cavity, the bosses of the components are connected in sequence to form a groove-shaped boss (4); the outer end surfaces of the components are provided with external shaping matching surfaces, the outer surface of the forming mold frame (1) is sleeved with a mold frame shaping piece (5), and the inner end surfaces of the mold frame shaping piece (5) are in contact with the outer shaping matching surfaces of the components.

4. A forming device for a grooved grinding wheel according to claim 3, characterized in that: The components are connected in sequence and the outer shaping matching surfaces are combined to form an outer conical surface. The inner end surface of the mold frame shaping component (5) is set as an inner conical surface, and the inner conical surface is in contact with the outer conical surface.

5. A forming device for a grooved grinding wheel according to claim 4, characterized in that: The forming mold frame (1) comprises 2 to 4 components.

6. The forming device of a grooved grinding wheel according to claim 4, characterized in that: The outer end surface of the mold frame shaping piece (5) is provided with a hand-holding groove.

7. A forming device for a grooved grinding wheel according to any one of claims 1 to 6, characterized in that: Both the upper pressed piece and the lower pressed piece (2) are provided with a core shaft (3) hole, and the core shaft (3) is arranged through the core shaft (3) hole.

8. The forming device of a grooved grinding wheel according to claim 7, characterized in that: The upper pressing part comprises a core mold (6) and a pressing ring (7), the core mold (6) is provided with a core shaft (3) hole, the core mold (6) is arranged in a pressing cavity and a pressing ring (7) gap is provided between an outer end surface of the core mold (6) and an inner end surface of the pressing cavity, the pressing ring (7) is sleeved outside the core mold (6) and is located in the pressing ring (7) gap, the lower end surface of the pressing ring (7) is provided with a material layer pressing end surface, and the lower end surface of the core mold (6) is provided with a grinding wheel base pressing end surface.

9. A forming device for a grooved grinding wheel according to claim 8, characterized in that: An operating portion is provided on the pressing ring (7), and the operating portion is located above the molding die frame (1) and outside the pressing cavity.

10. The forming device of a grooved grinding wheel according to claim 8, characterized in that: A power connection portion is provided on the core mold (6).

Images