Solar cell substrate coating device
By using two ion guns that can move each other in the solar cell coating device, the problems of large space occupation and poor film uniformity in the existing devices are solved, and a more efficient coating process is achieved.
Patent Information
- Application Number
- CN202421483369.8
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-06-26
- Publication Date
- 2025-04-15
- Estimated Expiration
- 2034-06-26
AI Technical Summary
In the existing solar cell coating devices, multiple ion guns occupy a large space, resulting in excessively dense argon ions and magnetic field interference, affecting the uniformity and efficiency of the film layer.
A solar cell substrate coating device is designed, using two ion guns that can move each other, and the target is bombarded by adjusting the position to reduce excessive density of argon ions and magnetic field interference.
It effectively reduces space occupation, avoids film layer damage, improves film layer uniformity and solar cell efficiency.
Smart Images
Figure CN222758314U_ABST
Abstract
Description
Technical Field
[0001] The present application relates to the technical field of solar cells, and specifically discloses a solar cell substrate coating device. Background Art
[0002] In recent years, perovskite solar cells have developed rapidly and their photovoltaic efficiency has been continuously improved. This not only depends on the perovskite material itself, but is also closely related to the quality of the ion transport membrane layer.
[0003] In the related technology, when preparing ion transport membrane layers, an ion gun is generally used to emit a high-energy ion beam to excite argon gas to form argon ions. The argon ions are accelerated by the electric field and collide with the surface of the target material, thereby sputtering out the target material atoms. These sputtered target material atoms are then deposited on the substrate to form a thin film, completing the substrate coating process.
[0004] At present, coating devices are often equipped with at least three ion guns to bombard the target material at multiple angles to improve the utilization rate of the target material. However, multiple ion guns take up a large space and will also produce too dense argon ions, which will form magnetic field interference between each other, thus affecting the movement path of the argon ions; in addition, too many argon ions may also pass through the target material to bombard the substrate, and form a large area of superimposed bombardment on the film layer, causing damage to the film layer and affecting the uniformity of the film layer. Utility Model Content
[0005] The purpose of this application is to solve at least part of the technical problems raised in the above content, and this purpose is achieved through the following technical solutions:
[0006] The present application proposes a solar cell substrate coating device, which includes a chassis and an ion gun. The chassis and the substrate are spaced apart along a first direction, and the chassis is loaded with a target material facing the substrate; there are two ion guns, which are installed in the chassis so as to be movable relative to each other along a second direction, and the two ion guns respectively emit ion beams toward the target material; wherein the first direction intersects with the second direction.
[0007] In some embodiments, the chassis drives the target to be movable relative to the substrate along a first direction.
[0008] In some embodiments, the distance between the target and the substrate is D1, then 45 cm ≤ D1 ≤ 60 cm.
[0009] In some embodiments, the solar cell substrate coating device also includes a mixing tank, which is arranged outside the chassis. The mixing tank is connected to a first air inlet pipe, a second air inlet pipe and an air outlet pipe. Oxygen is introduced into the first air inlet pipe, argon is introduced into the second air inlet pipe, and the air outlet pipe is connected to the inside of the chassis.
[0010] In some embodiments, the position where the gas outlet pipe is connected to the chassis is close to or toward the target material.
[0011] In some embodiments, the air outlet pipe is a branch pipe, and the branch pipe is connected to multiple positions of the chassis, and the multiple positions are arranged at intervals along the second direction.
[0012] In some embodiments, the solar cell substrate coating device further includes a liquid cooling plate, which includes multiple liquid cooling plates. The multiple liquid cooling plates are respectively attached to multiple side walls in the chassis, and coolant flows in the liquid cooling plates.
[0013] In some embodiments, the distance between the two ion guns is D2, then 40 cm≤D2≤60 cm.
[0014] In some embodiments, there are two targets, which are spaced apart along the second direction; and two ion guns emit ion beams to the two targets respectively.
[0015] In some embodiments, the distance between the ion gun and the target material it is facing is D3, then 20 cm≤D3≤30 cm.
[0016] The solar cell substrate coating device provided by the present application has at least the following technical effects:
[0017] In the present application, two ion guns are movably arranged in the chassis, which not only reduces the number of ion guns and reduces the space occupied, but also can achieve multi-angle bombardment of the target by adjusting the position, thereby improving the utilization rate of the target; at the same time, it can also avoid the generation of overly dense argon ions, reduce the mutual magnetic field interference, and ensure the movement path of the argon ions; in addition, it will also reduce the overlapping bombardment area, reduce the damage to the film layer, and improve the uniformity of the film layer. BRIEF DESCRIPTION OF THE DRAWINGS
[0018] In order to better combine the contents shown in the drawings of the specification with the contents described in the specific implementation methods, the drawings of the specification are briefly introduced below. It can be understood that the drawings of the specification mentioned below only schematically show some embodiments of the relevant technical solutions and the solutions of this application, and those skilled in the art can also make drawings showing other embodiments without creative work.
[0019] Specifically, the annotations to the drawings of the specification are as follows:
[0020] Figure 1 This is a front schematic diagram of a solar cell substrate coating device according to an embodiment of the present application;
[0021] Figure 2 for Figure 1 Schematic diagram of the cross section at AA.
[0022] Specifically, the annotations to the accompanying drawings in the specification are as follows:
[0023] 100, solar cell substrate coating device; 110, chassis; 120, ion gun; 130, mixing tank; 131, first air inlet pipe; 132, second air inlet pipe; 133, air outlet pipe; 140, liquid cooling plate; 150, first guide rail; 160, second guide rail; B, target material; C, substrate; X, first direction; Y, second direction. DETAILED DESCRIPTION
[0024] In order to make the contents of the embodiments of the present application clearer, the following description will be made in conjunction with the accompanying drawings. It can be understood that the contents mentioned below are only part of the embodiments of the present application, rather than all the embodiments. Based on this, other embodiments derived by those skilled in the art without creative work are within the scope of protection of this application.
[0025] It should be understood that the terms used herein are for the purpose of describing specific embodiments only and are not intended to be limiting, and unless the context clearly indicates otherwise, the singular forms "a", "an", and "the" as used herein may also be meant to include plural forms. The terms "include", "comprise", and "have" are inclusive and therefore specify the presence of stated features, elements, and / or components, but do not exclude the presence or addition of one or more other features, elements, components, and / or combinations thereof.
[0026] Although the terms first, second, etc. may be used in the text to describe multiple elements, components, regions, layers and / or sections, these elements, components, regions, layers and / or sections should not be limited by these terms. These terms may only be used to distinguish one element, component, region, layer or section from another region, layer or section. Unless the context clearly indicates otherwise, terms such as "first", "second" and other numerical terms do not imply order or sequence when used in the text. In addition, in the description of the present application, unless otherwise clearly specified and limited, the terms "set", "connect", and "install" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be directly connected or indirectly connected through an intermediate medium. For those skilled in the art, the specific meanings of the above terms in this application can be understood according to the specific circumstances.
[0027] For ease of description, spatial relative terms may be used herein to describe the relationship of one element or feature relative to another element or feature, such as "inside", "outside", "end", "side", "middle", "upper", "lower", "high", "lower", "axial", "circumferential", "radial", "horizontal", "vertical", "first direction", "second direction", etc. Such spatial relative terms are intended to include different orientations of the mechanism in use or operation in addition to the orientation shown in the figures.
[0028] In particular, the term "and / or" should be understood as follows:
[0029] First, the term “and / or” located between a first subject and a second subject includes any one of the following meanings: (1) only the first subject; (2) only the second subject; and (3) the first subject and the second subject.
[0030] Secondly, the term "and / or" between the last two entities among three or more entities refers to at least any one of the entities. For example, "the first entity, the second entity and / or the third entity" has the same meaning as "the first entity and / or the second entity and / or the third entity", specifically including the following combinations: (1) only the first entity; (2) only the second entity; (3) only the third entity; (4) the first entity and the second entity without the third entity; (5) the first entity and the third entity without the second entity; (6) the second entity and the third entity without the first entity; and (7) the first entity, the second entity, and the third entity.
[0031] The following mainly describes the embodiments of the present application in conjunction with the accompanying drawings.
[0032] The present application proposes a solar cell substrate coating device 100, referring to Figure 1 and Figure 2 , which includes a chassis 110 and an ion gun 120. The chassis 110 and the substrate C are spaced apart along a first direction X, and the chassis 110 is loaded with a target material B facing the substrate C; there are two ion guns 120, and the two ion guns 120 are installed in the chassis 110 so as to be movable relative to each other along a second direction Y, and the two ion guns 120 respectively emit ion beams toward the target material B; wherein the first direction X intersects with the second direction Y.
[0033] Preferably, the first direction X and the second direction Y are perpendicular to each other.
[0034] In the present application, two ion guns 120 are movably arranged in the chassis 110, which not only reduces the number of ion guns 120 and reduces the space occupied, but also can achieve multi-angle bombardment of the target material B by adjusting the position, thereby improving the utilization rate of the target material B; at the same time, it can also avoid the generation of overly dense argon ions, reduce the mutual magnetic field interference, and ensure the movement path of the argon ions; in addition, it will also reduce the overlapping bombardment area, reduce the damage to the film layer, and improve the uniformity of the film layer.
[0035] In some embodiments, reference Figure 2 The two ion guns 120 can be displaced by respectively setting a second guide rail 160 on the inner wall of the chassis 110; in addition, the target material B can be set on the side wall of the chassis 110 through a crucible.
[0036] In some embodiments, the chassis 110 drives the target B to be movable relative to the substrate C along the first direction X. Further, in some embodiments, the distance between the target B and the substrate C is D1, and 45 cm ≤ D1 ≤ 60 cm.
[0037] It should be noted that in the existing coating device, the positions of the target material B and the substrate C are relatively fixed. When the thickness, material and other process conditions of the target material B change, the deposition range of the target material B atoms on the substrate C will also change accordingly, thereby affecting the uniformity of the film layer. Therefore, the existing coating device cannot adapt to different working conditions well, lacks flexibility and poor versatility.
[0038] However, according to the above embodiment, the chassis 110 can drive the target material B to move relative to the substrate C along the first direction X, thereby adapting to a variety of process conditions and having strong versatility. Figure 2 , the substrate C is positioned by the carrier and is inconvenient to move, so a first guide rail 150 is provided at the bottom of the chassis 110 to drive the target B to approach or move away from the substrate C. In actual use, when the process conditions do not change, the chassis 110 is locked after the target B and the substrate C are adjusted to a suitable distance, that is, the distance between the two is fixed to ensure the uniformity of the coating.
[0039] In some embodiments, there are two target materials B, and the two target materials B are spaced apart along the second direction Y; the two ion guns 120 emit ion beams to the two target materials B respectively.
[0040] Understandably, referring to Figure 2, the ion beams emitted from the two targets B will overlap on the substrate C. When the distance between the target B and the substrate C is too close, the overlapping area is too large, and the ion beam bombardment energy in the overlapping area is too high, which can easily damage the film layer; when the distance between the target B and the substrate C is too far, it will make it difficult for the target B vapor to adhere to the substrate C to form a film layer. Therefore, the distance between the target B and the substrate C should not be too large or too small; in practice, the distance between the target B and the substrate C is more appropriately 45cm to 60cm.
[0041] Furthermore, in some embodiments, the distance between the two ion guns 120 is D2, and 40 cm ≤ D2 ≤ 60 cm. In addition, in some embodiments, the distance between the ion gun 120 and the target material B it faces is D3, and 20 cm ≤ D3 ≤ 30 cm.
[0042] In the above embodiment, the distance between the two ion guns 120 should not be too large or too small. If the distance is too large, most of the unexcited argon gas will exist between the two, resulting in a waste of space; if the distance is too small, it will cause electromagnetic interference. Similarly, the distance between the ion gun 120 and the target material B should also be moderate. If the distance is too large, the ion beam will not have enough energy to reach and evaporate the target material B, and increasing the power will result in higher energy consumption. If the distance is too small, the ion beam emitted by the ion gun 120 will easily pass through the target material B and bombard the substrate C, causing film damage. In practice, the distance between the two ion guns 120 is more suitable to be 40cm to 60cm, and the distance between the ion gun 120 and the target material B it is facing is more suitable to be 20cm to 30cm.
[0043] In addition, in some embodiments, the bombardment damage of the ion beam to the film layer C of the substrate can be reduced by reducing the current, voltage or power of the ion gun 120.
[0044] In some embodiments, reference Figure 2 The solar cell substrate coating device 100 further includes a mixing tank 130, which is disposed outside the chassis 110. The mixing tank 130 is connected to a first air inlet pipe 131, a second air inlet pipe 132, and an air outlet pipe 133. The first air inlet pipe 131 is fed with oxygen, the second air inlet pipe 132 is fed with argon, and the air outlet pipe 133 is connected to the inside of the chassis 110. Further, in some embodiments, the position where the air outlet pipe 133 is connected to the chassis 110 is close to or toward the target material B. In addition, in some embodiments, the air outlet pipe 133 is a branch pipe, which is connected to multiple positions of the chassis 110, and the multiple positions are arranged at intervals along the second direction Y.
[0045] It should be noted that in the coating process of solar cells, argon plays the role of forming plasma, helping target B atoms to sputter out from the surface of target B, and then forming a thin film on substrate C. Oxygen can react with silicon or other materials on substrate C to form the required oxide film, such as a silicon oxide layer, which is often used for surface passivation of solar cells or as a dielectric layer. The participation of oxygen can improve the chemical composition and structure of the film, and improve the quality and performance of the film. For example, the silicon oxide layer can reduce defects on the surface of the silicon wafer and reduce the surface recombination rate, thereby improving the efficiency of the solar cell.
[0046] In the above embodiment, argon and oxygen are pre-mixed and then introduced into the chassis 110 to enhance the uniformity of the mixing of the two gases, which is conducive to the stable operation of the device. In addition, the mixed argon and oxygen are introduced into the chassis 110 at multiple locations to ensure that the two gases are evenly distributed inside the chassis 110, and multiple introduction locations are close to and / or facing the target B to ensure that the argon and oxygen at the target B are sufficient.
[0047] In some embodiments, reference Figure 1 and Figure 2 The solar cell substrate coating device 100 further includes a liquid cooling plate 140 . The liquid cooling plate 140 includes a plurality of liquid cooling plates 140 . The plurality of liquid cooling plates 140 are respectively attached to a plurality of side walls in the chassis 110 . Cooling liquid flows in the liquid cooling plates 140 .
[0048] During the coating process, the ion gun 120 generates a large amount of heat when working. The liquid cooling plate 140 cools the ion gun 120 and its related components to maintain the normal working temperature of the equipment. The liquid cooling plate 140 also maintains a constant temperature through the liquid cooling system, which can reduce the performance changes of the equipment caused by temperature fluctuations and ensure the stability and uniformity of the coating process. In addition, maintaining a suitable working temperature can avoid production interruptions caused by overheating, thereby improving production efficiency.
[0049] In addition, although the above content describes the embodiments of the present application in conjunction with the accompanying drawings, those skilled in the art can also make various modifications and variations without departing from the concept of the present application, and such modifications and variations are all within the scope defined by the attached claims.
Claims
1. A solar cell substrate coating device, characterized in that: include: A chassis (110), the chassis (110) and the substrate (C) being spaced apart along a first direction (X), the chassis (110) being loaded with a target material (B) facing the substrate (C); An ion gun (120), wherein the ion gun (120) has two ion guns (120), the two ion guns (120) are installed in the housing (110) so as to be movable relative to each other along a second direction (Y), and the two ion guns (120) respectively emit ion beams toward the target material (B); Wherein, the first direction (X) intersects with the second direction (Y).
2. The solar cell substrate coating device according to claim 1, characterized in that: The chassis (110) drives the target (B) to be movable relative to the substrate (C) along the first direction (X).
3. The solar cell substrate coating device according to claim 2, characterized in that: The distance between the target (B) and the substrate (C) is D1, then 45cm≤D1≤60cm.
4. The solar cell substrate coating device according to claim 1, characterized in that: The solar cell substrate coating device (100) further comprises a mixing tank (130), wherein the mixing tank (130) is arranged outside the chassis (110), and the mixing tank (130) is connected to a first air inlet pipe (131), a second air inlet pipe (132) and an air outlet pipe (133), wherein oxygen is introduced into the first air inlet pipe (131), argon is introduced into the second air inlet pipe (132), and the air outlet pipe (133) is in communication with the interior of the chassis (110).
5. The solar cell substrate coating device according to claim 4, characterized in that: The position where the gas outlet pipe (133) is in communication with the chassis (110) is close to or facing the target material (B).
6. The solar cell substrate coating device according to claim 4, characterized in that: The air outlet pipe (133) is a branch pipe, and the branch pipe is connected to multiple positions of the chassis (110), and the multiple positions are arranged at intervals along the second direction (Y).
7. The solar cell substrate coating device according to claim 1, characterized in that: The solar cell substrate coating device (100) further comprises a liquid cooling plate (140), wherein the liquid cooling plate (140) comprises a plurality of plates, and the plurality of plates (140) are respectively attached to a plurality of side walls in the chassis (110), and cooling liquid flows in the liquid cooling plate (140).
8. The solar cell substrate coating device according to claim 1, characterized in that: The distance between the two ion guns (120) is D2, then 40cm≤D2≤60cm.
9. The solar cell substrate coating device according to any one of claims 1 to 7, characterized in that: There are two targets (B), and the two targets (B) are arranged at intervals along the second direction (Y); The two ion guns (120) emit ion beams toward the two target materials (B) respectively.
10. The solar cell substrate coating device according to claim 9, characterized in that: The distance between the ion gun (120) and the target material (B) it is facing is D3, and then 20cm≤D3≤30cm.