Exhaust pipe and reaction device

Abstract

The utility model provides an exhaust pipe and a reaction device, the reaction device further comprises a reaction furnace, the reaction furnace comprises a first end part and a second end part which are arranged in a spaced mode in the length direction, the exhaust pipe comprises a pipe body part, the pipe body part is used for penetrating through the first end part to enter the reaction furnace, and the pipe body part extends in the direction from the first end part to the second end part; the gas outlet part is arranged at one end, close to the second end part, of the pipe body part, one end, facing the second end part, of the gas outlet part is closed, the gas outlet part is communicated with the pipe body part, a plurality of gas holes are formed in the gas outlet part, the gas holes are formed in the length direction of the reaction furnace at intervals, and the gas outlet part is communicated with the reaction furnace through the gas holes. According to the exhaust pipe and the reaction device, the inert gas in the exhaust pipe can be sprayed into the reaction furnace through the multiple gas holes, the efficiency of filling the reaction furnace with the inert gas can be improved, and waste of the inert gas is reduced.

Description

Technical Field

[0001] The present disclosure relates to the technical field of photovoltaic and semiconductor product production, and in particular to an exhaust pipe and a reaction device. Background Art

[0002] In the process of producing photovoltaic and semiconductor products, sheet materials need to undergo a boron diffusion process in a reactor. The reactor can be connected to an air inlet pipe and an exhaust pipe, the exhaust pipe is connected to the reactor at the first end of the reactor, the air inlet pipe enters the reactor from the first end of the reactor, and extends to a position close to the second end of the reactor. The air inlet pipe opens at one end toward the second end of the reactor. During the boron diffusion process, an inert gas (such as nitrogen) needs to be transported into the reactor through the air inlet pipe, and the inert gas needs to be filled in the reactor to discharge the waste gas generated by the process in the reactor out of the reactor through the exhaust pipe.

[0003] At present, after the inert gas enters the reactor through the opening, the inert gas lacks the power to flow along the height or width direction of the reactor, and the inert gas will flow toward the exhaust pipe, resulting in part of the inert gas being discharged from the reactor through the exhaust pipe when the position far from the first end of the reactor is not filled with the inert gas, causing the defect of wasting the inert gas. Utility Model Content

[0004] In view of the above, it is necessary to provide an exhaust pipe and a reaction device to solve the above defects.

[0005] In a first aspect, an embodiment of the present disclosure provides an exhaust pipe, which is applied to a reaction device. The reaction device also includes a reaction furnace. The reaction furnace includes a first end and a second end spaced apart in a length direction. The exhaust pipe includes: a tube body portion, the tube body portion passes through the first end portion to enter the reaction furnace, and the tube body extends along the first end portion toward the second end portion; an air outlet portion, the air outlet portion is arranged at an end of the tube body portion close to the second end portion, the air outlet portion is connected to the tube body portion, a plurality of air holes are provided on the air outlet portion, the plurality of air holes are spaced apart in the length direction of the reaction furnace, and the air outlet portion is connected to the reaction furnace through the plurality of air holes.

[0006] After the inert gas enters the air inlet pipe, it can flow to the end of the air inlet pipe close to the second end, and be sprayed into the reactor through a plurality of air holes. The inert gas can enter the reactor through the air holes and be sprayed to a position far from the air inlet pipe, thereby increasing the uniformity of the inert gas spraying. In this way, the efficiency of the inert gas filling the reactor can be improved, and the inert gas flowing out of the reactor through the exhaust pipe when the inert gas does not fill the reactor can be reduced, thereby reducing the waste of the inert gas.

[0007] Optionally, among the multiple pores, some of the pores are arranged along a first direction, and the remaining pores are arranged along a second direction, wherein the first direction is perpendicular to the second direction.

[0008] Among them, multiple air holes can be respectively provided with air outlets along the first direction and the second direction, so that the gas entering the reaction furnace through the multiple air holes is sprayed in different directions respectively, which can increase the uniformity of the inert gas spraying, reduce the inert gas flowing out of the reaction furnace through the exhaust pipe when the inert gas is not filled in the reaction furnace, and reduce the waste of inert gas.

[0009] Optionally, the multiple pores include: first pores, which are arranged along a first direction; second pores, which are arranged along a second direction; wherein at least one first pore is arranged between every two adjacent second pores, and at least one second pore is arranged between every two adjacent first pores.

[0010] Optionally, the diameter of each pore is 1 mm to 2 mm; and in the length direction of the reaction furnace, the distance between two adjacent pores is 25 mm to 35 mm.

[0011] Optionally, the number of pores distributed in the length direction of the reaction furnace is 10 to 20.

[0012] In the second aspect, an embodiment of the present disclosure provides a reaction device, comprising: a reaction furnace, the reaction furnace comprising a first end and a second end; an exhaust pipe, the exhaust pipe is connected to the first end and communicated with the reaction furnace; an air inlet pipe, the exhaust pipe comprises a tube body and an air outlet, the tube body passes through the first end to enter the reaction furnace, the tube body extends along the direction from the first end toward the second end, the air outlet is arranged at an end of the tube body close to the second end, the end of the air outlet toward the second end is closed, the air outlet is communicated with the tube body, a plurality of air holes are provided on the air outlet, the plurality of air holes are arranged at intervals in the length direction of the reaction furnace, and the air outlet is communicated with the reaction furnace through the plurality of air holes.

[0013] After the inert gas enters the air inlet pipe, it can flow to the end of the air inlet pipe close to the second end, and be sprayed into the reactor through a plurality of air holes. The inert gas can enter the reactor through the air holes and be sprayed to a position far from the air inlet pipe, thereby increasing the uniformity of the inert gas spraying. In this way, the efficiency of the inert gas filling the reactor can be improved, and the inert gas flowing out of the reactor through the exhaust pipe when the inert gas does not fill the reactor can be reduced, thereby reducing the waste of the inert gas.

[0014] Optionally, among the multiple pores, some of the pores are arranged along a first direction, and the remaining pores are arranged along a second direction, wherein the first direction is perpendicular to the second direction.

[0015] Among them, multiple air holes can be respectively provided with air outlets along the first direction and the second direction, so that the gas entering the reaction furnace through the multiple air holes is sprayed in different directions respectively, which can increase the uniformity of the inert gas spraying, reduce the inert gas flowing out of the reaction furnace through the exhaust pipe when the inert gas is not filled in the reaction furnace, and reduce the waste of inert gas.

[0016] Optionally, the multiple pores include: first pores, which are arranged along a first direction; second pores, which are arranged along a second direction; wherein at least one first pore is arranged between every two adjacent second pores, and at least one second pore is arranged between every two adjacent first pores.

[0017] Optionally, the diameter of each pore is 1 mm to 2 mm; and in the length direction of the reaction furnace, the distance between two adjacent pores is 25 mm to 35 mm.

[0018] Optionally, the number of pores distributed in the length direction of the reaction furnace is 10 to 20.

[0019] With the exhaust pipe and reaction device provided by the present disclosure, a plurality of pores are provided on one end of the exhaust pipe close to the second end, and the plurality of pores can be arranged in a first direction and a second direction respectively. After the inert gas in the exhaust pipe flows to the end close to the second end, it can be sprayed into the reactor through the plurality of pores and in a plurality of directions. The inert gas can enter the reactor through the pores and be sprayed to a position far away from the air inlet pipe. The pores arranged in a plurality of directions can increase the uniformity of the inert gas spraying. In this way, the efficiency of the reactor filled with inert gas can be improved, the inert gas flowing out of the reactor through the exhaust pipe when the reactor is not filled with inert gas can be reduced, and the waste of inert gas can be reduced. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] Figure 1 Schematic diagram of a first reaction device in an embodiment of the present disclosure.

[0021] Figure 2 is a second schematic diagram of the reaction device in an embodiment of the present disclosure.

[0022] Figure 3 is a side view of an exhaust pipe in an embodiment of the present disclosure.

[0023] Figure 4 is a cross-sectional view of an exhaust pipe in an embodiment of the present disclosure.

[0024] Description of main component symbols:

[0025] 100. reaction device; 10. reaction furnace; 11. furnace body; 111. accommodation space; 112. first end space; 113. second end space; 12. first end; 13. second end; 20. exhaust pipe; 30. air inlet pipe; 31. tube body; 32. air outlet; 321. first air hole; 322. second air hole; 200. sheet material. DETAILED DESCRIPTION

[0026] The technical solutions in the embodiments of the present disclosure will be clearly and completely described below in conjunction with the drawings in the embodiments of the present disclosure. Obviously, the described embodiments are only part of the embodiments of the present disclosure, rather than all of the embodiments.

[0027] The term "plurality" in the present disclosure refers to two or more than two. In addition, it should be understood that in the description of the present disclosure, the terms "first", "second", etc. are only used for the purpose of distinguishing descriptions, and cannot be understood as indicating or implying relative importance, nor can they be understood as indicating or implying an order.

[0028] In the description of the embodiments of the present disclosure, words such as "exemplary" or "for example" are used to indicate examples, illustrations, or descriptions. Any embodiment or design described as "exemplary" or "for example" in the embodiments of the present disclosure should not be interpreted as being more preferred or more advantageous than other embodiments or designs. Specifically, the use of words such as "exemplary" or "for example" is intended to present related concepts in a specific way.

[0029] See also Figure 1 and Figure 2 , Figure 1 and Figure 2 A reaction device 100 provided by an embodiment of the present disclosure is shown.

[0030] In an embodiment of the present disclosure, the reaction device 100 may include a reaction furnace 10. The reaction furnace 10 may contain a plurality of sheet materials 200, and the sheet materials 200 may be processed in the reaction furnace 10.

[0031] In the embodiment of the present disclosure, there is no specific limitation on the type of the sheet material 200. For example, the sheet material 200 may be, but is not limited to, a silicon sheet, a silicon carbide sheet, a wafer, and the like.

[0032] In the embodiment of the present disclosure, there is no specific limitation on the process treatment of the sheet material 200 by the reactor 10. For example, the process performed by the reactor 10 on the sheet material 200 may be, but not limited to, boron diffusion, phosphorus diffusion, or oxidation annealing. Specifically, the reactor 10 may perform a boron diffusion process on the sheet material 200 by low-pressure horizontal boron diffusion technology, so that a boron doping layer may be formed on the surface of the sheet material 200 when the ambient pressure is less than or equal to 300 mbar.

[0033] For example, the reactor 10 can accommodate multiple carriers (not shown) equipped with sheet materials 200, and the carriers can be quartz boats or graphite boats. Multiple sheet materials 200 can be placed upright in each carrier. When the reactor 10 accommodates multiple carriers equipped with sheet materials 200, the multiple carriers are arranged at intervals in the reactor 10 along the length direction of the reactor 10; on each carrier, multiple sheet materials 200 are placed upright, and multiple sheet materials 200 are arranged at intervals along the width direction of the reactor 10.

[0034] It can be understood that in the related field, multiple sheet materials 200 are usually placed horizontally on a carrier, and then the carrier is moved into the reactor 10, so that the reactor 10 performs process treatment on the sheet materials 200; in some cases, parts of the sheet material 200 that are not supported by the carrier will sag and bend due to gravity during the process, resulting in uneven heat radiation received by various positions on the sheet material 200, thereby causing uneven thermal expansion of different parts of the sheet material 200, resulting in hidden cracks on the sheet material 200.

[0035] In the embodiment of the present disclosure, by arranging multiple sheet materials 200 upright in the reactor 10 for process treatment, the uneven heating of the sheet material 200 caused by sagging of some parts can be reduced, thereby reducing the probability of hidden cracks on the sheet material 200 and improving the within-wafer uniformity (Within-wafer Uniformity) and inter-wafer uniformity (Wafer-to-wafer Uniformity) of the sheet material 200 after the process.

[0036] In some embodiments, the reaction furnace 10 may include a furnace body 11, a first end 12, and a second end 13. The furnace body 11 may be a hollow furnace body. The first end 12 and the second end 13 are respectively located at the two ends of the furnace body 11 in the length direction, and the first end 12 and the second end 13 are fixedly installed or detachably installed on the furnace body 11. The length direction of the furnace body 11 coincides with the length direction of the reaction furnace 10, so that the first end 12 and the second end 13 are spaced apart in the length direction of the reaction furnace 10. A receiving space 111, a first end space 112, and a second end space 113 are provided in the furnace body 11, and the first end space 112, the receiving space 111, and the second end space 113 are arranged in the direction from the first end 12 to the second end 13, and the receiving space 111 can accommodate a plurality of sheet materials 200 and a carrier for mounting the sheet materials 200.

[0037] Please also read Figure 3 and Figure 4, the reaction device 100 may also include an exhaust pipe 20 and an air inlet pipe 30. The exhaust pipe 20 and the air inlet pipe 30 both extend along the length direction of the reaction furnace 10. The exhaust pipe 20 is fixedly connected to the first end 12 and communicated with the first end space 112. The air inlet pipe 30 may include a tube body 31 and an air outlet 32. The tube body 31 passes through the first end 12 and is fixedly connected to the first end 12. The tube body 31 extends in the direction from the first end 12 toward the second end 13, and passes through the first end space 112 and the receiving space 111. The tube body 31 is a hollow pipe with two ends passing through. The air outlet 32 ​​is fixedly connected to one end of the tube body 31 close to the second end 13, and is located in the second end space 113. The air outlet 32 ​​is communicated with the tube body 31, and the end of the air outlet 32 ​​facing the second end 13 is closed. A plurality of air holes are provided on the air outlet 32. A plurality of air holes may be provided in the gas outlet portion 32 in a direction perpendicular to the length direction of the reaction furnace 10. The exhaust pipe 20 may be connected to the second end space 113 through the plurality of air holes, so as to be connected to the furnace body 11.

[0038] It can be understood that when the air hole is provided through the air outlet portion 32 in a direction perpendicular to the length direction of the reaction furnace 10, it can be provided through one side of the air outlet portion 32, or through both sides of the air outlet portion 32 (such as Figure 4 The embodiments of the present disclosure are not limited to this.

[0039] In the embodiment of the present disclosure, the number of the air holes is not specifically limited. For example, the number of the air holes arranged in the length direction of the air inlet pipe 30 is 10 to 20. For example, the number of the air holes arranged in the length direction of the air inlet pipe 30 is 14.

[0040] In the embodiments of the present disclosure, there is no specific limitation on the fixing method during fixed connection and fixed installation. For example, the fixing method may include, but is not limited to, integral molding fixing, bolt fixing, screw fixing, welding fixing, etc.

[0041] In the embodiments of the present disclosure, the detachable connection method is not specifically limited. For example, the detachable connection direction may include, but is not limited to, screw connection, bolt connection, snap connection, etc.

[0042] It can be understood that the length direction of the exhaust pipe 20 and the length direction of the intake pipe 30 both coincide with the length direction of the reaction furnace 10. Figure 1 and Figure 2 As shown, Figure 1 is a cross-sectional view of the reaction furnace 10 from a side view perspective, Figure 2 is a cross-sectional view of the reaction furnace 10 from a top view, Figure 1 and Figure 2 The X direction and the opposite direction thereof are the length directions of the reaction furnace 10. Figure 1The Y direction and the reverse direction thereof are the height directions of the reaction furnace 10. Figure 2 The Z direction and the opposite direction thereof are the width directions of the reaction furnace 10 .

[0043] It can be understood that the exhaust pipe 20 can be connected to an exhaust device (not shown), and the pipe body 31 can be connected to a gas source device (not shown). The exhaust device can drive the gas in the reaction furnace 10 to enter the exhaust pipe 20, and flow out of the reaction furnace 10 through the exhaust pipe 20. The gas source device can transport inert gas to the inlet pipe 30, and drive the inert gas to enter the reaction furnace 10 through multiple air holes.

[0044] In the embodiments of the present disclosure, the type of the inert gas is not specifically limited. For example, the inert gas may be, but is not limited to, nitrogen.

[0045] It can be understood that a plurality of air holes penetrate the gas outlet portion 32 in a direction perpendicular to the length direction of the reactor 10 (for example, the width direction and the height direction of the reactor 10). Compared with the related art in which an opening is provided at the end of the air inlet pipe 30 and an inert gas is allowed to enter the reactor 10 through the opening, in the embodiment of the present disclosure, an inert gas is allowed to enter the reactor 10 through a plurality of air holes. When the inert gas enters the reactor 10 through an air hole with an aperture smaller than the inner diameter of the exhaust pipe 20, the flow rate increases, so that the inert gas can be sprayed to a position far away from the air inlet pipe 30, thereby increasing the uniformity of the inert gas spraying. In this way, the efficiency of filling the reactor 10 with inert gas can be improved, the inert gas flowing out of the reactor 10 through the exhaust pipe 20 when the inert gas does not fill the reactor 10 can be reduced, and the waste of inert gas can be reduced.

[0046] In the embodiments of the present disclosure, the diameter of the pore is not specifically limited. For example, the diameter of the pore is 1 mm to 2 mm. For example, the diameter of the pore may be equal to 1.5 mm.

[0047] In the embodiment of the present disclosure, there is no specific limitation on the spacing between adjacent pores in the length direction of the reaction furnace 10. For example, the spacing between two adjacent pores in the length direction of the reaction furnace 10 is 25 mm to 35 mm. Exemplarily, the spacing between two adjacent pores in the length direction of the reaction furnace 10 may be equal to 30 mm.

[0048] In some embodiments, the plurality of air holes may include a first air hole 321 and a second air hole 322. The first air hole 321 may be provided with an air outlet 32 ​​along a first direction. The second air hole 322 may be provided with an air outlet 32 ​​along a second direction. The first direction and the second direction are both perpendicular to the length direction of the reaction furnace 10, and the first direction and the second direction are perpendicular. There is at least one second air hole 322 between every two adjacent first air holes 321, and there is at least one first air hole 321 between every two adjacent second air holes 322.

[0049] In the embodiments of the present disclosure, the first direction and the second direction are not specifically limited. Figure 3 and Figure 4 As shown, the first direction may be the width direction of the reaction furnace 10, and the second direction may be the height direction of the reaction furnace 10. For another example, the first direction may be the height direction of the reaction furnace 10, and the second direction may be the width direction of the reaction furnace 10. For another example, the first direction may be a direction that forms an angle α with the height direction of the reaction furnace 10, and the second direction may be a direction that forms an angle α+90° with the height direction of the reaction furnace 10, where α is greater than 0 and less than 180°.

[0050] In the first case, if Figure 4 As shown, in the length direction of the reaction furnace 10 , there is a second air hole 322 between two adjacent first air holes 321 , and there is a first air hole 321 between two adjacent second air holes 322 .

[0051] In the second case, in the length direction of the reaction furnace 10 , there are N second air holes 322 between two adjacent first air holes 321 , and there is one first air hole 321 between two adjacent second air holes 322 , where N is a natural number greater than 1.

[0052] In the third case, in the length direction of the reaction furnace 10 , there is one second air hole 322 between two adjacent first air holes 321 , and there are M first air holes 321 between two adjacent second air holes 322 , where M is a natural number greater than 1.

[0053] In the fourth case, there are N second air holes 322 between two adjacent first air holes 321 , and there are M first air holes 321 between two adjacent second air holes 322 , wherein both M and N are natural numbers greater than 1.

[0054] Through the exhaust pipe 20 and the reaction device 100 provided by the embodiment of the present disclosure, the inert gas in the exhaust pipe 20 can be sprayed into the reactor 10 through multiple air holes. When the inert gas enters the reactor 10 through the air holes with a hole diameter smaller than the inner diameter of the exhaust pipe 20, the flow rate increases, so that it can be sprayed to a position far away from the air inlet pipe 30, and the uniformity of the inert gas spraying is increased. In this way, the efficiency of filling the reactor 10 with inert gas can be improved, and the inert gas flowing out of the reactor 10 through the exhaust pipe 20 when the inert gas does not fill the reactor 10 can be reduced, thereby reducing the waste of inert gas.

[0055] It is obvious to those skilled in the art that the present disclosure is not limited to the details of the above exemplary embodiments, and that the present disclosure can be implemented in other specific forms without departing from the spirit or essential features of the present disclosure. Therefore, no matter from which point of view, the above embodiments of the present disclosure should be regarded as exemplary and non-restrictive, and the scope of the present disclosure is defined by the appended claims rather than the above description, and therefore it is intended that all changes falling within the meaning and scope of the equivalent elements of the claims are included in the present disclosure.

Claims

1. An exhaust pipe, applied to a reaction device, wherein the reaction device further comprises a reaction furnace, wherein the reaction furnace comprises a first end portion and a second end portion spaced apart in a length direction, wherein: The exhaust pipe comprises: a tube body portion, the tube body portion passing through the first end portion and entering the reaction furnace, the tube body extending in a direction from the first end portion toward the second end portion; The air outlet portion is arranged at one end of the tube body portion close to the second end portion, the air outlet portion is connected to the tube body portion, the air outlet portion is closed at one end facing the second end portion, a plurality of air holes are provided on the air outlet portion, the plurality of air holes are arranged at intervals in the length direction of the reactor, and the air outlet portion is connected to the reactor through the plurality of air holes.

2. The exhaust pipe according to claim 1, characterized in that: Among the plurality of pores, some of the pores are arranged along a first direction, and the remaining pores are arranged along a second direction, wherein the first direction is perpendicular to the second direction.

3. The exhaust pipe according to claim 2, characterized in that The plurality of pores include: a first air hole, wherein the first air hole is arranged along the first direction; second air holes, the second air holes are arranged along the second direction; Among them, at least one of the first air holes is arranged between every two adjacent second air holes, and at least one of the second air holes is arranged between every two adjacent first air holes.

4. The exhaust pipe according to claim 1, characterized in that: The diameter of each of the pores is 1 mm to 2 mm; In the length direction of the reaction furnace, the distance between two adjacent air holes is 25 mm to 35 mm.

5. The exhaust pipe according to claim 1, characterized in that: In the length direction of the reaction furnace, the number of the pores distributed is 10 to 20.

6. A reaction device, characterized in that: include: A reaction furnace, the reaction furnace comprising a first end and a second end; an exhaust pipe connected to the first end and communicated with the reaction furnace; An air inlet pipe, the exhaust pipe includes a pipe body and an air outlet, the pipe body passes through the first end to enter the reactor, the pipe body extends along the first end toward the second end, the air outlet is arranged at one end of the pipe body close to the second end, the air outlet is connected with the pipe body, the end of the air outlet facing the second end is closed, a plurality of air holes are provided on the air outlet, the plurality of air holes are spaced apart in the length direction of the reactor, and the air outlet is connected to the reactor through the plurality of air holes.

7. The reaction device according to claim 6, characterized in that: Among the plurality of pores, some of the pores are arranged along a first direction, and the remaining pores are arranged along a second direction, wherein the first direction is perpendicular to the second direction.

8. The reaction device according to claim 7, characterized in that The plurality of pores include: a first air hole, wherein the first air hole is arranged along the first direction; second air holes, the second air holes are arranged along the second direction; Among them, at least one of the first air holes is arranged between every two adjacent second air holes, and at least one of the second air holes is arranged between every two adjacent first air holes.

9. The reaction device according to claim 6, characterized in that: The diameter of each of the pores is 1 mm to 2 mm; In the length direction of the reaction furnace, the distance between two adjacent air holes is 25 mm to 35 mm.

10. The reaction device according to claim 6, characterized in that: In the length direction of the reaction furnace, the number of the pores distributed is 10 to 20.

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