CVD (Chemical Vapor Deposition) cavity facilitating parylene cleaning

Abstract

The utility model discloses a CVD (Chemical Vapor Deposition) cavity favorable for cleaning parylene, and particularly relates to the technical field of coating, the CVD cavity comprises a base for supporting, a cleaning assembly is arranged on the base, the cleaning assembly comprises a forming cavity cylinder arranged at the top of the base, and a top tray is arranged in the forming cavity cylinder. According to the utility model, the cleaning component is arranged, gas emitted by the ozone generating device is in contact with a film in the forming cavity cylinder to form a yellowing phenomenon, and the film becomes brittle and falls off automatically due to the yellowing phenomenon, so that the problem that the film in the cavity is difficult to treat and remove can be solved; and meanwhile, an air pump is started to convey external air flow into the air disc through an air conveying pipe, the air flow is gathered in the air disc and then is carded into the guide pipes, so that the guide pipes are filled with air and jack up the receiving disc and the scraping disc, and the falling film is easy to clean.

Description

Technical Field

[0001] The utility model relates to the technical field of film coating, and more specifically to a CVD chamber which is beneficial for cleaning parylene. Background Art

[0002] Parylene is a high-performance organic thin film material, commonly used in microelectronics, optics and biomedical fields. CVD (chemical vapor deposition) is a common thin film preparation method, which involves depositing gaseous precursor compounds on a surface to form a solid thin film. Parylene CVD chamber refers to the equipment component used for Parylene thin film deposition. The chamber is usually made of stainless steel or other high temperature and corrosion resistant materials, and has sealing properties to ensure a stable reaction environment during the CVD process. In the Parylene CVD process, the solid Parylene precursor compound (usually a dimer) is first converted into a gaseous molecule, and then introduced into the CVD chamber. In the chamber, the gaseous precursor molecules are deposited layer by layer on the target surface by pyrolysis or chemical reaction to form a uniform and dense Parylene film;

[0003] Currently, the pyrolysis CVD for preparing parylene on the market is composed of a cracking tube, an evaporation tube, a chamber, a cold well and a vacuum pump. However, the parylene film is easy to adhere to the chamber components and is not easy to clean, resulting in poor subsequent coating effects. Utility Model Content

[0004] In order to overcome the above defects of the prior art, the utility model provides a CVD chamber that is conducive to cleaning parylene, aiming to solve the problems raised in the above background technology.

[0005] The utility model provides the following technical solution: a CVD chamber that is beneficial for cleaning parylene, comprising a base for support, wherein a cleaning component is arranged on the base;

[0006] The cleaning assembly comprises a molding cavity tube arranged on the top of the base, a top plate is arranged inside the molding cavity tube, a limiting rod for limiting position is arranged on the top of the top plate, and a receiving plate is arranged on the outer side of the limiting rod;

[0007] An ozone generator is provided on the top of the limiting rod, a scraper for cleaning is provided on the top of the receiving plate and outside the limiting rod, the outside of the scraper extends to the inner wall of the molding cavity, the receiving plate and the scraper are detachably connected, and a plurality of filter holes are provided on the receiving plate and the scraper;

[0008] It can be seen that in the above technical solution, the gas emitted by the ozone generator contacts the film inside the molding cavity and forms a yellowing phenomenon, which makes the film brittle and automatically falls off, thus solving the problem that the film inside the cavity is difficult to handle and remove, and the outer side of the scraper rubs against the inner wall of the molding cavity, which makes it easy to scrape off the remaining stubborn film, thereby improving the cleaning efficiency and effect of the device;

[0009] Optionally, in a possible embodiment, an air disk for guiding flow is provided at the bottom of the inner cavity of the molding cavity tube, a plurality of conduits are distributed at the top of the air disk and along the circumference of the axis point of the air disk, the tops of the plurality of conduits extend to the bottom of the receiving disk, and the conduits are connected with the air disk, an air pump is provided on the outside of the base, an air supply pipe for guiding flow is provided at the output end of the air pump, one end of the air supply pipe passes through the base and the molding cavity tube and extends to the bottom of the air disk and is connected with the air disk, and a limiting cylinder for limiting the limiting rod is provided on the top of the receiving disk and located on the outside of the limiting rod;

[0010] It can be seen that in the above technical solution, the air pump is started at the same time to transport the external airflow to the air disk through the air delivery pipe. After the airflow is gathered in the air disk, it will be combed into each duct, so that the duct is filled with gas and the receiving plate and the scraper plate are lifted upward, making it easy to clean the detached film.

[0011] Technical effects and advantages of the utility model:

[0012] By setting up a cleaning component, compared with the prior art, the overall design is simple and the structure is reasonable. Through the corresponding coordinated use of various structures, the gas emitted by the ozone generator contacts the film inside the molding cavity to form a yellowing phenomenon, which makes the film brittle and automatically falls off, thus solving the problem that the film inside the cavity is difficult to handle and remove;

[0013] At the same time, the air pump is started to transport the external airflow to the air disk through the air delivery pipe. After the airflow is gathered in the air disk, it will be combed into each duct, so that the duct is filled with gas and the receiving plate and scraper plate are lifted upward, making it easy to clean the fallen film;

[0014] In addition, the outer side of the scraper plate rubs against the inner wall of the molding cavity, making it easy to scrape off the remaining stubborn film, thereby improving the cleaning efficiency and effect of the device. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] In order to more clearly illustrate the technical solutions in the present disclosure, the following briefly introduces the drawings required to be used in some embodiments of the present disclosure. Obviously, the drawings described below are only drawings of some embodiments of the present disclosure. For ordinary technicians in this field, other drawings can also be obtained based on these drawings. In addition, the drawings described below can be regarded as schematic diagrams, and are not limitations on the actual size of the product involved in the embodiments of the present disclosure, the actual process of the method, the actual timing of the signal, etc.

[0016] Figure 1 It is the front view of the overall structure of the utility model.

[0017] Figure 2 It is a sectional view of the overall structure of the utility model.

[0018] Figure 3 It is a three-dimensional diagram of the base and the molding cavity tube of the utility model.

[0019] Figure 4 It is a three-dimensional diagram of the cleaning component of the utility model.

[0020] Figure 5 For this utility model Figure 4 Exploded diagram.

[0021] The accompanying drawings are marked as follows: 1. base; 2. forming cavity; 3. top plate; 4. limiting rod; 5. receiving plate; 6. scraping plate; 7. ozone generator; 8. air plate; 9. conduit; 10. air pump; 11. air supply pipe; 12. limiting cylinder; 13. filter hole. DETAILED DESCRIPTION

[0022] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0023] As attached Figure 1-5 The CVD cavity shown is conducive to cleaning parylene. Through the cleaning assembly arranged on the base 1, the gas emitted by the ozone generator 7 contacts the film inside the molding cavity 2 to form a yellowing phenomenon, which makes the film brittle and automatically falls off, so that the problem of the film inside the cavity being difficult to handle and remove can be solved. At the same time, the air pump 10 is started to transport the external airflow to the air disk 8 through the air delivery pipe 11. After the airflow is gathered in the air disk 8, it will be combed into each conduit 9, so that the conduit 9 is filled with gas and the receiving plate 5 and the scraper 6 are pushed up, which is easy to clean the fallen film, and the specific structure of the assembly is arranged as follows;

[0024] The cleaning assembly includes a molding cavity 2 arranged on the top of the base 1, a top plate 3 is arranged inside the molding cavity 2, a limiting rod 4 for limiting is arranged on the top of the top plate 3, and a receiving plate 5 is arranged on the outer side of the limiting rod 4;

[0025] An ozone generator 7 is provided at the top of the limiting rod 4, and a scraper 6 for cleaning is provided at the top of the receiving plate 5 and outside the limiting rod 4. The outside of the scraper 6 extends to the inner wall of the molding cavity 2. The receiving plate 5 and the scraper 6 are detachably connected, and a plurality of filter holes 13 are provided on both the receiving plate 5 and the scraper 6.

[0026] An air disk 8 for flow diversion is provided at the bottom of the inner cavity of the molding cavity tube 2, and a plurality of conduits 9 are distributed at the top of the air disk 8 and along the circumference of the axial point of the air disk 8. The tops of the plurality of conduits 9 extend to the bottom of the receiving plate 5, and the conduits 9 are connected with the air disk 8. An air pump 10 is provided on the outside of the base 1, and an air supply pipe 11 for flow diversion is provided at the output end of the air pump 10. One end of the air supply pipe 11 passes through the base 1 and the molding cavity tube 2 and extends to the bottom of the air disk 8 and is connected with the air disk 8. A limiting cylinder 12 for limiting the limiting rod 4 is provided at the top of the receiving plate 5 and located on the outside of the limiting rod 4.

[0027] According to the above structure, when the staff installs the device at a designated position, when cleaning the residual parylene in the molding cavity 2, the gas emitted by the ozone generator 7 and the parylene film inside the molding cavity 2 form the so-called yellowing phenomenon because the -CH2- of Parylene is oxidized to -C=O group, which makes the film brittle and automatically falls off, thus solving the problem that the film inside the cavity is difficult to handle and remove;

[0028] At the same time, the air pump 10 is started to deliver the external airflow to the air disk 8 through the air delivery pipe 11. After the airflow is gathered in the air disk 8, it is combed into each conduit 9, so that the conduit 9 is filled with gas and the receiving plate 5 and the scraper plate 6 are lifted upward, making it easy to clean the fallen film.

[0029] In addition, the outer side of the scraper 6 rubs against the inner wall of the molding cavity 2, making it easy to scrape off the remaining stubborn film, thereby improving the cleaning efficiency and effect of the device.

[0030] Different from the prior art, the present application discloses a CVD cavity that is conducive to cleaning parylene. The gas emitted by the ozone generator 7 contacts the film inside the molding cavity 2 to form a yellowing phenomenon, which makes the film brittle and automatically falls off. This can solve the problem that the film inside the cavity is difficult to handle and remove. At the same time, the air pump 10 is started to transport the external airflow through the air delivery pipe 11 to the air disk 8. After the airflow is gathered in the air disk 8, it will be combed into each duct 9, so that the duct 9 is filled with gas and the receiving plate 5 and the scraper plate 6 are lifted upward, making it easy to clean the fallen film.

[0031] The above are only preferred embodiments of the present invention and are not intended to limit the present invention. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present invention should be included in the protection scope of the present invention.

Claims

1. A CVD chamber for cleaning parylene, comprising a base (1) for supporting, characterized in that: The base (1) is provided with a cleaning component; The cleaning assembly comprises a molding cavity tube (2) arranged on the top of the base (1); a top plate (3) is arranged inside the molding cavity tube (2); a limiting rod (4) for limiting position is arranged on the top of the top plate (3); and a receiving plate (5) is arranged on the outer side of the limiting rod (4); An ozone generating device (7) is arranged on the top of the limiting rod (4).

2. A CVD chamber for cleaning parylene according to claim 1, characterized in that: A scraper (6) for cleaning is provided at the top of the receiving plate (5) and located outside the limiting rod (4), and the outside of the scraper (6) extends to the inner wall of the molding cavity tube (2).

3. A CVD chamber for cleaning parylene according to claim 1, characterized in that: The receiving plate (5) and the scraping plate (6) are detachably connected, and a plurality of filter holes (13) are provided on both the receiving plate (5) and the scraping plate (6).

4. A CVD chamber for cleaning parylene according to claim 1, characterized in that: An air disc (8) for guiding flow is arranged at the bottom of the inner cavity of the molding cavity tube (2), and a plurality of conduits (9) are arranged at the top of the air disc (8) and distributed along the circumference of the axis point of the air disc (8).

5. A CVD chamber for cleaning parylene according to claim 4, characterized in that: The tops of the plurality of conduits (9) extend to the bottom of the receiving plate (5), and the conduits (9) are connected to the gas plate (8).

6. A CVD chamber for cleaning parylene according to claim 1, characterized in that: An air pump (10) is arranged on the outside of the base (1), and an air supply pipe (11) for guiding air is arranged at the output end of the air pump (10).

7. A CVD chamber for cleaning parylene according to claim 6, characterized in that: One end of the air delivery pipe (11) passes through the base (1) and the molding cavity (2) and extends to the bottom of the air disk (8) to communicate with the air disk (8).

8. The CVD chamber for cleaning parylene according to claim 1, characterized in that: A limiting cylinder (12) for limiting the position of the limiting rod (4) is provided at the top of the receiving plate (5) and located outside the limiting rod (4).

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