Furnace inner supporting structure and machining equipment

Abstract

The utility model belongs to the technical field of photovoltaic cell manufacturing, and discloses an in-furnace supporting structure and processing equipment, the in-furnace supporting structure comprises a supporting frame and at least one supporting piece, the supporting frame abuts against the inner side wall of a furnace tube, the supporting frame comprises two sub-components, the two sub-components are detachably connected, and the supporting piece is arranged on the supporting frame. A U-shaped structure can be formed under the condition that the two sub-components are connected, the U-shaped structure is arranged in the circumferential direction of the furnace tube, at least one supporting piece is connected to at least one sub-component, and each supporting piece is used for supporting at least one auxiliary component. The in-furnace supporting structure does not affect the service life of the furnace tube, and is simple in structure and long in service life.

Description

Technical Field

[0001] The utility model relates to the technical field of photovoltaic cell manufacturing, in particular to a furnace support structure and processing equipment. Background Art

[0002] Chemical vapor deposition equipment is a type of vacuum high-temperature furnace, which is widely used in the processing of semiconductor materials, such as polysilicon deposition, silicon nitride, etc. As the cavity material of the vacuum furnace, the quartz furnace tube, on the one hand, needs to provide a high-temperature resistant vacuum cavity for the deposition process, and on the other hand, it needs to provide brackets for some auxiliary components in the vacuum furnace (such as gas pipelines and temperature measuring elements) to ensure uniform airflow and temperature distribution in the vacuum furnace, so as to ensure the deposition yield.

[0003] At present, the bracket inside the quartz furnace tube is directly welded to the inner wall of the quartz furnace tube by welding rods. The welding strength of this bracket structure is not high and it is easy to break. When the number of bracket breaks is too large and cannot carry auxiliary components, the quartz tube will be scrapped. In addition, the strength of the quartz tube itself will be damaged to a certain extent during the welding process, which will reduce the life of the quartz tube and cause huge economic losses.

[0004] Therefore, it is urgent to propose a furnace support structure that will not affect the service life of the furnace tube, has a simple structure and a long service life. Utility Model Content

[0005] The first purpose of the utility model is to provide a furnace support structure, which can reduce the impact on the service life of the furnace tube, has a simple structure and a long service life.

[0006] The second purpose of the utility model is to provide a processing device with a simple structure and a long service life.

[0007] To achieve this purpose, the utility model adopts the following technical solutions:

[0008] The utility model discloses a supporting structure in a furnace, which is applied to a furnace tube. The furnace tube comprises auxiliary components, including: a supporting frame, the supporting frame is stopped at the inner wall of the furnace tube, the supporting frame comprises two sub-components, the two sub-components are detachably connected, and a U-shaped structure can be formed when the two sub-components are connected, and the U-shaped structure is arranged along the circumference of the furnace tube; at least one supporting member, at least one of the sub-components is connected with at least one supporting member, and each of the supporting members is used to support at least one of the auxiliary components.

[0009] The beneficial effects of the in-furnace support structure of the utility model are as follows: since the support frame of the in-furnace support structure of this embodiment includes two sub-components, a U-shaped structure can be formed when the two sub-components are connected, and the U-shaped structure is arranged along the circumference of the furnace tube, while ensuring that the support frame can be stably maintained inside the furnace tube without any adverse effect on the inner wall of the furnace tube, reducing the phenomenon of deformation or damage of the furnace tube caused by welding brackets in the prior art.

[0010] In some embodiments, at least one of the sub-components includes: an arc-shaped plate, which stops at the inner wall of the furnace tube; a side plate, which is connected to one end of the arc-shaped plate away from another sub-component, and each of the side plates is connected to at least one of the support members.

[0011] In some specific embodiments, each of the support members is detachably mounted on the side panel.

[0012] In some more specific embodiments, both sub-components are provided with a docking protrusion, and in the radial direction of the furnace tube, one of the docking protrusions is located outside the other docking protrusion.

[0013] In some specific embodiments, the support member includes a support plate, which is arranged perpendicular to the axial direction of the furnace tube, and one of the support plate and the side plate is provided with a slot, and the other of the support plate and the side plate is plugged into the slot.

[0014] In some more specific embodiments, a side of the support plate facing the inner side wall of the furnace tube is provided with a rounded corner, and the rounded corner abuts against the inner side wall of the furnace tube.

[0015] In some embodiments, the support member comprises a support plate, and the support plate is bonded to the sub-component.

[0016] In some embodiments, the support frame and the support member are both made of ceramic.

[0017] The utility model also discloses a processing device, comprising the furnace support structure and furnace tube mentioned above, wherein the furnace support structure is arranged inside the furnace tube and is used for supporting auxiliary components arranged inside the furnace tube.

[0018] The beneficial effects of the processing equipment of the utility model are as follows: since it has the in-furnace support structure described above, the support frame of the in-furnace support structure stops at the inner wall of the furnace tube, which can reduce the phenomenon of furnace tube deformation or damage caused by welding brackets in the prior art, which is beneficial to extending the service life of the furnace tube.

[0019] Additional aspects and advantages of the present invention will be given in part in the following description, and in part will become apparent from the following description, or will be learned through the practice of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] Figure 1 It is a structural schematic diagram of the furnace support structure of an embodiment of the utility model;

[0021] Figure 2 yes Figure 1 The enlarged schematic diagram of the circled A;

[0022] Figure 3 It is an exploded schematic diagram of the furnace support structure of an embodiment of the utility model;

[0023] Figure 4 It is a structural schematic diagram of a processing device according to an embodiment of the utility model.

[0024] Reference numerals:

[0025] 100. Support structure inside the furnace; 110. Support frame; 111. Sub-component; 1111. Arc plate; 11111. Docking protrusion; 1112. Side plate; 120. Support member; 121. Slot; 122. Support part; 123. Fillet; 200. Furnace tube. DETAILED DESCRIPTION

[0026] The present invention is further described in detail below in conjunction with the accompanying drawings and embodiments. It is to be understood that the specific embodiments described herein are only used to explain the present invention, rather than to limit the present invention. It should also be noted that, for ease of description, only the parts related to the present invention, rather than all structures, are shown in the accompanying drawings.

[0027] In the description of the present invention, unless otherwise clearly specified and limited, the terms "connected", "connected", and "fixed" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0028] In the present utility model, unless otherwise clearly specified and limited, a first feature being "above" or "below" a second feature may include that the first and second features are in direct contact, or may include that the first and second features are not in direct contact but are in contact through another feature between them. Moreover, a first feature being "above", "above" and "above" a second feature includes that the first feature is directly above and obliquely above the second feature, or simply indicates that the first feature is higher in level than the second feature. A first feature being "below", "below" and "below" a second feature includes that the first feature is directly below and obliquely below the second feature, or simply indicates that the first feature is lower in level than the second feature.

[0029] In the description of this embodiment, the terms "upper", "lower", "right", etc., are based on the directions or positions shown in the drawings, and are only for the convenience of description and simplified operation, rather than indicating or implying that the device or element referred to must have a specific direction, be constructed and operated in a specific direction, and therefore cannot be understood as a limitation of the present invention. In addition, the terms "first" and "second" are only used to distinguish in the description and have no special meaning.

[0030] Reference below Figure 1-Figure 3 The specific structure of the furnace support structure 100 according to the embodiment of the present utility model is described.

[0031] The utility model discloses a furnace support structure 100, which is applied to a furnace tube 200. The furnace tube 200 includes auxiliary components, such as Figure 1 As shown, the furnace support structure 100 includes a support frame 110 and at least one support member 120. The support frame 110 stops at the inner side wall of the furnace tube 200. The support frame 110 includes two sub-components 111, which are detachably connected. When the two sub-components 111 are connected, a U-shaped structure can be formed. The U-shaped structure is arranged along the circumference of the furnace tube 200. At least one sub-component 111 is connected to at least one support member 120, and each support member 120 is used to support at least one auxiliary component. It can be understood that since the support frame 110 of the furnace support structure 100 of this embodiment includes two sub-components 111, which are detachably connected. When the two sub-components 111 are connected, a U-shaped structure can be formed. The U-shaped structure is arranged along the circumference of the furnace tube 200; while ensuring that the support frame 110 can be stably maintained inside the furnace tube 200, no adverse effects are generated on the inner side wall of the furnace tube 200, thereby reducing the phenomenon that the furnace tube 200 is deformed or damaged by the welding bracket in the prior art. In addition, it should be noted that it is understandable that, compared to manufacturing a U-shaped structure using a mold, in this embodiment, the entire support frame 110 is split into two sub-components 111, which is easier to mold and demold during the actual manufacturing process, thereby facilitating manufacturing.

[0032] refer to Figure 3 As shown, the sub-component 111 includes an arc-shaped plate 1111 and a side plate 1112. The arc-shaped plate 1111 abuts against the inner side wall of the furnace tube 200. The side plate 1112 is connected to one end of the arc-shaped plate 1111 away from another sub-component 111, and at least one support member 120 is connected to the side plate 1112. It can be understood that in most cases, the vertical cross-section of the furnace tube 200 is circular. When the sub-component 111 includes the arc-shaped plate 1111 and the arc-shaped plate 1111 abuts against the inner side wall of the furnace tube 200, it has a larger contact area, which is conducive to improving the stability of the entire furnace support structure 100 in the furnace tube 200. Compared with directly installing the support member 120 on the arc plate 1111, setting up the side plate 1112 for installing the support member 120 can more conveniently and firmly install the support member 120 on the support frame 110, ensuring the connection stability between the support member 120 and the support frame 110, thereby ensuring that the support member 120 can stably support the auxiliary components.

[0033] Of course, in other embodiments of the present invention, the shape of the support frame 110 can also be determined according to the shape of the furnace tube 200. For example, when the furnace tube 200 is a square tube, the support frame 110 includes a support bottom plate that abuts against the bottom wall of the square tube. It should be supplemented that, according to actual needs, a plurality of spaced support members 120 can also be connected to the side plate 1112 to enhance the supporting effect on the auxiliary components. That is, in other embodiments of the present invention, two, three or even more support members 120 can be connected to each side plate 1112.

[0034] Optionally, the support member 120 is detachably mounted on the side plate 1112. It is understandable that, since the support member 120 supporting the auxiliary components in the furnace tube 200 is detachably connected to the side plate 1112, even if the support member 120 is damaged during use, the support member 120 can be directly replaced without scrapping the entire furnace support structure 100. Compared with the prior art, the furnace support structure 100 of this embodiment has a simpler structure and a longer service life.

[0035] Further, refer to Figure 2 As shown, in order to improve the docking stability of the two sub-components 111, the two arc-shaped plates 1111 are provided with docking protrusions 11111, and in the radial direction of the furnace tube 200, one docking protrusion 11111 is located outside the other docking protrusion 11111

[0036] Further, refer to Figure 1 , Figure 3As shown, the support member 120 includes a support plate, and the support plate is arranged perpendicularly to the axial direction of the furnace tube 200. It can be understood that the auxiliary components in the furnace tube 200 are mostly structures such as gas pipelines and temperature measuring elements arranged parallel to the axial direction of the furnace tube 200. Setting the support member 120 as a support plate arranged perpendicularly to the axial direction of the furnace tube 200 can enhance the support capacity of auxiliary components such as the gas pipeline and the temperature measuring element, thereby ensuring the installation stability of auxiliary components such as the gas pipeline and the temperature measuring element in the furnace tube 200.

[0037] Furthermore, refer to Figure 3 As shown, the support frame 110 includes a side plate 1112 plugged into the support plate, and the support plate is provided with a slot 121, and the side plate 1112 is plugged into the slot 121. It can be understood that in the actual working process, the side plate 1112 can be directly inserted into the slot 121 to fix the support plate. This connection method is very convenient and facilitates the user to install and remove the support plate. Of course, in an alternative embodiment, the slot 121 can also be set on the side plate 1112, and the support plate is plugged into the slot 121.

[0038] Optionally, each support plate is bonded to the sub-component 111. The support plate is connected to the side plate 1112 by bonding. On the one hand, it is convenient to connect the support plate and the side plate 1112. In the actual connection process, it is only necessary to apply the adhesive to the connection position of the support plate and the side plate 1112. In the disassembly process, it is only necessary to use a chemical solvent or high-temperature melting to remove the adhesive. On the other hand, it is conducive to improving the connection stability between the support plate and the side plate 1112, and avoiding the support plate from falling off the side plate 1112.

[0039] Further optionally, each support plate is connected to the side plate 1112 by a high temperature adhesive, and after the high temperature adhesive is cured, the connection stability between the side plate 1112 and the support plate can be improved to avoid the side plate 1112 and the support plate from separating. Of course, it should be supplemented here that in other embodiments of the utility model, the support plate can also be detachably connected to the side plate 1112 by connecting members such as screws according to actual needs, and is not limited to bonding.

[0040] refer to Figure 1 and Figure 3As shown, a support portion 122 for supporting auxiliary components is provided on the support plate, and the support portion 122 includes a support hole. It can be understood that in the actual assembly process, auxiliary components such as gas pipelines and temperature measuring elements are passed through the support holes, and the auxiliary components are supported by the support holes, which can enhance the support and limiting capabilities of the auxiliary components and ensure that the auxiliary components can be stably maintained inside the furnace tube 200. Of course, in other embodiments of the utility model, the support portion 122 can also be a support groove, a support hook and other structures. When there are multiple support portions 122, the multiple support portions 122 can include at least one of a support hole, a support groove, and a support hook. The structures of the multiple support portions 122 can be the same or different, so as to meet the needs of different auxiliary components.

[0041] refer to Figure 1 and Figure 3 As shown, a rounded corner 123 is provided on one side of the support plate facing the inner side wall of the furnace tube 200, and the rounded corner 123 stops against the inner side wall of the furnace tube 200. It can be understood that in the actual working process, since the support plate is perpendicular to the axial direction of the furnace tube 200, the support plate has a side wall facing the furnace tube 200 after installation, and a rounded corner 123 is provided on one side of the support plate facing the inner side wall of the furnace tube 200, and the rounded corner 123 stops against the inner side wall of the furnace tube 200, which can prevent the support plate from having a sharp part and scratching the inner side wall of the furnace tube 200. In the embodiment of the utility model, the parameters of the rounded corner 123 can be selected according to actual needs.

[0042] Of course, in other embodiments of the present invention, the support member 120 may also include structures such as a support plate or a support rod that supports the furnace tube 200 at other angles to the axial direction.

[0043] Optionally, the support frame 110 and the support member 120 are both made of ceramic materials. It is understandable that ceramic materials have good high temperature resistance and heat shock resistance, stable performance, good durability, and ceramic materials are non-reactive, non-volatile, and corrosion-resistant at high temperatures. The support frame 110 and the support member 120 are both made of ceramic materials. On the one hand, they can ensure the strength and high temperature resistance of the entire in-furnace support structure 100, and on the other hand, they can avoid the reaction between the in-furnace support structure 100 and the atmosphere in the furnace tube 200, thereby well ensuring the cleanliness of the furnace tube 200. Of course, in other embodiments of the utility model, the support frame 110 and the support member 120 can also be made of other materials that are resistant to high temperature, corrosion, and have stable chemical properties.

[0044] The furnace support structure 100 of this embodiment has the following advantages:

[0045] First, it can meet the bearing requirements of the auxiliary components in the furnace tube 200 and ensure that the auxiliary components are stably maintained inside the furnace tube 200;

[0046] Second, the support member 120 is detachably connected to the support member 120, and the support member 120 can be replaced according to actual needs;

[0047] Third, the structure is stable and simple in the long term, the comprehensive cost is reduced by 60%, and the production cost is reduced by 50%;

[0048] Fourthly, it can reduce the strength damage of the furnace tube 200 caused by welding, so that the service life of the furnace tube 200 is increased by 30%.

[0049] The utility model also discloses a processing device, such as Figure 4 As shown, the furnace support structure 100 and the furnace tube 200 are included, and the furnace support structure 100 is disposed inside the furnace tube 200 and is used to support auxiliary components disposed inside the furnace tube 200. It can be understood that, due to the furnace support structure 100 described above, the support frame 110 of the furnace support structure 100 is stopped against the inner wall of the furnace tube 200, and the phenomenon of deformation or damage of the furnace tube 200 caused by welding brackets in the prior art will not occur, which is conducive to extending the service life of the furnace tube 200.

[0050] In the description of this specification, the description with reference to the terms "some embodiments", "other embodiments", etc. means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the utility model. In this specification, the schematic representation of the above terms does not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described can be combined in any one or more embodiments or examples in a suitable manner.

[0051] Obviously, the above embodiments of the present invention are merely examples for the purpose of clearly illustrating the present invention, and are not intended to limit the implementation methods of the present invention. For those skilled in the art, various obvious changes, readjustments and substitutions can be made without departing from the scope of protection of the present invention. It is not necessary and impossible to list all implementation methods here. Any modifications, equivalent substitutions and improvements made within the spirit and principles of the present invention shall be included in the scope of protection of the claims of the present invention.

Claims

1. A furnace support structure, characterized in that: Applied to a furnace tube, the furnace tube includes auxiliary components, and the furnace support structure includes: A support frame, the support frame abuts against the inner side wall of the furnace tube, the support frame comprises two sub-components, the two sub-components are detachably connected, and a U-shaped structure can be formed when the two sub-components are connected, and the U-shaped structure is arranged along the circumference of the furnace tube; At least one supporting member, at least one of the sub-components is connected with at least one supporting member, and each of the supporting members is used to support at least one of the auxiliary components.

2. The furnace support structure according to claim 1, characterized in that: At least one of the subcomponents comprises: An arc-shaped plate, wherein the arc-shaped plate abuts against the inner side wall of the furnace tube; A side plate is connected to one end of the arc-shaped plate away from another sub-component, and at least one of the support members is connected to the side plate.

3. The furnace support structure according to claim 2, characterized in that: Each of the supporting members is detachably mounted on the side plate.

4. The furnace support structure according to claim 3, characterized in that: Both of the two sub-components are provided with butt joint protrusions, and in the radial direction of the furnace tube, one of the butt joint protrusions is located outside the other butt joint protrusion.

5. The furnace support structure according to claim 3, characterized in that: The support member comprises a support plate, which is arranged perpendicular to the axial direction of the furnace tube. A slot is provided on one of the support plate and the side plate, and the other of the support plate and the side plate is plugged into the slot.

6. The furnace support structure according to claim 5, characterized in that: A rounded corner is arranged on one side of the support plate facing the inner side wall of the furnace tube, and the rounded corner stops at the inner side wall of the furnace tube.

7. The furnace support structure according to claim 1, characterized in that: The support member includes a support plate, and the support plate is bonded to the sub-component.

8. The furnace support structure according to any one of claims 1 to 7, characterized in that: The support member is provided with a support portion for supporting the auxiliary component, and the support portion includes at least one of a support hole, a support groove, and a support hook.

9. The furnace support structure according to any one of claims 1 to 7, characterized in that: The support frame and the support member are both made of ceramic.

10. A processing equipment, characterized in that: It comprises the in-furnace support structure and the furnace tube as described in any one of claims 1 to 9, wherein the in-furnace support structure is arranged inside the furnace tube and is used to support auxiliary components arranged inside the furnace tube.

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