Chip loading box and passivation equipment

Abstract

The utility model relates to the field of photovoltaic technology, in particular to a wafer loading box and passivation equipment, and solves the problem that when an existing silicon wafer carrier is applied to passivation process treatment of a silicon wafer section, a treated surface is easily passivated again. The wafer loading box comprises a first forming part, a second forming part and at least one connecting part, when a stack of sheet-shaped materials is placed in the containing space, the upper surface of the sheet-shaped material located at the top is attached to the first forming part, and the lower surface of the sheet-shaped material located at the bottom is attached to the first forming part. Or, the upper surface of the sheet-shaped material located at the top is attached to the first forming part, and the lower surface of the sheet-shaped material located at the bottom is attached to the second forming part. According to the method, the treated surface can be prevented from being passivated again, fine processing of the fracture surface of the cracked silicon wafer is ensured, meanwhile, the treated surface is protected, and the performance and the stability of a photovoltaic cell are improved.

Description

Technical Field

[0001] The present disclosure relates to the field of photovoltaic technology, and in particular to a wafer loading box and a passivation device. Background Art

[0002] Existing deposition equipment is mainly used to process the surface of the entire silicon wafer. However, after the silicon wafer undergoes the laser cracking process, a key problem arises: the cross-sections of the two halves of the wafer are exposed, and these cross-sections have not been processed. These exposed, unprocessed cross-sections may reduce the overall quality of the silicon wafer surface, which in turn has a negative impact on the performance and efficiency of photovoltaic cells.

[0003] In view of the above problems, the edge of the silicon wafer after splitting needs additional processing to ensure stable performance. However, since the upper and lower surfaces of the silicon wafer have been passivated, when the common silicon wafer carrier is used for passivation process, it may often cause the treated surface to be passivated again, which also damages the performance and stability of the photovoltaic cell. Utility Model Content

[0004] In view of this, the embodiments of the present disclosure provide a wafer box and a passivation device, which solve the problem that when the existing silicon wafer carrier is used for the passivation process of the silicon wafer cross section, the treated surface is easily passivated again.

[0005] In a first aspect, an embodiment of the present disclosure provides a film loading box, which is applied to the passivation process of sheet materials, and the film loading box includes: a first component, including N first component plates, the N first component plates are fixedly connected in sequence, N is a positive integer, and 2≤N≤4; a second component, including M second component plates, the M second component plates are fixedly connected in sequence, M is a positive integer, and 2≤M≤4; at least one connecting part, used to make the first component and the second component detachable and connected; wherein N+M=6; wherein, when the first component and the second component are in a mutually connected state, the N first component plates and the M second component plates are fixedly connected in sequence. The second constituent plates are enclosed to form a accommodating space for placing sheet materials; there is a gap between the second constituent plate and an adjacent first constituent plate, and / or there is a gap between the second constituent plate and another adjacent second constituent plate; wherein, when a stack of sheet materials is placed in the accommodating space, the upper surface of the sheet material at the top is attached to the first constituent part, and the lower surface of the sheet material at the bottom is attached to the first constituent part; or, the upper surface of the sheet material at the top is attached to the first constituent part, and the lower surface of the sheet material at the bottom is attached to the second constituent part.

[0006] In some embodiments, N=3, M=3, and there is a gap between one of the first constituent plates and another adjacent first constituent plate.

[0007] In some embodiments, the first constituent plate includes: a top plate; a first enclosure plate, located on one side of the top plate and vertically fixed to the top plate; a second enclosure plate, located on the other side of the top plate and vertically fixed to the top plate, the second enclosure plate is arranged adjacent to the first enclosure plate, and the gap is formed between the second enclosure plate and the first enclosure plate.

[0008] In some embodiments, the second constituent plate includes: a bottom plate; a third enclosure located on one side of the bottom plate and vertically fixed to the bottom plate; a fourth enclosure located on the other side of the bottom plate, adjacent to the third enclosure, and vertically fixed to the bottom plate; wherein, when the first constituent part and the second constituent part are in a mutually connected state, the bottom plate is opposite to the top plate, the third enclosure is connected to the top plate and vertically connected to the second enclosure, and the fourth enclosure is connected to the top plate and vertically connected to the first enclosure.

[0009] In some embodiments, the third enclosure panel and the fourth enclosure panel are spaced apart to form the gap.

[0010] In some embodiments, the connecting portion includes at least one snap-fit ​​mechanism, which includes: a mounting seat; a movable member movably connected to the mounting seat, the movable member being configured to move between a first position and a second position, and the movable member being provided with a limiting protrusion; an elastic member connecting the mounting seat and the movable member, the elastic member providing the movable member with an elastic force tending toward the first position; wherein the mounting seat is fixedly connected to one of the first component and the second component, and the limiting protrusion is snap-fitted to the other of the first component and the second component.

[0011] In some embodiments, the movable member is rotatably connected to the mounting base, and the movable member is configured to rotate between the first position and the second position.

[0012] In some embodiments, a first limiting groove is provided on one side of the movable part, and a second limiting groove is provided on the mounting seat, and the first limiting groove is arranged opposite to the second limiting groove; the elastic part includes: a compression spring, one end of the compression spring is located in the first limiting groove, and the other end of the compression spring is located in the second limiting groove.

[0013] In some embodiments, there are multiple snap-in mechanisms, which are disposed in the first constituent part and the second constituent part; wherein the snap-in mechanism located in the first constituent part is fixedly connected to one of the first constituent plates, and snap-fitted with one of the second constituent plates, and the snap-in mechanism located in the second constituent part is fixedly connected to one of the second constituent plates, and snap-fitted with one of the first constituent plates.

[0014] In some embodiments, the first component further includes: a supporting member located on the upper side of the bottom plate, configured to support the sheet material when the sheet material is placed in the accommodating space, and to fit with the lower surface of the sheet material located at the bottom.

[0015] In some embodiments, the second component further includes: a pressing member, located at the lower side of the top plate, configured to press the sheet material and fit with the upper surface of the sheet material at the top when the sheet material is placed in the accommodating space.

[0016] In a second aspect, an embodiment of the present disclosure provides a passivation device, comprising: a main body having a passivation chamber; and a wafer loading box as described in the first aspect, configured to be placed in the passivation chamber during a passivation process.

[0017] An embodiment of the present disclosure provides a wafer loading box and a passivation device. After a sheet material (such as a silicon wafer) is placed in the accommodating space of the wafer loading box, a gap can be used for a passivation gas to pass through, thereby creating conditions for a passivation process. During the passivation process, the upper surface of the sheet material at the top is attached to the first component, and the lower surface of the sheet material at the bottom is attached to the first component, or the upper surface of the sheet material at the top is attached to the first component, and the lower surface of the sheet material at the bottom is attached to the second component. This can avoid passivation of the processed surfaces (upper and lower surfaces) again, ensure fine processing of the cross section of the silicon wafer after splitting, and protect the processed surface at the same time, which is beneficial to improving the performance and stability of photovoltaic cells. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] The above and other purposes, features and advantages of the present disclosure will become more apparent by describing the embodiments of the present disclosure in more detail in conjunction with the accompanying drawings. The accompanying drawings are used to provide a further understanding of the embodiments of the present disclosure and constitute a part of the specification. Together with the embodiments of the present disclosure, they are used to explain the present disclosure and do not constitute a limitation of the present disclosure. In the drawings, the same reference numerals generally represent the same components or steps.

[0019] Figure 1 Shown is a three-dimensional view of a film loading box provided in one embodiment of the present disclosure.

[0020] Figure 2 Shown is a front view of a film loading box provided in one embodiment of the present disclosure.

[0021] Figure 3 Shown is a side view of a film loading box provided in one embodiment of the present disclosure.

[0022] Figure 4 Shown is an exploded view of a film loading box provided in one embodiment of the present disclosure.

[0023] Figure 5 The figure shows an exploded view of a film loading box provided by an embodiment of the present disclosure in a use state.

[0024] Figure 6 Shown is an exploded view of a film loading box provided by another embodiment of the present disclosure in a use state.

[0025] Figure 7 Shown is an exploded view of a film loading box provided by another embodiment of the present disclosure in a use state.

[0026] Figure 8 Shown is a top view of a film loading box provided by an embodiment of the present disclosure in a use state.

[0027] Fig. 9 Figure 8 Middle AA section view.

[0028] Fig.10 for Fig. 9 Enlarged view of point B in .

[0029] Fig.11 Shown is a schematic structural diagram of a passivation device provided in one embodiment of the present disclosure.

[0030] Reference numerals:

[0031] 1. passivation equipment; 10. main body; 11. passivation chamber; 20. film box; 110. second component; 111. bottom plate; 112. third enclosure; 113. fourth enclosure; 114. overlap; 120. first component; 121. top plate; 122. first enclosure; 123. second enclosure; 200. gap; 300. snap mechanism; 310. mounting seat; 311. second limiting groove; 312. through hole; 320. movable part; 321. limiting protrusion; 322. first limiting groove; 330. elastic part; 400. pressing part; 500. supporting part; 600. sheet material. DETAILED DESCRIPTION

[0032] The following will be combined with the drawings in the embodiments of the present disclosure to clearly and completely describe the technical solutions in the embodiments of the present disclosure. Obviously, the described embodiments are only part of the embodiments of the present disclosure, not all of the embodiments. Based on the embodiments in the present disclosure, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present disclosure.

[0033] like Figures 1 to 4 As shown, the wafer loading box 20 of the embodiment of the present disclosure is suitable for the passivation process of the sheet material 600, wherein the sheet material 600 can be specifically a sheet material 600 such as a silicon wafer, a glass substrate, etc. Taking the silicon wafer as an example, the passivation process can be to use gaseous reactants to react chemically on the surface of the silicon wafer to generate the required passivation layer. After the silicon wafer is laser split, the cross-section of the silicon wafer needs to be passivated. The wafer loading box 20 of this embodiment can avoid repeated passivation during the passivation process.

[0034] The film box 20 of this embodiment includes a first component 120, a second component 110 and at least one connecting portion. The first component 120 includes N first component plates, which are fixedly connected in sequence, N is a positive integer, and 2≤N≤4, and the second component 110 includes M second component plates, which are fixedly connected in sequence, M is a positive integer, and 2≤M≤4, where N+M=6. The at least one connecting portion is used to make the first component 120 and the second component 110 detachably connected. When the first component 120 and the second component 110 are in a mutually connected state, the N first component plates and the M second component plates enclose to form a containing space for placing the sheet material 600. There is a gap 200 between a second component plate and an adjacent first component plate, and / or there is a gap 200 between a second component plate and another adjacent second component plate. When a stack of sheet materials 600 is placed in the accommodating space, the upper surface of the sheet material 600 located at the top is adhered to the first component part 120, and the lower surface of the sheet material 600 located at the bottom is adhered to the first component part 120; or, the upper surface of the sheet material 600 located at the top is adhered to the first component part 120, and the lower surface of the sheet material 600 located at the bottom is adhered to the second component part 110.

[0035] In this embodiment, among the N first constituent plates of the first constituent part 120, adjacent first constituent plates are perpendicular to each other, and the connection position between the first constituent plates is the side position of the first constituent plates, and the corresponding side lengths of adjacent first constituent plates are equal. Similarly, among the N second constituent plates of the second constituent part 110, adjacent second constituent plates are perpendicular to each other, and the connection position between the second constituent plates is the side position of the second constituent plates, and the corresponding side lengths of adjacent second constituent plates are equal. The number of first constituent plates in the first constituent part 120 can be 2, 3 or 4, and the number of second constituent plates in the second constituent part 110 is 4, 3 or 2 accordingly. N+M=6, then the first constituent part 120 and the second constituent part 110 are combined to form a rectangular box structure.

[0036] There are three optional situations for forming the gap 200: the gap 200 is formed between adjacent first constituent plates of the first constituent part 120, the gap 200 is formed between adjacent second constituent plates of the second constituent part 110, and the gap 200 is formed between the first constituent part 120 and the second constituent part 110. The number of the gaps 200 is not specifically limited in this embodiment, and can be one or two or more. Moreover, when the number of the gaps 200 is two or more, the form selected for the gap 200 can be any one of the above three optional situations, or a combination of two or more.

[0037] By providing the gap 200 , process gas can enter the accommodating space, thus creating conditions for the process.

[0038] When a stack of sheet materials 600 is placed in the accommodation space, adjacent sheet materials 600 can shield each other at the contacting upper or lower surface positions, while the upper surface of the sheet material 600 at the top and the lower surface of the sheet material 600 at the bottom cannot be shielded by other sheet materials 600. In this embodiment, the upper surface of the sheet material 600 at the top is attached by the first component 120, and the lower surface of the sheet material 600 at the bottom is attached by the second component 110, so that the upper surface of the sheet material 600 at the top and the lower surface of the sheet material 600 at the bottom can be shielded to prevent them from contacting with gas. When a stack of sheet materials 600 is placed in the accommodation space, all the passivated upper and lower surfaces of the multiple stacked sheet materials 600 are shielded and protected, which can effectively prevent re-passivation from affecting product quality.

[0039] It is worth noting that the re-passivation of the side wall of the sheet material 600 will basically not affect the quality of the product, so shielding and protection are not required. When the side wall of the sheet material 600 needs to be protected, optionally, the first component 120 and the second component 110 are attached to the non-passivated side of the stacked sheet material 600 (i.e., the side that does not need to be passivated after cracking), and the first component 120 and the second component 110 form a gap with the side to be passivated of the stacked sheet material 600 (e.g., the cross section of the silicon wafer after cracking), and the gap is connected to the gap 200. As a result, after the process gas enters from the gap 200, it only contacts the side to be passivated of the sheet material 600 at the gap position, thereby achieving precise processing of the passivated surface.

[0040] In this embodiment, the second component 110 and the first component 120 are detachable structures. When the second component 110 and the first component 120 are disassembled, it is convenient to place a single or multiple stacked sheet materials 600 (such as cracked silicon wafers) into the second component 110 or the first component 120.

[0041] In some embodiments of the present disclosure, N=3, M=3, and the number of the first constituent plates is equal to the number of the second constituent plates, both of which are 3. Among the 3 first constituent plates, every two first constituent plates are adjacent and perpendicular to each other. Similarly, among the 3 second constituent plates, every two second constituent plates are adjacent and perpendicular to each other. The 3 first constituent plates of the first constituent part 120 constitute 3 adjacent and mutually perpendicular side walls of the film box 20, and the 3 second constituent plates of the second constituent part 110 constitute the other 3 adjacent and mutually perpendicular side walls of the film box 20.

[0042] Optionally, a gap 200 is provided between a first constituent plate and another adjacent first constituent plate. That is, among the plurality of first constituent plates of the first constituent part 120, at least two adjacent constituent plates have a gap 200. Since the relative positions between adjacent constituent plates of the first constituent part 120 are fixed, a stable gap 200 can be maintained, which is not affected by the installation process, and is conducive to ensuring the passivation effect.

[0043] In some embodiments of the present disclosure, the first component plate includes a top plate 121, a first enclosure plate 122, and a second enclosure plate 123. The first enclosure plate 122 is located on one side of the top plate 121 and is vertically fixed to the top plate 121. The second enclosure plate 123 is located on the other side of the top plate 121 and is vertically fixed to the top plate 121. The second enclosure plate 123 is disposed adjacent to the first enclosure plate 122, and a gap 200 is formed between the second enclosure plate 123 and the first enclosure plate 122.

[0044] The first enclosure 122 and the top plate 121 and the second enclosure 123 and the top plate 121 may be fixedly connected in an undetachable manner, such as by welding or bonding, or may be fixedly connected in a detachable manner, such as by bolts, nuts, screws, buckles, magnets, etc. Preferably, the first enclosure 122 and the top plate 121 and the second enclosure 123 and the top plate 121 are detachably connected.

[0045] In some embodiments of the present disclosure, the second constituent plate includes a bottom plate 111, a third enclosure plate 112, and a fourth enclosure plate 113. The third enclosure plate 112 is located on one side of the bottom plate 111 and is vertically fixed to the bottom plate 111. The fourth enclosure plate 113 is located on the other side of the bottom plate 111, is disposed adjacent to the third enclosure plate 112, and is vertically fixed to the bottom plate 111.

[0046] The third enclosure panel 112 and the top panel 121 as well as the fourth enclosure panel 113 and the top panel 121 may be fixedly connected in an irremovable manner, such as by welding or bonding, or may be fixedly connected in a removable manner, such as by bolts, nuts, screws, buckles, magnets, etc. Preferably, the third enclosure panel 112 and the top panel 121 as well as the fourth enclosure panel 113 and the top panel 121 are removably connected.

[0047] When the first component 120 and the second component 110 are in a mutually connected state, the bottom plate 111 is opposite to the top plate 121, the third enclosure 112 is connected to the top plate 121 and is perpendicular to the second enclosure 123, and the fourth enclosure 113 is connected to the top plate 121 and is perpendicular to the first enclosure 122.

[0048] In this embodiment, the first constituent plate and the second constituent plate are preferably rectangular plates, so that the first constituent part 120 and the second constituent part 110 can form a rectangular box structure when they are in a mutually connected state, which can better adapt to the shape of the sheet material 600.

[0049] Optionally, the third enclosure panel 112 and the fourth enclosure panel 113 are spaced apart to form a gap 200 between the third enclosure panel 112 and the fourth enclosure panel 113. Since the third enclosure panel 112 and the fourth enclosure panel 113 are respectively fixedly connected to the top plate 121, the relative position between the third enclosure panel 112 and the fourth enclosure panel 113 is fixed, so that a stable gap 200 can be maintained, which is not affected by the installation process, and is conducive to ensuring the passivation effect.

[0050] During actual use, after the second component 110 and the first component 120 are disassembled, the sheet material 600 can be placed on the bottom plate 111 laterally or upwardly through the second component 110, and then the first component 120 is buckled on the upper side of the second component 110 and fixed. At this time, the top plate 121 is parallel to the bottom plate 111, the top plate 121 is in contact with the third enclosure 112 and the fourth enclosure 113, and the first enclosure 122 is parallel to the third enclosure 112 and in contact with the bottom plate 111.

[0051] refer to Figure 5 In some embodiments of the present disclosure, a lap joint 114 is provided at one end of the bottom plate 111 away from the third enclosure plate 112 , and the lap joint 114 overlaps and cooperates with the first enclosure plate 122 .

[0052] Specifically, a lap portion 114 is provided at the lower side of one end of the bottom plate 111 away from the third enclosure 112, and the lap portion 114 extends along the side wall of the bottom plate 111. The upper side of the lap portion 114 forms a lap groove located outside the bottom plate 111. When the first component 120 is installed on the upper side of the second component 110, the lower end of the first enclosure 122 is located in the lap groove and contacts the lap portion 114. This embodiment does not specifically limit the size of the lap portion 114 in the horizontal direction perpendicular to its extension direction. Preferably, the size of the lap portion 114 in the horizontal direction perpendicular to the extension direction is equal to the thickness of the first enclosure 122, so that the lower end of the first enclosure 122 is completely located in the lap groove.

[0053] First, through the support and limiting effect of the overlap portion 114, the first component 120 can be more stable when installed on the second component 110, and is not prone to shaking or displacement. This helps to ensure that the sheet material 600 maintains a stable position during the passivation process, and prevents uneven passivation or damage caused by unstable devices.

[0054] Secondly, the tight fit between the overlapping portion 114 and the first enclosure 122 enhances the sealing performance. In addition, the arrangement of the overlapping portion 114 also simplifies the assembly and disassembly process of the film loading box 20. Due to the existence of the overlapping portion 114, the first component 120 can easily find the correct position and fix it during installation without complicated adjustment or positioning operations. Similarly, the first component 120 can also be quickly separated from the second component 110 during disassembly, which is convenient for cleaning, maintenance or replacement.

[0055] In summary, the film box 20 in the embodiment of the present disclosure achieves effective support and limitation for the first component 120 by setting the overlapping portion 114 on the bottom plate 111, thereby improving the stability and sealing, while simplifying the assembly and disassembly process of the device, and providing a more reliable and efficient solution for the passivation process of the sheet material 600.

[0056] Combination Figure 1 and Figure 2 In some embodiments of the present disclosure, the second component 110 is snap-fitted with the first component 120. The snap-fit ​​design makes the device more convenient and quick during assembly and disassembly. The snap-fit ​​not only simplifies the assembly and disassembly steps, but also improves the stability and reliability of the device. In addition, the snap-fit ​​also has a certain fault tolerance, and even if there is a slight deviation during assembly, the correct connection can be achieved.

[0057] Optionally, the second component 110 and the first component 120 are engaged with each other through at least one buckle mechanism 300. This ensures that the second component 110 and the first component 120 are firmly connected at multiple positions, further improving the structural strength and stability of the entire film box 20.

[0058] In some embodiments, in order to further enhance the connection stability and reliability between the second component 110 and the first component 120, the number of the snap mechanisms 300 is multiple, for example, the number of the snap mechanisms 300 is two. Multiple snap mechanisms 300 are disposed in the first component 120 and the second component 110; wherein the snap mechanism 300 located in the first component 120 is fixedly connected to one of the first component plates and is snapped with one of the second component plates, and the snap mechanism 300 located in the second component 110 is fixedly connected to one of the second component plates and is snapped with one of the first component plates. Not only more connection points are provided, but also support and fixation can be provided in multiple directions to ensure the stability and safety of the film loading box 20 during the passivation process.

[0059] Optionally, there are two snap mechanisms 300, one of which is fixed to the first enclosure 122 and is suitable for snapping with the bottom plate 111, and the other snap mechanism 300 is fixed to the third enclosure 112 and is suitable for snapping with the top plate 121. In this way, the two snap mechanisms 300 cooperate with each other to achieve a tight connection between the second component 110 and the first component 120. This design makes the film box 20 more convenient and quick to assemble, and also improves the stability and firmness of its overall structure. During the passivation process, even in the face of external forces such as vibration and impact, the film box 20 can maintain a stable shape to ensure the safety and processing quality of the sheet material 600.

[0060] In addition, the arrangement of the two buckle mechanisms 300 can be adjusted and optimized according to actual needs. For example, the position, quantity and structure of the buckle mechanisms 300 can be determined according to factors such as the size and shape of the film box 20 and the characteristics of the sheet material 600 to achieve the best connection effect and stability.

[0061] In addition, a buckle mechanism 300 is provided on the outer side of the third enclosure 112 and the outer side of the first enclosure 122, respectively, and the buckle mechanism can be used as a handle when carrying the material box. In actual operation, when the entire film box 20 needs to be moved or carried, the staff can easily grab the buckle mechanism 300 on the outer side of the third enclosure 112 and the first enclosure 122 and use it as a handle. This makes the carrying process more convenient and quick, and reduces the difficulty and inconvenience of carrying.

[0062] by Figure 1 Taking the snap mechanism 300 shown in the figure as an example, the snap mechanism 300 can be fixed to the outer side of the corresponding third enclosure panel 112 or the first enclosure panel 122 by means of bolts, nuts, screws, bonding, welding, etc.

[0063] Combination Figure 8 , Fig. 9 and Fig.10 In some embodiments, the buckle mechanism 300 includes a mounting seat 310, a movable member 320 and an elastic member 330. The movable member 320 is movably connected to the mounting seat 310, and the movable member 320 is configured to move between a first position and a second position. The movable member 320 is provided with a limited position protrusion 321. The elastic member 330 connects the mounting seat 310 and the movable member 320, and the elastic member 330 provides an elastic force for the movable member 320 to move toward the first position.

[0064] The mounting seat 310 is fixedly connected to one of the first component 120 and the second component 110. The limiting protrusion 321 is configured to be connected to the first component 120 and the second component 110, and when the movable member 320 is located at the first position, the limiting protrusion 321 is engaged with the other of the first component 120 and the second component 110, and when the movable member 320 is located at the second position, the limiting protrusion 321 is disengaged from the other of the first component 120 and the second component 110.

[0065] Taking the snap mechanism 300 in the first component 120 as an example, the mounting seat 310 is fixedly connected to the first component 120, and the limiting protrusion 321 is configured to: when the first component 120 and the second component 110 are connected and the movable part 320 is in the first position, it is snapped with the second component 110; when the movable part 320 is in the second position, it is disengaged from the second component 110.

[0066] In this embodiment, under the action of the elastic member 330, the movable member 320 can be maintained in the first position when not subjected to other external forces. On the one hand, it can achieve automatic locking when the first component 120 and the second component 110 are docked, thereby reducing the difficulty of operation. On the other hand, it can maintain a stable locking state after the first component 120 and the second component 110 are docked.

[0067] Optionally, the movable member 320 is rotatably connected to the mounting seat 310, and the movable member 320 is configured to rotate between a first position and a second position. Since when the first component 120 and the second component 110 are connected, an overlapped fit is formed between the second component plates connected to the first component plates, therefore, during the connection process, the first component plate or the second component plate engaged with the limiting protrusion 321 will contact and push the limiting protrusion 321. In this embodiment, the movable member 320 is rotatably connected to the mounting seat 310, and when the first component plate or the second component plate contacts and pushes the limiting protrusion 321, the movable member 320 can rotate to avoid the second position. After the first component plate or the second component plate passes the limiting protrusion 321, the movable member 320 is reset to the first position under the action of the elastic member 330, thereby achieving automatic locking.

[0068] In some embodiments, a first limiting groove 322 is provided on one side of the movable member 320, and a second limiting groove 311 is provided on the mounting seat 310, and the first limiting groove 322 is arranged opposite to the second limiting groove 311. The elastic member 330 includes a compression spring, one end of which is located in the first limiting groove 322, and the other end of which is located in the second limiting groove 311. When the movable member 320 rotates from the first position to the second position, the compression amount of the compression spring gradually increases, so that it can automatically reset after other external forces are removed. The first limiting groove 322 and the second limiting groove 311 arranged opposite to each other can respectively limit the two ends of the compression spring, prevent the compression spring from failing to move, which is conducive to ensuring the stability of the structure, and can also avoid excessive compression and damage to the compression spring.

[0069] The elastic member 330 may also be in other structural forms such as a torsion spring, a tension spring or an elastic sheet.

[0070] In some embodiments, the mounting base 310 is provided with a through hole 312 , the movable member 320 is passed through the through hole 312 , and the movable member 320 is rotatably connected to the mounting base 310 via a rotating shaft located in the through hole 312 , and the elastic member 330 is disposed in the through hole 312 .

[0071] In some embodiments, the mounting base 310 is fixedly connected to the first component 120 or the second component 110 by bolts.

[0072] See also Figure 5 and Figure 7 In some embodiments, the second component 110 further includes a pressing member 400, which is located at the lower side of the top plate 121 and is configured to press the sheet material 600 and fit with the upper surface of the sheet material 600 located at the top when the sheet material 600 is placed in the accommodating space.

[0073] The main function of the pressing member 400 is to be located above the sheet material 600 when the sheet material 600 is placed in the accommodating space, and to apply a certain pressure to make the sheet material 600 fit more closely to the bottom plate 111, thereby ensuring that the sheet material 600 can be evenly and fully in contact with the passivation gas during the passivation process.

[0074] The specific design of the pressing member 400 can be adjusted according to actual needs. For example, the pressing member 400 can include a pressing plate, and after the sheet material 600 is placed on the bottom plate 111, the position of the pressing plate can be adjusted so that it fits tightly above the sheet material 600. The pressing plate can have a certain weight or exert a certain pressure to ensure that the sheet material 600 remains stable during the passivation process.

[0075] In addition, the pressing member 400 may also include some auxiliary components, such as a sealing gasket or elastic material, etc., to provide better sealing and buffering between the pressing plate and the sheet material 600. These auxiliary components can effectively prevent the passivation gas from leaking from the gap 200 between the pressing plate and the sheet material 600 during the passivation process, thereby improving the passivation effect.

[0076] By introducing the pressing member 400, the film loading box 20 in the embodiment of the present disclosure can better meet the actual needs of the sheet material 600 during the passivation process. It can not only ensure that the sheet material 600 remains stable during the passivation process, but also improve the utilization rate of the passivation gas and the passivation effect. At the same time, the design of the pressing member 400 also takes into account the convenience and practicality of operation, making the entire passivation process more efficient and reliable.

[0077] In practical applications, the specific form and parameters of the pressing member 400 (such as the size, weight, applied pressure, etc. of the pressing plate) can be flexibly adjusted according to the properties, size and quantity of the sheet material 600 and the requirements of the passivation process. This ensures that the film cassette 20 can perform optimally in different application scenarios.

[0078] See also Figure 6 and Figure 7 In some embodiments, the first component 120 further includes a supporting member 500, which is located on the upper side of the bottom plate 111 and is configured to support the sheet material 600 when the sheet material 600 is placed in the accommodating space, and to fit with the lower surface of the sheet material 600 located at the bottom.

[0079] Specifically, the support member 500 can be designed according to the shape, size, weight and other characteristics of the sheet material 600 to ensure that it can effectively support the sheet material 600 and prevent it from shifting or deforming during the passivation process. The specific form of the support member 500 can be selected and adjusted according to actual needs. For example, the support member 500 can include a pad, which not only supports the sheet material 600, but also facilitates the overall placement of the stacked sheet material 600 (such as silicon wafers).

[0080] The present disclosure also provides a passivation device 1, such as Fig.11 As shown, the passivation device 1 comprises a main body 10 and the above-mentioned film loading box 20. The main body 10 has a passivation chamber 11, which is the main place for the passivation process.

[0081] During use, the cassette 20 is configured to be placed in the passivation chamber 11 during the passivation process. The sheet material 600 can be efficiently passivated under the support and protection of the cassette 20.

[0082] The passivation device 1 provided in the embodiment of the present disclosure realizes efficient, stable and safe processing of the sheet material 600 through the film loading box 20. Not only the efficiency and quality of the passivation process are improved, but also the operation difficulty and cost are reduced. Since the passivation device 1 includes the film loading box 20, all the technical features and technical effects of the passivation device 1 including the film loading box 20 are not repeated here.

[0083] The phrases "one embodiment", "an embodiment", etc. mentioned in the specification indicate that the embodiment described may include a specific feature, structure or characteristic, but not every embodiment may include the specific feature, structure or characteristic. In addition, such phrases do not necessarily refer to the same embodiment. In addition, when a specific feature, structure or characteristic is described in conjunction with an embodiment, it is within the knowledge of those skilled in the art to implement such feature, structure or characteristic in conjunction with other embodiments, whether explicitly or not explicitly described.

[0084] It should be understood that “on,” “above,” and “over” in this disclosure should be interpreted in the broadest manner, so that “on” not only means “directly on something,” but also includes the meaning of “on something” with intervening features or layers therebetween, and “above” or “over” not only includes the meaning of “above” or “over,” but also may include the meaning of “above” or “over something” with no intervening features or layers therebetween (i.e., directly on something).

[0085] Additionally, spatially relative terms, such as "below," "below," "beneath," "above," "above," etc., may be used herein for ease of description to describe the relationship of one component or feature to other components or features as shown in the figures. The spatially relative terms are intended to encompass different orientations of the component in use or operation in addition to the orientation depicted in the figures. The device may be otherwise oriented (rotated 90 degrees or at other orientations), and the spatially relative descriptors used herein may likewise be interpreted accordingly.

[0086] It should be noted that, in this article, the terms "include", "comprises" or any other variations thereof are intended to cover non-exclusive inclusion, so that a process, method, article or device including a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such process, method, article or device. In the absence of further restrictions, an element defined by the sentence "comprises a ..." does not exclude the existence of other identical elements in the process, method, article or device including the element.

[0087] The above description is only a preferred embodiment of the present disclosure and is not intended to limit the present disclosure. Any modifications, equivalent substitutions, etc. made within the spirit and principles of the present disclosure should be included in the protection scope of the present disclosure.

Claims

1. A film box, characterized in that: Applied to the passivation process of sheet materials, the sheet loading box comprises: The first component includes N first component plates, wherein the N first component plates are fixedly connected in sequence, where N is a positive integer and 2≤N≤4; The second component includes M second component plates, wherein the M second component plates are fixedly connected in sequence, where M is a positive integer and 2≤M≤4; at least one connecting portion, used to detachably connect the first component and the second component; Where, N+M=6; Wherein, when the first component and the second component are in a mutually connected state, N first component plates and M second component plates enclose to form a containing space for placing sheet materials; there is a gap between one of the second component plates and an adjacent one of the first component plates, and / or there is a gap between one of the second component plates and another adjacent one of the second component plates; Among them, when a stack of the sheet materials is placed in the accommodating space, the upper surface of the sheet material located at the top is attached to the first component, and the lower surface of the sheet material located at the bottom is attached to the first component; or, the upper surface of the sheet material located at the top is attached to the first component, and the lower surface of the sheet material located at the bottom is attached to the second component.

2. The film box according to claim 1, characterized in that: N=3, M=3, and there is a gap between one of the first constituent plates and another adjacent first constituent plate.

3. The film box according to claim 2, characterized in that: The first constituent plate comprises: roof; A first enclosure plate, located on one side of the top plate and vertically fixed to the top plate; The second enclosure is located on the other side of the top plate and is vertically fixed to the top plate. The second enclosure is adjacent to the first enclosure, and the gap is formed between the second enclosure and the first enclosure.

4. The film loading box according to claim 3, characterized in that: The second component plate comprises: Base plate; A third enclosure plate is located on one side of the bottom plate and is vertically fixed to the bottom plate; a fourth enclosure plate, located on the other side of the bottom plate, disposed adjacent to the third enclosure plate, and vertically fixed to the bottom plate; When the first component and the second component are in an interconnected state, the bottom plate is opposite to the top plate, the third enclosure is connected to the top plate and is perpendicular to the second enclosure, and the fourth enclosure is connected to the top plate and is perpendicular to the first enclosure.

5. The film loading box according to claim 4, characterized in that: The third enclosure panel and the fourth enclosure panel are spaced apart to form the gap.

6. The film loading box according to any one of claims 1 to 5, characterized in that: The connecting portion includes at least one buckle mechanism, and the buckle mechanism includes: Mounting seat; A movable member, movably connected to the mounting seat, the movable member is configured to move between a first position and a second position, and the movable member is provided with a limiting protrusion; an elastic member, connecting the mounting seat and the movable member, the elastic member providing an elastic force for the movable member to move toward the first position; Wherein, the mounting seat is fixedly connected to one of the first component and the second component, and the limiting protrusion is clamped to the other of the first component and the second component.

7. The film loading box according to claim 6, characterized in that: The movable member is rotatably connected to the mounting seat, and the movable member is configured to rotate between the first position and the second position.

8. The film loading box according to claim 6, characterized in that: A first limiting groove is provided on one side of the movable member, and a second limiting groove is provided on the mounting seat, and the first limiting groove is arranged opposite to the second limiting groove; The elastic member comprises: A compression spring, one end of the compression spring is located in the first limiting groove, and the other end of the compression spring is located in the second limiting groove.

9. The film loading box according to claim 6, characterized in that: There are multiple buckle mechanisms, and the multiple buckle mechanisms are respectively disposed in the first component part and the second component part; Among them, the snap-fit ​​mechanism located at the first constituent part is fixedly connected to one of the first constituent plates and snap-fitted with one of the second constituent plates, and the snap-fit ​​mechanism located at the second constituent part is fixedly connected to one of the second constituent plates and snap-fitted with one of the first constituent plates.

10. The film loading box according to claim 4 or 5, characterized in that: The first component also includes: The supporting member is located on the upper side of the bottom plate, and is configured to support the sheet material when the sheet material is placed in the accommodating space, and to fit with the lower surface of the sheet material located at the bottom.

11. The film loading box according to any one of claims 3 to 5, characterized in that: The second component also includes: The pressing member is located at the lower side of the top plate, and is configured to press the sheet material when the sheet material is placed in the accommodating space, and to fit with the upper surface of the sheet material located at the top.

12. A passivation device, characterized in that: include: a main body having a passivation chamber; The wafer loading box according to any one of claims 1 to 11 is configured to be placed in the passivation chamber during a passivation process.

Images