Cold well type particle trap applied to film coating process

Abstract

The utility model relates to the field of semiconductor film coating, in particular to a cold well type particle trap applied to a film coating process, which comprises a cavity, the top of the cavity is connected with an upper cover through a screw, the top of the upper cover is provided with a cooling mechanism, the cooling mechanism comprises a water-cooling buried pipe, the water-cooling buried pipe is embedded in the upper cover, and the water-cooling buried pipe is connected with the upper cover through a screw. One end of the water-cooling buried pipe communicates with a water inlet pipe. The electric heating pipe is arranged and used for heating process gas entering the cavity, particles in the gas are conveniently captured, the water-cooling buried pipe, the water inlet pipe, the quick-insertion type cooling pipe connector and the water outlet pipe are arranged and can communicate with external water supply equipment, cooling water is conveyed into the water-cooling buried pipe, and the bottom of the upper cover is cooled; process gas flows through the interior of the cavity through the gas inlet pipe, and trapped particles are quickly settled and condensed on the surfaces of the upper flow guide fins through high-temperature reaction and temperature difference brought by the cooling mechanism of the upper cover part.

Description

Technical Field

[0001] The utility model relates to the field of semiconductor film coating technology, in particular to a cold well type particle collector applied in the film coating technology. Background Art

[0002] With the rapid development of semiconductor technology, semiconductor thin film technology, as one of the core cornerstones of modern science and technology, has increasingly higher requirements for process accuracy and efficiency. The preparation of semiconductor thin films involves uniformly and accurately depositing extremely thin layers of semiconductor materials on various substrates. These films are usually no more than a few microns thick or even thinner, but they are key components of integrated circuits, optoelectronic devices and various sensors. In the semiconductor coating process, it is crucial to maintain the cleanliness of the production environment, because any tiny particle contamination may have a serious impact on the quality of the film and the performance of the final product.

[0003] In the semiconductor coating process, the vacuum environment works, and the process gas is recycled through the vacuum pump. After the high-purity gas is processed by the coating, the process gas will carry a lot of derived particulate matter. First, the particulate matter will cause irreversible wear on the vacuum pump, and in severe cases, it will cause the vacuum pump to lock and shut down. Second, if the particulate matter cannot be effectively removed, it will be deposited on the substrate, thereby affecting the processing of the finished product. Therefore, we have made improvements to this and proposed a cold well particle collector for use in the coating process. Utility Model Content

[0004] The purpose of the utility model is to address the current problems that particulate matter in process gas cannot be effectively captured, and particulate matter cannot be settled and condensed by temperature control, so that particulate matter cannot be effectively removed and will be deposited on the substrate, thereby affecting the processing of finished products. The utility model is installed at the front end of the pump, and particulate matter in the process gas is effectively captured. The temperature is controlled to settle and condense the particulate matter in the cold well particle collector cavity, so that particulate matter entrained in the process gas is effectively removed, and clean process gas is kept entering the vacuum pump and coating equipment.

[0005] In order to achieve the above-mentioned purpose of the utility model, the utility model provides a cold well type particle collector applied in the coating process to improve the above-mentioned problem.

[0006] The specific application is as follows:

[0007] A cold well type particle collector applied in a coating process comprises a cavity, the top of the cavity is connected to an upper cover by screws, a cooling mechanism is installed on the top of the upper cover, the cooling mechanism comprises a water-cooling buried pipe, the water-cooling buried pipe is embedded in the interior of the upper cover, one end of the water-cooling buried pipe is connected to a water inlet pipe, one end of the water inlet pipe is connected to a quick-plug cold pipe interface, the other end of the water-cooling buried pipe is connected to a water outlet pipe, a heating mechanism is installed on the bottom of the upper cover, the heating mechanism comprises a heating cover, the interior of the heating cover is connected to an electric heating pipe, and the top of the heating cover is connected to the bottom of the upper cover.

[0008] As a preferred technical solution of the present application, the top of the upper cover is connected to an air inlet pipe, the top of the upper cover is connected to a heating tube power socket, and the top of the heating cover passes through the upper cover and is connected to the heating tube power socket.

[0009] As a preferred technical solution of the present application, the top of the heating hood is connected with upper guide fins, the upper guide fins are arranged circumferentially, the bottom of the upper cover is inlaid with a sealing ring, and the bottom of the sealing ring is in contact with the cavity.

[0010] As a preferred technical solution of the present application, a mounting plate is connected to the surface of the electric heating tube, a threaded connecting tube is connected to the bottom of the upper cover, and the mounting plate is connected to the threaded connecting tube by screws.

[0011] As a preferred technical solution of the present application, a temperature sensor is connected to the front side of the top of the upper cover, and a humidity sensor is connected to the rear side of the top of the upper cover. The temperature sensor and the humidity sensor are located at the top of the water-cooled buried pipe.

[0012] As a preferred technical solution of the present application, the bottom of the cavity is connected to a bottom plate, the top of the bottom plate is equipped with a flow diversion and filtering mechanism, the flow diversion and filtering mechanism includes a support sleeve, the top of the support sleeve is penetrated by a support vertical pipe, the top of the support vertical pipe is connected to a particle adsorption horizontal plate, the top of the particle adsorption horizontal plate is connected to an outer shell, and the inside of the outer shell is connected to a particle capture plate.

[0013] As a preferred technical solution of the present application, the surface of the shell is connected to vertical guide fins, the surface of the vertical guide fins is provided with slots, the surface of the vertical guide fins is connected with horizontal guide fins through the slots, and the surface of the horizontal guide fins is provided with guide holes.

[0014] As a preferred technical solution of the present application, a short tube is connected to the bottom of the particle adsorption transverse plate, and a cavity-avoiding guide fin is fixedly connected to the inner wall of the cavity.

[0015] As a preferred technical solution of the present application, the bottom of the base plate is connected to an exhaust pipe, and a guide pipe is installed through the surface of the particle adsorption horizontal plate.

[0016] Compared with the prior art, the utility model has the following beneficial effects:

[0017] In the scheme of this application:

[0018] 1. In order to solve the problem that the prior art cannot effectively capture particulate matter in the gas, cannot make the particulate matter settle and condense by temperature control, so that the particulate matter cannot be effectively removed and will be deposited on the substrate, thereby affecting the processing of the finished product, the present application sets an electric heating pipe to heat the process gas entering the cavity, so as to facilitate the capture of particles in the gas, sets a water-cooled buried pipe, a water inlet pipe, a quick-plug cold pipe interface and a water outlet pipe, which can be connected with an external water supply device, transports cooling water to the inside of the water-cooled buried pipe, and cools the bottom of the upper cover. The process gas flows through the cavity through the air inlet pipe, and after a high-temperature reaction, coupled with the temperature difference brought by the cooling mechanism of the upper cover, the captured particulate matter is quickly settled and condensed on the surface of the upper guide fin;

[0019] 2. By setting up temperature sensors and humidity sensors to detect the temperature and humidity on the surface of the water-cooled buried pipes, temperature monitoring feedback is performed on the cavity heating area and the central area. If the cavity temperature is too high, the water flow of the water cooling system can be increased. If the temperature is too low, the heating power can be increased through the transformer to increase the temperature to avoid the heating mechanism heating the upper cover too high, which affects the sealing effect of the sealing ring between the upper cover and the cavity. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] Figure 1 A schematic diagram of the overall structure of a cold well type particle collector applied to a coating process provided in the present application;

[0021] Figure 2 A schematic diagram of the housing and vertical guide fins of a cold well type particle collector applied to the coating process provided in this application;

[0022] Figure 3 A schematic cross-sectional view of the cold well type particle collector used in the coating process provided in the present application.

[0023] Indicated in the figure:

[0024] 1. Cavity; 2. Upper cover; 3. Inlet pipe; 4. Cooling mechanism; 40. Water-cooled buried pipe; 41. Water inlet pipe; 42. Quick-plug cold pipe interface; 43. Water outlet pipe; 5. Bottom plate; 6. Diversion and filtering mechanism; 60. Support sleeve; 61. Support vertical pipe; 62. Particle adsorption horizontal plate; 63. Shell; 64. Particle capture plate; 65. Vertical guide fin; 66. Slot; 67. Horizontal guide fin; 68. Diversion hole; 69. Short pipe; 610. Guide pipe; 611. Exhaust pipe; 612. Cavity avoidance guide fin; 7. Heating mechanism; 70. Heating cover; 71. Heating pipe power socket; 72. Upper guide fin; 73. Temperature sensor; 74. Humidity sensor; 75. Mounting plate; 76. Threaded connecting pipe; 77. Sealing ring. DETAILED DESCRIPTION

[0025] In order to enable those skilled in the art to better understand the solution of the utility model, the technical solution in the embodiment of the utility model will be clearly and completely described below in conjunction with the drawings in the embodiment of the utility model. Obviously, the described embodiment is only a part of the embodiment of the utility model, not all of the embodiments. Based on the embodiment of the utility model, all other embodiments obtained by ordinary technicians in this field without creative work should fall within the scope of protection of the utility model.

[0026] As described in the background art, it is impossible to effectively capture the particles in the gas, and it is impossible to make the particles settle and condense by controlling the temperature, so that the particles cannot be effectively removed and will be deposited on the substrate, thereby affecting the processing of the finished product.

[0027] In order to solve this technical problem, the utility model provides a cold well type particle collector applied to a film coating process, which is applied to the field of semiconductor film coating process.

[0028] Specifically, please refer to Figure 1 and Figure 3 A cold well particle collector used in a coating process comprises a cavity 1, the top of the cavity 1 is connected to an upper cover 2 by screws, a cooling mechanism 4 is installed on the top of the upper cover 2, the cooling mechanism 4 comprises a water-cooled buried pipe 40, the water-cooled buried pipe 40 is embedded in the interior of the upper cover 2, one end of the water-cooled buried pipe 40 is connected to a water inlet pipe 41, one end of the water inlet pipe 41 is connected to a quick-plug cold pipe interface 42, the other end of the water-cooled buried pipe 40 is connected to a water outlet pipe 43, a heating mechanism 7 is installed at the bottom of the upper cover 2, the heating mechanism 7 comprises a heating cover 70, the interior of the heating cover 70 is connected to an electric heating pipe, and the top of the heating cover 70 is connected to the bottom of the upper cover 2.

[0029] By setting up a heating cover 70, the electric heating tube is isolated and protected to prevent process gas particles from adhering to the surface of the electric heating tube and affecting the heating efficiency. By setting up an electric heating tube, it is used to heat the process gas entering the cavity 1 to facilitate the capture of particles in the gas. By setting up a water-cooled buried pipe 40, a water inlet pipe 41, a quick-plug cold pipe interface 42 and a water outlet pipe 43, it can be connected to an external water supply device to transport cooling water to the inside of the water-cooled buried pipe 40 to cool the bottom of the upper cover 2, thereby preventing the heating mechanism 7 from heating the upper cover 2 too high and affecting the sealing effect of the upper cover 2 and the cavity 1 seal.

[0030] In order to enable those skilled in the art to better understand the solution of the utility model, the technical solution in the embodiments of the utility model will be clearly and completely described below in conjunction with the accompanying drawings.

[0031] It should be noted that, in the absence of conflict, the embodiments of the present invention and the features and technical solutions in the embodiments may be combined with each other.

[0032] It should be noted that similar reference numerals and letters denote similar items in the following drawings, and therefore, once an item is defined in one drawing, further definition and explanation thereof is not required in subsequent drawings.

[0033] Example 1, please refer to Figure 1 , Figure 2 and Figure 3 A cold well particle collector used in a coating process comprises a cavity 1, the top of the cavity 1 is connected to an upper cover 2 by screws, a cooling mechanism 4 is installed on the top of the upper cover 2, the cooling mechanism 4 comprises a water-cooled buried pipe 40, the water-cooled buried pipe 40 is embedded in the interior of the upper cover 2, one end of the water-cooled buried pipe 40 is connected to a water inlet pipe 41, one end of the water inlet pipe 41 is connected to a quick-plug cold pipe interface 42, the other end of the water-cooled buried pipe 40 is connected to a water outlet pipe 43, a heating mechanism 7 is installed at the bottom of the upper cover 2, the heating mechanism 7 comprises a heating cover 70, the interior of the heating cover 70 is connected to an electric heating pipe, and the top of the heating cover 70 is connected to the bottom of the upper cover 2.

[0034] By setting up a heating cover 70, the electric heating tube is isolated and protected to prevent process gas particles from adhering to the surface of the electric heating tube and affecting the heating efficiency. By setting up an electric heating tube, it is used to heat the process gas entering the cavity 1 to facilitate the capture of particles in the gas. A water-cooled buried pipe 40, a water inlet pipe 41, a quick-plug cold pipe interface 42 and a water outlet pipe 43 are provided, which can be connected to an external water supply device to transport cooling water to the inside of the water-cooled buried pipe 40 to cool the bottom of the upper cover 2, so as to prevent the heating mechanism 7 from heating the upper cover 2 too high and affecting the sealing effect of the upper cover 2 and the cavity 1 seal.

[0035] The top of the upper cover 2 is connected to the air inlet pipe 3 , the top of the upper cover 2 is connected to the heating tube power socket 71 , and the top of the heating cover 70 passes through the upper cover 2 and is connected to the heating tube power socket 71 .

[0036] By providing a heating tube power socket 71, it is convenient to connect to an external power source to provide power to the electric heating tube.

[0037] The top of the heating cover 70 is connected with upper guide fins 72 , which are arranged in a circumferential direction. A sealing ring 77 is embedded in the bottom of the upper cover 2 , and the bottom of the sealing ring 77 is in contact with the cavity 1 .

[0038] A sealing ring 77 is provided to seal between the upper cover 2 and the cavity 1, thereby improving the sealing performance there. The process gas flows through the cavity 1 through the air inlet pipe 3, and after a high-temperature reaction, coupled with the temperature difference brought by the cooling mechanism 4 of the upper cover 2, the captured particles are quickly settled and condensed on the surface of the upper guide fin 72. The process gas passes through the upper guide fins 72 at different positions along the path, and the process gas is guided to the surroundings.

[0039] The surface of the electric heating tube is connected with a mounting plate 75, the bottom of the upper cover 2 is connected with a threaded connecting tube 76, and the mounting plate 75 is connected to the threaded connecting tube 76 by screws.

[0040] By providing the threaded connection pipe 76 and the mounting plate 75 , it is convenient to install them by screws, thereby facilitating the fixed installation of the heating cover 70 , thereby improving the stability of the heating cover 70 .

[0041] The front side of the top of the upper cover 2 is connected to a temperature sensor 73 , and the rear side of the top of the upper cover 2 is connected to a humidity sensor 74 . The temperature sensor 73 and the humidity sensor 74 are located on the top of the water-cooling buried pipe 40 .

[0042] By setting up a temperature sensor 73 and a humidity sensor 74, the temperature and humidity on the surface of the water-cooled buried pipe 40 are detected, and temperature monitoring feedback is performed on the heating area and the central area of ​​the cavity 1. If the temperature of the cavity 1 is too high, the water flow of the water cooling system can be increased. If the temperature is too low, the heating power can be increased through the transformer to increase the temperature.

[0043] Example 2 further optimizes a cold well type particle collector applied to a coating process provided in Example 1. Specifically, Figure 2 and Figure 3 As shown, the bottom of the cavity 1 is connected to a bottom plate 5, the top of the bottom plate 5 is installed with a guide and filter mechanism 6, the guide and filter mechanism 6 includes a support sleeve 60, the top of the support sleeve 60 is penetrated by a support vertical pipe 61, the top of the support vertical pipe 61 is connected to a particle adsorption transverse plate 62, the top of the particle adsorption transverse plate 62 is connected to an outer shell 63, and the interior of the outer shell 63 is connected to a particle capture plate 64.

[0044] By setting the support sleeve 60 and the support vertical pipe 61, the particle adsorption transverse plate 62 can be supported, which is convenient for positioning and installing the particle adsorption transverse plate 62. By setting the particle adsorption transverse plate 62 and the particle capture plate 64, particulate matter in the process gas can be captured, and the filtering effect is good.

[0045] The surface of the housing 63 is connected with vertical guide fins 65 , the surface of the vertical guide fins 65 is provided with slots 66 , the surface of the vertical guide fins 65 is plugged with horizontal guide fins 67 through the slots 66 , and the surface of the horizontal guide fins 67 is provided with guide holes 68 .

[0046] By providing the vertical guide fins 65 , the transverse guide fins 67 and the guide holes 68 , the process gas can be guided to facilitate the downward flow of the process gas.

[0047] The bottom of the particle adsorption transverse plate 62 is connected with a short tube 69 , and the inner wall of the cavity 1 is fixedly connected with a cavity avoidance guide fin 612 .

[0048] By providing the short tube 69, the gas is guided to facilitate the upward flow of the process gas, and by providing the cavity avoidance guide fins 612, the gas is guided vertically.

[0049] The bottom of the bottom plate 5 is connected to an exhaust pipe 611 , and a flow guide pipe 610 is installed through the surface of the particle adsorption transverse plate 62 .

[0050] By providing a guide pipe 610, the gas at the top of the inner cavity of the shell 63 is guided downward, and by providing an exhaust pipe 611, it is connected to an external vacuum pump to facilitate the exhaust of the gas into the vacuum pump.

[0051] The use process of the cold well type particle collector applied in the coating process provided by the utility model is as follows: the process gas flows through the cavity 1 through the air inlet pipe 3, and is heated by controlling the operation of the electric heating pipe to heat the process gas. The quick-plug cold pipe interface 42 is connected to the external water supply pipe, and the outlet pipe 43 is connected to the external return pipe. By controlling the operation of the external water supply equipment, cooling water is delivered to the water-cooled buried pipe 40 to cool the gas under the upper cover 2. The temperature sensor 73 and the humidity sensor 74 are used to detect the temperature and humidity on the surface of the water-cooled buried pipe 40, and to monitor and feedback the temperature of the heating area and the central area of ​​the cavity 1. If the temperature of the cavity 1 is too high, the water level can be increased. The water flow of the cooling system, if the temperature is too low, can increase the heating power through the transformer device to raise the temperature. After high-temperature reaction, plus the temperature difference brought by the cooling mechanism 4 of the upper cover 2, the captured particles are quickly settled and condensed on the surface of the upper guide fin 72; the process gas flows to the surroundings through the upper guide fin 72, and then is guided downward through the vertical guide fin 65 and the horizontal guide fin 67, and then is guided upward through the short tube 69, passes through the particle adsorption horizontal plate 62 and the particle capture plate 64 to capture the particles in the gas again, and enters the inner cavity of the guide pipe 610 from the top of the inner cavity of the shell 63. Finally, the process gas enters the vacuum pump in a clean manner through the exhaust pipe 611.

[0052] In the present invention, unless otherwise clearly specified and limited, the terms "installed", "connected", "connected", "fixed" and the like should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral one; it can be a mechanical connection, an electrical connection, or communication with each other; it can be a direct connection, or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements, unless otherwise clearly defined. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0053] Obviously, the embodiments described above are only some embodiments of the utility model, rather than all embodiments. The preferred embodiments of the utility model are given in the accompanying drawings, but they do not limit the patent scope of the utility model. The utility model can be implemented in many different forms. On the contrary, the purpose of providing these embodiments is to make the understanding of the disclosure of the utility model more thorough and comprehensive. Although the utility model is described in detail with reference to the aforementioned embodiments, for those skilled in the art, it is still possible to modify the technical solutions recorded in the aforementioned specific implementation methods, or to replace some of the technical features therein with equivalents. Any equivalent structure made using the contents of the utility model specification and the accompanying drawings, directly or indirectly used in other related technical fields, is also within the scope of patent protection of the utility model.

Claims

1. A cold well type particle collector used in a coating process, characterized in that: The invention comprises a cavity (1), the top of the cavity (1) is connected to an upper cover (2) by screws, the top of the upper cover (2) is equipped with a cooling mechanism (4), the cooling mechanism (4) comprises a water-cooling buried pipe (40), the water-cooling buried pipe (40) is embedded in the interior of the upper cover (2), one end of the water-cooling buried pipe (40) is connected to a water inlet pipe (41), one end of the water inlet pipe (41) is connected to a quick-plug cold pipe interface (42), the other end of the water-cooling buried pipe (40) is connected to a water outlet pipe (43), the bottom of the upper cover (2) is equipped with a heating mechanism (7), the heating mechanism (7) comprises a heating cover (70), the interior of the heating cover (70) is connected to an electric heating pipe, and the top of the heating cover (70) is connected to the bottom of the upper cover (2).

2. A cold well type particle collector used in a coating process according to claim 1, characterized in that: The top of the upper cover (2) is connected to an air inlet pipe (3), the top of the upper cover (2) is connected to a heating tube power socket (71), and the top of the heating cover (70) passes through the upper cover (2) and is connected to the heating tube power socket (71).

3. The cold well type particle collector used in the coating process according to claim 2, characterized in that: The top of the heating cover (70) is connected to an upper guide fin (72), and the upper guide fins (72) are arranged in a circumferential direction. The bottom of the upper cover (2) is inlaid with a sealing ring (77), and the bottom of the sealing ring (77) is in contact with the cavity (1).

4. The cold well type particle collector used in the coating process according to claim 3, characterized in that: The surface of the electric heating tube is connected with a mounting plate (75), the bottom of the upper cover (2) is connected with a threaded connecting tube (76), and the mounting plate (75) is connected to the threaded connecting tube (76) by means of screws.

5. The cold well type particle collector used in the coating process according to claim 4, characterized in that: The front side of the top of the upper cover (2) is connected to a temperature sensor (73), and the rear side of the top of the upper cover (2) is connected to a humidity sensor (74). The temperature sensor (73) and the humidity sensor (74) are located at the top of the water-cooled buried pipe (40).

6. The cold well type particle collector used in the coating process according to claim 5, characterized in that: The bottom of the cavity (1) is connected to a bottom plate (5), the top of the bottom plate (5) is provided with a flow guiding and filtering mechanism (6), the flow guiding and filtering mechanism (6) comprises a support sleeve (60), the top of the support sleeve (60) is connected with a support vertical pipe (61), the top of the support vertical pipe (61) is connected with a particle adsorption transverse plate (62), the top of the particle adsorption transverse plate (62) is connected with an outer shell (63), and the inside of the outer shell (63) is connected with a particle capturing plate (64).

7. The cold well type particle collector used in the coating process according to claim 6, characterized in that: The surface of the shell (63) is connected to a vertical guide fin (65), the surface of the vertical guide fin (65) is provided with a slot (66), the surface of the vertical guide fin (65) is plugged with a horizontal guide fin (67) through the slot (66), and the surface of the horizontal guide fin (67) is provided with a guide hole (68).

8. The cold well type particle collector used in the coating process according to claim 7, characterized in that: The bottom of the particle adsorption transverse plate (62) is connected to a short tube (69), and the inner wall of the cavity (1) is fixedly connected to a cavity avoidance guide fin (612).

9. The cold well type particle collector used in the coating process according to claim 8, characterized in that: The bottom of the bottom plate (5) is connected to an exhaust pipe (611), and a flow guide pipe (610) is installed through the surface of the particle adsorption transverse plate (62).

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