Small-caliber free-form surface optical machining center

By designing an integrated small-diameter free-surface optical machining center, the problems of process dispersion and poor processing stability in existing equipment are solved, and an efficient and accurate processing process is achieved, which significantly improves production efficiency.

CN222767999UActive Publication Date: 2025-04-18CHANGCHUN CHANGGUANG DAQI TECH CO LTD
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Patent Information

Application Number
CN202421629210.2
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2024-07-10
Publication Date
2025-04-18
Estimated Expiration
2034-07-10

AI Technical Summary

Technical Problem

The existing small-diameter free-curved optical processing equipment has problems such as dispersed process, difficult to ensure processing accuracy, high operational complexity, serious resource waste and poor processing stability.

Method used

A small-diameter free curved surface optical machining center is designed, integrating a workpiece table, calibration mechanism, fast throwing mechanism, fine throwing mechanism and testing mechanism. All mechanisms are set on the body and can move, realizing the position calibration, processing and inspection of the workpiece, shortening the process route, and reducing the number of equipment and process equipment.

Benefits of technology

It significantly improves production efficiency, reduces manual operation, avoids damage to workpieces during clamping and transportation, and improves processing accuracy and stability.

✦ Generated by Eureka AI based on patent content.

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Abstract

The utility model relates to the field of optical element machining equipment, in particular to a small-caliber free-form surface optical machining center which comprises a machine body, a workpiece table arranged on the machine body, a calibration mechanism, a fast polishing mechanism, a fine polishing mechanism and a detection mechanism. A first movement mechanism and a second movement mechanism are arranged at the bottom of the machine body and drive the workpiece table to move in the x direction and the y direction. A third movement mechanism is arranged on the machine body back plate and used for driving the calibration mechanism to move in the x direction; a fourth movement mechanism and a fifth movement mechanism are arranged on the two sides of the machine body correspondingly and drive the fast polishing mechanism and the fine polishing mechanism to move in the z direction correspondingly. The detection mechanism is arranged above the machine body and is used for detecting the processed workpiece; the workpiece table comprises a rotary carrying mechanism, and the rotary carrying mechanism is used for driving a workpiece to be machined to rotate. Workpieces do not need to be frequently carried, clamped and positioned, the machining route is effectively simplified, and the machining precision and stability are improved.
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Description

Technical Field

[0001] The utility model belongs to the field of optical element processing equipment, in particular to a small-caliber free-form surface optical processing center. Background Art

[0002] Free-form optical elements have the advantages of small aberration and clear imaging, and can achieve the effect of replacing a group of spherical optical elements with one or two optical elements. Therefore, small-aperture free-form optical elements are being used more and more widely in high-end instruments and equipment. However, compared with traditional spherical optical elements, free-form elements are difficult to process, have poor precision and low efficiency, and the high cost limits their further promotion and application. The existing small-aperture free-form optical processing equipment still has some problems. The process is scattered, and the processing of parts is dispersed into many processes. Each process has little processing content, the process route is very long, the number of equipment and process equipment required is large, there are many operators, and the floor space is large, resulting in low production efficiency, difficult to ensure processing accuracy, high operation complexity, serious waste of resources and poor processing stability. Therefore, a new small-aperture free-form optical processing equipment is needed to solve the above problems. Utility Model Content

[0003] In order to achieve the above object, the technical solution of the utility model is implemented as follows:

[0004] The utility model provides a small-aperture free-form surface optical processing center, comprising a machine body, a workpiece table arranged on the machine body, a calibration mechanism, a fast polishing mechanism, a fine polishing mechanism and a detection mechanism; a first motion mechanism and a second motion mechanism are arranged at the bottom of the machine body, driving the workpiece table to move along the x direction and the y direction; a third motion mechanism is arranged on the back plate of the machine body, used for driving the calibration mechanism to move along the x direction; a fourth motion mechanism and a fifth motion mechanism are arranged on both sides of the machine body, respectively, driving the fast polishing mechanism and the fine polishing mechanism to move along the z direction; the detection mechanism is arranged above the machine body, used for detecting the processed workpiece; wherein the workpiece table comprises a rotating carrier mechanism, and the rotating carrier mechanism is used for driving the workpiece to be processed to rotate.

[0005] Preferably, the workpiece table includes a moving frame, and the rotating carrier mechanism is arranged on the moving frame. The rotating carrier mechanism includes a workpiece table motor, a reducer, a coupling, a center shaft and a carrier table which are connected in sequence from bottom to top, and the center shaft is connected to an externally arranged bearing seat through a rolling bearing, and the bearing seat is connected to the moving frame. The workpiece table motor and the reducer drive the center shaft to rotate through the coupling, and the center shaft drives the workpiece to be processed on the carrier table to rotate.

[0006] Preferably, the first motion mechanism includes a first motor, a first lead screw connected to the first motor, a first nut cooperating with the first lead screw, a first X-axis guide rail arranged in parallel on both sides of the first lead screw, and a support plate, a first slider is arranged on the first X-axis guide rail, the first nut and the first slider are both connected to the support plate, the second motion mechanism is arranged on the support plate, and the workpiece table is arranged on the second motion mechanism, the first motor drives the first lead screw to rotate, and the first nut drives the support plate to move linearly along the first X-axis guide rail; the second motion mechanism includes a second motor, a second lead screw connected to the second motor, a second nut cooperating with the second lead screw, and a first Y-axis guide rail arranged in parallel on both sides of the second lead screw, a second slider is arranged on the first Y-axis guide rail, the second nut and the second slider are both connected to the moving frame, the second motor drives the second lead screw to rotate, and the second nut drives the workpiece table to move linearly along the first Y-axis guide rail.

[0007] Preferably, the calibration mechanism includes a moving plate, a first probe and a second probe perpendicular to each other, the first probe is fixed on the moving plate and perpendicular to the moving plate, and the second probe is fixed on the moving plate through a connecting rod and parallel to the moving plate.

[0008] Preferably, the third motion mechanism includes a third motor, a third lead screw connected to the third motor, a third nut cooperating with the third lead screw, and a second X-axis guide rail arranged in parallel on both sides of the third lead screw. A third slider is arranged on the second X-axis guide rail, and the third nut and the third slider are both connected to the movable plate. The third motor drives the third lead screw to rotate, and the third nut drives the calibration mechanism to move linearly along the second X-axis guide rail.

[0009] Preferably, the quick-throw mechanism comprises a quick-throw tool head and a quick-throw motor, and the quick-throw tool head is driven by the quick-throw motor.

[0010] Preferably, the fourth motion mechanism includes a fourth motor, a fourth lead screw connected to the fourth motor, a fourth nut cooperating with the fourth lead screw, and a first Z-axis guide rail arranged in parallel on both sides of the fourth lead screw, a fourth slider is arranged on the first Z-axis guide rail, the fourth nut and the fourth slider are both connected to the quick-throw mechanism, the fourth motor drives the fourth lead screw to rotate, and the fourth nut drives the quick-throw mechanism to move linearly along the first Z-axis guide rail.

[0011] Preferably, the fine polishing mechanism comprises a magnetorheological polishing wheel, a magnetorheological circulation system and a fine polishing motor, and the magnetorheological polishing wheel is driven by the fine polishing motor.

[0012] Preferably, the fifth motion mechanism includes a fifth motor, a fifth lead screw connected to the fifth motor, a fifth nut cooperating with the fifth lead screw, and a second Z-axis guide rail arranged in parallel on both sides of the fifth lead screw, a fifth slider is arranged on the second Z-axis guide rail, the fifth nut and the fifth slider are both connected to the precision polishing mechanism, the fifth motor drives the fifth lead screw to rotate, and the fifth nut drives the precision polishing mechanism to move linearly along the second Z-axis guide rail.

[0013] Preferably, the detection mechanism includes a mounting frame fixed on the top of the fuselage, on which an interferometer, a first phase shifter, a reflector and a second phase shifter are sequentially arranged, the light emitted by the interferometer is adjusted by the first phase shifter and reaches the surface of the reflector, and the reflected light is adjusted by the second phase shifter and reaches the surface of the processed workpiece for optical detection.

[0014] Compared with the prior art, the utility model can achieve the following beneficial effects:

[0015] The utility model discloses a small-aperture free-form surface optical processing center, in which a workpiece table, a calibration mechanism, a quick polishing mechanism, a fine polishing mechanism and a detection machine are all arranged on a machine body and can move on the machine body, so as to realize position calibration, processing and detection of the workpiece to be processed, shorten the processing route, do not need to frequently transport the workpiece to different processing mechanisms, and require a small number of equipment and process equipment. Each processing procedure is uniformly controlled by a control system, which saves manpower, can significantly improve production efficiency, and also avoids damage to the workpiece to be processed during repeated clamping and transportation. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] The accompanying drawings constituting a part of the present invention are used to provide a further understanding of the present invention. The illustrative embodiments of the present invention and their descriptions are used to explain the present invention and do not constitute an improper limitation on the present invention. In the accompanying drawings:

[0017] Figure 1 It is a schematic diagram of the small-aperture free-form surface optical processing center of the utility model;

[0018] Figure 2 For this utility model Figure 1 Sectional view of the center workpiece table in the AA direction;

[0019] Figure 3 It is a schematic diagram of the first motion mechanism and the second motion mechanism at the bottom of the fuselage of the utility model;

[0020] Figure 4 It is a schematic diagram of the third motion mechanism and the calibration mechanism of the utility model;

[0021] Figure 5It is a schematic diagram of the fourth motion mechanism and the quick-throwing mechanism of the utility model;

[0022] Figure 6 It is a schematic diagram of the fifth motion mechanism and the fine polishing mechanism of the utility model;

[0023] Figure 7 It is a schematic diagram of the detection mechanism of the utility model.

[0024] Description of reference numerals:

[0025] 1. Body; 2. Workpiece table; 21. Moving frame; 22. Fixed frame; 23. Workpiece table motor; 24. Reducer; 25. Coupling; 26. Center axis; 27. Workpiece stage; 28. Bearing seat; 281. Rolling bearing; 29. ​​Workpiece; 3. Calibration mechanism; 31. Moving plate; 32. First probe; 321. Second quick-change assembly; 33. Second probe; 331. Third quick-change assembly; 34. Connecting rod; 4. Quick-polishing mechanism; 41. Quick-polishing tool head; 42. Quick-polishing motor; 5. Fine-polishing mechanism; 51. Magnetorheological polishing wheel; 52. Magnetorheological circulation system; 53. Fine-polishing motor; 6. Detection mechanism; 61. Mounting frame; 62. Interferometer; 63. First phase shifter; 64. A reflecting mirror; 65, a second phase shifter; 7, a first motion mechanism; 71, a first motor; 72, a first lead screw; 73, a first X-axis guide rail; 74, a support plate; 81, a second motor; 82, a second lead screw; 83, a second nut; 84, a first Y-axis guide rail; 85, a second slider; 9, a third motion mechanism; 91, a third motor; 92, a third lead screw; 93, a second X-axis guide rail; 94, a third slider; 10, a fourth motion mechanism; 101, a fourth motor; 102, a fourth lead screw; 103, a first Z-axis guide rail; 104, a fourth slider; 11, a fifth motion mechanism; 111, a fifth motor; 112, a fifth lead screw; 113, a second Z-axis guide rail; 114, a fifth slider. DETAILED DESCRIPTION

[0026] In order to make the purpose, technical solution and advantages of the utility model more clear, the utility model is further described in detail below in conjunction with the accompanying drawings and specific embodiments. It should be understood that the specific embodiments described here are only used to explain the utility model and do not constitute a limitation of the utility model.

[0027] In the description of the present utility model, it should be understood that the terms "center", "longitudinal", "lateral", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside" and the like indicate positions or positional relationships based on the positions or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present utility model and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present utility model. In addition, the terms "first", "second", etc. are only used for descriptive purposes, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Therefore, features defined as "first", "second", etc. may explicitly or implicitly include one or more of the features. In the description of the present utility model, unless otherwise specified, "multiple" means two or more.

[0028] In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "installation", "connection" and "connection" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be an indirect connection through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood by specific circumstances.

[0029] The present invention will be described in detail below with reference to the accompanying drawings and in combination with embodiments.

[0030] The utility model provides a small-caliber free-form surface optical processing center, such as Figure 1-Figure 3 As shown, it includes a machine body 1, a workpiece table 2 arranged on the machine body 1, a calibration mechanism 3, a fast polishing mechanism 4, a fine polishing mechanism 5 and a detection mechanism 6; Figure 1, in the horizontal direction, the transverse direction is the x direction, the longitudinal direction is the y direction, and the vertical direction is the z direction. A first motion mechanism 7 and a second motion mechanism are provided at the bottom of the fuselage 1. The first motion mechanism 7 includes a first X-axis guide rail 73, and the first X-axis guide rail 73 extends along the x direction; the second motion mechanism includes a first Y-axis guide rail 84, and the first Y-axis guide rail 84 extends along the y direction. The first motion mechanism 7 is used to drive the workpiece stage 2 to move along the x direction, and the second motion mechanism is used to drive the workpiece stage 2 to move along the y direction; a third motion mechanism 9 is provided on the back plate of the fuselage 1 to drive the calibration mechanism 3 to move along the x direction; a fourth motion mechanism 10 and a fifth motion mechanism are provided on both sides of the fuselage 1, respectively. 11, the fourth motion mechanism 10 includes a first Z-axis guide rail 103, the first Z-axis guide rail 103 extends along the z direction, and the fourth motion mechanism 10 is used to drive the quick polishing mechanism 4 to move along the z direction. The fifth motion mechanism 11 includes a second Z-axis guide rail 113, the second Z-axis guide rail 113 extends along the z direction, and the fifth motion mechanism 11 is used to drive the fine polishing mechanism 5 to move along the z direction; the detection mechanism 6 is arranged above the fuselage 1, and is used to detect the processed workpiece 29; wherein, the workpiece table 2 includes a rotating carrier mechanism, and the rotating carrier mechanism is used to drive the workpiece 29 to be processed to rotate.

[0031] According to the small-caliber free-form surface optical processing center provided by the utility model, the workpiece table 2, the calibration mechanism 3, the quick polishing mechanism 4, the fine polishing mechanism 5 and the detection mechanism 6 are all arranged on the fuselage 1 and can move on the fuselage 1, so that the position calibration, processing and detection of the workpiece 29 to be processed can be realized, the processing route can be shortened, and the workpiece 29 does not need to be frequently transported to various different processing mechanisms. The number of required equipment and process equipment is small, and each processing procedure is uniformly controlled by the control system, which saves labor, can significantly improve production efficiency, and also avoids damage to the workpiece 29 to be processed during repeated clamping and transportation. The workpiece table 2 can not only fix and move the workpiece 29, but also drive the workpiece 29 to rotate. The processing routes of the quick polishing mechanism 4 and the fine polishing mechanism 5 are simple, ensuring the accuracy and stability of the processing.

[0032] In some embodiments, Figure 2As shown, the workpiece stage 2 includes a moving frame 21, and a rotating carrier mechanism is arranged on the upper part of the moving frame 21. The rotating carrier mechanism includes a workpiece stage motor 23, a reducer 24, a coupling 25, a central shaft 26 and a stage 27 connected in sequence from bottom to top. The central shaft 26 is connected to an externally arranged bearing seat 28 through a rolling bearing 281, and the bearing seat 28 is connected to the upper part of the moving frame 21. In other embodiments, a fixed frame 22 is arranged on the upper part of the moving frame 21, and the rotating carrier mechanism is arranged on the fixed frame 22, and the bearing seat 28 is connected to the upper part of the fixed frame 22. When the workpiece stage 2 is working, the workpiece stage motor 23 rotates, and the reducer 24 reduces the speed according to the reduction ratio, amplifies the torque, and drives the central shaft 26 to rotate through the coupling 25. The central shaft 26 drives the stage 27 and the workpiece 29 to be processed thereon to rotate.

[0033] Furthermore, a first quick-change assembly (not shown in the figure) is also provided on the stage 27 for fixing workpieces 29 of different sizes, eliminating the need for repeated positioning and satisfying the processing of workpieces 29 of different calibers.

[0034] In some embodiments, Figure 3 As shown, the first motion mechanism 7 also includes a first motor 71, a first lead screw 72 connected to the first motor 71, a first nut cooperating with the first lead screw 72, and a support plate 74. The first X-axis guide rail 73 is arranged in parallel on both sides of the first lead screw 72. A first slider is arranged on the first X-axis guide rail 73, and the first nut is connected to the support plate 74. A second motion mechanism is arranged on the support plate 74, and the workpiece table 2 is arranged on the second motion mechanism. The first motor 71 drives the first lead screw 72 to rotate, and the first nut arranged on the first lead screw 72 converts the rotational motion into linear motion. Further, the first slider is also connected to the support plate 74, and the first slider and the first nut are in the same plane. The first slider slides on the first X-axis guide rail 73. Through the guiding action of the first slider and the first X-axis guide rail 73, the first nut drives the support plate 74 and the second motion mechanism on the support plate 74 and the workpiece table 2 to move linearly along the first X-axis guide rail 73.

[0035] The second motion mechanism also includes a second motor 81, a second lead screw 82 connected to the second motor 81, a second nut 83 matched with the second lead screw 82, a first X-axis guide rail 84 is arranged in parallel on both sides of the second lead screw 82, a second slider 85 is arranged on the first Y-axis guide rail 84, the second nut 83 and the second slider 85 are both connected to the moving frame 21, the second motor 81 drives the second lead screw 82 to rotate, and the second nut 83 arranged on the second lead screw 82 converts the rotational motion into a linear motion. Under the guidance of the slider and the first Y-axis guide rail 84, the second nut 83 drives the workpiece table 2 to move linearly along the first Y-axis guide rail 84. Under the joint action of the first motion mechanism 7 and the second motion mechanism, the motion of the workpiece table 2 along the x-direction and the y-direction can be realized.

[0036] The workpiece table 2 moves along the x-direction and the y-direction, and can drive the workpiece 29 to move into the working range of the calibration mechanism 3, the quick polishing mechanism 4 and the fine polishing mechanism 5. It is only necessary to position the workpiece 29 on the stage 27 at the beginning. During the processing and inspection process, there is no need to clamp the workpiece 29 multiple times, nor is there any need to recalibrate the position coordinates of the workpiece 29, which improves the processing efficiency and reduces the risks caused by frequent movement of the workpiece 29.

[0037] In other embodiments, a vacuum adsorption device for fixing the workpiece 29 is disposed on the stage 27 to achieve vacuum adsorption clamping of the workpiece 29 .

[0038] In some embodiments, Figure 4 As shown, the calibration mechanism 3 includes a moving plate 31, a first probe 32 and a second probe 33 which are perpendicular to each other, and a third motion mechanism 9 includes a third motor 91, a third lead screw 92 connected to the third motor 91, a third screw nut matched with the third lead screw 92, and a second X-axis guide rail 93 arranged in parallel on both sides of the third lead screw 92. A third slider 94 is arranged on the second X-axis guide rail 93, and the third screw nut and the third slider 94 are both connected to the moving plate 31. The third motor 91 drives the third lead screw 92 to rotate, and the third screw nut arranged on the third lead screw 92 converts the rotational motion into a linear motion. Under the guidance of the third slider 94 and the second X-axis guide rail 93, the third screw nut drives the calibration mechanism 3 to move linearly along the second X-axis guide rail 93. The first probe 32 is fixed on the moving plate 31 and is perpendicular to the moving plate 31, and the second probe 33 is fixed on the moving plate 31 through a connecting rod 34, and the second probe 33 is parallel to the moving plate 31 and perpendicular to the second X-axis guide rail 93.

[0039] Initially, the control system establishes the relative position coordinates of the calibration mechanism 3 and the quick-polishing mechanism 4 and the fine-polishing mechanism 5 respectively. After the workpiece 29 is fixed on the workpiece table 2, the workpiece table 2 drives the workpiece 29 to move to the vicinity of the calibration mechanism 3. The calibration mechanism 3 can perform contact measurement on the workpiece 29. The position coordinates of the workpiece 29 in the z direction can be measured by the first probe 32, and the position coordinates of the workpiece 29 in the x direction and the y direction can be measured by the second probe 33. Thus, the control system can obtain the position coordinates of the workpiece 29 relative to the quick-polishing mechanism 4 and the fine-polishing mechanism 5, respectively, to facilitate subsequent precision machining.

[0040] Furthermore, a second quick-change assembly 321 is provided at the connection between the first probe 32 and the movable plate 31, and a third quick-change assembly 331 is provided at the connection between the second probe 33 and the connecting rod 34. At the same time, multiple sets of connecting rods 34 of different lengths can be equipped. When processing workpieces 29 of other calibers and heights, it is convenient to replace first probes 32 and second probes 33 of other specifications. The resetting accuracy is high, and there is no need for repeated position calibration, thus saving time for repeated calibration.

[0041] In some embodiments, Figure 5 As shown, the fourth motion mechanism 10 also includes a fourth motor 101, a fourth lead screw 102 connected to the fourth motor 101, and a fourth nut matched with the fourth lead screw 101. The first Z-axis guide rail 103 is arranged in parallel on both sides of the fourth lead screw 102. A fourth slider 104 is arranged on the first Z-axis guide rail 103. The fourth nut and the fourth slider 104 are both connected to the quick-throw mechanism 4. The fourth motor 101 drives the fourth lead screw 102 to rotate. The fourth nut arranged on the fourth lead screw 102 converts the rotational motion into a linear motion. Under the guidance of the fourth slider 104 and the first Z-axis guide rail 103, the fourth nut drives the quick-throw mechanism 4 to move linearly along the first Z-axis guide rail 103, and the height between the workpiece 29 can be adjusted. It should be noted here that since the fourth nut is arranged on the fourth lead screw 102 and connected to the back of the quick-throw mechanism 4, the fourth nut is not shown in the schematic diagram. The quick-casting mechanism 4 includes a quick-casting motor 42 and a quick-casting tool head 41. The quick-casting tool head 41 is driven by the quick-casting motor 42. After the calibration mechanism 3 calibrates the position of the workpiece 29, the control system obtains the relative position coordinates of the workpiece 29 and the quick-casting tool head 41. The control system controls the movement of the workpiece table 2, and the quick-casting motor 42 drives the quick-casting tool head 41 to perform quick-casting processing on the workpiece 29.

[0042] In some embodiments, Figure 6 As shown, the fine polishing mechanism 5 includes a fine polishing motor 53, a magnetorheological polishing wheel 51 and a magnetorheological circulation system 52. The fine polishing motor 53 is used to drive the magnetorheological polishing wheel 51, and the magnetorheological circulation system 52 provides the magnetorheological polishing wheel 51 with recyclable magnetorheological polishing fluid. The fifth motion mechanism 11 also includes a fifth motor 111, a fifth lead screw 112 connected to the fifth motor 111, and a fifth nut cooperating with the fifth lead screw 112. The second Z-axis guide rail 113 is arranged in parallel on both sides of the fifth lead screw 112. A fifth slider 114 is arranged on the second Z-axis guide rail 113. The fifth nut and the fifth slider 114 are both connected to the fine polishing mechanism 5. The fifth motor 111 drives the fifth lead screw 112 to rotate, and the fifth nut on the fifth lead screw 112 converts the rotational motion into linear motion. Under the guidance of the fifth slider 114 and the second Z-axis guide rail 113, the fifth nut drives the fine polishing mechanism 5 to move linearly along the second Z-axis guide rail 113, and the height between the workpiece 29 can be adjusted. The position of the workpiece 29 in the x direction and the y direction is adjusted by the workpiece table 2, and the workpiece 29 is fine-polished using the magnetorheological polishing wheel 51.

[0043] In some embodiments, Figure 7As shown, the detection mechanism 6 includes a mounting frame 61 fixed on the top of the fuselage 1, and an interferometer 62, a first phase shifter 63, a reflector 64, and a second phase shifter 65 are arranged on the mounting frame 61 in sequence. When the workpiece 29 is processed, the workpiece stage 2 moves the workpiece 29 to the right below the second phase shifter 65, and the light emitted by the interferometer 62 is adjusted by the first phase shifter 63 and reaches the surface of the reflector 64. The reflected light is adjusted by the second phase shifter 65 and reaches the surface of the processed workpiece 29. The detection optical path is focused and the aberration is eliminated by the first phase shifter 63 and the second phase shifter 65. The interferometer 62 is used to perform optical detection on the workpiece 29, and the detection content includes but is not limited to geometric dimensions, low-frequency surface shape accuracy, high-frequency surface shape accuracy, and aberration characteristics. The workpiece 29 that fails the detection is re-polished and then optically detected, until the detection is qualified and the processing is completed.

[0044] In a specific implementation, a column is respectively provided at the four corners of the bottom of the fuselage 1 .

[0045] The above specific implementations do not constitute a limitation on the protection scope of the present utility model. It should be understood by those skilled in the art that various modifications, combinations, sub-combinations and substitutions can be made according to design requirements and other factors. Any modification, equivalent substitution and improvement made within the spirit and principle of the present utility model shall be included in the protection scope of the present utility model.

Claims

1. A small-caliber free-form surface optical processing center, characterized by: It comprises a fuselage, a workpiece table arranged on the fuselage, a calibration mechanism, a quick polishing mechanism, a fine polishing mechanism and a detection mechanism; a first motion mechanism and a second motion mechanism are arranged at the bottom of the fuselage to drive the workpiece table to move along the x direction and the y direction; a third motion mechanism is arranged on the back plate of the fuselage to drive the calibration mechanism to move along the x direction; a fourth motion mechanism and a fifth motion mechanism are arranged on both sides of the fuselage to drive the quick polishing mechanism and the fine polishing mechanism to move along the z direction respectively; the detection mechanism is arranged above the fuselage to detect the processed workpiece; wherein the workpiece table comprises a rotating carrier mechanism, and the rotating carrier mechanism is used to drive the workpiece to be processed to rotate.

2. The small-aperture free-form surface optical processing center according to claim 1, characterized in that: The workpiece table includes a moving frame, and the rotating carrier mechanism is arranged on the moving frame. The rotating carrier mechanism includes a workpiece table motor, a reducer, a coupling, a center shaft and a carrier table which are connected in sequence from bottom to top. The center shaft is connected to an externally arranged bearing seat through a rolling bearing, and the bearing seat is connected to the moving frame. The workpiece table motor and the reducer drive the center shaft to rotate through the coupling, and the center shaft drives the workpiece to be processed on the carrier table to rotate.

3. The small-aperture free-form surface optical processing center according to claim 1, characterized in that: The first motion mechanism includes a first motor, a first lead screw connected to the first motor, a first nut cooperating with the first lead screw, a first X-axis guide rail arranged in parallel on both sides of the first lead screw, and a support plate, a first slider is arranged on the first X-axis guide rail, the first nut and the first slider are both connected to the support plate, the second motion mechanism is arranged on the support plate, and the workpiece table is arranged on the second motion mechanism, the first motor drives the first lead screw to rotate, and the first nut drives the support plate to move linearly along the first X-axis guide rail; the second motion mechanism includes a second motor, a second lead screw connected to the second motor, a second nut cooperating with the second lead screw, and a first Y-axis guide rail arranged in parallel on both sides of the second lead screw, a second slider is arranged on the first Y-axis guide rail, the second nut and the second slider are both connected to the workpiece table, the second motor drives the second lead screw to rotate, and the second nut drives the workpiece table to move linearly along the first Y-axis guide rail.

4. The small-aperture free-form surface optical processing center according to claim 1, characterized in that: The third motion mechanism includes a third motor, a third lead screw connected to the third motor, a third nut cooperating with the third lead screw, and a second X-axis guide rail arranged in parallel on both sides of the third lead screw. A third slider is arranged on the second X-axis guide rail. The third nut and the third slider are both connected to the calibration mechanism. The third motor drives the third lead screw to rotate, and the third nut drives the calibration mechanism to move linearly along the second X-axis guide rail.

5. The small-aperture free-form surface optical processing center according to claim 4, characterized in that: The calibration mechanism includes a moving plate, a first probe and a second probe perpendicular to each other, the moving plate is connected to the third slider and the third nut, the first probe is vertically fixed on the moving plate, the second probe is fixed on the moving plate through a connecting rod, the second probe is parallel to the moving plate and perpendicular to the second X-axis guide rail.

6. The small-aperture free-form surface optical processing center according to claim 1, characterized in that: The quick-throw mechanism comprises a quick-throw tool head and a quick-throw motor, and the quick-throw tool head is driven by the quick-throw motor.

7. The small-aperture free-form surface optical processing center according to claim 1, characterized in that: The fourth motion mechanism includes a fourth motor, a fourth lead screw connected to the fourth motor, a fourth nut cooperating with the fourth lead screw, and a first Z-axis guide rail arranged in parallel on both sides of the fourth lead screw. A fourth slider is arranged on the first Z-axis guide rail, and the fourth nut and the fourth slider are both connected to the quick-throw mechanism. The fourth motor drives the fourth lead screw to rotate, and the fourth nut drives the quick-throw mechanism to move linearly along the first Z-axis guide rail.

8. The small-aperture free-form surface optical processing center according to claim 1, characterized in that: The fine polishing mechanism comprises a magnetorheological polishing wheel, a magnetorheological circulation system and a fine polishing motor, and the magnetorheological polishing wheel is driven by the fine polishing motor.

9. The small-aperture free-form surface optical processing center according to claim 1, characterized in that: The fifth motion mechanism includes a fifth motor, a fifth lead screw connected to the fifth motor, a fifth nut cooperating with the fifth lead screw, and a second Z-axis guide rail arranged in parallel on both sides of the fifth lead screw. A fifth slider is arranged on the second Z-axis guide rail. The fifth nut and the fifth slider are both connected to the fine polishing mechanism. The fifth motor drives the fifth lead screw to rotate, and the fifth nut drives the fine polishing mechanism to move linearly along the second Z-axis guide rail.

10. The small-aperture free-form surface optical processing center according to claim 1, characterized in that: The detection mechanism includes a mounting frame fixed on the top of the fuselage, on which an interferometer, a first phase shifter, a reflector and a second phase shifter are sequentially arranged. The light emitted by the interferometer is adjusted by the first phase shifter and reaches the surface of the reflector, and the reflected light is adjusted by the second phase shifter and reaches the surface of the processed workpiece for optical detection.