Reaction cavity

Abstract

The utility model discloses a reaction chamber which comprises a chamber wall, a heating plate, a drainage part and a tray, the chamber wall comprises an upper wall, a lower wall and a side wall which are mutually connected to form a total chamber, and the drainage part, the tray and the heating plate are arranged in the total chamber and divide the total chamber into an upper chamber and a lower chamber. The upper chamber comprises a drainage section corresponding to the upper range of the drainage part, a reaction section corresponding to the upper range of the tray and a tail section corresponding to the upper range of the heating plate, the drainage section is provided with an inlet, the tail section is provided with an outlet, and the height between the upper end and the lower end of the drainage section is gradually reduced from upstream to downstream. According to the reaction cavity disclosed by the utility model, the drainage section in the range above the drainage part is of a structure of which the height is gradually reduced from the upstream to the downstream, so that reaction gas flows to a certain extent in the vertical direction and the horizontal direction, the reaction gas is diffused more uniformly, the uniformity of a deposited film is favorably improved, and the yield of the deposited film is improved. And the quality of the deposited film is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor equipment, in particular to a reaction chamber. Background Art

[0002] The laminar flow reaction chamber is a common thin film deposition reaction chamber. Chemical vapor deposition, atomic layer deposition and other methods may use this type of reaction chamber. The main structure of the reaction chamber is a generally elongated chamber. The reaction gas usually enters from one end of the chamber, flows horizontally over the substrate in the chamber, reacts with the substrate surface, and deposits a thin film on the substrate, and then discharges the reaction chamber through the other end of the chamber.

[0003] In the prior art, after the reaction gas enters the reaction chamber, the problem of uneven diffusion often occurs, resulting in the film formed by the reaction on the surface of the substrate being uneven and the film quality failing to meet the requirements. Utility Model Content

[0004] In view of this, the utility model aims to provide a reaction chamber to solve the technical problems of poor uniformity and low quality of thin films deposited in the reaction chamber in the prior art.

[0005] The utility model provides a reaction chamber, comprising a chamber wall, a heating plate, a drainage portion and a tray, wherein the chamber wall comprises an upper wall, a lower wall and a side wall which are connected to each other to form a total chamber, the drainage portion, the tray and the heating plate are arranged in the total chamber, and the total chamber is divided into an upper chamber and a lower chamber, the upper chamber comprises a drainage section corresponding to a range above the drainage portion, a reaction section corresponding to a range above the tray, and a tail section corresponding to a range above the heating plate, the drainage section is provided with an inlet, the tail section is provided with an outlet, and the height between the upper end and the lower end of the drainage section gradually decreases from upstream to downstream.

[0006] Furthermore, a panel is provided on the cavity wall, the drainage section is located between the lower surface of the panel and the upper surface of the drainage portion, and the panel is extended downwardly at an angle from upstream to downstream.

[0007] Further, the panel includes a first plate segment and a second plate segment, the upstream end of the first plate segment is arranged at the inlet, the downstream end of the first plate segment extends obliquely downward and is connected to the upstream end of the second plate segment, the upstream end of the second plate segment is arranged upstream of the tray, and the downstream end of the second plate segment extends horizontally to downstream of the tray.

[0008] Furthermore, the first plate section includes a first inclined surface section, and a plurality of the first inclined surface sections are connected to each other. Among every two adjacent first inclined surface sections, the angle between the first inclined surface section close to the upstream and the horizontal direction is greater than the angle between the first inclined surface section close to the downstream and the horizontal direction.

[0009] Furthermore, the panel is detachably mounted on the cavity wall; a support portion is provided on the side wall, and the panel is pressed onto an upper surface of the support portion.

[0010] Furthermore, the support portion is in a quarter-spherical structure, the panel is pressed onto one of the semicircular surfaces on the outer surface of the support portion, and the other semicircular surface on the outer surface of the support portion is fitted and connected to the side wall.

[0011] Furthermore, the upper surface of the drainage portion is arranged to extend upwardly and obliquely from the upstream to the downstream.

[0012] Furthermore, a second slope section is provided on the upper surface of the drainage portion, and a plurality of the second slope sections are connected to each other. Among every two adjacent second slope sections, the angle between the second slope section close to the upstream and the horizontal direction is greater than the angle between the second slope section close to the downstream and the horizontal direction.

[0013] Furthermore, the lower surface of the upper wall in the upper range of the drainage portion is arranged to extend downwardly at an inclination from upstream to downstream.

[0014] Furthermore, a third inclined surface section is provided on the lower surface of the upper wall within the range above the drainage portion, and multiple third inclined surface sections are connected to each other. Among every two adjacent third inclined surface sections, the angle between the third inclined surface section close to the upstream and the horizontal direction is greater than the angle between the third inclined surface section close to the downstream and the horizontal direction.

[0015] Furthermore, it also includes a heating ring, the tray is arranged on the inner side of the heating ring, the upstream end of the outer side of the heating ring is connected to the drainage part, and the downstream end is connected to the heating plate.

[0016] Furthermore, a chamber flange is provided on the outer side of the chamber wall corresponding to the inlet, and an inner hole of the chamber flange is communicated with the inlet.

[0017] The reaction chamber of the utility model arranges the drainage part, the tray and the heating plate in the main chamber of the chamber wall, divides the main chamber into an upper chamber and a lower chamber, and arranges the drainage section above the drainage part in a structure with a height gradually decreasing from upstream to downstream, so that the reaction gas has a certain flow in the vertical direction, the horizontal direction and the longitudinal direction, thereby making the reaction gas diffuse more evenly, which is beneficial to improving the uniformity of the deposited film and thus improving the quality of the deposited film.

[0018] In order to make the above-mentioned objects, features and advantages of the present invention more obvious and easy to understand, preferred embodiments are given below and described in detail with reference to the accompanying drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] In the drawings that are not necessarily drawn to scale, the same reference numerals may describe similar parts in different views. The same reference numerals with letter suffixes or different letter suffixes may represent different instances of similar parts. The drawings generally illustrate various embodiments by way of example and not limitation, and together with the specification and claims, are used to illustrate the disclosed embodiments. When appropriate, the same reference numerals are used throughout the drawings to refer to the same or similar parts. Such embodiments are illustrative and are not intended to be exhaustive or exclusive embodiments of the present apparatus or method. The drawings described herein are used to provide a further understanding of the present invention and constitute a part of this application. The illustrative embodiments of the present invention and their descriptions are used to explain the present invention and do not constitute an improper limitation of the present invention. In the drawings:

[0020] Figure 1 This is one of the cross-sectional schematic diagrams of the reaction chamber provided by the utility model;

[0021] Figure 2 This is the second cross-sectional schematic diagram of the reaction chamber provided by the utility model;

[0022] Figure 3 The third is a cross-sectional schematic diagram of the reaction chamber provided by the utility model;

[0023] Figure 4 This is the fourth cross-sectional schematic diagram of the reaction chamber provided by the utility model;

[0024] Figure 5 This is a fifth cross-sectional schematic diagram of the reaction chamber provided by the utility model;

[0025] Figure 6 This is the sixth cross-sectional schematic diagram of the reaction chamber provided by the utility model;

[0026] Figure 7 It is an enlarged schematic diagram of the support portion provided by the utility model;

[0027] Figure 8 It is a schematic diagram of the gas flow direction at the support part provided by the utility model.

[0028] The above drawings include the following reference numerals:

[0029] 10. Main chamber; 101. Upper chamber; 102. Lower chamber; 01. Drainage section; 011. Inlet; 02. Reaction section; 03. Tail section; 031. Outlet; 1. Chamber wall; 11. Upper wall; 111. Third slope section; 12. Lower wall; 13. Side wall; 14. Support part; 2. Heating plate; 3. Drainage part; 31. Second slope section; 4. Tray; 5. Panel; 51. First plate section; 511. First slope section; 52. Second plate section; 6. Chamber flange; 7. Heating ring. DETAILED DESCRIPTION

[0030] The specific embodiments of the present invention are described in detail below with reference to the accompanying drawings, but are not intended to limit the present invention.

[0031] These and other characteristics of the invention will become apparent from the following description of a preferred form of embodiment given as a non-limiting example, with reference to the accompanying drawings.

[0032] It should also be understood that although the present invention has been described with reference to some specific examples, those skilled in the art will be able to realize many other equivalent forms of the present invention that have the features described in the claims and are therefore within the scope of protection defined thereby.

[0033] It should be noted that the terms "first", "second", etc. in the specification and claims of the utility model and the above-mentioned drawings are used to distinguish similar objects, and are not necessarily used to describe a specific order or sequence. It should be understood that the data used in this way can be interchanged where appropriate, so that the embodiments of the utility model described here can be implemented in an order other than those illustrated or described here. In addition, the terms "including" and "having" and any of their variations are intended to cover non-exclusive inclusions, for example, a process, method, system, product or device that includes a series of steps or units is not necessarily limited to those steps or units clearly listed, but may include other steps or units that are not clearly listed or inherent to these processes, methods, products or devices.

[0034] The embodiment of the utility model provides a reaction chamber, including a chamber wall 1, a heating plate 2, a drainage portion 3 and a tray 4. The chamber wall 1 includes an upper wall 11, a lower wall 12 and a side wall 13 connected to each other to form a total chamber 10. The drainage portion 3, the tray 4 and the heating plate 2 are arranged in the total chamber 10, and the total chamber 10 is divided into an upper chamber 101 and a lower chamber 102. The upper chamber 101 includes a drainage section 01 corresponding to the range above the drainage portion 3, a reaction section 02 corresponding to the range above the tray 4, and a tail section 03 corresponding to the range above the heating plate 2. The drainage section 01 is provided with an inlet 011, and the tail section 03 is provided with an outlet 031. The height between the upper end and the lower end of the drainage section 01 gradually decreases from upstream to downstream.

[0035] Combination Figures 1 to 6 As shown, the chamber wall 1 in each embodiment is formed by connecting the upper wall 11, the lower wall 12 and the side wall 13 to each other, and encloses the total chamber 10. The drainage part 3, the tray 4 and the heating plate 2 are arranged in the total chamber 10, and together form a dividing interface, thereby dividing the total chamber 10 into an upper chamber 101 and a lower chamber 102. The tray 4 is used to carry the substrate. The upper chamber 101 is exemplarily divided by dot-dash lines in the figure to facilitate the distinction between the drainage section 01, the reaction section 02 and the tail section 03, that is, the part of the upper chamber 101 corresponding to the range above the drainage part 3 is the drainage section 01, the part of the upper chamber 101 corresponding to the range above the tray 4 is the reaction section 02, and the part of the upper chamber 101 corresponding to the range above the heating plate 2 is the tail section 03. The drainage section 01 and the tail section 03 are respectively provided with an inlet 011 and an outlet 031. The reaction gas enters the drainage section 01 from the inlet 011, reacts with the substrate surface on the tray 4 when passing through the reaction section 02, and then passes through the tail section 03 and flows out of the reaction chamber from the outlet 031. Among them, the drainage section 01 has an upper end and a lower end in the vertical direction, and the distance between the upper end and the lower end in the vertical direction is the height. According to the positions of the inlet 011 and the outlet 031, it can be seen that the corresponding upstream and downstream relationship of each part structure in the horizontal direction (that is, the one relatively close to the inlet 011 is the upstream, and the one relatively close to the outlet 031 is the downstream), and the height of the drainage section 01 gradually decreases from upstream to downstream. The structure and shape of the upper wall 11, the drainage part 3, and the drainage section 01 can be designed as needed, as long as the height of the drainage section 01 can be gradually reduced from upstream to downstream, and its specific structure and shape are not limited here.

[0036] The reaction chamber in the utility model arranges the drainage part 3, the tray 4 and the heating plate 2 in the main chamber 10 of the chamber wall 1, divides the main chamber 10 into an upper chamber 101 and a lower chamber 102, and arranges the drainage section 01 above the drainage part 3 into a structure with a height gradually decreasing from upstream to downstream, so that the reaction gas has a certain flow in the vertical direction, the horizontal direction and the longitudinal direction, thereby making the reaction gas diffuse more evenly, which is beneficial to improving the uniformity of the deposited film and thus improving the quality of the deposited film.

[0037] Furthermore, a panel 5 is provided on the cavity wall 1, and the drainage section 01 is located between the lower surface of the panel 5 and the upper surface of the drainage portion 3, and the lower surface of the panel 5 is inclined and extends downward from upstream to downstream.

[0038] Combination Figure 1 and Figure 2 As shown, the panel 5 is exemplarily installed on the side wall 13, and the upper chamber 101 between the lower surface of the panel 5 and the upper surface of the drainage portion 3 is the drainage section 01. The lower surface of the panel 5 extends downwardly at an angle from upstream to downstream. The panel 5 can be a slope structure or an inclined arc structure, etc., as long as the height of the drainage section 01 can be gradually reduced from upstream to downstream.

[0039] In this way, the shape of the drainage section 01 is changed by the panel 5, so that the height of the drainage section 01 gradually decreases from upstream to downstream, without changing the design of the upper wall 11 of the reaction chamber and the drainage part 3, which can make the reaction gas mixing more uniform and reduce the overall manufacturing cost of the reaction chamber to a certain extent.

[0040] Furthermore, the panel 5 includes a first panel section 51 and a second panel section 52, wherein the upstream end of the first panel section 51 is arranged at the inlet 011, the downstream end of the first panel section 51 extends obliquely downward and is connected to the upstream end of the second panel section 52, the upstream end of the second panel section 52 is arranged upstream of the tray 4, and the downstream end of the second panel section 52 extends horizontally to the downstream of the tray 4. Figure 1As shown, the upstream end of the first plate segment 51 (i.e., the end close to the inlet 011) is connected to the upper wall surface of the inlet 011, and the downstream end of the first plate segment 51 (i.e., the end close to the outlet 031) extends obliquely downward. For example, the first plate segment 51 is an inclined structure as a whole, and the angle between the first plate segment 51 and the horizontal direction is α (its specific value can be designed as needed, for example, 1° to 20°), the upstream end of the second plate segment 52 (i.e., the end close to the inlet 011) is connected to the downstream end of the first plate segment 51, and the second plate segment 52 extends in the horizontal direction, and its downstream end (i.e., the end close to the outlet 031) extends to the downstream of the tray 4 (i.e., located on the side of the tray 4 close to the outlet 031). It can be understood that the positions of the two ends of the first plate segment 51 and the two ends of the second plate segment 52 can be specifically designed as needed.

[0041] In a preferred embodiment, the downstream end of the second plate segment 52 extends beyond the downstream end of the tray 4. This arrangement can avoid turbulence at the port position of the second plate segment 52, thereby preventing uneven film deposition on the substrate on the upper side of the tray 4.

[0042] In this way, the gas enters the upper chamber 101 from the inlet 011, and is first guided by the first plate segment 51, so that the gas flows in the vertical direction, the horizontal direction and the longitudinal direction (i.e., the direction perpendicular to the paper), thereby making the gas diffuse more evenly; when the gas flows to the top of the tray 4, the horizontally arranged second plate segment 52 can ensure that the gas flows in a horizontal laminar state, so as to improve the quality of the deposited film.

[0043] Furthermore, the first plate segment 51 includes a first slope segment 511, and multiple first slope segments 511 are connected to each other. Among every two adjacent first slope segments 511, the angle between the first slope segment 511 close to the upstream and the horizontal direction is greater than the angle between the first slope segment 511 close to the downstream and the horizontal direction.

[0044] Combination Figure 2 As shown, illustratively, the first plate segment 51 is formed by connecting three first inclined surface segments 511 (the specific number of the first inclined surface segments 511 can be designed as needed), each of the first inclined surface segments 511 is at a certain angle to the horizontal direction, and among two adjacent first inclined surface segments 511, the angle between the first inclined surface segment 511 close to the upstream and the horizontal direction is greater than the angle between the first inclined surface segment 511 close to the downstream and the horizontal direction, for example Figure 2 Among the three first inclined surface sections 511, the first inclined surface section 511 closest to the entrance 011 has an angle β3 with the horizontal direction, the first inclined surface section 511 located in the middle of the three first inclined surface sections 511 has an angle β2 with the horizontal direction, and the first inclined surface section 511 closest to the exit 031 has an angle β1 with the horizontal direction, β3>β2>β1.

[0045] In this way, the first plate segment 51 formed by connecting multiple first inclined surface segments 511 can ensure that after the gas enters the upper chamber 101 from the inlet 011, it is guided more smoothly by the first plate segment 51, so that the gas enters the area below the second plate segment 52 more smoothly, thereby making the laminar gas above the tray 4 more uniform and less prone to turbulence.

[0046] Furthermore, the panel 5 is detachably mounted on the cavity wall 1 .

[0047] For example, the panel 5 is connected to the chamber wall 1 by fasteners (this embodiment is not shown in the figure), so that the panel 5 can be disassembled and replaced when necessary, so as to adjust the inclination angle, size, shape, etc. of the panel 5 to achieve different drainage effects for the reaction gas, thereby ensuring the quality of the deposited film. The panel 5 can be installed on the chamber wall 1 in any detachable installation manner, as long as the panel 5 can be disassembled and replaced.

[0048] Preferably, a support portion 14 is provided on the side wall 13 , and the panel 5 is pressed onto the upper surface of the support portion 14 .

[0049] Combination Figure 1 to Figure 2 As shown, the support portion 14 is disposed on the side wall 13 , and the specific position and shape of the support portion 14 can be designed as required (e.g., spherical, square, etc.). The upper surface of the support portion 14 contacts the lower surface of the panel 5 , thereby providing a certain support for the panel 5 . Meanwhile, the panel 5 can be replaced, and the panel 5 can be directly pulled out from the upper chamber 101 , and then a new panel 5 can be placed on the support portion 14 .

[0050] In this way, the supporting portion 14 can play a better supporting and fixing role for the panel 5. At the same time, different panels 5 can be easily replaced to control the flow of gas to achieve different drainage effects.

[0051] Furthermore, the support portion 14 is in a quarter spherical structure, the panel 5 is pressed onto one of the semicircular surfaces of the outer surface of the support portion 14 , and the other semicircular surface of the outer surface of the support portion 14 is fitted and connected to the side wall 13 .

[0052] Combination Figure 7 and Figure 8 As shown, the support portion 14 is a quarter spherical structure, and its outer surface has two semicircular surfaces and a quarter spherical surface, one of which is in contact with the lower surface of the panel 5 to form a support and fixation for the panel 5, and the other semicircular surface is in contact with the surface of the side wall 13 to ensure that there is no gap between the support portion 14 and the inner side of the side wall 13. When the gas flows through the support portion 14, it will be guided by the quarter spherical surface of its outer surface. Figure 8As shown in FIG, turbulence is formed, which is beneficial to the uniform diffusion of gas.

[0053] It should be noted that, considering the quality of the thin film deposited on the substrate, the support portion 14 should be placed too close to the tray 4 to prevent the support portion 14 from being too close to the tray 4. Figure 1 For example, there are five support parts 14, the first plate section 51 is crimped on one of the support parts 14, and the second plate section 52 is crimped on the other four support parts 14. The four support parts 14 are all at a certain distance from the tray 4 in the horizontal direction. The specific value of the distance can be determined according to the actual situation and is not limited here. In some embodiments, the distance between two adjacent support parts 14 located upstream and downstream of the substrate is 1.1-1.3 times the diameter of the substrate.

[0054] In another embodiment, the upper surface of the drainage portion 3 extends upwardly and obliquely from upstream to downstream.

[0055] Combination Figure 3 and Figure 4 As shown, the specific structure of the upper surface of the drainage portion 3 is not limited here, as long as it extends upward from upstream to downstream in an inclined manner, such as Figure 3 As shown in , illustratively, the upper surface of the drainage portion 3 is a slope structure, and the angle between the upper surface of the drainage portion and the horizontal direction is φ, and its specific value can be designed according to needs. For example, in some embodiments, the aforementioned angle φ is 1° to 20°.

[0056] In this way, by setting the upper surface of the drainage portion 3 to extend obliquely upward from upstream to downstream, the gas can be guided by the upper surface of the drainage portion 3 and flow in the vertical, horizontal and longitudinal directions, thereby improving the uniformity of gas diffusion and facilitating improving the quality of the deposited film.

[0057] Furthermore, a second inclined surface section 31 is provided on the upper surface of the drainage portion 3, and a plurality of the second inclined surface sections 31 are connected to each other. Among every two adjacent second inclined surface sections 31, the angle between the second inclined surface section 31 close to the upstream and the horizontal direction is greater than the angle between the second inclined surface section 31 close to the downstream and the horizontal direction.

[0058] Combination Figure 4 As shown, three second inclined surface sections 31 are connected to each other to form the upper surface of the drainage portion 3, wherein the second inclined surface section 31 closest to the inlet 011 has an angle θ3 with the horizontal direction, the second inclined surface section 31 located in the middle has an angle θ2 with the horizontal direction, and the second inclined surface section 31 closest to the outlet 031 has an angle θ1 with the horizontal direction, θ3>θ2>θ1.

[0059] In this way, multiple second inclined sections 31 are connected to form the upper surface of the drainage section 3, which can ensure that after the gas enters the drainage section 01 from the inlet 011, it is guided more smoothly by the drainage section 3, allowing the gas to enter the reaction section 02 more smoothly, thereby making the laminar gas above the tray 4 more uniform and turbulent-free.

[0060] In another embodiment, the lower surface of the upper wall 11 above the drainage portion 3 is arranged to extend downwardly and obliquely from upstream to downstream.

[0061] Combination Figure 5 and Figure 6 As shown, the lower surface of the upper wall 11 within the upper range of the drainage portion 3 is arranged to extend downwardly from upstream to downstream, as shown in FIG. Figure 5 As shown in , the lower surface of the upper wall 11 above the drainage portion 3 is a slope structure, and the angle between it and the horizontal direction is ψ. The specific value can be designed according to needs. For example, in some embodiments, the angle ψ is 1° to 20°.

[0062] In this way, by setting the lower surface of the upper wall 11 above the drainage portion 3 to extend downwardly from upstream to downstream, the gas can be guided by the lower surface of the upper wall 11 and flow in the vertical, horizontal and longitudinal directions, thereby improving the uniformity of gas diffusion and facilitating improving the quality of the deposited film.

[0063] Furthermore, a third inclined surface section 111 is provided on the lower surface of the upper wall 11 within the range above the drainage portion 3, and a plurality of the third inclined surface sections 111 are connected to each other. Among every two adjacent third inclined surface sections 111, the angle between the third inclined surface section 111 close to the upstream and the horizontal direction is greater than the angle between the third inclined surface section 111 close to the downstream and the horizontal direction.

[0064] Combination Figure 6 As shown, the three third inclined surface sections 111 are interconnected to form the lower surface of the upper wall 11 within the range above the drainage portion 3, wherein the angle between the third inclined surface section 111 closest to the inlet 011 and the horizontal direction is δ3, the angle between the third inclined surface section 111 located in the middle and the horizontal direction is δ2, and the angle between the third inclined surface section 111 closest to the outlet 031 and the horizontal direction is δ1, δ3>δ2>δ1.

[0065] In this way, multiple third inclined sections 111 are connected to form the lower surface of the upper wall 11 within the range above the drainage portion 3, which can ensure that after the gas enters the drainage section 01 from the inlet 011, it is guided more smoothly by the lower surface of the upper wall 11, so that the gas enters the reaction section 02 more smoothly, thereby making the laminar gas above the tray 4 more uniform and turbulent-free.

[0066] Furthermore, a chamber flange 6 is provided on the upstream side of the chamber wall 1. Figures 1 to 6 As shown, the chamber flange 6 is installed on the outer side of the chamber wall 1 (the upstream side in the figure), and the chamber flange 6 has a transfer port, which corresponds to the inlet 011, so as to facilitate the introduction of gas into the upper chamber 101. In addition, the substrate is also transferred from the transfer port to the upper chamber 101. In other embodiments, the downstream side of the chamber wall 1 can also be provided with a chamber flange.

[0067] Furthermore, it also includes a heating ring 7 , the tray 4 is arranged on the inner side of the heating ring 7 , the upstream end of the outer side of the heating ring 7 is connected to the drainage part 3 , and the downstream end is connected to the heating plate 2 .

[0068] Combination Figures 1 to 6 As shown, the heating ring 7 is annular, the tray 4 is arranged on the inner side of the heating ring 7, the end of the outer side of the heating ring 7 close to the inlet 011 is connected to the drainage part 3, and the end close to the outlet 031 is connected to the heating plate 2.

[0069] In this way, the periphery of the substrate and the reaction gas on the tray 4 can be heated by the heating ring 7, which makes the temperature of the substrate more uniform on the one hand and the temperature of the reaction gas closer to the temperature of the substrate on the other hand, thereby improving the quality of the deposited film.

[0070] In the above embodiments of the present invention, the description of each embodiment has its own emphasis. For parts that are not described in detail in a certain embodiment, reference can be made to the relevant descriptions of other embodiments.

[0071] For ease of description, spatially relative terms such as "above", "above", "on the upper surface of", "above", etc. may be used herein to describe the spatial positional relationship between a device or feature and other devices or features as shown in the figure. It should be understood that spatially relative terms are intended to include different orientations of the device in use or operation in addition to the orientation described in the figure. For example, if the device in the accompanying drawings is inverted, the device described as "above other devices or structures" or "above other devices or structures" will be positioned as "below other devices or structures" or "below other devices or structures". Thus, the exemplary term "above" may include both "above" and "below". The device may also be positioned in other different ways, rotated 90 degrees or in other orientations, and the spatially relative descriptions used herein are interpreted accordingly.

[0072] In addition to the above, it should be noted that "one embodiment", "another embodiment", "embodiment", etc. mentioned in this specification refer to the specific features, structures or characteristics described in conjunction with the embodiment included in at least one embodiment generally described in this application. The same expression appearing in multiple places in the specification does not necessarily refer to the same embodiment. Further, when describing a specific feature, structure or characteristic in conjunction with any embodiment, it is claimed that the realization of such feature, structure or characteristic in conjunction with other embodiments also falls within the scope of the present utility model.

[0073] In the above embodiments, the description of each embodiment has its own emphasis. For parts that are not described in detail in a certain embodiment, reference can be made to the relevant descriptions of other embodiments.

[0074] The above description is only the preferred embodiment of the utility model, and is not intended to limit the utility model. For those skilled in the art, the utility model can have various modifications and changes. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the utility model shall be included in the protection scope of the utility model.

Claims

1. A reaction chamber, characterized in that: The invention comprises a cavity wall, a heating plate, a drainage part and a tray, wherein the cavity wall comprises an upper wall, a lower wall and a side wall which are connected to each other to form a total cavity, the drainage part, the tray and the heating plate are arranged in the total cavity, and the total cavity is divided into an upper cavity and a lower cavity, the upper cavity comprises a drainage section corresponding to the range above the drainage part, a reaction section corresponding to the range above the tray, and a tail section corresponding to the range above the heating plate, the drainage section is provided with an inlet, and the tail section is provided with an outlet, and the height between the upper end and the lower end of the drainage section gradually decreases from upstream to downstream.

2. The reaction chamber according to claim 1, characterized in that: The cavity wall is provided with a panel, the drainage section is located between the lower surface of the panel and the upper surface of the drainage portion, and the panel is inclined and extends downward from upstream to downstream.

3. The reaction chamber according to claim 2, characterized in that: The panel includes a first plate segment and a second plate segment, the upstream end of the first plate segment is arranged at the inlet, the downstream end of the first plate segment extends obliquely downward and is connected to the upstream end of the second plate segment, the upstream end of the second plate segment is arranged upstream of the tray, and the downstream end of the second plate segment extends horizontally to downstream of the tray.

4. The reaction chamber according to claim 3, characterized in that: The first plate section includes a first inclined surface section, and multiple first inclined surface sections are connected to each other. Among every two adjacent first inclined surface sections, the angle between the first inclined surface section close to the upstream and the horizontal direction is greater than the angle between the first inclined surface section close to the downstream and the horizontal direction.

5. The reaction chamber according to claim 2, characterized in that: The panel is detachably mounted on the cavity wall; a support portion is provided on the side wall, and the panel is pressed against the upper surface of the support portion.

6. The reaction chamber according to claim 5, characterized in that: The support portion is in a quarter spherical structure, the panel is pressed onto one of the semicircular surfaces on the outer surface of the support portion, and the other semicircular surface on the outer surface of the support portion is fitted and connected to the side wall.

7. The reaction chamber according to claim 1, characterized in that: The upper surface of the drainage portion is arranged to extend upwardly and obliquely from the upstream to the downstream.

8. The reaction chamber according to claim 7, characterized in that: The upper surface of the drainage portion is provided with a second inclined surface segment, and multiple second inclined surface segments are connected to each other. Among every two adjacent second inclined surface segments, the angle between the second inclined surface segment close to the upstream and the horizontal direction is greater than the angle between the second inclined surface segment close to the downstream and the horizontal direction.

9. The reaction chamber according to claim 1, characterized in that: The lower surface of the upper wall above the drainage portion is arranged to extend downwardly and obliquely from upstream to downstream.

10. The reaction chamber according to claim 9, characterized in that: A third inclined surface section is provided on the lower surface of the upper wall within the range above the drainage portion, and multiple third inclined surface sections are connected to each other. Among every two adjacent third inclined surface sections, the angle between the third inclined surface section close to the upstream and the horizontal direction is greater than the angle between the third inclined surface section close to the downstream and the horizontal direction.

11. The reaction chamber according to claim 1, characterized in that: It also includes a heating ring, the tray is arranged on the inner side of the heating ring, the upstream end of the outer side of the heating ring is connected with the drainage part, and the downstream end is connected with the heating plate.

12. The reaction chamber according to claim 1, characterized in that: A chamber flange is provided on the outer side of the chamber wall corresponding to the inlet, and an inner hole of the chamber flange is communicated with the inlet.

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