Precise rotary measuring platform for quartz furnace tube

Abstract

The utility model discloses a precision rotation measuring platform for a quartz furnace tube, and relates to the technical field of measuring devices. Comprising a cast iron base, two pairs of trundles are arranged on the lower wall face of the cast iron base, a protective cover is arranged at the upper end of the cast iron base, a gear motor is arranged in the protective cover, a driving synchronous wheel is arranged at the driving end of the gear motor, and the driving synchronous wheel is rotationally connected into the lower wall face of the cast iron base. A driven synchronous wheel is rotationally connected to the middle position in the lower wall face of the cast iron base, the driven synchronous wheel and the driving synchronous wheel are connected with a synchronous belt, and a marble rotating platform is arranged at the upper end of the driven synchronous wheel. According to the utility model, the quartz furnace tube precision rotation measuring platform is designed and manufactured to measure data, so that the data can be measured more quickly and more accurately, meanwhile, the measuring time can be saved, the working efficiency of measurement can be improved, the inconvenient manual operation can be reduced, the adjustment is convenient, and the practicability is strong.

Description

Technical Field

[0001] The utility model relates to the technical field of measuring devices, in particular to a quartz furnace tube precision rotating measuring platform. Background Art

[0002] The roundness, coaxiality and cylindricity testing process of quartz furnace tube products in the semiconductor industry. For each process in the processing of quartz furnace tube products, the required type and position tolerance (roundness, coaxiality, cylindricity, etc.) must be tested and measured to verify whether it meets the drawings and technical requirements. The basic operation of the test is to use a roller-type micrometer or a dial gauge to perform a circumferential contact measurement on the surface of the furnace tube, observe and record the fluctuation data of the spring gauge rod to fit it into a standard roundness value, and compare the difference with the drawing requirements to measure whether it exceeds the tolerance.

[0003] In the process of realizing the utility model, the inventor found that the prior art has the following problems: the roundness, coaxiality, and cylindricity detection process of the previous quartz furnace tube products used an ordinary rotating platform during operation, which was not accurate, and the parallelism and verticality could not be accurately guaranteed. Moreover, the rotation power was manually operated, and the measurement personnel had to measure the data while rotating manually, which was very inconvenient. The accuracy of the rotating platform was basically around ±0.2mm. When measuring a specified angle, the measurement point could not be accurately found, and the error was large. The selection of the measurement position could only be single-point measurement, not multi-point and multi-meter measurement, and the work efficiency was low. Utility Model Content

[0004] In view of the deficiencies in the prior art, the utility model provides a quartz furnace tube precision rotating measurement platform, which solves the problem that the existing quartz furnace tube products use ordinary rotating platforms during operation for roundness, coaxiality, and cylindricity detection. The accuracy is not high, and the parallelism and verticality cannot be accurately guaranteed. Moreover, the rotating power is manually operated, and the measurement personnel have to measure the data while rotating manually, which is very inconvenient. The accuracy of the rotating platform is basically around ±0.2mm. When measuring a specified angle, the measurement point cannot be accurately found, and the error is large. The selection of the measurement position can only be single-point measurement, and multi-point and multi-meter measurement cannot be performed, resulting in low work efficiency.

[0005] To achieve the above purpose, the utility model is implemented through the following technical solutions: a quartz furnace tube precision rotating measuring platform, comprising a cast iron base, the lower wall of the cast iron base is provided with two pairs of casters, the upper end of the cast iron base is provided with a protective cover, a reduction motor is provided in the protective cover, and a driving end of the reduction motor is provided with an active synchronous wheel, the active synchronous wheel is rotatably connected to the lower wall of the cast iron base, a driven synchronous wheel is rotatably connected to the middle position of the lower wall of the cast iron base, and the driven synchronous wheel is connected to the active synchronous wheel. A synchronous belt, a marble rotating platform is provided at the upper end of the driven synchronous wheel, a quartz furnace tube is placed at the upper end of the marble rotating platform, a guide rail support column and a guide rail fixing seat are provided in the upper wall surface of the cast iron base, a pair of guide rail side fixing seats are provided on the side wall surface of the guide rail support column, a pair of guide rail side fixing seats are fixedly installed with sliding guide rails, three roller type micrometers are slidably installed on the sliding guide rails, the three roller type micrometers are all connected with a gauge rod locking device, and the upper end of the guide rail fixing seat is fixedly connected to the sliding guide rail.

[0006] Preferably, a sensor holder is provided in the protective cover, and the sensor holder is connected to a photoelectric sensor.

[0007] Preferably, the three roller micrometers are all in contact with the side wall surface of the quartz furnace tube.

[0008] Preferably, a control display screen is provided on the side wall surface of the protective cover.

[0009] Preferably, the lower wall surface of the cast iron base is provided with two pairs of ground supports.

[0010] Beneficial Effects

[0011] The utility model provides a quartz furnace tube precision rotating measuring platform. The utility model measures data by designing and manufacturing the quartz furnace tube precision rotating measuring platform, which can measure data more quickly and accurately, and can save measurement time, improve measurement efficiency, reduce inconvenient human operation, facilitate adjustment, and has strong practicality. BRIEF DESCRIPTION OF THE DRAWINGS

[0012] Figure 1 It is a schematic diagram of the overall structure of the utility model.

[0013] Figure 2 It is a schematic diagram of the internal structure of the protective cover of the utility model.

[0014] Figure 3 It is a bottom schematic diagram of the utility model.

[0015] Figure 4 It is a side schematic diagram of the utility model.

[0016] In the figure: 1. Cast iron base; 2. Control display screen; 3. Marble rotating platform; 4. Quartz furnace tube; 5. Guide rail side fixing seat; 6. Guide rail support column; 7. Roller micrometer; 8. Gauge rod locking device; 9. Sliding guide rail; 10. Guide rail fixing seat; 11. Reducer motor; 12. Photoelectric sensor; 13. Protective cover; 14. Driven synchronous wheel; 15. Active synchronous wheel; 16. Casters; 17. Floor support; 18. Synchronous belt; 19. Sensor support. DETAILED DESCRIPTION

[0017] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0018] See also Figure 1-4 The utility model provides a technical solution: a quartz furnace tube precision rotating measuring platform, comprising a cast iron base 1, the lower wall of the cast iron base 1 is provided with two pairs of casters 16, the upper end of the cast iron base 1 is provided with a protective cover 13, a reduction motor 11 is provided in the protective cover 13, the driving end of the reduction motor 11 is provided with an active synchronous wheel 15, the active synchronous wheel 15 is rotatably connected to the lower wall of the cast iron base 1, the middle position of the lower wall of the cast iron base 1 is rotatably connected to a driven synchronous wheel 14, and the driven synchronous wheel 14 and the active synchronous wheel 15 are connected by a synchronous belt 18. A marble rotating platform 3 is provided at the upper end of the driven synchronous wheel 14, a quartz furnace tube 4 is placed at the upper end of the marble rotating platform 3, a guide rail support column 6 and a guide rail fixing seat 10 are provided in the upper wall surface of the cast iron base 1, a pair of guide rail side fixing seats 5 are provided on the side wall surface of the guide rail support column 6, a pair of guide rail side fixing seats 5 are fixedly installed with a sliding guide rail 9, three roller type micrometers 7 are slidably installed on the sliding guide rail 9, the three roller type micrometers 7 are all connected with a gauge rod locking device 8, and the upper end of the guide rail fixing seat 10 is fixedly connected to the sliding guide rail 9.

[0019] In this embodiment, specifically, a sensor holder 19 is provided in the protective cover 13 , and the sensor holder 19 is connected to the photoelectric sensor 12 .

[0020] In this embodiment, specifically, the three roller micrometers 7 are all in contact with the side wall surface of the quartz furnace tube 4 .

[0021] In this embodiment, specifically, a control display screen 2 is provided on the side wall surface of the protective cover 13 .

[0022] In this embodiment, specifically, two pairs of ground supports 17 are provided on the lower wall surface of the cast iron base 1 .

[0023] The detailed connection means are well-known in the art. The following mainly introduces the working principle and process. The specific work is as follows.

[0024] Embodiment: The driving synchronous wheel 15 is driven to rotate by starting the reduction motor 11, and the driving synchronous wheel 15 rotates through the synchronous belt 18 to drive the driven synchronous wheel 14 to rotate, and the driven synchronous wheel 14 rotates to drive the marble rotating platform 3 to rotate, so that the parallelism and verticality of the flange surface of the quartz furnace tube 4 and the platform and the runout value of the rotating surface end can be within 0.02 during rotation. The main shaft assembly connected to the marble rotating platform 3 contains a high-precision platform-specific bearing with an accuracy of within 0.005. The quartz furnace tube 4 is rotated synchronously with the same number of revolutions. The speed of rotation can be adjusted by the knob on the control display 2, and the parameters are set by the value on the control display 2. The probe of the roller micrometer 7 is contacted with the surface of the furnace tube, and the roller micrometer 7 is adjusted in the height direction through the cooperation of the table rod locking device 8 and the sliding guide rail 9 to adjust to the point to be measured. Multiple roller micrometers 7 can also be measured simultaneously and the values ​​are recorded. The function of the photoelectric sensor 12 is to set the required angle of the quartz furnace tube 4 from a set point. When the quartz furnace tube 4 rotates to a specified angle, the photoelectric sensor 12 transmits a signal to the control display screen 2 to stop the rotation and measure the value at this angle.

[0025] It should be noted that, in this document, relational terms such as first and second, etc. are merely used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any actual relationship or order between these entities or operations.

Claims

1. A quartz furnace tube precision rotating measuring platform, comprising a cast iron base (1), characterized in that: The lower wall surface of the cast iron base (1) is provided with two pairs of casters (16); the upper end of the cast iron base (1) is provided with a protective cover (13); a reduction motor (11) is provided in the protective cover (13); a driving end of the reduction motor (11) is provided with an active synchronous wheel (15); the active synchronous wheel (15) is rotatably connected to the lower wall surface of the cast iron base (1); a driven synchronous wheel (14) is rotatably connected to the middle position of the lower wall surface of the cast iron base (1); the driven synchronous wheel (14) and the active synchronous wheel (15) are connected by a synchronous belt (18); the upper end of the driven synchronous wheel (14) is provided with a large A marble rotating platform (3), a quartz furnace tube (4) is placed on the upper end of the marble rotating platform (3), a guide rail support column (6) and a guide rail fixing seat (10) are provided in the upper wall surface of the cast iron base (1), a pair of guide rail side fixing seats (5) are provided on the side wall surface of the guide rail support column (6), a sliding guide rail (9) is fixedly installed in the pair of guide rail side fixing seats (5), three roller-type micrometers (7) are slidably installed on the sliding guide rail (9), the three roller-type micrometers (7) are all connected to a gauge rod locking device (8), and the upper end of the guide rail fixing seat (10) is fixedly connected to the sliding guide rail (9).

2. The quartz furnace tube precision rotation measurement platform according to claim 1, characterized in that: A sensor support (19) is provided in the protective cover (13), and the sensor support (19) is connected to a photoelectric sensor (12).

3. The quartz furnace tube precision rotation measurement platform according to claim 1, characterized in that: The three roller micrometers (7) are all in contact with the side wall surface of the quartz furnace tube (4).

4. The quartz furnace tube precision rotation measurement platform according to claim 1, characterized in that: A control display screen (2) is provided on the side wall surface of the protective cover (13).

5. The quartz furnace tube precision rotation measurement platform according to claim 1, characterized in that: The lower wall surface of the cast iron base (1) is provided with two pairs of floor supports (17).

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