Supporting tooth structure and substrate bearing equipment
By designing a tooth support structure with large openings and tapered groove sections, combined with a flexible pad, the problem of poor separation and stability of the substrate during the insertion process is solved, and the stable insertion and fixation of the substrate is achieved.
Patent Information
- Application Number
- CN202421534239.2
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-06-28
- Publication Date
- 2025-04-18
- Estimated Expiration
- 2034-06-28
AI Technical Summary
When the existing substrate carrier equipment inserts the substrate, due to the large size and thin thickness, separation is prone to occur, resulting in poor stability and easy wear or scratching of the substrate.
A tooth support structure is designed, wherein the tooth groove part is composed of a first tooth body and a second tooth body. The height of the first tooth body is greater than the height of the second tooth body, forming a larger opening, combining the tapered groove section and the flexible pad to improve the insertion stability of the substrate.
The stable insertion and fixation of the substrate is achieved, the installation stability of the substrate is improved, and the collision and wear between the substrate and the top of the cog groove is avoided.
Smart Images
Figure CN222775287U_ABST
Abstract
Description
Technical Field
[0001] The present application relates to the field of loading technology, and in particular to a tooth structure and a substrate carrying device. Background Art
[0002] In the current technology, during the production process of photovoltaics or semiconductors, the handling and insertion and unloading of substrates cannot be separated from the substrate carrying equipment. The substrate carrying equipment includes a tooth structure, and a tooth groove is opened on the top of the tooth structure to divide the top of the support plate into two teeth of equal height. When inserting the sheet, the manipulator merges the two substrates and inserts them into the same tooth groove. As the size of the substrate becomes larger and the thickness becomes thinner, the substrate itself has a certain curvature, so when one end of the merged substrate is fixed, the other end will separate. In the current technology, in order to allow the two substrates to be inserted into the tooth groove at the same time, the distance between the two teeth is relatively large to obtain a large tooth groove opening to avoid collision between the substrate and the top of the tooth groove. Although this can avoid collision between the substrate and the top of the tooth groove to a certain extent, the width of the tooth groove is relatively large, the stability of the substrate after installation is relatively poor, and the substrate can move on the two side walls of the tooth groove, which is easy to wear or scratch the substrate.
[0003] How to overcome the above-mentioned defects is a technical problem that needs to be solved urgently by those skilled in the art. Utility Model Content
[0004] The purpose of the present application is to provide a tooth support structure in which a substrate can be easily inserted into a tooth groove and the substrate can be reliably fixed after being inserted into the tooth groove, and a substrate carrying device having the tooth support structure.
[0005] In order to solve the above technical problems, the present application provides a tooth support structure, including a base, the top of the base has a tooth groove portion, the tooth groove portion has an opening at one end away from the base, the tooth groove portion includes a first tooth body and a second tooth body arranged opposite to each other, the height of the first tooth body is greater than the height of the second tooth body, the bottom of the tooth groove portion has a tapered groove section, and along the direction from the opening to the base, the distance between the two side walls of the tapered groove section gradually decreases.
[0006] In the embodiment of the present application, because the height of the first tooth body is greater than the height of the second tooth body, the opening size formed by the two is relatively large. When the inserting process is performed, the manipulator extracts two substrates from the load-bearing station, and inserts them between the first tooth body and the second tooth body from the opening after closing the substrates. In the process, when the height of the lower end of the substrate is lower than the top of the first tooth body and higher than the top of the second tooth body, the substrate can move to the side of the first tooth body, and use the side of the first tooth body to close the lower ends of the two substrates and then move downward until they are placed in place. In this way, even if the lower ends of the two substrates are slightly separated, the inserting can be carried out smoothly. In addition, the bottom of the tooth groove portion in the embodiment of the present application is a tapered groove section, which can make the two substrates relatively close to each other, thereby improving the installation stability of the two substrates after the inserting.
[0007] In one example, the tooth groove portion further includes a flexible pad, the flexible pad is supported on the base, and the flexible pad is at least partially located between the first tooth body and the second tooth body, and the tapered groove segment is located on the flexible pad.
[0008] In one example, the flexible pad includes a middle section and an extension section, both ends of the middle section arranged along the first direction have the extension section, the middle section is supported on the base, the extension section extends between the first tooth body and the second tooth body, and the tapered groove section is located between the two extension sections; the first direction is perpendicular to the arrangement direction of the first tooth body and the second tooth body.
[0009] In one example, each of the extension sections includes a boss higher than the middle section, the tapered groove section is arranged on the boss, the top surface of the middle section is a plane, and the top surface of the middle section and the bottom of the tapered groove section are located in the same plane.
[0010] In one example, the middle section is clamped between the first tooth body and the second tooth body, the width of the extension section along the second direction is greater than the width of the middle section along the second direction, and the second direction is the arrangement direction of the first tooth body and the second tooth body.
[0011] In one example, the first tooth body, the second tooth body and the base body are separately provided, and the first tooth body and the second tooth body are fixedly connected to the base body via a fixing member.
[0012] In one example, the top of the base has a protrusion, the first tooth body and the second tooth body are respectively located on both sides of the protrusion, and the first tooth body and the second tooth body are fixedly connected to the protrusion through the fixing member.
[0013] In one example, the base is further provided with a first supporting surface and a second supporting surface, which are respectively located on both sides of the protrusion, and the end of the first tooth body away from the opening is supported on the first supporting surface, and the end of the second tooth body away from the opening is supported on the second supporting surface.
[0014] In one example,
[0015] The side surface of the second tooth body opposite to the first tooth body comprises a first surface and a second surface connected to each other, the second surface is located at the top of the second tooth body, the second surface is inclined relative to the first surface toward a side away from the first tooth body, and a gradually expanding opening is formed between the second surface and the first tooth body, and the size of the gradually expanding opening becomes larger along the direction away from the base body;
[0016] Or / and, along the height direction of the first tooth body, the side of the first tooth body opposite to the second tooth body includes a first section and a second section connected, the second section is located at the top of the first tooth body, the second section is inclined relative to the first section toward a side away from the second tooth body, and the inclination angle of the second section relative to the first section ranges from 15° to 30°;
[0017] Alternatively or alternatively, a height difference between the first tooth body and the second tooth body ranges from 0.8 mm to 1.5 mm.
[0018] In one example, the inclination angle of the second surface relative to the first surface ranges from 15° to 30°; and the minimum distance between the second surface and the first tooth body ranges from 0.4 mm to 0.8 mm.
[0019] In addition, an embodiment of the present application further provides a substrate supporting device, including a mounting seat, on which is disposed a tooth structure as described in any one of the above items, and the base is fixedly connected to the mounting seat.
[0020] The substrate supporting device of the embodiment of the present application has the above-mentioned tooth supporting structure, so the substrate supporting device also has the above-mentioned technical effect of the tooth supporting structure. BRIEF DESCRIPTION OF THE DRAWINGS
[0021] Figure 1 This is a schematic structural diagram of a tooth support structure according to an embodiment of the present application;
[0022] Figure 2 for Figure 1 A side view of the tooth structure shown;
[0023] Figure 3 for Figure 1 The enlarged schematic diagram at A in the middle;
[0024] Figure 4 for Figure 1 A schematic diagram of the structure of the flexible pad;
[0025] Figure 5 for Figure 4 Middle BB section view.
[0026] The following are the descriptions of the reference numerals:
[0027] 1 substrate, 11 protrusion, 12 second supporting surface, 13 first supporting surface;
[0028] 2 first tooth body, 20 first section, 21 second section;
[0029] 3 second tooth body, 30 first surface, 31 second surface, 32 mounting hole;
[0030] 4 flexible pad, 40 tapered groove section, 41 middle section, 411 plane, 421 groove bottom, 42 extension section. DETAILED DESCRIPTION
[0031] In order to enable those skilled in the art to better understand the technical solution of the present application, the present application is further described in detail below in conjunction with the accompanying drawings and specific embodiments.
[0032] Please refer to Figures 1 to 5 , Figure 1 This is a schematic structural diagram of a tooth support structure according to an embodiment of the present application; Figure 2 for Figure 1 A side view of the tooth structure shown; Figure 3 for Figure 1 The enlarged schematic diagram at A in the middle; Figure 4 for Figure 1 A schematic diagram of the structure of the flexible pad; Figure 5 for Figure 4 Middle BB section view.
[0033] The embodiment of the present application provides a tooth support structure, and the embodiment of the present application takes the application of the tooth support structure to a substrate carrying device as an example to continue to introduce the technical solution and technical effects, which can be used as a tooth support or top tooth of a substrate carrying device. The substrate carried by the substrate carrying device can be a semiconductor sheet such as a silicon wafer, or of course, a sheet of other materials.
[0034] In an embodiment of the present application, the substrate supporting device includes a mounting seat, and a tooth structure is provided on the mounting seat. Usually, two tooth structures on the mounting seat form a supporting unit, and the substrate is inserted into the two tooth structures of the same supporting unit at the same time. In other words, the substrate is supported by the two tooth structures of the same supporting unit. For the substrate supporting device of the silicon wafer, two silicon wafers are inserted into the two tooth structures of the same supporting unit as a group. Several groups of supporting units are arranged on the mounting seat.
[0035] In the embodiment of the present application, the tooth structure includes a base 1, the top of the base 1 has a tooth groove portion, the end of the tooth groove portion away from the base 1 has an opening, the tooth groove portion also includes a first tooth body 2 and a second tooth body 3, and the substrate can be inserted between the first tooth body 2 and the second tooth body 3 from the opening. The height of the first tooth body 2 is greater than the height of the second tooth body 3, that is, the first tooth body 2 and the second tooth body 3 have a height difference, and the tops of the two are not in the same horizontal plane. In the embodiment of the present application, the direction parallel to the substrate insertion direction is defined as the height direction. The spacing between the first tooth body 2 and the second tooth body 3 is determined by the number of substrates placed between the two, and the spacing between the first tooth body 2 and the second tooth body 3 is at least the thickness of one substrate. When two substrates are placed between the first tooth body 2 and the second tooth body 3, the spacing between the first tooth body 2 and the second tooth body 3 can be roughly equal to the thickness of the two substrates. Of course, three or more substrates can be placed between the first tooth body 2 and the second tooth body 3.
[0036] In the embodiment of the present application, the bottom of the tooth groove portion has a tapered groove section 40, and the distance between the two side walls of the tapered groove section 40 gradually decreases along the direction from the opening to the base 1. In the embodiment of the present application, the tapered groove section 40 can be a U-shaped groove or a V-shaped groove. The tapered groove section 40 can be formed by the first tooth body 2 and the second tooth body 3, the tapered groove section 40 can be formed on the base 1, or the tapered groove section 40 is surrounded by the first tooth body 2, the second tooth body 3 and the base 1. Of course, in order to reduce the processing technology, the tapered groove section 40 can also be formed on other components besides the first tooth body 2, the second tooth body 3 and the base 1.
[0037] In the embodiment of the present application, since the height of the first tooth body 2 is greater than the height of the second tooth body 3, the opening size formed by the two is relatively large. When the inserting process is performed, the manipulator extracts two substrates from the load-bearing station, and inserts them between the first tooth body 2 and the second tooth body 3 from the opening after closing the substrates. When the height of the lower end of the substrate is lower than the top of the first tooth body 2 and higher than the top of the second tooth body 3, the substrate can be moved to the side of the first tooth body 2, and the lower ends of the two substrates are closed by relying on the side of the first tooth body 2 and then moved downward until they are placed in place. In this way, even if the lower ends of the two substrates are slightly separated, the inserting can be carried out smoothly. In addition, the bottom of the tooth groove portion in the embodiment of the present application is a tapered groove section 40, which can make the two substrates relatively close to each other, thereby improving the installation stability of the two substrates after inserting the substrates.
[0038] Typically, the first tooth body 2, the second tooth body 3 and the base 1 have relatively high hardness. To minimize the wear of the substrate by the first tooth body 2, the second tooth body 3 and the base 1 having high hardness, the embodiment of the present application further makes the following arrangement for the tooth structure.
[0039] In the embodiment of the present application, the tooth groove portion includes a flexible pad 4, which is supported on the base 1. The flexible pad 4 is at least partially located between the first tooth body 2 and the second tooth body 3. The tapered groove section 40 is located on the flexible pad 4. After the substrate is inserted into place, the substrate is supported on the flexible pad 4, and the lower end of the substrate is located in the tapered groove section 40. The material of the flexible pad 4 is relatively soft and can be processed and made of elastic materials, such as silicone or rubber. The flexible pad 4 can also be a thermoplastic plastic, such as polyetheretherketone (PEEK), which has the functions of wear resistance and self-lubrication.
[0040] The flexible pad 4 can play a buffering and protective role on the substrate to a certain extent, reducing the edge collapse and decrystalline at the bottom of the substrate. In addition, in the embodiment of the present application, the tapered groove section 40 is arranged on the flexible pad 4. Compared with the tapered groove section 40 being arranged on the base 1 or the tooth body, the processing technology of the tapered groove section 40 is relatively simple.
[0041] In the embodiment of the present application, the flexible pad 4 includes a middle section 41 and an extension section 42. Both ends of the middle section 41 arranged along the first direction S1 have extension sections 42. The middle section 41 is supported on the base 1, and the extension section 42 extends between the first tooth body 2 and the second tooth body 3. In other words, the middle section 41 is located between the first tooth body 2 and the second tooth body 3, and the extension section 42 is located outside the space enclosed by the first tooth body 2 and the second tooth body 3. The tapered groove section 40 in the embodiment of the present application is located on the two extension sections 42, that is, each extension section 42 has a tapered groove section 40. The first direction S1 is perpendicular to the arrangement direction of the first tooth body 2 and the second tooth body 3. The present application defines the arrangement direction of the first tooth body 2 and the second tooth body 3 as the second direction S2.
[0042] In this embodiment, the flexible pad 4 has an extension section 42 located outside the first tooth body 2 and the second tooth body 3, which increases the volume of the flexible pad 4 to a certain extent, facilitates the setting of the tapered groove section 40, and the setting of the tapered groove section 40 on the two extension sections 42 is also conducive to stable support of the substrate.
[0043] The middle section 41 can be clamped between the first tooth body 2 and the second tooth body 3, and the width of the middle section 41 is substantially equal to the distance between the first tooth body 2 and the second tooth body 3. In order to meet the use strength of the flexible pad 4, the width L2 of the extension section 42 along the second direction S2 can be greater than the width L1 of the middle section 41 along the second direction S2. In this way, even if the tapered groove section 40 is provided on the extension section 42, the extension section 42 still has sufficient use strength.
[0044] Since the distance between the first tooth body 2 and the second tooth body 3 is relatively small, Figure 1As shown, the sides opposite to the first tooth body 2 and the second tooth body 3 are defined as the first side face and the second side face, respectively, that is, the first tooth body 2 has the first side face, the second tooth body 3 has the second side face, and the first side face and the second side face are arranged opposite to each other. The first side face includes the first section 20 and the second section 21 connected, and the second side face includes the first surface 30 and the second surface 31 connected, and the distance between the first section 20 and the first surface 30 is the smallest. The width of the middle section 41 is relatively small. In order not to affect the use strength of the middle section 41, the middle section 41 can be used only as a fixed section, and the tapered groove section 40 is only arranged on the extension section 42. Of course, the middle section 41 can also be provided with the tapered groove section 40.
[0045] In the embodiment of the present application, the extension section 42 includes a boss higher than the middle section 41, and the tapered groove section 40 is arranged on the boss, that is, the top surface of the middle section 41 is a plane 411, and the top surface of the middle section 41 and the groove bottom 421 of the tapered groove section 40 are located in the same plane. In this way, the substrate can be supported by the tapered groove section 40 and the middle section 41 at the same time, and the flexible pad 4 plays a good supporting role on the substrate.
[0046] In the embodiment of the present application, the first tooth body 2, the second tooth body 3 and the base body 1 can be provided separately, and the three are fixedly connected by a fixing member, and the fixing member can be a mechanical part, such as a screw, a bolt, etc. Figure 2 As shown, Figure 2 It is shown that a mounting hole 32 is provided on the second tooth body 3 for installing a fixing part. Although the structure of the first tooth body 2 and the base 1 for installing the fixing part is not shown in the accompanying drawings, this does not hinder the understanding and implementation of the technical solution of this article by those skilled in the art. For example, in one embodiment, the second tooth body 3 and the base 1 are also provided with a mounting hole coaxial with the mounting hole 32, and the fixing part is simultaneously installed inside the mounting holes of the first tooth body 2, the second tooth body 3 and the base 1 to achieve position locking of the three. The fixing part can be in a detachable form to facilitate the replacement of the first tooth body 2 and the second tooth body 3. Of course, the fixing part can also be directly formed by a fixing process, such as a welding process or a bonding process. In one example, the first tooth body 2 and the second tooth body 3 can be fixedly connected to the base 1 by a welding process, or the first tooth body 2 and the second tooth body 3 can be fixedly connected to the base 1 by an adhesive layer.
[0047] In the embodiment of the present application, the top of the base 1 has a protrusion 11, and the first tooth body 2 and the second tooth body 3 are respectively located on both sides of the protrusion 11. The first tooth body 2 and the second tooth body 3 are fixedly connected to the protrusion 11 through a fixing member. The opposite sides of the first tooth body 2 and the second tooth body 3 can be respectively fitted with the corresponding side walls of the protrusion 11. In the arrangement direction of the first tooth body 2 and the second tooth body 3, the size of the protrusion 11 is approximately equal to the thickness of one or several substrates. In this way, the protrusion 11 can locate the distance between the first tooth body 2 and the second tooth body 3, realize the rapid installation of the first tooth body 2 and the second tooth body 3, and improve the assembly efficiency of the first tooth body 2, the second tooth body 3 and the base 1.
[0048] In the embodiment of the present application, the base 1 is further provided with a first supporting surface 13 and a second supporting surface 12, the first supporting surface 13 and the second supporting surface 12 are respectively located on both sides of the protrusion 11, the end of the first tooth body 2 away from the opening is supported on the first supporting surface 13, and the end of the second tooth body 3 away from the opening is supported on the second supporting surface 12, so that Figure 1 The orientation shown is for reference, the lower end of the first tooth body 2 is supported on the first support surface 13, and the lower end of the second tooth body 3 is supported on the second support surface 12. The first support surface 13 and the second support surface 12 can both be planes, and of course can also be curved surfaces.
[0049] In the embodiment of the present application, the first tooth body 2 is supported on the first supporting surface 13, and the second tooth body 3 is supported on the second supporting surface 12, which can quickly locate the position of the first tooth body 2 relative to the base 1 in the height direction, and the position of the second tooth body 3 relative to the base 1 in the height direction, and is beneficial to the fixing stability of the first tooth body 2 and the second tooth body 3.
[0050] In the embodiment of the present application, the second surface 31 is located at the top of the second tooth body 3, and the second surface 31 is inclined relative to the first surface 30 toward the side away from the first tooth body 2, and a gradually expanding opening is formed between the second surface 31 and the first tooth body 2, and the size of the gradually expanding opening becomes larger and larger along the direction away from the base 1; specifically, the second surface 31 is opposite to the first section 20, and a gradually expanding opening is formed between the two. The inclination angle m of the second surface 31 relative to the first surface 30 ranges from 15° to 30°, for example, 15°, 20°, 25° or 30°. In one example, the second surface 31 can be opposite to the first section 20 of the first side.
[0051] In the embodiment of the present application, the second section 21 in the first tooth body 2 is located at the top of the first tooth body 2, that is, the second section 21 is located on the side of the first tooth body 2 close to the opening, and the second section 21 is inclined relative to the first section 20 toward the side away from the second tooth body 3, and the inclination angle n of the second section 21 relative to the first section 20 is in the range of 15° to 30°, for example, 15°, 20°, 25° or 30°.
[0052] Of course, the inclination angle n of the second section 21 relative to the first section 20 and the inclination angle m of the second surface 31 and the first surface 30 are not limited to the above values, and may also be other values.
[0053] When the substrate is inserted, even if the substrate contacts the second section 21 or the second surface 31, the substrate can move downward along the second section 21 or the second surface 31, which is conducive to smooth downward movement of the substrate and avoids wear between the first tooth body 2 or the second tooth body 3 and the substrate.
[0054] In the embodiment of the present application, the height difference H between the first tooth body 2 and the second tooth body 3 ranges from 0.8 mm to 1.5 mm, for example, 0.8 mm, 0.9 mm, 1.0 mm, 1.1 mm, 1.2 mm, 1.3 mm, 1.4 mm or 1.5 mm. Of course, the height difference H between the first tooth body 2 and the second tooth body 3 is not limited to the above-listed values, and can be any value between 0.8 mm and 1.5 mm. When the first tooth body 2 and the second tooth body 3 are within this range, it can be suitable for smooth insertion of substrates of various specifications.
[0055] In the embodiment of the present application, the minimum distance L between the second surface 31 and the first tooth body 2 ranges from 0.4 mm to 0.8 mm, and the minimum distance L between the second surface 31 and the first tooth body 2 is the distance between the first section 20 and the first surface 30. The distance can be any value between 0.4 mm and 0.8 mm, for example, 0.4 mm, 0.5 mm, 0.6 mm, 0.7 mm or 0.8 mm, and the rest are not listed one by one.
[0056] The above are only preferred implementations of the present application. It should be pointed out that for ordinary technicians in this technical field, several improvements and modifications can be made without departing from the principles of the present application. These improvements and modifications should also be regarded as the scope of protection of the present application.
Claims
1. A tooth support structure, characterized in that: It includes a base, the top of the base has a tooth groove portion, the end of the tooth groove portion away from the base has an opening, the tooth groove portion includes a first tooth body and a second tooth body arranged opposite to each other, the height of the first tooth body is greater than the height of the second tooth body, the bottom of the tooth groove portion has a tapered groove section, and along the direction from the opening to the base, the distance between the two side walls of the tapered groove section gradually decreases.
2. The tooth structure according to claim 1, characterized in that: The tooth groove portion further includes a flexible pad, which is supported on the base and at least partially located between the first tooth body and the second tooth body, and the tapered groove segment is located on the flexible pad.
3. The tooth structure according to claim 2, characterized in that: The flexible pad includes a middle section and an extension section, and both ends of the middle section arranged along the first direction have the extension section. The middle section is supported on the base, and the extension section extends between the first tooth body and the second tooth body. The tapered groove section is located between the two extension sections; the first direction is perpendicular to the arrangement direction of the first tooth body and the second tooth body.
4. The tooth structure according to claim 3, characterized in that: Each of the extension sections comprises a boss higher than the middle section, the tapered groove section is arranged on the boss, the top surface of the middle section is a plane, and the top surface of the middle section and the groove bottom of the tapered groove section are located in the same plane.
5. The tooth structure according to claim 3, characterized in that: The middle section is clamped between the first tooth body and the second tooth body, the width of the extension section along the second direction is greater than the width of the middle section along the second direction, and the second direction is the arrangement direction of the first tooth body and the second tooth body.
6. The tooth structure according to claim 1, characterized in that: The first tooth body, the second tooth body and the base body are arranged separately, and the first tooth body and the second tooth body are fixedly connected to the base body through a fixing member.
7. The tooth structure according to claim 6, characterized in that: The top of the base body is provided with a protrusion, the first tooth body and the second tooth body are respectively located on both sides of the protrusion, and the first tooth body and the second tooth body are fixedly connected to the protrusion through the fixing member.
8. The tooth structure according to claim 7, characterized in that: The base is also provided with a first supporting surface and a second supporting surface, which are respectively located on both sides of the protrusion, and the end of the first tooth body away from the opening is supported on the first supporting surface, and the end of the second tooth body away from the opening is supported on the second supporting surface.
9. The tooth structure according to any one of claims 1 to 8, characterized in that: The side surface of the second tooth body opposite to the first tooth body comprises a first surface and a second surface connected to each other, the second surface is located at the top of the second tooth body, the second surface is inclined relative to the first surface toward a side away from the first tooth body, and a gradually expanding opening is formed between the second surface and the first tooth body, and the size of the gradually expanding opening becomes larger along the direction away from the base body; Or / and, along the height direction of the first tooth body, the side of the first tooth body opposite to the second tooth body includes a first section and a second section connected, the second section is located at the top of the first tooth body, the second section is inclined relative to the first section toward a side away from the second tooth body, and the inclination angle of the second section relative to the first section ranges from 15° to 30°; Alternatively or alternatively, a height difference between the first tooth body and the second tooth body ranges from 0.8 mm to 1.5 mm.
10. The tooth structure according to claim 9, characterized in that: The inclination angle of the second surface relative to the first surface ranges from 15° to 30°; the minimum distance between the second surface and the first tooth body ranges from 0.4 mm to 0.8 mm.
11. A substrate carrying device, characterized in that: It comprises a mounting seat, on which the tooth support structure according to any one of claims 1 to 10 is arranged, and the base is fixedly connected to the mounting seat.