Device for rapidly removing residual hydrogen peroxide gas
By designing a removal device that combines multiple means, the problem of long-term removal of hydrogen peroxide gas residue in the prior art is solved, and efficient and rapid removal effect is achieved, production efficiency is improved and clean environment is ensured.
Patent Information
- Application Number
- CN202420646270.9
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-03-30
- Publication Date
- 2025-04-22
- Estimated Expiration
- 2034-03-30
AI Technical Summary
The prior art takes a long time to remove hydrogen peroxide gas residue, affecting production efficiency, especially in small batches and multiple batches of production modes.
A device including a circulation pipe, a filtration device, a heating device, a chemical solution spraying device, a cooling and dehumidification device, a temperature and humidity callback device and a filtration device are designed to remove hydrogen peroxide gas residues through a combination of various means.
It achieves efficient removal of hydrogen peroxide gas residues, shortens treatment time, improves production efficiency, ensures a sterile A-level clean environment in the heat chamber or isolator, and reduces the risk of recontamination.
Smart Images
Figure CN222777838U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of hydrogen peroxide evolution devices, in particular to a device for rapidly removing residual hydrogen peroxide gas. Background Art
[0002] In the pharmaceutical production industry, gasified hydrogen peroxide sterilization is usually used to quickly remove residual hydrogen peroxide concentration to below 1ppm so that it can be put into production as soon as possible and improve production efficiency, especially small-batch and multi-batch production, such as radioactive drug production.
[0003] At present, the main residual exhaust technology used in the industry is to introduce fresh air without hydrogen peroxide to ventilate the inside of the production equipment to dilute and exhaust the residual hydrogen peroxide. Although this method is effective to a certain extent, it has many shortcomings. This method relies on repeated ventilation and air exchange until the hydrogen peroxide concentration drops below the safety standard. This process is often time-consuming and seriously affects production efficiency, especially in situations where production batches need to be switched quickly, such as small batch and multi-batch production modes. Its efficiency and economy are even more challenged.
[0004] Therefore, it is necessary to further improve and perfect the prior art to overcome these deficiencies, and the present invention is made based on this situation. Utility Model Content
[0005] The utility model aims to overcome the shortcomings of the prior art and provide a device for removing residual hydrogen peroxide gas with high processing efficiency and fast processing speed.
[0006] The utility model is realized by the following technical solutions:
[0007] In order to solve the above technical problems, the utility model provides a device for quickly removing residual hydrogen peroxide gas, comprising a circulation pipeline, wherein an air inlet and an exhaust port are arranged at both ends of the circulation pipeline, the air inlet is connected to a return / exhaust device in a hot chamber or an isolator to pump the gas in the hot chamber or the isolator into the circulation pipeline, the exhaust port is used to return the treated gas to the hot chamber or the isolator, and a first filtering device for slowing down the airflow and filtering impurities, a first heating device for heating the gas to accelerate the decomposition of hydrogen peroxide, a chemical solution spraying device for reducing or neutralizing hydrogen peroxide, a cooling and dehumidifying device for lowering the temperature of the airflow to precipitate hydrogen peroxide liquid and remove moisture in the air, a temperature and humidity adjustment device for adjusting the temperature and humidity of the air to meet the temperature and humidity of a Class A clean environment, and a second filtering device for slowing down the escape of the airflow and filtering impurities are arranged in sequence between the air inlet and the exhaust port.
[0008] In order to further solve the technical problem to be solved by the utility model, in a device for quickly removing residual hydrogen peroxide gas provided by the utility model, a first strong light irradiation device for accelerating the decomposition of hydrogen peroxide is provided at the first heating device.
[0009] In order to further solve the technical problem to be solved by the utility model, the utility model provides a device for quickly removing residual hydrogen peroxide gas, wherein the chemical solution spraying device includes a device capable of spraying a solution containing Cu 2+ The first ion solution spraying device of the solution, and the first ion solution spraying device containing Fe 2+ A second ion solution spraying device of the solution.
[0010] In order to further solve the technical problem to be solved by the utility model, in a device for quickly removing residual hydrogen peroxide gas provided by the utility model, the chemical solution spraying device also includes an alkaline solution spraying device for spraying an alkaline solution to neutralize hydrogen peroxide, and the alkaline solution spraying device is located before the first ion solution spraying device and the second ion solution spraying device.
[0011] In order to further solve the technical problem to be solved by the utility model, in a device for quickly removing residual hydrogen peroxide gas provided by the utility model, the first ion solution spraying device, the second ion solution spraying device and the alkaline solution spraying device all include a liquid storage device, a water pump, a plurality of spray heads arranged in a circulation pipeline, and a water collection tray arranged below the spray heads.
[0012] In order to further solve the technical problem to be solved by the utility model, the utility model provides a device for quickly removing residual hydrogen peroxide gas, wherein the cooling and dehumidifying device includes a zigzag heat exchanger arranged in a circulation pipeline, and a refrigerant circulates in the heat exchanger.
[0013] In order to further solve the technical problem to be solved by the utility model, in a device for quickly removing residual hydrogen peroxide gas provided by the utility model, a second strong light irradiation device is provided at the cooling and dehumidifying device.
[0014] In order to further solve the technical problem to be solved by the utility model, in a device for quickly removing residual hydrogen peroxide gas provided by the utility model, the temperature and humidity adjustment device includes a second heating device for heating the airflow, and a humidifying device for spraying water mist.
[0015] In order to further solve the technical problem to be solved by the utility model, in a device for quickly removing residual hydrogen peroxide gas provided by the utility model, the temperature and humidity adjustment device also includes a control system for controlling the second heating device and the humidifying device, and the control system is connected to a temperature and humidity detection device provided at the exhaust port, and the control system regulates the second heating device and the humidifying device according to data fed back by the temperature and humidity detection device.
[0016] In order to further solve the technical problem to be solved by the utility model, in a device for quickly removing residual hydrogen peroxide gas provided by the utility model, a third strong light irradiation device is provided at the second heating device.
[0017] Compared with the prior art, the utility model has the following advantages:
[0018] 1. This device directly extracts gas containing hydrogen peroxide from the hot chamber or isolator through an efficient internal circulation system. After a series of precise treatment processes, the purified gas is returned to the hot chamber or isolator, which not only ensures the sterile Class A clean environment of the hot chamber or isolator, but also avoids the introduction of outside air, thereby reducing the risk of re-contamination.
[0019] 2. The utility model adopts a combination of filtration, heating decomposition, neutralization, reduction, cooling and precipitation, etc., which has a relatively high efficiency in removing residual hydrogen peroxide gas and a relatively fast processing speed. Through the above combination of devices used in succession, efficient removal of hydrogen peroxide can be achieved. Each device specifically solves different problems that may be encountered in the removal process, and as a whole forms a highly efficient, fast-response and environmentally friendly purification system. This system can not only quickly remove harmful substances in the hot chamber or isolator, but also ensure the purity of the treated air, which meets the requirements of a sterile environment.
[0020] 3. Before the gas is about to flow back to the hot chamber or isolator, the temperature and humidity adjustment device adjusts the temperature and humidity of the airflow through the second heating device and the humidifying device to match the environment in the hot chamber or isolator. The control system accurately controls the operation of the heating and humidifying device based on the feedback data of the temperature and humidity detection device to ensure that the gas sent back to the hot chamber or isolator will not affect the environment of the hot chamber or isolator.
[0021] 4. This device can be miniaturized and can be used as a part of the return air duct of a hot room or isolator. It can transform the hot room or isolator that does not have the ability to quickly discharge hydrogen peroxide gas in the past, so as to achieve the purpose of quickly removing hydrogen peroxide, avoid the overall replacement of equipment, reduce enterprise costs, and improve production efficiency. BRIEF DESCRIPTION OF THE DRAWINGS
[0022] The specific implementation of the utility model is further described in detail below with reference to the accompanying drawings, wherein:
[0023] Figure 1 It is a structural schematic diagram of the utility model. DETAILED DESCRIPTION
[0024] In order to enable those skilled in the art to better understand the technical solution of the present invention, the present invention is further described in detail below in conjunction with the accompanying drawings and specific implementation methods.
[0025] like Figure 1 A device for quickly removing hydrogen peroxide gas residues is shown, comprising a circulation pipeline 1, with an air inlet 11 and an exhaust port 12 at both ends of the circulation pipeline 1. The air inlet 11 is connected to the return / exhaust equipment inside the hot chamber or isolator, so that the gas in the hot chamber or isolator can be effectively drawn into the circulation pipeline 1 for treatment. The exhaust port 12 is responsible for safely sending the treated gas back to the hot chamber or isolator. The circulation pipeline 1 forms a closed circulation system with the inside of the hot chamber or isolator through the air inlet 11 and the exhaust port 12. A series of treatment devices in the circulation pipeline 1 are specially designed to efficiently remove hydrogen peroxide residues in the gas, including multiple steps such as filtering, heating, and spraying treatment by physical and chemical means. These steps work together to significantly reduce the content of hydrogen peroxide in the gas.
[0026] This device directly extracts gas containing hydrogen peroxide from the inside of the hot chamber or isolator through an efficient internal circulation system, and returns the purified gas to the hot chamber or isolator after a series of precise treatment processes, which not only ensures the sterile Class A clean environment of the hot chamber or isolator, but also avoids the introduction of outside air, thereby reducing the risk of re-contamination.
[0027] Among them, the explanation of Class A clean environment is as follows: Class A clean environment is an area with extremely high requirements for environmental cleanliness during the drug production process, and is mainly used for high-risk operations, such as filling, assembly or connection of sterile drugs. In the Good Manufacturing Practice (GMP) for pharmaceutical production, environmental control of Class A clean areas is crucial to ensure the quality and safety of drugs. The air suspended particle level in Class A clean areas is ISO 4.8, that is, under the suspended particle limit standard of ≥5.0μm, the number of particles under dynamic and static conditions should reach this level. The results of dynamic microbial monitoring should achieve planktonic bacteria <1cfu / m 3 , sedimentation bacteria (φ90mm) <1cfu / 4 hours.
[0028] Preferably, the design of the circulation pipeline 1 adopts a modular concept, which is formed by connecting multiple sections of pipelines through flange structures. This design not only improves the flexibility and applicability of the entire system, but also greatly facilitates the disassembly and maintenance of the pipeline, and also provides convenience for future system upgrades or expansions.
[0029] What's more important is that a first filtering device 2, a first heating device 3, a chemical solution spraying device 4, a cooling and dehumidifying device 5, a temperature and humidity adjustment device 6, and a second filtering device 7 are sequentially arranged between the air inlet 11 and the air outlet 12.
[0030] Firstly, the function of the first filtering device 2 is to slow down the air flow speed and filter out larger impurities in the gas. This step is the preliminary preparation for the entire purification process, ensuring that the subsequent processing device can operate under more ideal conditions.
[0031] Next, the first heating device 3 accelerates the decomposition process of hydrogen peroxide by heating the gas. Since hydrogen peroxide is more easily decomposed into water and oxygen after heating, this step is crucial to reduce the content of hydrogen peroxide in the gas.
[0032] The chemical solution spraying device 4 further processes the hydrogen peroxide in the gas. By spraying a specific ion solution, the hydrogen peroxide molecules can be quickly reduced, further reducing their concentration.
[0033] The cooling and dehumidifying device 5 is responsible for cooling down the gas after the heating and spraying treatment. Lowering the temperature can condense any unreacted hydrogen peroxide, which is convenient for subsequent filtering and removal.
[0034] The temperature and humidity adjustment device 6 is a regulating process, which adjusts the treated airflow to the temperature and humidity conditions matching the hot chamber or isolator environment, ensuring that the treated gas will not cause any negative impact on the original environment in the hot chamber or isolator when it returns to the hot chamber or isolator.
[0035] Finally, the second filter device 7 is similar to the first filter device 2, and is used to further slow down the air flow escape speed and finely filter the remaining impurities. This ensures that even the smallest impurities can be effectively removed, thereby avoiding contamination of the internal environment of the hot chamber or isolator.
[0036] In summary, the utility model adopts a combination of filtration, heating decomposition, neutralization, reduction, cooling and precipitation, etc., which has a relatively high efficiency in removing residual hydrogen peroxide gas and a relatively fast processing speed. Through the above combination of devices used in succession, efficient removal of hydrogen peroxide can be achieved. Each device specifically solves different problems that may be encountered in the removal process, and as a whole forms a highly efficient, fast-response and environmentally friendly purification system. This system can not only quickly remove harmful substances in a hot chamber or isolator, but also ensure the purity of the treated air, meeting the requirements of a sterile environment.
[0037] Here is a further explanation:
[0038] The first filter device 2 is a high-efficiency filter, which uses a porous high-efficiency filter structure, such as a sponge filter structure. When the gas containing hydrogen peroxide passes through the first filter device 2, the complex channels inside the sponge-like structure can slow down the airflow speed, thereby providing sufficient time and contact area, allowing the subsequent first heating device 3 to perform heating and decomposition treatment more efficiently. At the same time, these channels also play a role of physical barrier, not only can capture dust and particulate matter, but also can absorb some harmful gas molecules.
[0039] The first filter device 2 is preferably designed to be easy to disassemble and replace quickly so that the staff can perform necessary maintenance work regularly.
[0040] The first heating device 3 is preferably a disc-shaped electric heating wire, which is designed to provide uniform and effective heating for the airflow passing through the device. The first heating device 3 raises the airflow temperature to above 152°C, which can accelerate the decomposition of hydrogen peroxide. Through this heating method, hydrogen peroxide can be quickly decomposed into water and oxygen under high temperature conditions, greatly reducing the concentration of hydrogen peroxide in the system, thereby improving treatment efficiency and safety.
[0041] More specifically, in order to further accelerate the decomposition process of hydrogen peroxide, the first heating device 3 is also equipped with a first strong light irradiation device 31. This device uses a light source that can emit high-intensity light, such as an ultraviolet LED or other high-intensity light source. When the airflow is irradiated with strong light while being heated, the decomposition rate of hydrogen peroxide will be significantly increased due to photocatalysis. Photocatalysis uses light energy to stimulate chemical reactions, which can not only improve the decomposition efficiency, but also help reduce energy consumption, because strong light irradiation can promote the decomposition of hydrogen peroxide at a lower temperature.
[0042] This design, which combines a coiled heating wire with a strong light irradiation device, optimizes the decomposition process of hydrogen peroxide. High temperature heating ensures that hydrogen peroxide can decompose quickly and effectively, while strong light irradiation further accelerates this chemical reaction and improves the decomposition efficiency. In addition, this design also has the advantages of easy operation, low energy consumption, and low maintenance costs, making the treatment of hydrogen peroxide both environmentally friendly and economical.
[0043] The chemical solution spraying device 4 includes an alkaline solution spraying device 43 for spraying an alkaline solution to neutralize hydrogen peroxide. The alkaline solution spraying device 43 can spray an alkaline solution with Ph>11 (such as sodium hydroxide (NaOH) solution, potassium hydroxide (KOH) solution, calcium hydroxide (Ca(OH)2) solution, etc.), and hydrogen peroxide can react with the alkaline solution to neutralize, thereby removing part of the hydrogen peroxide in the airflow.
[0044] The design of the chemical solution spraying device 4 has a clear purpose - to reduce the concentration of hydrogen peroxide in the airflow by introducing two different chemical reaction mechanisms, namely chemical neutralization and catalytic reduction, to ensure that the treatment process is efficient and environmentally friendly.
[0045] More specifically, a key component of the device is an alkaline solution spraying device 43, which is specifically used to spray alkaline solutions with a pH value greater than 11. These solutions, such as sodium hydroxide (NaOH), potassium hydroxide (KOH) and calcium hydroxide (Ca(OH)2) solutions, can contact hydrogen peroxide in the air flow in the form of sprays and react with it at the chemical level. This reaction produces water and corresponding salts, thereby effectively removing hydrogen peroxide and reducing potential oxidation corrosion problems.
[0046] In addition, the ion solution spraying device 4 includes two different metal ion solution spraying components. The first ion solution spraying device 41 is capable of spraying Cu 2+ The second ion solution spraying device 42 can spray the Fe 2+ When these metal ion-containing solutions come into contact with hydrogen peroxide, the metal ions act as catalysts to promote the decomposition of hydrogen peroxide, reducing it to water and oxygen. This catalytic reduction process not only removes hydrogen peroxide, but also avoids excessive use of chemicals and protects the surrounding environment.
[0047] This diversified spray system design allows the process to react chemically at multiple levels simultaneously, including both neutralization and catalytic reduction, increasing the number of pathways to remove hydrogen peroxide and improving efficiency. The design of the spray system takes into account the kinetics of the chemical reaction and the operability of the engineering implementation, ensuring that the sprayed solution can fully react with the hydrogen peroxide in the airflow without causing blockage or other operational problems to the system.
[0048] More specifically, the first ion solution spraying device 41, the second ion solution spraying device 42 and the alkaline solution spraying device 43 all include a liquid storage device 4a, a water pump 4b, a plurality of spray heads 4c arranged in the circulation pipeline 1, and a water collection tray 4d arranged below the spray heads 4c.
[0049] More specifically, the cooling and dehumidifying device 5 includes a zigzag heat exchanger 51 arranged in the circulation pipe 1, and a refrigerant circulates in the heat exchanger 51. The heat exchanger 51 is preferably a disc-shaped cold row. This structure can not only increase the surface area of the heat exchanger, thereby improving the heat exchange efficiency, but also make the device more compact and save space. The disc-shaped cold row absorbs and transfers heat through the refrigerant flowing inside it, thereby achieving a fast and effective cooling effect. The refrigerant can be liquid nitrogen, ethanol, etc.
[0050] The cooling and dehumidifying device can reduce the temperature of the treated airflow to below -5°C through the refrigerant circulating in the heat exchanger 51. This cooling effect not only helps to accelerate the precipitation and solidification speed of hydrogen peroxide, but also significantly improves the processing efficiency and safety of the entire system. In a low temperature environment, the physical state of hydrogen peroxide changes, making it easier to separate from the gas, which is convenient for subsequent collection and treatment.
[0051] More specifically, the cooling and dehumidifying device 5 is provided with a second strong light irradiation device 52. The second strong light irradiation device 52 is also a light source capable of emitting strong light, and strong light irradiation can accelerate the decomposition of hydrogen peroxide.
[0052] The temperature and humidity adjustment device 6 is a comprehensive device, and its main function is to adjust the cleaned and purified airflow so that its temperature and humidity conditions match the internal environment of the hot chamber or isolator, thereby ensuring that the environmental stability in the hot chamber or isolator is not affected by the returned gas.
[0053] In this device, the second heating device 61 plays a key role. It is preferably a disc-shaped electric heating wire, which has efficient heat conduction and uniform heating capacity. The second heating device 61 can accurately control the degree of heating and raise the temperature of the airflow to 20 to 22°C, which is consistent with the room temperature of the hot chamber or isolator. This can ensure that the gas sent back to the hot chamber or isolator will not disrupt the original temperature balance and ensure the best state of the treated gas.
[0054] The humidifier 62 is responsible for regulating the humidity of the airflow. By spraying fine water mist, it can adjust the humidity of the treated gas to the same humidity level as the hot chamber or isolator environment, that is, 50%-60%. This humidity range is suitable for most industrial hot chambers or isolators, helping to maintain comfort in the hot chamber or isolator and prevent potential problems caused by excessive dryness or humidity of the gas. The core components of the humidifier 62 include a water supply structure, a water pump, and a spray head installed inside the circulation pipe 1.
[0055] Through the coordinated work of the second heating device 61 and the humidifying device 62, the temperature and humidity adjustment device 6 ensures that the treated gas will not cause any negative impact on the working environment in the hot chamber or isolator when it is sent back to the hot chamber or isolator. This efficient temperature and humidity management fully complies with the requirements of the current Good Manufacturing Practice for Pharmaceuticals (GMP2010).
[0056] The temperature and humidity adjustment device 6 also includes a highly intelligent control system 63, whose core function is to accurately adjust the second heating device 61 and the humidifying device 62 to achieve the optimal temperature and humidity balance. The efficient operation of the control system 63 depends on the temperature and humidity detection device 64 located at the exhaust port 12, which can monitor the temperature and humidity status of the treated gas in real time and feed back these data to the control system 63 in real time.
[0057] Once the data from the temperature and humidity detection device 64 is received, the control system 63 immediately analyzes the information and automatically adjusts the working state of the second heating device 61 and the humidifying device 62 according to the preset temperature and humidity target range. If the gas temperature is detected to be lower than the predetermined range of 20 to 22°C of the hot chamber or isolator, the control system will instruct the second heating device 61 to increase the heating intensity until the air flow temperature reaches the set value. Similarly, if the humidity of the gas is not within the ideal range of 50%-60%, the control system will adjust the spraying intensity of the humidifying device 62 to ensure that the gas humidity is adjusted to a level that meets the environment of the hot chamber or isolator.
[0058] The design of the control system 63 fully considers the convenience of operation and the intelligent requirements. Through advanced algorithms and feedback mechanisms, it realizes the automatic management of the temperature and humidity adjustment process. This intelligent control not only significantly improves the response speed and adjustment accuracy of the system, but also greatly reduces the need for manual intervention and improves the stability and reliability of the entire system.
[0059] More specifically, the second heating device 61 is provided with a third strong light irradiation device 65. The third strong light irradiation device 65 is also a light source capable of emitting strong light, and strong light irradiation can accelerate the decomposition of hydrogen peroxide.
[0060] The second filter device 7 is similar in structure to the first filter device 2, and the second filter device 7 can also slow down the airflow, escape, and filter impurities. The second filter device 7 and the first filter device 2 have the function of increasing the airflow residence time, and can increase the reaction time of the airflow between the two to more fully remove hydrogen peroxide.
Claims
1. A device for rapidly removing residual hydrogen peroxide gas, characterized in that: The invention comprises a circulation pipeline (1), wherein both ends of the circulation pipeline (1) are provided with an air inlet (11) and an air outlet (12), wherein the air inlet (11) is connected to a return / exhaust device in a hot chamber or an isolator to pump the gas in the hot chamber or the isolator into the circulation pipeline (1), and the air outlet (12) is used to return the treated gas to the hot chamber or the isolator, and a first filtering device (2) for slowing down the air flow and filtering impurities, a first heating device (3) for heating the gas to accelerate the decomposition of hydrogen peroxide, a chemical solution spraying device (4) for reducing or neutralizing hydrogen peroxide, a cooling and dehumidifying device (5) for reducing the air flow temperature to precipitate hydrogen peroxide liquid and remove moisture in the air, a temperature and humidity adjustment device (6) for adjusting the temperature and humidity of the air to meet the temperature and humidity of a Class A clean environment, and a second filtering device (7) for slowing down the escape of the air flow and filtering impurities are sequentially arranged between the air inlet (11) and the air outlet (12).
2. The device for rapidly removing residual hydrogen peroxide gas according to claim 1, characterized in that: The first heating device (3) is provided with a first strong light irradiation device (31) for accelerating the decomposition of hydrogen peroxide.
3. The device for rapidly removing residual hydrogen peroxide gas according to claim 1, characterized in that: The chemical solution spraying device (4) includes a device capable of spraying a solution containing Cu 2+ The first ion solution spraying device (41) of the solution and the first ion solution spraying device (41) of the solution 2+ A second ion solution spraying device (42) of the solution.
4. The device for rapidly removing residual hydrogen peroxide gas according to claim 3, characterized in that: The chemical solution spraying device (4) further comprises an alkaline solution spraying device (43) for spraying an alkaline solution to neutralize hydrogen peroxide. The alkaline solution spraying device (43) is located before the first ion solution spraying device (41) and the second ion solution spraying device (42).
5. The device for rapidly removing residual hydrogen peroxide gas according to claim 4, characterized in that: The first ion solution spraying device (41), the second ion solution spraying device (42) and the alkaline solution spraying device (43) all comprise a liquid storage device (4a), a water pump (4b), a plurality of spraying heads (4c) arranged in the circulation pipeline (1), and a water collection tray (4d) arranged below the spraying heads (4c).
6. The device for rapidly removing residual hydrogen peroxide gas according to claim 1, characterized in that: The cooling and dehumidifying device (5) comprises a zigzag heat exchanger (51) arranged in the circulation pipe (1), and a refrigerant circulates in the heat exchanger (51).
7. The device for rapidly removing residual hydrogen peroxide gas according to claim 6, characterized in that: The cooling and dehumidifying device (5) is provided with a second strong light irradiation device (52).
8. The device for rapidly removing residual hydrogen peroxide gas according to claim 1, characterized in that: The temperature and humidity adjustment device (6) comprises a second heating device (61) for heating the air flow, and a humidifying device (62) for spraying water mist.
9. The device for rapidly removing residual hydrogen peroxide gas according to claim 8, characterized in that: The temperature and humidity adjustment device (6) further comprises a control system (63) for controlling the second heating device (61) and the humidifying device (62), and the control system (63) is connected to a temperature and humidity detection device (64) provided at the exhaust port (12), and the control system (63) regulates the second heating device (61) and the humidifying device (62) according to data fed back by the temperature and humidity detection device (64).
10. The device for rapidly removing residual hydrogen peroxide gas according to claim 8, characterized in that: The second heating device (61) is provided with a third strong light irradiation device (65).