Evaporation line source crucible convenient to heat
By setting a heating structure between the inner and outer layers of the evaporation line source crucible and connecting it with the power supply through the box-shaped crucible base, the problem of easy damage to the crucible heating structure in the prior art is solved, and more efficient heating is achieved and maintenance costs are reduced.
Patent Information
- Application Number
- CN202421569932.3
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-07-04
- Publication Date
- 2025-04-22
- Estimated Expiration
- 2034-07-04
AI Technical Summary
In the existing evaporation equipment, the narrow spacing between the crucible and the evaporation cavity wall leads to the easy damage to the heating structure, which increases the time cost of repair and replacement and reduces production efficiency.
A heated evaporation line source crucible is designed to facilitate heating. By setting a heating structure between the inner line source crucible and the outer line source crucible, heat is transmitted to the evaporation chamber through the inner crucible and connected to the power supply through the box-shaped crucible base, ensuring that the heating structure is built into the crucible and avoiding contact with the cavity wall of the evaporation device.
It reduces the risk of heating structure damage, reduces maintenance time and consumables costs, and improves the stability and production efficiency of the evaporation process.
Smart Images
Figure CN222781672U_ABST
Abstract
Description
Technical Field
[0001] The present application relates to the technical field of evaporation crucibles, and in particular to an evaporation line source crucible which is easy to heat. Background Art
[0002] Evaporation technology is a process that evaporates organic materials by heating, causing them to sublimate or vaporize and condense and deposit as thin films on the surface of a substrate. It is widely used in the production of organic light-emitting diodes (OLEDs). The evaporation process usually requires placing a crucible in an evaporation chamber of an evaporation device and heating the crucible through a heating structure set on the wall of the evaporation chamber.
[0003] In existing evaporation equipment, in order to ensure heating efficiency and heat preservation effect, the distance between the crucible and the wall of the evaporation chamber is usually designed to be very narrow, generally between 0.5 and 1 cm. Although this design can improve heating efficiency, it also brings inconvenience in operation. When taking and placing the crucible in a narrow space, the crucible can easily collide with the heating structure on the wall of the chamber, causing damage to the heating structure. This not only causes a waste of equipment resources, but also increases the time cost of maintenance and replacement, thereby reducing production efficiency.
[0004] Therefore, how to design an evaporation line source crucible that is easy to heat and can reduce the risk of damage during operation has become an important issue in improving the stability and production efficiency of the evaporation process. Utility Model Content
[0005] In view of the shortcomings of the prior art, the purpose of the present application is to provide a vapor deposition line source crucible that is easy to heat, so as to solve the problems raised in the above background technology.
[0006] According to one aspect of the present application, a vapor deposition line source crucible that is easy to heat includes an inner line source crucible, an outer line source crucible, a line source crucible cover, a heating structure and a box-shaped crucible base, wherein the inner line source crucible is provided with a line source crucible cover on the top, the inner line source crucible is arranged in the outer line source crucible, and a gap is left between the outer side wall of the inner line source crucible and the inner side wall of the outer line source crucible, and a heating structure is arranged in the gap, a socket 1 and a socket 2 are provided at the bottom of the outer line source crucible, and the socket 1 and the socket 2 are respectively electrically connected to the neutral line and the live line of the heating structure, the outer line source crucible is arranged in the box-shaped crucible base, and a plug 1 and a plug 2 are respectively provided at positions corresponding to the socket 1 and the socket 2 on the inner bottom surface of the box-shaped crucible base, the plug 1 and the plug 2 are respectively electrically connected to the neutral line and the live line of the power supply, and the plug 1 and the plug 2 are respectively inserted into the socket 1 and the socket 2.
[0007] Preferably, the bottom of the inner line source crucible is recessed and provided with a plurality of evaporation partition grooves, and the plurality of evaporation partition grooves are evenly and equidistantly distributed along the length direction of the inner line source crucible, and a gap is provided between the outer side walls of each adjacent two evaporation partition grooves. The interior of the outer line source crucible is provided with a plurality of partition plates vertically fixed along its length direction, and the plurality of partition plates are evenly and equidistantly distributed and divide the inner cavity of the outer line source crucible into a plurality of heating accommodating cavities. The setting positions of the plurality of heating accommodating cavities correspond one-to-one to the setting positions of the plurality of evaporation partition grooves. When the inner line source crucible is arranged in the outer line source crucible, each of the evaporation partition grooves is arranged in the corresponding heating accommodating cavity.
[0008] Preferably, a heating structure is arranged between the outer wall of each of the evaporation partition grooves and the heating accommodating chamber, and the bottom of the outer layer line source crucible located in each of the heating accommodating chambers is provided with the socket one and the socket two, and the socket one and the socket two are respectively electrically connected to the neutral wire and the live wire of the heating structure, and the plug one and the plug two are respectively arranged on the inner bottom surface of the box-shaped crucible base at the position corresponding to each of the heating accommodating chambers, and the plug one and the plug two are respectively inserted into the corresponding socket one and the socket two.
[0009] Preferably, the heating structure is a serpentine coiled heating wire.
[0010] Preferably, a connecting boss 1 extends from the outer side of the top opening of the inner line source crucible, and a connecting boss 2 extends from the outer side of the top opening of the outer line source crucible. The inner line source crucible and the outer line source crucible are fixedly connected to the box-shaped crucible base by screws passing through the connecting boss 1 and the connecting boss 2 in turn.
[0011] Preferably, a plurality of fixing bars are arranged on the inner side wall of the box-shaped crucible base along its circumference, and the fixing bars are in close contact with the outer side wall of the outer layer line source crucible.
[0012] The advantages of the present application over the prior art are as follows: the present application provides an evaporation line source crucible that is easy to heat, and a heating structure is arranged between the inner line source crucible and the outer line source crucible, so that the heat generated by the heating structure is conducted to the evaporation chamber through the inner line source crucible, so that the evaporation material in the evaporation chamber is heated and vaporized or sublimated; since the heating structure is built between the inner line source crucible and the outer line source crucible, rather than being arranged on the cavity wall of the evaporation device, when the line source crucible is placed in the accommodating cavity of the evaporation device, the heating structure will not be damaged, thereby reducing the maintenance time cost and consumables cost. BRIEF DESCRIPTION OF THE DRAWINGS
[0013] Figure 1It is a three-dimensional diagram of an evaporation line source crucible that is easy to heat according to an embodiment of the present application.
[0014] Figure 2 It is a main cross-sectional view of an evaporation line source crucible that is easy to heat according to an embodiment of the present application.
[0015] Figure 3 It is a side sectional view of an evaporation line source crucible that is easy to heat according to an embodiment of the present application.
[0016] Figure 4 It is a schematic structural diagram of a heating structure of an evaporation line source crucible that is easy to heat according to an embodiment of the present application.
[0017] Figure numerals: 1. Inner line source crucible; 2. Outer line source crucible; 3. Line source crucible cover; 4. Heating structure; 5. Box-shaped crucible base; 6. Socket one; 7. Socket two; 8. Plug one; 9. Plug two; 10. Evaporation partition groove; 11. Partition plate; 12. Heating accommodating chamber; 13. Fixing bar. DETAILED DESCRIPTION
[0018] In order to make the content of this application easier to understand, the technical solutions in the embodiments of this application will be described clearly and completely in conjunction with the drawings in the embodiments of this application. It should be noted that the words "front", "rear", "left", "right", "upper" and "lower" used in the following description refer to the attached drawings. Figure 2 As used herein, the terms "inward" and "outward" refer to directions toward and away from, respectively, the geometric center of the particular component.
[0019] like Figure 1 to Figure 4As shown, a vapor deposition line source crucible that is easy to heat includes an inner line source crucible 1, an outer line source crucible 2, a line source crucible cover 3, a heating structure 4 and a box-shaped crucible base 5, characterized in that a line source crucible cover 3 is arranged on the top of the inner line source crucible 1, a connecting boss 1 is extended outside the top opening of the inner line source crucible 1, the inner line source crucible 1 is arranged in the outer line source crucible 2, a connecting boss 2 is extended outside the top opening of the outer line source crucible 2, the inner line source crucible 1 and the outer line source crucible 2 are fixedly connected by screws passing through the connecting boss 1 and the connecting boss 2 in sequence, and a gap is left between the outer side wall of the inner line source crucible 1 and the inner side wall of the outer line source crucible 2, and the heating structure 4 is arranged in the gap. Specifically, the bottom of the inner line source crucible 1 is recessed downward and provided with a plurality of vapor deposition partition grooves 1 0, and multiple evaporation separation grooves 10 are evenly and equidistantly distributed along the length direction of the inner line source crucible 1, and a gap is provided between the outer side walls of each adjacent two evaporation separation grooves 10, and multiple partition plates 11 are vertically fixed inside the outer line source crucible 2 along its length direction, and the multiple partition plates 11 are evenly and equidistantly distributed and divide the inner cavity of the outer line source crucible 2 into multiple heating accommodating chambers 12, and the setting positions of the multiple heating accommodating chambers 12 correspond to the setting positions of the multiple evaporation separation grooves 10 one by one. When the inner line source crucible 1 is arranged in the outer line source crucible 2, each evaporation separation groove 10 is arranged in the corresponding heating accommodating chamber 12, and a heating structure 4 is provided between the outer side wall of each evaporation separation groove 10 and the heating accommodating chamber 12, and the heating structure 4 is a serpentine coiled heating wire (such as Figure 4 As shown, the heating wire is wound around the outer wall of the heating accommodating cavity 12, and a socket 1 6 and a socket 2 7 are provided at the bottom of the outer layer line source crucible 2 located in each heating accommodating cavity 12, and the socket 1 6 and the socket 2 7 are electrically connected to the neutral line and the live line of the heating structure 4 respectively, and the outer layer line source crucible 2 is arranged in the box-shaped crucible base 5, and the inner layer line source crucible 1 and the outer layer line source crucible 2 are fixedly connected to the box-shaped crucible base 5 by screws passing through the connecting boss 1 and the connecting boss 2 in sequence, and a plug 8 is provided on the inner bottom surface of the box-shaped crucible base 5 at the position corresponding to each heating accommodating cavity 12. And plug 2 9, and plug 1 8 and plug 2 9 are respectively arranged corresponding to socket 1 6 and socket 2 7, plug 1 8 and plug 2 9 are respectively electrically connected to the neutral line and live line of the power supply. When in use, plug 1 8 and plug 2 9 are respectively inserted into the corresponding socket 1 6 and socket 2 7. In addition, a plurality of fixing bars 13 are arranged on the inner side wall of the box-shaped crucible base 5 along its circumference. When the outer line source crucible 2 is placed in the box-shaped crucible base 5, the fixing bars 13 are in contact with the outer side wall of the outer line source crucible 2 to ensure the stable placement of the outer line source crucible 2 and the inner line source crucible 1.
[0020] In summary, when in use, the assembled inner line source crucible 1 and the outer line source crucible 2 are placed in the box-shaped crucible base 5, so that the plug 1 8 and the plug 2 9 are respectively inserted into the corresponding socket 1 6 and the socket 2 7, so that the heating structure 4 is powered on for heating, and the heating structure 4 is arranged between the inner line source crucible 1 and the outer line source crucible 2, so that the heat generated by the heating structure 4 is transferred to the evaporation chamber through the inner line source crucible 1, so that the evaporation material in the evaporation chamber is heated and vaporized or sublimated. Since the heating structure 4 is built between the inner line source crucible 1 and the outer line source crucible 2, instead of being arranged on the cavity wall of the evaporation device, when the line source crucible is placed in the accommodating cavity of the evaporation device, the heating structure 4 will not be damaged, thereby reducing the maintenance time cost and consumables cost.
[0021] The above embodiments are only used to illustrate the technical solutions of the embodiments of the present application, rather than to limit them. Although the embodiments of the present application are described in detail with reference to the above embodiments, it should be understood by those skilled in the art that the technical solutions described in the above embodiments can still be modified, or some of the technical features can be replaced by equivalents, without departing from the spirit and scope defined by the claims of the present application.
Claims
1. A vapor deposition line source crucible that is easy to heat, comprising an inner line source crucible (1), an outer line source crucible (2), a line source crucible cover (3), a heating structure (4) and a box-shaped crucible base (5), characterized in that: A line source crucible cover (3) is arranged on the top of the inner line source crucible (1), the inner line source crucible (1) is arranged in the outer line source crucible (2), and a gap is left between the outer side wall of the inner line source crucible (1) and the inner side wall of the outer line source crucible (2), and a heating structure (4) is arranged in the gap, and a socket 1 (6) and a socket 2 (7) are opened at the bottom of the outer line source crucible (2), and the socket 1 (6) and the socket 2 (7) are respectively connected to the neutral line and the neutral line of the heating structure (4). The outer layer line source crucible (2) is arranged in a box-shaped crucible base (5), and a plug 1 (8) and a plug 2 (9) are respectively arranged on the inner bottom surface of the box-shaped crucible base (5) at positions corresponding to the socket 1 (6) and the socket 2 (7), and the plug 1 (8) and the plug 2 (9) are respectively electrically connected to the neutral line and the live line of the power supply, and the plug 1 (8) and the plug 2 (9) are respectively inserted into the socket 1 (6) and the socket 2 (7).
2. The evaporation line source crucible that is easy to heat according to claim 1, characterized in that: The bottom of the inner line source crucible (1) is recessed downward and is provided with a plurality of evaporation partition grooves (10), and the plurality of evaporation partition grooves (10) are evenly and equidistantly distributed along the length direction of the inner line source crucible (1), and a gap is provided between the outer side walls of each two adjacent evaporation partition grooves (10). The interior of the outer line source crucible (2) is vertically fixed with a plurality of partition plates (11) along its length direction, and the plurality of partition plates (11) are evenly and equidistantly distributed and divide the inner cavity of the outer line source crucible (2) into a plurality of heating accommodating cavities (12). The setting positions of the plurality of heating accommodating cavities (12) correspond one-to-one to the setting positions of the plurality of evaporation partition grooves (10). When the inner line source crucible (1) is arranged in the outer line source crucible (2), each of the evaporation partition grooves (10) is arranged in the corresponding heating accommodating cavity (12).
3. The evaporation line source crucible that is easy to heat according to claim 2, characterized in that: A heating structure (4) is provided between the outer wall of each of the evaporation partition grooves (10) and the interior of the heating accommodating cavity (12), and the bottom of the outer layer line source crucible (2) located in each of the heating accommodating cavities (12) is provided with the socket one (6) and the socket two (7), and the socket one (6) and the socket two (7) are respectively electrically connected to the neutral line and the live line of the heating structure (4), and the plug one (8) and the plug two (9) are respectively provided on the inner bottom surface of the box-shaped crucible base (5) at the position corresponding to each of the heating accommodating cavities (12), and the plug one (8) and the plug two (9) are respectively inserted into the corresponding socket one (6) and the socket two (7).
4. The evaporation line source crucible that is easy to heat according to claim 3, characterized in that: The heating structure (4) is a serpentine coiled heating wire.
5. The evaporation line source crucible that is easy to heat according to claim 1, characterized in that: A first connecting boss extends outside the top opening of the inner line source crucible (1), and a second connecting boss extends outside the top opening of the outer line source crucible (2). The inner line source crucible (1) and the outer line source crucible (2) are fixedly connected to the box-shaped crucible base (5) by screws passing through the first connecting boss and the second connecting boss in sequence.
6. The evaporation line source crucible that is easy to heat according to claim 1, characterized in that: A plurality of fixing bars (13) are arranged on the inner side wall of the box-shaped crucible base (5) along its circumference, and the fixing bars (13) are in close contact with the outer side wall of the outer layer line source crucible (2).