Cavity and photovoltaic cell production equipment

Abstract

The utility model relates to the technical field of photovoltaic cell production equipment, and provides a cavity and photovoltaic cell production equipment, the cavity comprises a chamber, a gate valve and a turnover mechanism, the first end of the chamber is provided with a first opening for a carrier plate to pass through, and the gate valve is arranged in the chamber and used for blocking the first opening; the turnover mechanism is arranged in the cavity, the turnover mechanism is connected with the gate valve, the turnover mechanism is arranged to be capable of driving the gate valve to be switched between a first state and a second state, in the first state, the gate valve can block the first opening, and in the second state, the gate valve can be away from the first opening so as to open the first opening; an external independent gate valve is omitted, the gate valve is integrated in the cavity of the cavity, the number of parts is reduced, cost is reduced, the installation process is simpler and more direct, production efficiency is improved, potential fault points are reduced due to the design of the integrated gate valve, and therefore maintenance cost is reduced.

Description

Technical Field

[0001] The utility model relates to the technical field of photovoltaic cell production equipment, in particular to a cavity and photovoltaic cell production equipment. Background Art

[0002] The production equipment of photovoltaic cells is usually composed of multiple plate-type chambers with different functions connected together. The reaction gas and function of each chamber are different. In order to isolate the gas from each chamber and not affect the silicon wafer carrier from entering another chamber, a gate valve that can be opened and closed is required. It is installed between the chambers or on the outermost side of the chamber to open and close according to the system requirements.

[0003] At present, gate valves generally adopt independent external gate valves, that is, the entire gate valve is an independent mechanism installed outside the cavity. This method not only makes the cavity and the gate valve have separate chambers, increasing material costs, but also adds gate valve installation procedures during production line assembly. Utility Model Content

[0004] The utility model provides a cavity and photovoltaic cell production equipment, which are used to solve the defects of high cavity cost and low installation efficiency caused by a gate valve structure in the prior art.

[0005] The utility model provides a cavity, comprising:

[0006] a chamber, wherein a first end of the chamber is provided with a first opening for passing a carrier plate;

[0007] a gate valve, disposed in the chamber and used to block the first opening;

[0008] A flip mechanism is arranged in the chamber, and the flip mechanism is connected to the gate valve. The flip mechanism is configured to drive the gate valve to switch between a first state and a second state. In the first state, the gate valve can block the first opening, and in the second state, the gate valve can move away from the first opening to open the first opening.

[0009] The cavity provided by the utility model further comprises a cavity cover, which is flippably arranged on the top of the cavity and is used to close or open the cavity.

[0010] According to the cavity provided by the utility model, the second end of the chamber is provided with a second opening, and the first opening corresponds to the first opening.

[0011] According to the cavity provided by the utility model, the flipping mechanism includes:

[0012] A rotating shaft, rotatably disposed inside the first end of the chamber;

[0013] A plurality of flip arms are provided, and the plurality of flip arms are arranged at intervals along the axial direction of the rotating shaft. The first end of the flip arm is connected to the gate valve, and the second end of the flip arm is connected to the rotating shaft.

[0014] The cavity provided by the utility model further includes a driving device, which is arranged outside the chamber and is drivingly connected to the rotating shaft for driving the rotating shaft to rotate.

[0015] According to the cavity provided by the utility model, it also includes a support seat, the number of the support seats is the same as the flip arms and they correspond one to one, a plurality of the support seats are fixed on the inner side of the first end of the chamber, and the rotating shaft is axially arranged in sequence in the plurality of the support seats.

[0016] According to the cavity provided by the utility model, the cavity cover is connected to the top of the cavity by bolts.

[0017] In a second aspect, the utility model further provides a photovoltaic cell production device, comprising a plurality of cavities as described in the first aspect, wherein the chambers of two adjacent cavities are connected.

[0018] According to the photovoltaic cell production equipment provided by the utility model, two adjacent chambers are connected by a bolt group.

[0019] According to the photovoltaic cell production equipment provided by the utility model, the first end of one of the two adjacent chambers is connected to the second end of the other through a bolt group, and the first opening of the first end of one of them corresponds to the second opening of the second end of the other.

[0020] The utility model provides a cavity, including a chamber, a gate valve and a flip mechanism. By eliminating the external independent gate valve, the external space of the cavity is released, the equipment layout is more compact, and the space utilization is optimized. By integrating the gate valve in the chamber of the cavity, the gate valve can be operated in the chamber to close or open the first opening. There is no need to set a separate chamber with a gate valve outside the cavity, and the reduction of connection points is beneficial to improving the sealing of the chamber. The number of components is reduced, the cost is reduced, and the installation process becomes simpler and more direct. No additional steps are required to install and debug the external gate valve, which improves production efficiency. The design of the integrated gate valve reduces potential failure points, thereby reducing maintenance costs.

[0021] The utility model also provides a photovoltaic cell production device, including the above-mentioned cavity. The derivation process of the beneficial effect is generally similar to the derivation process of the beneficial effect brought by the above-mentioned cavity, and will not be repeated here. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] In order to more clearly illustrate the technical solutions in the present invention or the prior art, a brief introduction will be given below to the drawings required for use in the embodiments or the description of the prior art. Obviously, the drawings described below are some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.

[0023] Figure 1 It is a top view of the cavity in the open state provided by the embodiment of the utility model.

[0024] Figure 2 It is a schematic diagram of the internal structure of the chamber provided in an embodiment of the utility model.

[0025] Figure 3 It is a top view of the cavity in a closed state provided by an embodiment of the utility model.

[0026] Figure 4 It is a structural schematic diagram of a photovoltaic cell production device provided in an embodiment of the utility model.

[0027] Reference numerals:

[0028] 1. Chamber; 11. First opening; 2. Gate valve; 3. Rotating shaft; 4. Chamber cover; 5. Flip arm; 6. Driving device; 7. Support seat; 8. Bolt group. DETAILED DESCRIPTION

[0029] In order to make the purpose, technical solution and advantages of the utility model clearer, the technical solution of the utility model will be described clearly and completely in conjunction with the drawings in the utility model. Obviously, the described embodiments are part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0030] Combine the following Figure 1-Figure 4 The utility model describes a cavity and photovoltaic cell production equipment.

[0031] This embodiment provides a cavity, including a chamber 1, a gate valve 2 and a turnover mechanism.

[0032] Among them, the first end of the chamber 1 is provided with a first opening 11 for the carrier plate to pass through, and the gate valve 2 is provided in the chamber 1 to block the first opening 11; the flip mechanism is provided in the chamber 1, and the flip mechanism is connected to the gate valve 2, and the flip mechanism is configured to be able to drive the gate valve 2 to switch between a first state and a second state. In the first state, the gate valve 2 can block the first opening 11, and in the second state, the gate valve 2 can move away from the first opening 11 to open the first opening 11.

[0033] It can be seen from the above scheme that, compared with the prior art, the utility model eliminates the external independent gate valve 2, thereby releasing the external space of the cavity, making the equipment layout more compact, and optimizing the space utilization. By integrating the gate valve 2 in the chamber 1 of the cavity, the gate valve 2 can be operated in the chamber 1 to close or open the first opening 11. There is no need to separately set up the chamber 1 with the gate valve 2 outside the cavity. The reduction of connection points is beneficial to improving the sealing of the chamber 1, and the number of components is reduced, reducing costs, and the installation process becomes simpler and more direct. No additional steps are required to install and debug the external gate valve 2, which improves production efficiency. The design of the integrated gate valve 2 reduces potential failure points, thereby reducing maintenance costs.

[0034] In this embodiment, the second end of the chamber 1 is provided with a second opening, and the first opening 11 corresponds to the first opening 11 .

[0035] With such arrangement, the material supported by the carrier plate can enter from the second opening and exit from the first opening 11 , so that the carrier plate enters from one end of the cavity and exits from the other end.

[0036] like Figure 2 As shown, the flip mechanism includes a rotating shaft 3 and a flip arm 5, wherein the rotating shaft 3 is rotatably arranged on the inner side of the first end of the chamber 1; a plurality of flip arms 5 are arranged, and the plurality of flip arms 5 are arranged at intervals along the axial direction of the rotating shaft 3, the first end of the flip arm 5 is fixedly connected to the gate valve 2, and the second end of the flip arm 5 is fixedly connected to the rotating shaft 3; in this arrangement, since the flip arm 5 is connected between the rotating shaft 3 and the gate valve 2, the rotating shaft 3 drives the flip arm 5 to move the gate valve 2 by rotating, so that it is close to or away from the first opening 11, thereby realizing that the gate valve 2 closes or opens the first opening 11.

[0037] In this embodiment, a driving device 6 is also included. The driving device 6 is arranged outside the chamber 1. The driving device 6 is connected to the rotating shaft 3 for driving the rotating shaft 3 to rotate. The driving device 6 can be a motor, and the main shaft of the motor is connected to the rotating shaft 3. The driving device 6 can also be any one of a cylinder, a hydraulic cylinder or an electric cylinder.

[0038] For example, the driving device 6 is a cylinder, which is installed on the outside of the cavity. A toothed plate is provided on the telescopic rod of the cylinder, and a gear is provided on the rotating shaft 3 corresponding to the telescopic rod. The gear and the toothed plate are meshed and transmitted to each other. The gear is driven to rotate by the linear motion of the telescopic rod to drive the rotating shaft 3 to rotate, thereby realizing the adjustment of the state of the gate valve 2 by the rotating shaft 3. By adopting the cylinder, there is no need for oil lubrication maintenance, which reduces the difficulty of maintenance, improves the production efficiency of the photovoltaic cell, and at the same time, the service life of the cylinder is longer.

[0039] In some embodiments, a support seat 7 is further included. The number of support seats 7 is the same as that of the flip arms 5 and they correspond one to one. Multiple support seats 7 are fixed to the inner side of the first end of the chamber 1, and the rotating shaft 3 is sequentially arranged in the multiple support seats 7 along the axial direction. The support seat 7 can be fixed to the inner side of the first end of the chamber 1 by bolts or welding. The installation of the rotating shaft 3 is achieved by setting the support seat 7. By setting multiple support seats 7, the bending deformation of the rotating shaft 3 can be reduced, so that each part of the rotating shaft 3 is evenly stressed, and the reliability of the installation structure is guaranteed.

[0040] Optionally, a bearing is provided in the support seat 7 , and the rotating shaft 3 is connected to the bearing to ensure smooth rotation of the rotating shaft 3 in the support seat 7 .

[0041] Furthermore, a sealing ring may be provided on the peripheral side of the gate valve 2 to ensure that the gate valve 2 has good sealing performance after blocking the first opening 11 .

[0042] Reference Figure 3 In this embodiment, a chamber cover 4 is also included, which is flippably arranged on the top of the chamber 1 and is used to close or open the chamber 1. In this arrangement, by integrating the gate valve 2 in the chamber 1, the gate valve 2 and the chamber 1 share a chamber cover 4, which simplifies the overall structure and makes the structure compact, reduces the number of required materials and components, and also reduces the steps in the processing and assembly process, thereby reducing the manufacturing cost; and the opening operation is more convenient, which facilitates the maintenance of the entire chamber 1 and reduces the maintenance time.

[0043] Optionally, the cavity cover 4 is connected to the top of the chamber 1 by bolts, that is, after the cavity cover 4 closes the chamber 1, the two are connected by bolts to form a closed cavity to ensure the airtightness of the chamber.

[0044] Reference Figure 4 The embodiment of the utility model further provides a photovoltaic cell production device, comprising a plurality of the above-mentioned cavities, wherein the chambers 1 of two adjacent cavities are connected. Optionally, the two adjacent chambers 1 are connected by a bolt group 8.

[0045] Since the photovoltaic cell production equipment has the above-mentioned cavity, it has all the advantages of the cavity. In addition, since the gate valve 2 is directly integrated in the chamber 1, there is no need to install an independent gate valve 2 and a separate chamber 1 outside the cavity, so that the chambers 1 of the two cavities can be directly connected, making the equipment more compact in spatial layout, simplifying the entire assembly process, saving installation time, reducing assembly difficulty, and helping to improve production efficiency.

[0046] In the present embodiment, the first end of one of the two adjacent chambers 1 is connected to the second end of the other through a bolt group 8, and the outer sides of the ends of the two chambers 1 are in contact, and the first opening 11 of the first end of one of them corresponds to the second opening of the second end of the other. By closing the gate valve 2 at the first opening 11, the first opening 11 is blocked and the second opening of the second end of the adjacent chamber 1 can also be blocked at the same time. Therefore, for the two connected chambers, it is only necessary to set a gate valve 2 in the chamber 1 of one of the chambers, and the first opening 11 is closed by the gate valve 2, so that the sealing effect of the two chambers 1 at the connection can be achieved at the same time.

[0047] Such an arrangement not only improves the assembly efficiency, but also saves the number of parts and ensures the sealing effect of the chamber 1.

[0048] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the utility model, rather than to limit it. Although the utility model has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the aforementioned embodiments, or make equivalent replacements for some of the technical features therein. However, these modifications or replacements do not deviate the essence of the corresponding technical solutions from the spirit and scope of the technical solutions of the various embodiments of the utility model.

Claims

1. A cavity, characterized in that: include: A chamber (1), wherein a first end of the chamber (1) is provided with a first opening (11) for allowing a carrier plate to pass through; a gate valve (2), arranged in the chamber (1) and used for blocking the first opening (11); A flip mechanism is arranged in the chamber (1), the flip mechanism is connected to the gate valve (2), and the flip mechanism is arranged to be able to drive the gate valve (2) to switch between a first state and a second state. In the first state, the gate valve (2) can block the first opening (11), and in the second state, the gate valve (2) can move away from the first opening (11) to open the first opening (11).

2. The cavity according to claim 1, characterized in that: It also comprises a cavity cover (4), which is arranged on the top of the cavity (1) in a flippable manner and is used to close or open the cavity (1).

3. The cavity according to claim 1, characterized in that: The second end of the chamber (1) is provided with a second opening, and the first opening (11) corresponds to the first opening (11).

4. The cavity according to claim 1, characterized in that: The turning mechanism comprises: A rotating shaft (3) rotatably arranged inside the first end of the chamber (1); A plurality of flip arms (5) are provided, and the plurality of flip arms (5) are arranged at intervals along the axial direction of the rotating shaft (3); a first end of the flip arm (5) is connected to the gate valve (2), and a second end of the flip arm (5) is connected to the rotating shaft (3).

5. The cavity according to claim 4, characterized in that: It also comprises a driving device (6), wherein the driving device (6) is arranged outside the chamber (1), and the driving device (6) is in driving connection with the rotating shaft (3) for driving the rotating shaft (3) to rotate.

6. The cavity according to claim 4, characterized in that: It also includes a support seat (7), the number of the support seats (7) is the same as the number of the flip arms (5) and they correspond one to one, the multiple support seats (7) are all fixed on the inner side of the first end of the chamber (1), and the rotating shaft (3) is axially arranged in sequence in the multiple support seats (7).

7. The cavity according to claim 2, characterized in that: The chamber cover (4) is connected to the top of the chamber (1) via bolts.

8. A photovoltaic cell production device, characterized in that: It comprises a plurality of cavities according to any one of claims 1 to 7, wherein the chambers (1) of two adjacent cavities are connected.

9. The photovoltaic cell production equipment according to claim 8, characterized in that: Two adjacent chambers (1) are connected via a bolt group (8).

10. The photovoltaic cell production equipment according to claim 9, characterized in that: The first end of one of the two adjacent chambers (1) is connected to the second end of the other via a bolt group (8), and the first opening (11) of the first end of one of the chambers corresponds to the second opening of the second end of the other chamber.

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