Film coating assembly and film coating equipment

Abstract

The utility model is applicable to the technical field of coating equipment, and provides a coating component and coating equipment, the coating component comprises a coating cavity internally provided with a cavity, the coating cavity is provided with a feed port and a discharge port which are communicated with the cavity and arranged oppositely, and an air inlet and an air outlet which are communicated with the cavity and arranged oppositely, the air inlet direction of the air inlet and the air outlet direction of the air outlet are perpendicular to the direction from the feeding port to the discharging port. The first gas uniformizing plate is provided with a plurality of first gas uniformizing holes, and the first gas uniformizing plate is arranged in the cavity and is opposite to the gas inlet; the second gas uniformizing plate is provided with a plurality of second gas uniformizing holes, and the second gas uniformizing plate is arranged in the cavity and is opposite to the gas outlet; and the transmission mechanism is arranged in the cavity and is used for driving the coating workpiece to move from the feeding hole to the discharging hole. According to the coating component provided by the utility model, the mixing uniformity of the coating material in the coating cavity can be improved, so that the coating quality of the coating equipment is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of coating equipment, in particular to a coating component and coating equipment. Background Art

[0002] Plasma Enhanced Chemical Vapor Deposition (PECVD) coating equipment uses microwaves or radio frequencies to ionize the gas containing the atoms of the film components, forming plasma locally. It uses the principle that plasma has strong chemical activity and is easy to react, thereby depositing the required thin film on the coating workpiece.

[0003] In the prior art, the PECVD coating equipment needs to be provided with a coating chamber having a chamber. When coating, the coating equipment needs to introduce a carrier gas (such as an inert gas) into the chamber from the air inlet of the coating chamber, and use a vacuum pump to continuously extract the carrier gas from the air outlet of the coating chamber to maintain a vacuum environment in the chamber, and use the carrier gas to drive the atomized coating material entering the atomizer to mix evenly in the chamber, and the coating material deposits a coating on the coating workpiece in the chamber. However, the air inlet direction of the air inlet and the air outlet direction of the air outlet on the coating chamber of the existing coating equipment are usually set parallel to the coating workpiece, and the carrier gas entering the air inlet is not easy to drive the coating material to mix evenly in the coating chamber, and the coating material has poor mixing uniformity in the coating chamber, which leads to poor coating quality of the coating equipment. Utility Model Content

[0004] The utility model provides a coating component, aiming to solve the problem that the coating equipment in the prior art has poor mixing uniformity of coating materials in a coating cavity, resulting in poor coating quality of the coating equipment.

[0005] The utility model is implemented by providing a coating component for coating equipment, comprising:

[0006] A coating cavity with a chamber therein, wherein the coating cavity is provided with a feed port and a discharge port connected to and opposite to the chamber, and an air inlet and an air outlet connected to and opposite to the chamber, wherein the air inlet direction of the air inlet and the air outlet direction of the air outlet are perpendicular to the direction from the feed port to the discharge port;

[0007] A first air-distributing plate provided with a plurality of first air-distributing holes, wherein the first air-distributing plate is arranged in the chamber and opposite to the air inlet;

[0008] A second air-distributing plate having a plurality of second air-distributing holes, the second air-distributing plate being disposed in the chamber and opposite to the air outlet; and

[0009] The transmission mechanism disposed in the chamber is used to drive the coating workpiece to move from the feed port to the discharge port.

[0010] Preferably, the coating chamber includes a frame, a cover plate detachably covering the frame, and a side plate detachably covering the frame, the cover plate, the side plate and the frame cover together form the chamber, the feed port and the discharge port are respectively opened on two opposite side walls of the frame, the air inlet is opened on the cover plate, and the air outlet is opened on the bottom wall of the frame.

[0011] Preferably, the cover plate and the side plate are respectively provided with handles.

[0012] Preferably, the volume of the chamber is 50 to 200 liters.

[0013] Preferably, it also includes heating plates attached to the upper and lower surfaces of the coating cavity.

[0014] Preferably, it also includes:

[0015] The first electrode plate and the second electrode plate are arranged between the first gas uniformizing plate and the second gas uniformizing plate, the first electrode plate and the second electrode plate are arranged in parallel and spaced apart, and the transmission mechanism is arranged between the first electrode plate and the second electrode plate.

[0016] Preferably, the transmission mechanism includes a belt or chain installed in the chamber and arranged along the direction from the feed port to the discharge port, and a driving device transmission connected to the belt or chain, and the driving device can drive the belt or chain to drive the coated workpiece to move from the feed port to the discharge port.

[0017] Preferably, it also includes:

[0018] A first fixed block and a second fixed block are fixed in the chamber, the first gas uniformizing plate and the first electrode plate are respectively engageable with the first fixed block, and the second gas uniformizing plate and the second electrode plate are respectively engageable with the second fixed block.

[0019] The utility model also provides a coating device, comprising the coating component mentioned above.

[0020] Preferably, the coating equipment further comprises:

[0021] A first gate valve disposed at the feed inlet, used to open or close the feed inlet; and

[0022] The second gate valve arranged at the discharge port is used to open or close the discharge port.

[0023] The utility model provides a coating component, which sets the air inlet direction of the air inlet and the air outlet direction of the coating chamber to be perpendicular to the direction from the feed port to the feed port, so that the air inlet direction of the air inlet and the air outlet direction of the air outlet are both perpendicular to the transmission direction of the coating workpiece, and the carrier gas entering the air inlet diffuses vertically through the surface of the coating workpiece into the chamber and then is discharged from the air outlet, so that the carrier gas drives the coating material to be more evenly mixed in the chamber, and the coating material mixing uniformity is good, thereby ensuring the consistency of coating on the surface of the coating workpiece, thereby improving the coating quality of the coating equipment for the coating workpiece; at the same time, by correspondingly arranging a first air uniforming plate and a second air uniforming plate at the positions of the air inlet and the air outlet respectively, the first air uniforming plate is used to evenly disperse the carrier gas entering the air inlet into the chamber, and the second air uniforming plate is used to block and buffer the carrier gas discharged from the air outlet, thereby increasing the effect of the carrier gas driving the coating raw materials to mix evenly, thereby improving the mixing uniformity of the coating materials in the chamber, and further improving the coating quality of the coating workpiece. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] Figure 1 A three-dimensional diagram of a coating assembly provided by an embodiment of the utility model;

[0025] Figure 2 Another stereoscopic view of a coating assembly provided by an embodiment of the utility model;

[0026] Figure 3 A three-dimensional diagram of a coating assembly provided by an embodiment of the utility model after removing the cover plate;

[0027] Figure 4 A three-dimensional diagram of a partial structure of a coating assembly provided by an embodiment of the utility model;

[0028] Figure 5 A three-dimensional diagram of a coating device provided by an embodiment of the utility model;

[0029] Figure 6 A schematic diagram of a partial structure of a coating device provided in an embodiment of the utility model. DETAILED DESCRIPTION

[0030] In order to make the purpose, technical solution and advantages of the utility model more clear, the utility model is further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described here are only used to explain the utility model and are not used to limit the utility model.

[0031] The coating component provided by the embodiment of the utility model sets the air inlet direction of the air inlet and the air outlet direction of the coating chamber to be perpendicular to the direction from the feed port to the feed port, so that the air inlet direction of the air inlet and the air outlet direction of the air outlet are both perpendicular to the transmission direction of the coated workpiece, and the carrier gas entering the air inlet diffuses vertically through the surface of the coated workpiece into the chamber and then is discharged from the air outlet, so that the carrier gas drives the coating material to be more evenly mixed in the chamber, and the coating material mixing uniformity is good, thereby ensuring the consistency of the coating on the surface of the coated workpiece, thereby improving the coating quality of the coating equipment for the coated workpiece; at the same time, by correspondingly arranging a first air uniforming plate and a second air uniforming plate at the positions of the air inlet and the air outlet respectively, the first air uniforming plate is used to evenly disperse the carrier gas entering the air inlet into the chamber, and the second air uniforming plate is used to block and buffer the carrier gas discharged from the air outlet, thereby increasing the effect of the carrier gas driving the coating raw materials to mix evenly, improving the mixing uniformity of the coating material in the chamber, and further improving the coating quality of the coated workpiece.

[0032] Please refer to Figure 1-Figure 4 The present invention provides a coating component 1 for coating equipment, and the coating component 1 includes:

[0033] A coating chamber 11 is provided with a chamber 110 therein, and the coating chamber 11 is provided with a feed port 111 and a discharge port 112 which are connected to and opposite to the chamber 110, and an air inlet 113 and an air outlet 114 which are connected to and opposite to the chamber 110, and the air inlet direction of the air inlet 113 and the air outlet direction of the air outlet 114 are perpendicular to the direction from the feed port 111 to the discharge port 112;

[0034] A first air-distributing plate 12 having a plurality of first air-distributing holes 121 is disposed in the chamber 110 and opposite to the air inlet 113;

[0035] A second air-distributing plate 13 having a plurality of second air-distributing holes 131, the second air-distributing plate 13 being disposed in the chamber 110 and opposite to the air outlet 114; and

[0036] The transmission mechanism 14 disposed in the chamber 110 is used to drive the coating workpiece to move from the feed port 111 to the discharge port 112 .

[0037] In an embodiment of the utility model, a coating component is provided in which the air inlet 113 of the coating chamber 11 and the air outlet 114 are set to be perpendicular to the direction from the feed port 111 to the feed port 112, so that the air inlet direction of the air inlet 113 and the air outlet direction of the air outlet 114 are both perpendicular to the transmission direction of the coating workpiece, and the carrier gas entering the air inlet vertically passes through the surface of the coating workpiece and diffuses to various positions of the coating workpiece and diffuses in the chamber 110 before being discharged from the air outlet 114. The carrier gas is vertically passed through the surface of the coating workpiece and then discharged from the air outlet 114, so that the coating material is evenly distributed on the surface of the coating workpiece, and the coating raw materials are evenly mixed. The coating consistency of the coating workpiece surface is ensured, thereby improving the coating quality of the coating equipment for the coating workpiece; at the same time, by correspondingly arranging the first air uniform plate 12 and the second air uniform plate 13 at the positions of the air inlet 113 and the air outlet 114 respectively, the first air uniform plate 12 is used to evenly disperse the carrier gas entering the air inlet 113 into the chamber 110, and the second air uniform plate 13 is used to block and buffer the carrier gas discharged from the air outlet 114, thereby reducing the discharge amount and discharge speed of the carrier gas from the air outlet 114, increasing the mixing effect of the coating raw materials driven by the carrier gas, further improving the mixing uniformity of the coating materials in the chamber 110, thereby further improving the coating quality of the coating workpiece.

[0038] In the embodiment of the utility model, the air inlet 113 is connected to an external gas supply device, and the gas supply device is used to pass a carrier gas into the air inlet 113. The carrier gas can be an inert gas (such as helium, argon, etc.). The air outlet 114 is connected to a vacuum pump (not shown). The vacuum pump extracts the inert gas carrier gas in the chamber 110 from the air outlet 114 to keep the chamber 110 in a vacuum state. The air inlet direction of the air inlet 113 and the air outlet direction of the air outlet 114 are along Figure 1 The Z direction. The feed port 111 is used for supplying the coated workpiece to the transmission mechanism 14 in the chamber 110, and the transmission mechanism 14 is used to drive the coated workpiece from the feed port 111 into the chamber 110 for coating. In actual application, the coated workpiece can be placed on a jig rack, and the transmission mechanism 14 drives the jig rack with the coated workpiece placed thereon to enter the chamber 110 from the feed port 111 for coating. After the coating of the coated workpiece is completed, the transmission mechanism 14 drives the coated workpiece to move out from the direction of the discharge port 112. The transmission mechanism 14 is used to transport the coated workpiece in and out of the chamber 110, and there is no need to manually take and place the coated workpiece, which greatly improves the coating efficiency. Among them, the feeding direction of the feed port 111 and the discharging direction of the discharge port 112 are along Figure 1 In the Y direction, the Y direction and the Z direction are perpendicular to each other.

[0039] In the embodiment of the utility model, the structures of the first gas leveling plate 12 and the second gas leveling plate 13 can be completely the same, and a plurality of first gas leveling holes 121 are arranged in an array on the first gas leveling plate 12, and a plurality of second gas leveling holes 131 are arranged in an array on the second gas leveling plate 13. The first gas leveling plate 12 utilizes the gas leveling effect of the plurality of first gas leveling holes 121 thereon to evenly disperse the gas entering from the gas inlet 113 through the first gas leveling plate 12 into the chamber 110, and the second gas leveling plate 13 utilizes the plurality of second gas leveling holes 131 to reduce the carrier gas discharge speed and the discharge amount of the coating material, thereby further improving the coating quality of the coating workpiece.

[0040] In an embodiment of the utility model, the coating assembly also includes an atomizer 15 disposed on the coating cavity 11 and connected to the chamber 110. The atomizer 15 is used to heat and atomize the coating material, and pass the atomized coating material into the chamber 110. The carrier gas introduced through the air inlet 113 drives the coating material to diffuse evenly in the chamber 110, and the atomized coating material is used to deposit a coating on the coating workpiece in the chamber 110.

[0041] As an embodiment of the present invention, the coating chamber 11 includes a frame 116, a cover plate 117 that is detachably covered with the frame 116, and a side plate 118 that is detachably covered with the frame 116. The cover plate 117, the side plate 118 and the frame 116 together form a chamber 110. The feed port 111 and the discharge port 112 are respectively opened on two opposite side walls of the frame 116, the air inlet 113 is opened on the cover plate 117, and the air outlet 114 is opened on the bottom wall of the frame 116.

[0042] In this embodiment, the air inlet 113 and the air outlet 114 are arranged opposite to each other in the vertical direction, and the air inlet 113 and the air outlet 114 can be arranged opposite to each other or not opposite to each other. The carrier gas introduced from the air inlet 113 enters the chamber 110 from top to bottom perpendicularly to the coating workpiece on the transmission mechanism 14, and after the inert gas is evenly diffused in the chamber 110, under the action of the vacuum pump, the gas in the chamber 110 is pumped out from the air outlet 114 from top to bottom perpendicularly to the coating workpiece, so as to exhaust the air in the chamber 110, thereby maintaining the vacuum state in the chamber 110.

[0043] In this embodiment, since the cover plate 117 and the side plate 118 are both detachable, it is convenient to install the internal components of the coating chamber 11 , and it is also convenient to process and assemble the coating chamber 11 .

[0044] As an embodiment of the present invention, handles 119 are respectively provided on the cover plate 117 and the side plate 118 to facilitate the disassembly and assembly of the cover plate 117 and the side plate 118, and also facilitate the flexible disassembly and assembly of the entire coating chamber 11, so as to facilitate the later maintenance and replacement.

[0045] As an embodiment of the present invention, the volume of the chamber 110 is 50 to 200 liters, which is conducive to reducing the selection specifications of the vacuum pump and reducing the power of the vacuum pump, thereby reducing the production cost and the use cost. Optionally, the volume of the chamber 110 is 180 liters.

[0046] As an embodiment of the utility model, it also includes a heating plate 16 attached to the upper and lower surfaces of the coating chamber 1, and the coating chamber 11 is heated by the heating plate 16, so that the temperature in the chamber 110 can be adjusted, so that the distribution of the coating temperature field can be changed according to the coating process requirements, and the best coating process can be adjusted to meet different coating process requirements. The specific implementation structure of the heating plate 16 is not limited, and it can be an electric heating plate or an electric heating wire.

[0047] As an embodiment of the utility model, it also includes a first electrode plate 17 and a second electrode plate 18 arranged between the first gas uniformizing plate 12 and the second gas uniformizing plate 13, the first electrode plate 17 and the second electrode plate 18 are arranged in parallel and spaced apart, and the transmission mechanism 14 is arranged between the first electrode plate 17 and the second electrode plate 18.

[0048] In this embodiment, the first electrode plate 17 and the second electrode plate 18 serve as the anode plate and the cathode plate, respectively. The first electrode plate 17 and the second electrode plate 18 are respectively supplied with radio frequency alternating current. After the first electrode plate 17 and the second electrode plate 18 are energized, the atomized coating material in the chamber 110 is ionized. After the atomized coating material is ionized, the ions move in the electric field formed between the first electrode plate 17 and the second electrode plate 18. Since the coating material is charged after ionization, when the ions hit the coating workpiece, they will adhere to the surface of the coating workpiece to deposit the coating. In addition to this embodiment, a heating element can also be provided inside the chamber 110, without the need to provide an electrode plate, and electroplating can be achieved by heating.

[0049] As an embodiment of the utility model, it also includes:

[0050] The first fixed block 19 and the second fixed block 10 are fixed in the chamber 110 , the first gas homogenizing plate 12 and the first electrode plate 17 are respectively movably engaged with the first fixed block 19 , and the second gas homogenizing plate 13 and the second electrode plate 18 are respectively movably engaged with the second fixed block 10 .

[0051] In this embodiment, the number of the first fixed blocks 19 and the second fixed blocks 10 are both four, and they are evenly distributed at the four corner positions in the chamber 110. The first fixed blocks 19 and the second fixed blocks 10 are respectively provided with corresponding slots, the first gas-distributing plate 12 and the first electrode plate 17 are respectively engaged with the slots on the first fixed block 19 to form a pull-out fit, the second gas-distributing plate 13 and the second electrode plate 18 are respectively engaged with the slots on the second fixed block 10 to form a pull-out fit, the first gas-distributing plate 12, the first electrode plate 17, the second gas-distributing plate 13 and the second electrode plate 18 are respectively installed in the chamber 110 in a pull-out manner, which facilitates the disassembly and assembly of the first gas-distributing plate 12, the first electrode plate 17, the second gas-distributing plate 13 and the second electrode plate 18.

[0052] As an embodiment of the utility model, the transmission mechanism 14 includes a belt or chain 141 installed in the chamber 110 and arranged along the direction from the feed port 111 to the discharge port 112, and a driving device 142 transmission-connected to the belt or chain 141. The driving device 142 can drive the belt or chain 141 to drive the coated workpiece to move from the feed port 111 to the discharge port 112.

[0053] In this embodiment, the driving device 142 can be a motor, and the driving device 142 forms a transmission connection with the belt or chain 141 through a transmission wheel, and the belt or chain 141 is wound around the transmission wheel. The motor drives the transmission wheel to rotate, and the transmission wheel drives the belt or chain 141 to rotate. Among them, the transmission wheel can be a pulley or a sprocket, and the belt or chain 141 can be a belt or a chain; when the transmission wheel is a pulley, the belt or chain 141 is a belt; when the transmission wheel is a sprocket, the belt or chain 141 is a chain.

[0054] In this embodiment, the number of the belts or chains 141 of the transmission mechanism 14 is two, and the two belts or chains 141 are symmetrically arranged on both sides of the chamber 110. The driving device 142 can simultaneously drive the two belts or chains 141 to move the coated workpiece.

[0055] In this embodiment, before the coating chamber 11 is coated, the driving device 142 drives the belt or chain 141 to rotate, and the belt or chain 141 drives the coated workpiece to enter the chamber 110 from the feed port 111 to the discharge port 112, and then the coating process of the coated workpiece is performed. When the coating process of the coated workpiece is completed, the driving device 142 drives the belt or chain 141 to rotate again, so that the coated workpiece is moved out from the discharge port 112. There is no need to manually take and place the coated workpiece, which greatly improves the coating efficiency.

[0056] Please refer to Figure 5-Figure 6The embodiment of the utility model also provides a coating device, including the coating component of the above embodiment. Among them, the coating device is specifically a PECVD coating device. The coating device provided by the embodiment of the utility model is provided with the above coating component. Since the air inlet direction of the air inlet 113 of the coating chamber 11 and the air outlet direction of the air outlet 114 are arranged perpendicular to the direction from the feed port 111 to the feed port 112, and air uniforming plates are respectively arranged at the positions of the air inlet 113 and the air outlet 114, the mixing uniformity of the coating material in the chamber 110 can be greatly improved, thereby improving the coating quality of the coated workpiece.

[0057] As an embodiment of the present invention, the coating device further includes:

[0058] A first gate valve 2 disposed at the feed inlet 111, used to open or close the feed inlet 111; and

[0059] The second gate valve 3 disposed at the discharge port 112 is used to open or close the discharge port 112 .

[0060] In this embodiment, by correspondingly disposing the first gate valve 2 and the second gate valve 3 at the feed port 111 and the discharge port 112 respectively, the first gate valve 2 is used to open or close the feed port 111, and the second gate valve 3 is used to open or close the discharge port 112, so as to realize opening or closing of the chamber 110, facilitate feeding and closing of the chamber 110, and ensure continuous coating and coating quality of the coating equipment.

[0061] As an embodiment of the utility model, the first gate valve 2 and the second gate valve 3 both include a valve cavity 21, a valve plate 22 movably disposed in the valve cavity 21, and a power device 23 transmission-connected to the valve plate 21, and the power device 23 can drive the valve plate 22 to open or close the feed port 111 and the discharge port 112.

[0062] In this embodiment, the first gate valve 2 and the second gate valve 3 are exactly the same, the power device 23 can be a motor or a hydraulic cylinder, the power device 23 can drive the valve plate 22 to move up and down, or can drive the valve plate 22 to rotate, and the specific implementation structure can be flexibly set.

[0063] In this embodiment, before the coating chamber 11 of the coating equipment is coated, the power device 23 of the first gate valve 2 drives the valve plate 22 to open, so that the feed port 111 remains in an open state, and then the coated workpiece enters the belt or chain 141 from the feed port 111, and the belt or chain 141 drives the coated workpiece to move to the corresponding position in the chamber 110; the power device 23 of the second gate valve 3 drives the valve plate 22 at the feed port 111 to close, and the coating process is carried out; after the coating process is completed, the power device 23 of the second gate valve 3 drives the valve plate 22 to open, and the driving device 142 drives the belt or chain 141 to rotate, so that the belt or chain 141 drives the coated workpiece to move out from the discharge port 112, and the power device 23 of the second gate valve 3 drives the valve plate 22 to close; in this way, the above actions are repeated continuously to achieve continuous coating of the coating chamber 11, which greatly improves the coating efficiency.

[0064] In the embodiment of the utility model, the coating equipment specifically includes a loading rack 50, a third gate valve 51, a first buffer chamber 52, a fourth gate valve 53, a drying chamber 54, a first gate valve 2, a coating chamber 11, a second gate valve 3, a second buffer chamber 55, a fifth gate valve 56 and a loading rack 57. Among them, the structures of the first gate valve 2, the second gate valve 3, the third gate valve 51, the fourth gate valve 53 and the fifth gate valve 56 are all the same.

[0065] In this embodiment, the coated workpiece passes through the loading rack 50, the third gate valve 51, the first buffer chamber 52, and the fourth gate valve 53 in sequence to enter the drying chamber 54 for drying treatment, and then passes through the first gate valve 2 to enter the chamber 110 of the coating chamber 11 for coating. After the coating of the coated workpiece is completed, it passes through the second gate valve 2, the second buffer chamber 55, and the fifth gate valve 56 in sequence, and then is unloaded from the unloading rack 57 to achieve continuous coating of the coating equipment. Among them, the coating equipment is a double-layer coating production line, and the double-layer coating production line can be continuously coated at the same time, which can greatly improve the coating efficiency, that is, the upper and lower layers of the coating equipment are sequentially provided with the loading rack 50, the third gate valve 51, the first buffer chamber 52, the fourth gate valve 53, the drying chamber 54, the first gate valve 2, the coating chamber 111, the second gate valve 3, the second buffer chamber 55, the fifth gate valve 56 and the unloading rack 57, and the upper and lower double-layer coating production lines share a drying chamber, which can reduce production costs. In addition, the coating equipment can also be a coating production line with three or more layers, which can further improve the coating efficiency.

[0066] The coating component provided by the embodiment of the utility model sets the air inlet direction 113 of the coating chamber 11 and the air outlet direction 114 to be perpendicular to the direction from the feed port 111 to the feed port 112, so that the air inlet direction 113 and the air outlet direction 114 are perpendicular to the transmission direction of the coating workpiece, and the carrier gas entering the air inlet vertically passes through the surface of the coating workpiece and diffuses to various positions of the coating workpiece and diffuses in the chamber before being discharged from the air outlet. By using the carrier gas to vertically pass through the surface of the coating workpiece and then be discharged from the air outlet, the coating material in the chamber is more uniform, ensuring that the surface of the coating workpiece is coated. Film consistency is improved, thereby improving the coating quality of the coating equipment for the coating workpiece; at the same time, by correspondingly arranging the first air uniform plate 12 and the second air uniform plate 13 at the positions of the air inlet 113 and the air outlet 114 respectively, the first air uniform plate 12 is used to evenly disperse the carrier gas entering the air inlet 113 into the chamber 110, and the second air uniform plate 13 is used to block and buffer the carrier gas discharged from the air outlet 114, thereby reducing the discharge speed of the carrier gas from the air outlet 114, increasing the mixing effect of the coating raw materials driven by the carrier gas, and further improving the mixing uniformity of the coating materials in the chamber 110, thereby further improving the coating quality of the coating workpiece.

[0067] The above are only preferred embodiments of the present invention and are not intended to limit the present invention. Any modifications, equivalent substitutions and improvements made within the spirit and principles of the present invention should be included in the protection scope of the present invention.

Claims

1. A coating component, used in a coating device, characterized in that: include: A coating cavity with a chamber therein, wherein the coating cavity is provided with a feed port and a discharge port connected to and opposite to the chamber, and an air inlet and an air outlet connected to and opposite to the chamber, wherein the air inlet direction of the air inlet and the air outlet direction of the air outlet are perpendicular to the direction from the feed port to the discharge port; A first air-distributing plate provided with a plurality of first air-distributing holes, wherein the first air-distributing plate is arranged in the chamber and opposite to the air inlet; A second air-distributing plate having a plurality of second air-distributing holes, the second air-distributing plate being disposed in the chamber and opposite to the air outlet; and The transmission mechanism disposed in the chamber is used to drive the coating workpiece to move from the feed port to the discharge port.

2. The coating assembly according to claim 1, characterized in that: The coating chamber includes a frame, a cover plate detachably covering the frame, and a side plate detachably covering the frame. The cover plate, the side plate and the frame cover together form the chamber. The feed port and the discharge port are respectively opened on two opposite side walls of the frame. The air inlet is opened on the cover plate, and the air outlet is opened on the bottom wall of the frame.

3. The coating assembly according to claim 2, characterized in that: The cover plate and the side plate are respectively provided with handles.

4. The coating assembly according to claim 1, characterized in that: The volume of the chamber is 50 to 200 liters.

5. The coating assembly according to claim 1, characterized in that: It also includes heating plates attached to the upper and lower surfaces of the coating cavity.

6. The coating assembly according to claim 1, characterized in that: Also includes: The first electrode plate and the second electrode plate are arranged between the first gas uniformizing plate and the second gas uniformizing plate, the first electrode plate and the second electrode plate are arranged in parallel and spaced apart, and the transmission mechanism is arranged between the first electrode plate and the second electrode plate.

7. The coating assembly according to claim 1, characterized in that: The transmission mechanism includes a belt or chain installed in the chamber and arranged along the direction from the feed port to the discharge port, and a driving device connected to the belt or chain. The driving device can drive the belt or chain to drive the coated workpiece to move from the feed port to the discharge port.

8. The coating assembly according to claim 6, characterized in that: Also includes: A first fixed block and a second fixed block are fixed in the chamber, the first gas uniformizing plate and the first electrode plate are respectively engageable with the first fixed block, and the second gas uniformizing plate and the second electrode plate are respectively engageable with the second fixed block.

9. A coating device, characterized in that: It comprises a coating assembly as described in any one of claims 1 to 8.

10. The coating device according to claim 9, characterized in that: The coating equipment also includes: A first gate valve disposed at the feed inlet, used to open or close the feed inlet; and The second gate valve arranged at the discharge port is used to open or close the discharge port.

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