Battery piece processing equipment

Abstract

The utility model discloses battery piece processing equipment, the processing equipment comprises a rack and operation units, the rack is provided with a plurality of processing bins which are sequentially distributed along the vertical direction, the operation units are configured to be used for processing battery pieces, and each processing bin is internally provided with one operation unit; and the moving unit is arranged on the rack and is configured to move among the plurality of treatment bins so as to convey a carrier to any one of the treatment bins. By arranging the plurality of processing bins which are vertically distributed along the height of the battery piece operation workshop on the rack, the space utilization rate of the battery piece operation workshop is greatly improved, each processing bin can be internally provided with an operation unit for simultaneously carrying out horizontal process processing on a plurality of groups of battery pieces, and the processing efficiency of the battery pieces is improved.

Description

Technical Field

[0001] The utility model relates to the field of solar cell production, in particular to a cell processing device. Background Art

[0002] During the production of battery cells, the battery cells need to be processed through multiple processes, such as developing, exposing, and electroplating the battery cells. In order to accommodate large equipment, the existing battery cell workshop has an internal height of more than 6 meters. However, in the prior art, a horizontal processing process is usually adopted when processing battery cells, that is, the battery cells are transported horizontally in the battery cell processing equipment for processing, and the height requirement of the equipment is much smaller than the height of the battery cell workshop. This will result in a lot of idle space between the top of the battery cell processing equipment and the top of the battery cell workshop, resulting in low space utilization inside the workshop.

[0003] It should be stated that the above background technology content is only used to assist in understanding the inventive concept and technical solution of this patent application. It does not necessarily belong to the prior art of this patent application. In the absence of clear evidence that the above content has been disclosed before the filing date of this patent application, the above background technology should not be used to evaluate the novelty and creativity of this application. Utility Model Content

[0004] The utility model aims to provide a new battery slice processing equipment.

[0005] In order to achieve the above purpose, the technical solution adopted by the utility model is:

[0006] A battery cell processing device, the processing device comprising:

[0007] A frame, wherein the frame has a plurality of processing chambers sequentially distributed along a vertical direction;

[0008] An operation unit, wherein the operation unit is configured to process the battery cells, and each of the processing chambers is provided with the operation unit;

[0009] The moving unit is disposed on the frame and is configured to move between the plurality of processing chambers to transport the carrier to any one of the processing chambers.

[0010] Preferably, the rack comprises a frame body and a plurality of substrates spaced apart in a vertical direction, the frame body has a hollow cavity, all of the substrates are arranged in the hollow cavity and the hollow cavity is divided into a plurality of the processing chambers.

[0011] Preferably, the mobile unit adopts any of the following structures:

[0012] (1) The mobile unit is an automatic lifting device and is arranged outside the frame;

[0013] (2) The mobile unit is a manual lifting device and is arranged outside the frame;

[0014] (3) The mobile unit is an automatic lifting device and is arranged inside the frame;

[0015] (4) The moving unit is a manual lifting device and is arranged inside the frame.

[0016] Preferably, the processing equipment further comprises an exhaust unit, and the exhaust unit is arranged on the top of the rack, wherein:

[0017] Each of the processing chambers is provided with an air exhaust port, and each of the air exhaust ports is connected to the air exhaust unit;

[0018] Alternatively, the processing chamber includes a base plate located at the bottom, each of the base plates is provided with an exhaust port, two adjacent processing chambers are connected via the exhaust port, and the exhaust unit is connected to one of the processing chambers.

[0019] Preferably, the operation unit at least comprises a processing tank, and there is a distance between the processing tank and the warehouse wall of the processing warehouse, so that a maintenance channel is formed between the processing tank and the warehouse wall of the processing warehouse.

[0020] In some embodiments, the processing equipment also includes a liquid circulation mechanism, and the liquid circulation unit at least includes a liquid storage tank, a first circulation main pipe, and a second circulation main pipe. The first circulation main pipe and the second circulation main pipe are both connected to the liquid storage tank, and each of the processing tanks is connected to the first circulation main pipe and the second circulation main pipe through a liquid inlet pipe and a liquid discharge pipe, respectively, so that a liquid loop is formed among the liquid storage tank, the first circulation main pipe, the liquid inlet pipe, the processing tank, the liquid discharge pipe and the second circulation main pipe.

[0021] In some embodiments, the processing tank includes a tank body having a tank cavity, a partition assembly arranged on the tank body, the partition assembly divides the tank cavity into a main chamber, and a first chamber located on at least one side of the main chamber, the first chamber is connected to the main chamber at the top, the processing tank also includes a liquid supply port arranged at the bottom of the main chamber and used to supply liquid to the main chamber, and a liquid discharge port communicated with the first chamber and used to discharge liquid, the liquid inlet pipe is connected to the liquid supply port, and the liquid discharge pipe is connected to the liquid discharge port.

[0022] In some embodiments, the operating unit also includes a spray assembly, which is configured to spray processing liquid onto the battery cells. The spray assembly is disposed in the processing tank. The spray assembly at least includes a spray liquid supply pipe, a spray liquid supply pump and a nozzle. The spray liquid supply pump is disposed on the spray liquid supply pipe, one end of the spray liquid supply pipe is connected to the processing tank and the other end is connected to the nozzle, and the water spray outlet of the nozzle is facing the battery cells.

[0023] In some embodiments, the operation unit further includes a transmission component, which is disposed on the processing tank and is configured to transmit the battery cells. During the transmission process, the area to be processed of the battery cells is immersed in the processing liquid.

[0024] In some embodiments, the operation unit includes a transport device configured to transport the battery cell or battery cell hanger to the processing tank;

[0025] And / or, the operating unit includes a loading component and a unloading component, the loading component and the unloading component are respectively located at two ends of the processing tank, the loading component is configured to temporarily store the battery cells and load the temporarily stored battery cells to the transmission component, and the unloading component is configured to unload the battery cells on the transmission component and temporarily store the unloaded battery cells.

[0026] Due to the application of the above technical scheme, the utility model has the following advantages compared with the prior art: the battery cell processing equipment of the utility model is provided with a plurality of vertically distributed processing chambers on the frame, and each processing chamber is provided with an operating unit to perform process processing on the battery cells. The battery cell processing equipment is particularly suitable for the process of horizontal processing of battery cells, such as developing, exposing, electroplating, cleaning, etc. of the battery cells. Since there is a certain gap between the height of the operating unit adopted in the horizontal processing process and the height of the battery cell working workshop, the battery cell processing equipment arranges the plurality of processing chambers in sequence along the height of the battery cell working workshop, which can greatly improve the space utilization rate of the battery cell working workshop. In addition, by setting a plurality of operating units, it is possible to process a plurality of groups of battery cells at the same time, which can effectively improve the processing efficiency of the battery cells. BRIEF DESCRIPTION OF THE DRAWINGS

[0027] Attached Figure 1 This is a structural schematic diagram of a battery cell processing device according to an embodiment of the utility model;

[0028] Attached Figure 2 This is a schematic structural diagram of a battery cell processing device according to another embodiment of the utility model;

[0029] Attached Figure 3 For attachment Figure 1 A schematic diagram of the structure of a battery cell processing device after adding a liquid circulation mechanism;

[0030] Attached Figure 4 For attachment Figure 1 A schematic diagram of the structure after adding an exhaust unit to the battery cell processing equipment;

[0031] Attached Figure 5 It is a partial structural schematic diagram of an operating unit of an embodiment of the utility model;

[0032] Attached Figure 6 This is a schematic diagram of the top view of the operating unit in one embodiment of the utility model;

[0033] Attached Figure 7 This is a schematic diagram of the structure of a processing tank and a hanger in one embodiment of the utility model;

[0034] Attached Figure 8 This is a schematic diagram of the structure of the treatment tank and the anode member in one embodiment of the utility model;

[0035] Among them: 1. rack; 11. frame; 12. substrate; 13. processing chamber; 14. maintenance channel; 2. operation unit; 21. liquid inlet pipe; 22. liquid discharge pipe; 23. processing tank; 231. tank body; 232. partition assembly; 23a. main chamber; 23b. first chamber; 24. nozzle; 25. transmission assembly; 26. handling device; 27. loading assembly; 28. unloading assembly; 29. ​​hanger; 210. anode component; 3. mobile unit; 4. liquid circulation mechanism; 5. exhaust unit; 10. battery cell. DETAILED DESCRIPTION

[0036] The technical solution of the utility model is described in detail below in conjunction with the accompanying drawings and specific embodiments, so that the advantages and features of the utility model can be more easily understood by those skilled in the art. Obviously, the embodiments described in this application are only part of the embodiments of the application, rather than all of the embodiments. Based on the embodiments in this application, all other embodiments obtained by those skilled in the art without making creative work are within the scope of protection of this application.

[0037] See also Figures 1 to 8The cell processing equipment shown in the figure includes a frame 1 and an operation unit 2. The frame 1 has a plurality of processing chambers 13 distributed in sequence along the vertical direction. The operation unit 2 is configured to process the cell. Each processing chamber 13 is provided with the above-mentioned operation unit 2, wherein the operation unit 2 at least includes a processing tank 23. There is a spacing between the processing tank 23 and the chamber wall of the processing chamber 13, so that a maintenance passage 14 is formed between the processing tank 23 and the chamber wall of the processing chamber 13. The staff can reach the side of the processing tank 23 through the maintenance passage 14 to maintain the operation unit 2 or provide necessary manual assistance during the processing. In this way, a plurality of processing chambers 13 are arranged on the frame 1 and are distributed in sequence in the vertical direction. The operation unit 2 is arranged in each processing chamber 13, that is, the cell can be processed in each processing chamber 13, which makes full use of the space utilization of the processing equipment in the vertical direction and can significantly improve the processing efficiency of the cell.

[0038] Specifically, see Figures 1 to 4 As shown, the rack 1 includes a rack body 11 and a plurality of substrates 12 spaced apart in the vertical direction. The rack body 11 has a hollow cavity. All substrates 12 are arranged in the above-mentioned hollow cavity and the hollow cavity is divided into a plurality of processing chambers 13. The substrates 12 can be rectangular in shape, and the processing chambers 13 are rectangular. The number of processing chambers 13 is consistent with the number of substrates 12. Preferably, the number of processing chambers 13 can be set as follows: Figure 1 The two shown can also be set as Figure 2 3 shown.

[0039] The processing equipment also includes a mobile unit 3, which is arranged on the frame 1 and is configured to move between multiple processing bins 13 to transport a carrier to any processing bin 13, wherein the carrier can be an operation and maintenance personnel, a battery cell, a battery cell carrier, or any equipment component. The mobile unit 3 can be arranged between any two adjacent processing bins 13, or one end can be arranged at the bottom of the processing equipment and the other end can extend to the top of the processing equipment. In addition, in practical applications, the mobile unit 3 can adopt any of the following structures:

[0040] (1) The mobile unit 3 is an automatic lifting device and is arranged outside the frame 1. In this structure, the automatic lifting device can be an elevator, a hoist, etc., which is arranged on the frame, which can reduce the space occupied by the processing equipment and make the transport carrier no longer subject to the space restrictions inside the processing equipment.

[0041] (2) The mobile unit 3 is a manual lifting device and is arranged outside the frame 1. Under this structure, the manual lifting device can be a ladder, a scaffold, a work platform, etc., and is arranged on the frame 1, which can reduce the space occupied by the processing equipment and the carrying carrier is no longer limited by the space inside the processing equipment.

[0042] (3) The mobile unit 3 is an automatic lifting device and is arranged inside the frame 1. Under this structure, the automatic lifting device can be an elevator, a hoist, etc., and it is arranged in the processing equipment, which can reduce the space occupied by the processing equipment in the battery cell operation workshop, thereby improving the utilization rate of the battery cell operation workshop.

[0043] (4) The mobile unit 3 is a manual lifting device and is arranged inside the frame 1. Under this structure, the manual lifting device can be a ladder, a scaffold, a work platform, etc., which is arranged inside the processing equipment, which can reduce the space occupied by the processing equipment in the battery cell operation workshop, thereby improving the utilization rate of the battery cell operation workshop.

[0044] For example, if ladders are used, all ladders are arranged outside the frame 1 and on the same side thereof, and the staff can use the ladders to reach any processing chamber 13. Of course, in other embodiments, ladders can also be arranged in the processing chamber 13 to lead to another processing chamber 13 adjacent thereto.

[0045] See also Figure 4 As shown, the processing equipment further includes an exhaust unit 5, which is disposed on the top of the frame 1 and is used to extract the gas in each processing chamber 13 for processing, thereby preventing the gas in the processing chamber 13 from escaping to the external environment.

[0046] The exhaust unit 5 at least includes an exhaust fan and an exhaust duct, one end of the exhaust duct is connected to the exhaust fan, and the other end is connected to the frame 1. Specifically, an exhaust port is provided on the base plate 12 of the processing bin 13, and two adjacent processing bins 13 are connected through the exhaust port. The exhaust duct of the exhaust unit 5 is connected to one of the processing bins 13. As a preferred mode, the exhaust duct is connected to the processing bin 13 located at the top. In other embodiments, an exhaust port can also be provided in each processing bin 13, and each exhaust port is connected to the exhaust duct of the exhaust unit 5.

[0047] In the present invention, the operation unit 2 is mainly configured to process the surface of the battery cell. Specifically, the operation unit 2 can be used to realize the processes of developing, exposing, electroplating, cleaning, etc. of the battery cell. The electroplating tank 23 in each operation unit 2 is used to contain the processing liquid. Each processing tank 23 is connected to a liquid inlet pipe 21 and a liquid discharge pipe 22. The processing liquid is injected into the processing tank 23 through the liquid inlet pipe 21, and the processing liquid is discharged to the outside through the liquid discharge pipe 22.

[0048] See also Figure 3 As shown, the processing equipment also includes a liquid circulation mechanism 4, which includes a liquid storage tank, a first circulation main pipe and a second circulation main pipe, wherein the first circulation main pipe and the second circulation main pipe are both connected to the liquid storage tank, the liquid inlet pipe 21 is connected to the first circulation main pipe, and the liquid discharge pipe 22 is connected to the second circulation main pipe, so that a liquid supply loop is formed between the liquid storage tank, the first circulation main pipe, the liquid inlet pipe 21, the processing tank 23, the liquid discharge pipe 22 and the second circulation main pipe, through which the processing liquid can be injected into the processing tank 23 or the processing liquid can be supplemented during the processing, and the processing liquid overflowed from the processing tank 23 can be recycled and returned to the liquid storage tank. In the specific setting, each liquid inlet pipe 21 is provided with a valve to adjust the flow direction of the processing liquid, and correspondingly, each liquid discharge pipe 22 can also be provided with a valve to realize the circulation of the processing liquid. In actual applications, after the treated liquid in the liquid storage tank flows into the first circulation main pipe, it flows to the treatment tank 23 of the corresponding treatment bin 13 according to the opening and closing of the valve on the liquid inlet pipe 21. The treated liquid in the treatment tank 23 flows into the second circulation main pipe and the liquid storage tank according to the opening and closing of the valve on the liquid discharge pipe 22. In this way, the circulation of the treated liquid in each treatment tank 23 can be realized.

[0049] Among them, the treatment liquid in the treatment tank 23 can be discharged by timed discharge or liquid level limiting discharge. If the liquid level limiting discharge method is adopted, a liquid level sensor can also be arranged in the treatment tank 23. Of course, the battery cell processing equipment can also include a controller. There are communication lines (wired or wireless communication lines) between the valves and the liquid level sensors and the controller. The controller can receive signals sent by the valves and the liquid level sensors, and then monitor the real-time liquid level of the treatment liquid in each treatment tank 23, and adjust the opening and closing of the valves on the liquid inlet pipe 21 and the liquid discharge pipe 22 according to the real-time liquid level.

[0050] See also Figure 7 As shown, the processing tank 23 includes a tank body 231 with a tank cavity, a partition assembly 232 arranged on the tank body 231, the partition assembly 232 divides the tank cavity into a main chamber 23a, and a first chamber 23b located at at least one side of the main chamber 23a, and the first chamber 23b is connected to the main chamber 23a at the top. The processing tank 23 also includes a liquid supply port arranged at the bottom of the main chamber 23a and used to supply liquid to the main chamber 23a, and a liquid discharge port connected to the first chamber 23b and used to discharge liquid. The liquid inlet pipe 21 is connected to the liquid inlet port and the liquid discharge pipe 22 is connected to the liquid discharge port. In this way, during the processing process, the processing liquid in the main chamber 23a of the processing tank 23 can always be kept at a preset liquid level height, and the excess processing liquid 23 can flow from the upper part of the main chamber 23a into the first chamber 23b, and then reach the liquid discharge pipe 22 through the liquid discharge port, and flow into the liquid storage tank through the second circulation main pipe for recovery, so as to avoid waste caused by overflow of the processing liquid.

[0051] In some embodiments, part or all of the operating units 2 further include a spray assembly, which is configured to spray the processing liquid onto the battery cell, and the spray assembly is disposed in the processing tank 23, such as Figure 5 As shown, the spray assembly at least includes a spray liquid supply pipe, a spray liquid supply pump and a nozzle 24. The spray liquid supply pump is arranged on the spray liquid supply pipe. One end of the spray liquid supply pipe is connected to the processing tank 23, specifically to the main chamber 23a of the processing tank 23. The other end of the spray liquid supply pipe is connected to the nozzle 24. The water spray port of the nozzle 24 is facing the battery cell, so that the processing liquid around the battery cell can be fully circulated when the battery cell is in the processing tank 23, so that the concentration of metal or other processing media in the processing liquid contacted by the battery cell is more uniform, thereby improving the processing quality of the battery cell.

[0052] In some embodiments, Figure 5 As shown, the operation unit 2 also includes a transmission component 25, which is arranged on the processing tank 23 and is configured to transmit the battery cell 10. During the transmission process, the area to be processed of the battery cell 10 is immersed in the processing liquid. By setting the transmission component 25, the battery cell 10 can be automatically moved in the processing tank 23, and the area to be processed can be processed during the movement. This structure adopts a method of dynamically processing the battery cell 10. If the battery cell 10 is statically processed, such as Figure 6 As shown, the battery cell 10 can be installed in the hanger 29, and the hanger 29 can be immersed in the processing liquid, so that the processing liquid processes the battery cell 10 in the hanger 29. In practical applications, the transmission component 25 is a chain conveyor or a belt conveyor.

[0053] In some embodiments, part or all of the operation unit 2 further includes a loading assembly 27 and a unloading assembly 28, and the loading assembly 27 and the unloading assembly 28 are respectively arranged at different ends of the processing tank 23. The loading assembly 27 is configured to temporarily store the battery cells 10 and load the temporarily stored battery cells 10 to the transmission assembly 25, and the unloading assembly 28 is configured to unload the battery cells 10 on the transmission assembly 25 and temporarily store the unloaded battery cells 10. In some embodiments, when the operation unit 2 is in a working state, the loading assembly 27 can realize automatic loading of the transmission assembly 25, so that the battery cells are automatically transported to the transmission assembly 25. In actual application, the loading assembly 27 includes a shelf and an automatic loading rack, and the automatic loading rack is tilted, and the higher end is connected to the shelf, and the lower end is tilted and extended to the transmission assembly 25, so that the battery cells on the shelf can be moved to the transmission assembly 25 through the automatic loading rack, wherein the shelf is also provided with a movable track for automatic unloading. Accordingly, when the operating unit 2 is in working condition, it can realize automatic unloading of the transmission component 25 through the unloading component 28, so that the battery cells can be automatically transported to the transmission component 25 after being processed in the processing tank 23. In actual application, the unloading component 28 includes a shelf and an automatic unloading rack. The automatic unloading rack is tilted, and the lower end is connected to the shelf, and the higher end is tilted and extends to the transmission component 25, so that the battery cells on the transmission component 25 can be moved to the shelf through the automatic unloading rack, wherein the shelf is also provided with a movable track for automatic unloading.

[0054] Different from the above-mentioned automatic loading and unloading method, in other embodiments, the operation unit 2 further includes a handling device 26, which is configured to be able to carry the battery cells or battery cell hangers to the processing tank 23. Under this structure, the battery cells or hangers are transported to each processing bin 13 by the mobile unit 3, and are carried to the processing tank 23 for processing by the handling device 26. After the processing is completed, they are transported and transferred by the handling device 26. In actual applications, the handling device 26 uses tools such as AGV carts and forklifts.

[0055] Of course, in some implementations, the aforementioned implementations may also be combined and improved. Figure 5 and Figure 6The scheme in the embodiment is combined and improved, and the operation unit includes a handling device 26, a loading assembly 27 and a unloading assembly 28. After the mobile unit 3 transports the battery cell or the hanger to each processing bin 13, the handling device 26 transports it to the loading assembly 27 for temporary storage. The temporarily stored battery cell 10 or hanger 29 can be transported to the processing tank 23 through the loading assembly 27. If the method of transporting the battery cell is adopted, a transmission assembly 25 is installed in the processing tank 23 to transport the battery cell through the transmission assembly 25 and process its surface during transportation. If the method of transporting the hanger is adopted, the handling device 26 can transport the hanger in the loading assembly 27 to the processing tank 23, or the loading assembly 27 transports the hanger to the processing tank 23. After the battery cell is processed, it can be transported away from the processing tank 23 by the unloading assembly 28 or the handling device 26 and temporarily stored in the unloading assembly 28. When the processed battery cell needs to be transferred, it can be transported to the mobile unit 3 by the handling device 26. Specifically, Figure 6 As shown, two groups of handling devices 26 are provided, which are respectively provided between the processing tank 23 and the loading assembly 27, and between the processing tank 23 and the unloading assembly 28. The operation unit 2 is mainly used for static treatment of the battery cells. For example, when the battery cells are subjected to rack plating treatment, the battery cells are placed on the hanger 29, and the hanger 29 is moved into or out of the processing tank 23 by the handling device 26. In some embodiments, part or all of the operation unit 2 is configured to perform electroplating treatment on the battery cells. In the operation unit 2, the treatment liquid contained in the processing tank 23 is an electroplating liquid, and an anode member 210 is also provided in the tank cavity of the processing tank 23, such as Figure 8 shown.

[0056] In some embodiments, part or all of the working units 2 include, in addition to the above-mentioned loading assembly 27 and unloading assembly 28, a transmission assembly 25, which is disposed between the loading assembly 27 and the unloading assembly 28 and transmits the material through the processing tank 23. The transmission assembly 25 may specifically include a roller transmission member, such as Figure 5 As shown in FIG. 1 , the battery cell is transported through the processing tank 23 in a horizontal direction, and contacts with the processing liquid in the processing tank 23 during the process of passing through the processing tank 23 to undergo a process treatment.

[0057] In summary, the battery cell processing equipment of the present invention arranges multiple vertically distributed processing chambers 13 on the frame 1, and an operating unit 2 can be set in each processing chamber 13 to perform horizontal process processing on the battery cells. Since there is a certain gap between the height of the operating unit 2 adopted in the horizontal process and the height of the battery cell working workshop, the battery cell processing equipment arranges multiple processing chambers 13 in sequence along the height of the battery cell working workshop, which can greatly improve the space utilization rate of the equipment in the battery cell working workshop. In addition, by setting up multiple operating units 2, multiple groups of battery cells 10 can be processed simultaneously, which can effectively improve the processing efficiency of the battery cells 10.

[0058] The above embodiments are only for illustrating the technical concept and features of the utility model, and their purpose is to enable people familiar with the technology to understand the content of the utility model and implement it accordingly, and they cannot be used to limit the protection scope of the utility model. Any equivalent changes or modifications made according to the spirit of the utility model should be included in the protection scope of the utility model.

Claims

1. A battery cell processing device, characterized in that: The processing equipment comprises: A frame, wherein the frame has a plurality of processing chambers sequentially distributed along a vertical direction; An operation unit, wherein the operation unit is configured to process the battery cells, and each of the processing chambers is provided with the operation unit; The moving unit is disposed on the frame and is configured to move between the plurality of processing chambers to transport the carrier to any one of the processing chambers.

2. The cell processing equipment according to claim 1, characterized in that: The frame includes a frame body and a plurality of substrates spaced apart in a vertical direction. The frame body has a hollow cavity. All the substrates are arranged in the hollow cavity and the hollow cavity is divided into a plurality of processing chambers.

3. The cell processing equipment according to claim 1, characterized in that: The mobile unit adopts any of the following structures: (1) The mobile unit is an automatic lifting device and is arranged outside the frame; (2) The mobile unit is a manual lifting device and is arranged outside the frame; (3) The mobile unit is an automatic lifting device and is arranged inside the frame; (4) The moving unit is a manual lifting device and is arranged inside the frame.

4. The cell processing equipment according to claim 1, characterized in that: The processing equipment further comprises an exhaust unit, which is arranged on the top of the rack, wherein: Each of the processing chambers is provided with an air exhaust port, and each of the air exhaust ports is connected to the air exhaust unit; Alternatively, the processing chamber includes a substrate located at the bottom, each substrate is provided with an exhaust port, two adjacent processing chambers are connected through the exhaust port, and the exhaust unit is connected to one of the processing chambers.

5. The cell processing equipment according to claim 1, characterized in that: The operation unit at least comprises a processing tank, and a distance is provided between the processing tank and a warehouse wall of the processing warehouse, so that a maintenance passage is formed between the processing tank and the warehouse wall of the processing warehouse.

6. The cell processing equipment according to claim 5, characterized in that: The processing equipment also includes a liquid circulation mechanism, and the liquid circulation unit at least includes a liquid storage tank, a first circulation main pipe, and a second circulation main pipe. The first circulation main pipe and the second circulation main pipe are both connected to the liquid storage tank, and each of the processing tanks is connected to the first circulation main pipe and the second circulation main pipe through a liquid inlet pipe and a liquid discharge pipe, so that a liquid loop is formed among the liquid storage tank, the first circulation main pipe, the liquid inlet pipe, the processing tank, the liquid discharge pipe and the second circulation main pipe.

7. The cell processing equipment according to claim 6, characterized in that: The processing tank includes a tank body having a tank cavity, and a partition assembly arranged on the tank body, wherein the partition assembly divides the tank cavity into a main chamber and a first chamber located on at least one side of the main chamber, wherein the first chamber is connected to the main chamber at the top, and the processing tank also includes a liquid supply port located at the bottom of the main chamber and used to supply liquid into the main chamber, and a liquid discharge port communicated with the first chamber and used to discharge liquid, the liquid inlet pipe is connected to the liquid supply port, and the liquid discharge pipe is connected to the liquid discharge port.

8. The cell processing equipment according to claim 5, characterized in that: The operation unit also includes a spray assembly, which is configured to spray a processing liquid onto the battery cell. The spray assembly is arranged in the processing tank. The spray assembly at least includes a spray liquid supply pipe, a spray liquid supply pump and a nozzle. The spray liquid supply pump is arranged on the spray liquid supply pipe. One end of the spray liquid supply pipe is connected to the processing tank and the other end is connected to the nozzle. The water outlet of the nozzle faces the battery cell.

9. The cell processing equipment according to claim 5, characterized in that: The operation unit further comprises a transmission component, which is disposed on the processing tank and is configured to transmit the battery cells. During the transmission process, the area to be processed of the battery cells is immersed in the processing liquid.

10. The cell processing equipment according to claim 9, characterized in that: The operation unit includes a transport device, and the transport device is configured to transport the battery cell or the battery cell hanger to the processing tank; And / or, the operating unit includes a loading component and a unloading component, the loading component and the unloading component are respectively located at two ends of the processing tank, the loading component is configured to temporarily store the battery cells and load the temporarily stored battery cells to the transmission component, and the unloading component is configured to unload the battery cells on the transmission component and temporarily store the unloaded battery cells.

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