Drying machine and silicon carbide production system

Abstract

According to the drying machine and the silicon carbide production system, the detection pieces and the normally-open control valves are arranged on the first gas outlet pipe and the second gas outlet pipe, in the CDA output process of the first gas outlet pipe, if the pressure and / or the flow rate are / is suddenly increased, it is indicated that a second butterfly valve on the second gas outlet pipe breaks down, at the moment, a second control valve is closed, and the CDA is output; similarly, in the output process of the second air outlet pipe, if the pressure and / or the flow are / is suddenly increased, it is indicated that the first butterfly valve on the first air outlet pipe breaks down, and at the moment, the first control valve is closed, so that the CDA is prevented from being mixed to the first tower through the first air outlet pipe. Therefore, the blow-by condition can be prevented, enough reaction time is reserved for personnel to process the faulted first butterfly valve or second butterfly valve, shutdown of silicon carbide production equipment is avoided, and continuous production is guaranteed.

Description

Technical Field

[0001] The present application relates to the technical field of silicon carbide production, and in particular to a dryer and a silicon carbide production system. Background Art

[0002] Dryer is a mechanical device used to remove moisture from materials. It is widely used in many industries such as food processing, chemical industry, pharmaceutical industry, agriculture, mining, papermaking, etc. Its working principle and design vary according to the characteristics of the material and the purpose of application, but the basic goal is to reduce the moisture content of the material through heating, ventilation, vacuum, freezing, etc. to achieve a predetermined degree of dryness.

[0003] In the silicon carbide production workshop, a dryer is needed to dry the compressed air to provide compressed dry air (CDA). However, if the butterfly valve on the outlet pipe of the current dryer fails, gas cross-talk will occur, that is, CDA will cross-talk from the drying adsorption tower to the regeneration desorption tower, causing the output CDA pressure to drop sharply, unable to meet the gas requirements of the workshop equipment, and the staff response and processing time is long, which will affect the shutdown of the entire workshop equipment and production difficulties. Utility Model Content

[0004] The purpose of the present application is to provide a dryer and a silicon carbide production system that can prevent the occurrence of cross-gas situations and leave personnel with sufficient reaction time to deal with the faulty first butterfly valve or second butterfly valve, thereby avoiding shutdown of silicon carbide production equipment and ensuring continuous production.

[0005] The embodiments of the present application can be implemented as follows:

[0006] In a first aspect, the utility model provides a dryer, comprising a first tower, a second tower and an air outlet pipeline;

[0007] The air outlet pipeline includes an air outlet main pipe and a first air outlet pipe and a second air outlet pipe connected to the air outlet main pipe;

[0008] The first gas outlet pipe is connected to the first tower, and a first gas outlet valve is disposed on the first gas outlet pipe;

[0009] The second gas outlet pipe is connected to the second tower, and a second gas outlet valve is disposed on the second gas outlet pipe;

[0010] Wherein, the first air outlet pipe and the second air outlet pipe are both provided with a detection member and a normally open control valve, the detection member and the control valve on the first air outlet pipe are respectively a first detection member and a first control valve, and the detection member and the control valve on the second air outlet pipe are respectively a second detection member and a second control valve;

[0011] When the first tower is used as a drying adsorption tower and the second tower is used as a regeneration desorption tower, the first gas outlet valve is opened and the second gas outlet valve is closed, and when the second detection element detects an increase in pressure and / or flow, the second control valve is closed;

[0012] When the first tower is used as a regeneration desorption tower and the second tower is used as a drying adsorption tower, the first gas outlet valve is closed and the second gas outlet valve is opened. When the first detection component detects an increase in pressure and / or flow, the first control valve is closed.

[0013] In an optional embodiment, the dryer further includes a drying air intake pipeline and a regeneration pipeline, and the drying air intake pipeline and the regeneration pipeline are both connected to the first tower and the second tower.

[0014] In an optional embodiment, the dry air intake pipeline includes a dry air intake main pipe and a first dry air intake pipe and a second dry air intake pipe connected to the dry air intake main pipe;

[0015] The first dry air inlet pipe is connected to the first tower, and a first dry air inlet valve is disposed on the first dry air inlet pipe;

[0016] The second dry air inlet pipe is connected to the second tower, and a second dry air inlet valve is disposed on the second dry air inlet pipe.

[0017] In an optional embodiment, the regeneration pipeline includes a regeneration intake pipe, a regeneration exhaust pipe, a heating pipe, a cooling pipe, a first connecting pipe and a second connecting pipe;

[0018] The first connecting pipe and the second connecting pipe both connect the first tower and the second tower;

[0019] The heating pipe and the cooling pipe are connected in parallel between the first connecting pipe and the second connecting pipe;

[0020] The regeneration intake pipe is connected to the heating pipe or the cooling pipe, and the regeneration exhaust pipe is connected to the first connecting pipe or the second connecting pipe.

[0021] In an optional embodiment, the heating pipe includes a heating main pipe and a heating valve and a heater arranged on the heating main pipe;

[0022] The cooling pipe includes a cooling main pipe and a cooling valve and an aftercooler arranged on the cooling main pipe;

[0023] The heating main pipe and the cooling main pipe are connected in parallel between the first connecting pipe and the second connecting pipe;

[0024] The cooling main pipe is provided with a blower;

[0025] The regeneration air intake pipe is connected to the cooling main pipe.

[0026] In an optional embodiment, the first connecting pipe includes a first connecting main pipe and a first connecting branch pipe and a second connecting branch pipe connected to the first connecting main pipe;

[0027] The first connecting pipe is connected to the cooling pipe and the heating pipe;

[0028] The first connecting branch pipe is connected to the first tower, and a first valve is disposed on the first connecting branch pipe;

[0029] The second connecting branch pipe is connected to the second tower, and a second valve is disposed on the second connecting branch pipe.

[0030] In an optional embodiment, the second connecting pipe includes a second connecting main pipe and a third connecting branch pipe and a fourth connecting branch pipe connected to the second connecting main pipe;

[0031] The second connecting pipe is connected to the cooling pipe and the heating pipe;

[0032] The third connecting branch pipe is connected to the first tower, and a third valve is disposed on the third connecting branch pipe;

[0033] The fourth connecting branch pipe is connected to the second tower, and a fourth valve is disposed on the fourth connecting branch pipe;

[0034] The regeneration exhaust pipe is connected to the second connecting main pipe.

[0035] In an optional embodiment, the control valve comprises an electric valve.

[0036] In an optional embodiment, the detection component includes a flow meter and a pressure meter, the flow meter is used to detect flow rate, and the pressure meter is used to detect pressure.

[0037] In a second aspect, the utility model provides a silicon carbide production system, comprising silicon carbide production equipment and a dryer as described in any one of the aforementioned embodiments, wherein the dryer is used to provide CDA for the silicon carbide production equipment.

[0038] The beneficial effects of the embodiments of the present application include, for example:

[0039] By arranging a detection member and a normally open control valve on the first gas outlet and the second gas outlet pipe, during the process of CDA output from the first gas outlet pipe, the pressure and / or flow in the second gas outlet pipe is detected by the second detection member. If the pressure and / or flow suddenly increases, it indicates that the second butterfly valve on the second gas outlet pipe is faulty. At this time, the second control valve is closed to prevent gas from being blown to the second tower through the second gas outlet pipe. Similarly, during the output from the second gas outlet pipe, the pressure and / or flow in the first gas outlet pipe is detected by the first detection member. If the pressure and / or flow suddenly increases, it indicates that the first butterfly valve on the first gas outlet pipe is faulty. At this time, the first control valve is closed to prevent CDA from being blown to the first tower through the first gas outlet pipe. Therefore, the present application can prevent the occurrence of blow-by and leave personnel with enough reaction time to deal with the faulty first butterfly valve or second butterfly valve, avoid shutdown of silicon carbide production equipment, and ensure continuous production. BRIEF DESCRIPTION OF THE DRAWINGS

[0040] In order to more clearly illustrate the specific implementation methods of the present application or the technical solutions in the prior art, the drawings required for use in the specific implementation methods or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are some implementation methods of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.

[0041] Figure 1 A gas circuit schematic diagram of a dryer is provided for an embodiment of the present application.

[0042] Icons: 1-first dry air intake valve; 2-second dry air intake valve; 3-third valve; 4-fourth valve; 7-regeneration exhaust valve; 9-main valve; 11-heating valve; 12-blower; 14-regeneration air intake valve; 15-intake silencer; 16-heating main pipe; 17-heater; 18-aftercooler; 19-cooling main pipe; 20-cooling valve; 21-first valve; 22-second valve; 23-first butterfly valve; 24-second butterfly valve; 27-first tower; 28-second tower; 30-exhaust main pipe; 31-first outlet pipe; 310 -first air outlet valve; 311-first flow meter; 312-first pressure gauge; 313-first control valve; 32-second air outlet pipe; 320-second air outlet valve; 321-second flow meter; 322-second pressure gauge; 323-second control valve; 40-first connecting main pipe; 41-first connecting branch pipe; 42-second connecting branch pipe; 50-second connecting main pipe; 51-third connecting branch pipe; 52-fourth connecting branch pipe; 60-dry air intake main pipe; 61-first dry air intake pipe; 62-second dry air intake pipe; 70-regeneration exhaust pipe. DETAILED DESCRIPTION

[0043] In order to make the purpose, technical solution and advantages of the embodiments of the present application clearer, the technical solution in the embodiments of the present application will be clearly and completely described below in conjunction with the drawings in the embodiments of the present application. Obviously, the described embodiments are part of the embodiments of the present application, rather than all the embodiments. The components of the embodiments of the present application described and shown in the drawings here can be arranged and designed in various different configurations.

[0044] Therefore, the following detailed description of the embodiments of the present application provided in the accompanying drawings is not intended to limit the scope of the present application for which protection is sought, but merely represents selected embodiments of the present application. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in the field without creative work are within the scope of protection of the present application.

[0045] It should be noted that similar reference numerals and letters denote similar items in the following drawings, and therefore, once an item is defined in one drawing, further definition and explanation thereof is not required in subsequent drawings.

[0046] In the description of the present application, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. indicate positions or positional relationships based on the positions or positional relationships shown in the accompanying drawings, or the positions or positional relationships in which the product of the application is usually placed when in use. They are only for the convenience of describing the present application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific position, be constructed and operated in a specific position, and therefore cannot be understood as a limitation on the present application. In addition, the terms "first", "second", "third", etc. are only used to distinguish the description, and cannot be understood as indicating or implying relative importance.

[0047] In addition, the terms "horizontal", "vertical", "overhanging" and the like do not mean that the components are required to be absolutely horizontal or overhanging, but can be slightly tilted. For example, "horizontal" only means that its direction is more horizontal than "vertical", and does not mean that the structure must be completely horizontal, but can be slightly tilted.

[0048] In the description of this application, it should also be noted that, unless otherwise clearly specified and limited, the terms "set", "install", "connect", and "connect" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two elements. For ordinary technicians in this field, the specific meanings of the above terms in this application can be understood according to specific circumstances.

[0049] In conjunction with the accompanying drawings, some embodiments of the present application are described in detail below. In the absence of conflict, the following embodiments and features in the embodiments can be combined with each other.

[0050] refer to Figure 1 , the embodiment of the present application discloses a dryer, which includes a first tower 27, a second tower 28 and an air outlet pipeline;

[0051] One of the first tower 27 and the second tower 28 is used as a drying adsorption tower, and the other is used as a regeneration desorption tower;

[0052] The gas outlet pipeline includes a gas outlet main pipe 30 and a first gas outlet pipe 31 and a second gas outlet pipe 32 connected to the gas outlet main pipe 30;

[0053] The first gas outlet pipe 31 is connected to the first tower 27, and a first gas outlet valve 310 is disposed on the first gas outlet pipe 31;

[0054] The second gas outlet pipe 32 is connected to the second tower 28, and a second gas outlet valve 320 is disposed on the second gas outlet pipe 32;

[0055] The first air outlet pipe 31 and the second air outlet pipe 32 are provided with a detection member and a normally open control valve, wherein the detection member is used to detect pressure and / or flow; the detection member and the control valve on the first air outlet pipe 31 are respectively a first detection member and a first control valve 313, and the detection member and the control valve on the second air outlet pipe 32 are respectively a second detection member and a second control valve 323;

[0056] When the first tower 27 is used as a drying adsorption tower and the second tower 28 is used as a regeneration desorption tower, the first gas outlet valve 310 is opened and the second gas outlet valve 320 is closed. When the second detection element detects pressure and / or flow, the second control valve 323 is closed.

[0057] When the first tower 27 is used as a regeneration desorption tower and the second tower 28 is used as a drying adsorption tower, the first gas outlet valve 310 is closed and the second gas outlet valve 320 is opened. When the first detection component detects pressure and / or flow, the first control valve 313 is closed.

[0058] In this way, by arranging the detection element and the normally open control valve on the first outlet pipe 31 and the second outlet pipe 32, during the process of CDA output from the first outlet pipe 31, the pressure and / or flow rate in the second outlet pipe 32 is detected by the second detection element. If the pressure and / or flow rate suddenly increases, it indicates that the second butterfly valve 24 on the second outlet pipe 32 is faulty. At this time, the second control valve 323 is closed to prevent CDA from being blown to the second tower 28 through the second outlet pipe 32. Similarly, during the process of CDA output from the second outlet pipe 32, the pressure and / or flow rate in the first outlet pipe 31 is detected by the first detection element. If the pressure and / or flow rate suddenly increases, it indicates that the first butterfly valve 23 on the first outlet pipe 31 is faulty. At this time, the first control valve 313 is closed to prevent CDA from being blown to the first tower 27 through the first outlet pipe 31. Therefore, the present application can prevent the occurrence of blow-by, and leave personnel with sufficient reaction time to deal with the faulty first butterfly valve 23 or second butterfly valve 24, avoid the shutdown of silicon carbide production equipment, and ensure the continuous production.

[0059] Wherein, the control valve comprises an electric valve, so as to quickly respond to the detection member and process quickly. Of course, in some embodiments, the control valve may also be other electrically controlled valves, such as a hydraulic valve.

[0060] The detection component includes a flow meter and a pressure gauge, wherein the flow meter is used to detect the flow rate, and the pressure gauge is used to detect the pressure. In addition, the detection component can also be an integrated sensor that integrates multi-parameter detection such as flow detection and pressure detection. Therefore, the first detection component includes a first flow meter 311 and a first pressure gauge 312, which are used to detect the flow rate and pressure of the first outlet pipe 31 respectively; the second detection component includes a second flow meter 321 and a second pressure gauge 322, which are used to detect the flow rate and pressure of the second outlet pipe 32 respectively.

[0061] Typically, the dryer further includes a drying air intake pipeline and a regeneration pipeline, and both the drying air intake pipeline and the regeneration pipeline are connected to the first tower 27 and the second tower 28 to ensure that air is normally input into the tower for adsorption drying, and after the first tower 27 or the second tower 28 is dry and adsorbed to saturation, heating, regeneration and desorption are performed to achieve alternating adsorption and desorption operation of the first tower 27 and the second tower 28.

[0062] Specifically, the dry air intake pipeline includes a dry air intake main pipe 60 and a first dry air intake pipe 61 and a second dry air intake pipe 62 connected to the dry air intake main pipe 60; the first dry air intake pipe 61 is connected to the first tower 27, and a first dry air intake valve 1 is provided on the first dry air intake pipe 61; the second dry air intake pipe 62 is connected to the second tower 28, and a second dry air intake valve 2 is provided on the second dry air intake pipe 62.

[0063] The regeneration pipeline includes a regeneration intake pipe, a regeneration exhaust pipe 70, a heating pipe, a cooling pipe, a first connecting pipe and a second connecting pipe; the first connecting pipe and the second connecting pipe are both connected to the first tower 27 and the second tower 28; the heating pipe and the cooling pipe are connected in parallel between the first connecting pipe and the second connecting pipe; the regeneration intake pipe is connected to the heating pipe or the cooling pipe, and the regeneration exhaust pipe 70 is connected to the first connecting pipe or the second connecting pipe.

[0064] The heating pipe includes a heating main pipe 16 and a heating valve 11 and a heater 17 arranged on the heating main pipe 16; the cooling pipe includes a cooling main pipe 19 and a cooling valve 20 and an aftercooler 18 arranged on the cooling main pipe 19; the heating main pipe 16 and the cooling main pipe 19 are connected in parallel between the first connecting pipe and the second connecting pipe; the blower 12 is arranged on the cooling main pipe 19.

[0065] The first connecting pipe includes a first connecting main pipe 40 and a first connecting branch pipe 41 and a second connecting branch pipe 42 connected to the first connecting main pipe 40; the first connecting main pipe 40 is connected to the cooling pipe and the heating pipe; the first connecting branch pipe 41 is connected to the first tower 27, and a first valve 21 is disposed on the first connecting branch pipe 41; the second connecting branch pipe 42 is connected to the second tower 28, and a second valve 22 is disposed on the second connecting branch pipe 42.

[0066] The second connecting pipe includes a second connecting main pipe 50 and a third connecting branch pipe 51 and a fourth connecting branch pipe 52 connected to the second connecting main pipe 50; the second connecting main pipe 50 is connected to the cooling pipe and the heating pipe; a main pipe valve 9 is arranged on the second main pipe line, the third connecting branch pipe 51 is connected to the first tower 27, and a third valve 3 is arranged on the third connecting branch pipe 51; the fourth connecting branch pipe 52 is connected to the second tower 28, and a fourth valve 4 is arranged on the fourth connecting branch pipe 52.

[0067] The regeneration air intake pipe is connected to the cooling main pipe 19 , and an air intake muffler 15 and a regeneration air intake valve 14 are arranged on the regeneration air intake pipe.

[0068] The regeneration exhaust pipe 70 is connected to the second connecting main pipe 50 , and a regeneration exhaust valve 7 is disposed on the regeneration exhaust pipe 70 .

[0069] The working principle of the dryer in this application is as follows:

[0070] When the first tower 27 is used as a drying adsorption tower and the second tower 28 is used as a regeneration desorption tower, the first air outlet valve 310 is opened and the second air outlet valve 320 is closed, and compressed air is introduced from the drying air inlet main pipe 60, then enters the first drying air inlet pipe 61, and then passes through the first drying air inlet valve 1 to enter the bottom of the first tower 27. After flowing through the drying bed inside the first tower 27, the moisture of the compressed air is absorbed by the adsorbent and enters the first air outlet pipe 31 as CDA, and then is sent to the outside through the first air outlet valve 310. At the same time, the second tower 28 is heated, regenerated and cooled. When the second tower 28 is heated, air enters the regeneration air intake pipe. Under the action of the blower 12, the airflow passes through the regeneration air intake valve 14 and enters the cooling main pipe 19, and then passes through the blower 12 and enters the heating main pipe 16, and passes through the heating valve 11 and the heater 17 in sequence. The hot air heated by the heater 17 passes through the first connecting main pipe 40 and the second connecting branch pipe 42 in sequence and enters the second tower 28. When flowing through the drying bed in the second tower 28, it can take away the moisture on the adsorbent to achieve desorption, and then passes through the fourth connecting branch pipe 52 and the second connecting main pipe 50 in sequence to enter the regeneration exhaust pipe 70, and finally is discharged to the outside from the regeneration exhaust valve 7. After the heating stage is over, although the regeneration of the adsorbent in the second tower 28 is achieved, the temperature of the adsorbent after regeneration is still very high. Before the compressed air is dried by the second tower 28 as a drying adsorption tower, the temperature of the second tower 28 must be reduced to obtain the best adsorption effect. Therefore, the fan needs to be run to cool the hot air through the aftercooler 18. The cooled cold air passes through the cooling valve 20, the first connecting pipe 40, and the second connecting branch pipe 42 in turn to enter the second tower 28, taking away the heat on the adsorption machine in the second tower 28 to achieve cooling. The hot air after absorbing the heat passes through the fourth connecting branch pipe 52 and the second connecting pipe 50 in turn and returns to the heating pipe 16, and the cycle continues.

[0071] The airflow path of the case where the first tower 27 is used as a regeneration desorption tower and the second tower 28 is used as a drying adsorption tower is similar to the above, only the airflow path is different, and the principle is the same, which will not be repeated here.

[0072] In addition, an embodiment of the present application further discloses a silicon carbide production system, which includes silicon carbide production equipment and the dryer of the above embodiment, and the dryer provides CDA for the silicon carbide production equipment.

[0073] Finally, it should be noted that in this article, the terms "include", "comprises" or any other variations thereof are intended to cover non-exclusive inclusion, so that a process, method, article or apparatus that includes a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such process, method, article or apparatus.

[0074] The above embodiments are only used to illustrate the technical solutions of the present application, rather than to limit them. Although the present application has been described in detail with reference to the aforementioned embodiments, a person skilled in the art should understand that the technical solutions described in the aforementioned embodiments may still be modified, or some or all of the technical features thereof may be replaced by equivalents. However, these modifications or replacements do not deviate the essence of the corresponding technical solutions from the scope of the technical solutions of the embodiments of the present application.

Claims

1. A dryer, characterized in that: It includes a first tower (27), a second tower (28) and an air outlet pipeline; The gas outlet pipeline comprises a gas outlet main pipe (30) and a first gas outlet pipe (31) and a second gas outlet pipe (32) connected to the gas outlet main pipe (30); The first gas outlet pipe (31) is connected to the first tower (27), and a first gas outlet valve (310) is provided on the first gas outlet pipe (31); The second gas outlet pipe (32) is connected to the second tower (28), and a second gas outlet valve (320) is provided on the second gas outlet pipe (32); Wherein, the first air outlet pipe (31) and the second air outlet pipe (32) are both provided with a detection component and a normally open control valve, the detection component and the control valve on the first air outlet pipe (31) are respectively a first detection component and a first control valve (313), and the detection component and the control valve on the second air outlet pipe (32) are respectively a second detection component and a second control valve (323); When the first tower (27) is used as a drying adsorption tower and the second tower (28) is used as a regeneration desorption tower, the first gas outlet valve (310) is opened and the second gas outlet valve (320) is closed, and when the second detection element detects an increase in pressure and / or flow rate, the second control valve (323) is closed; When the first tower (27) is used as a regeneration desorption tower and the second tower (28) is used as a drying adsorption tower, the first gas outlet valve (310) is closed and the second gas outlet valve (320) is opened. When the first detection component detects an increase in pressure and / or flow, the first control valve (313) is closed.

2. The dryer according to claim 1, characterized in that: The dryer further comprises a drying air inlet pipeline and a regeneration pipeline, wherein the drying air inlet pipeline and the regeneration pipeline are both connected to the first tower (27) and the second tower (28).

3. The dryer according to claim 2, characterized in that: The dry air intake pipeline comprises a dry air intake main pipe (60) and a first dry air intake pipe (61) and a second dry air intake pipe (62) connected to the dry air intake main pipe (60); The first drying air inlet pipe (61) is connected to the first tower (27), and a first drying air inlet valve (1) is provided on the first drying air inlet pipe (61); The second drying air inlet pipe (62) is connected to the second tower (28), and a second drying air inlet valve (2) is disposed on the second drying air inlet pipe (62).

4. The dryer according to claim 2, characterized in that: The regeneration pipeline comprises a regeneration intake pipe, a regeneration exhaust pipe (70), a heating pipe, a cooling pipe, a first connecting pipe and a second connecting pipe; The first connecting pipe and the second connecting pipe both connect the first tower (27) and the second tower (28); The heating pipe and the cooling pipe are connected in parallel between the first connecting pipe and the second connecting pipe; The regeneration air intake pipe is connected to the heating pipe or the cooling pipe, and the regeneration exhaust pipe (70) is connected to the first connecting pipe or the second connecting pipe.

5. The dryer according to claim 4, characterized in that: The heating pipe comprises a heating main pipe (16) and a heating valve (11) and a heater (17) arranged on the heating main pipe (16); The cooling pipe comprises a cooling main pipe (19), a cooling valve (20) and an aftercooler (18) arranged on the cooling main pipe (19); The heating main pipe (16) and the cooling main pipe (19) are connected in parallel between the first connecting pipe and the second connecting pipe; The cooling main pipe (19) is provided with a blower (12); The regeneration air intake pipe is connected to the cooling main pipe (19).

6. The dryer according to claim 4, characterized in that: The first connecting pipe comprises a first connecting main pipe (40) and a first connecting branch pipe (41) and a second connecting branch pipe (42) connected to the first connecting main pipe (40); The first connecting main pipe (40) is connected to the cooling pipe and the heating pipe; The first connecting branch pipe (41) is connected to the first tower (27), and a first valve (21) is disposed on the first connecting branch pipe (41); The second connecting branch pipe (42) is connected to the second tower (28), and a second valve (22) is disposed on the second connecting branch pipe (42).

7. The dryer according to claim 4, characterized in that: The second connecting pipe comprises a second connecting main pipe (50) and a third connecting branch pipe (51) and a fourth connecting branch pipe (52) connected to the second connecting main pipe (50); The second connecting main pipe (50) is connected to the cooling pipe and the heating pipe; The third connecting branch pipe (51) is connected to the first tower (27), and a third valve (3) is provided on the third connecting branch pipe (51); The fourth connecting branch pipe (52) is connected to the second tower (28), and a fourth valve (4) is provided on the fourth connecting branch pipe (52); The regeneration exhaust pipe (70) is connected to the second connecting main pipe (50).

8. The dryer according to claim 1, characterized in that: The control valve includes an electric valve.

9. The dryer according to claim 1, characterized in that: The detection component includes a flow meter and a pressure meter, the flow meter is used to detect flow, and the pressure meter is used to detect pressure.

10. A silicon carbide production system, characterized in that: The invention comprises silicon carbide production equipment and the dryer according to any one of claims 1 to 9, wherein the dryer is used to provide CDA for the silicon carbide production equipment.

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