Quartz tube hanging ring welding equipment

Abstract

The utility model provides quartz tube hanging ring welding equipment. The quartz tube hanging ring welding equipment comprises a first supporting mechanism, a second supporting mechanism, a clamping mechanism and a welding mechanism. The first supporting mechanism comprises a base, a moving module and a bearing assembly, the second supporting mechanism comprises a supporting table, a lifting module and a supporting frame, the clamping mechanism comprises a pressing air cylinder, a mounting plate and a clamping jaw, the pressing air cylinder is arranged at the end of the supporting frame in the vertical direction, the mounting plate is connected with a piston rod of the pressing air cylinder, and the clamping jaw is arranged on the mounting plate; the welding mechanism comprises a propelling module and a welding gun, the propelling module is arranged on the supporting frame, and the welding gun is movably arranged on the propelling module. The quartz tube hanging ring welding equipment is simple in structure, low in manufacturing cost and applied to the quartz tube hanging ring welding technology, the first supporting mechanism is used for bearing the quartz tube, the clamping mechanism is used for clamping the hanging ring, the welding mechanism is used for welding the hanging ring to the designated position of the quartz tube, operation and control are convenient, and the production efficiency is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of quartz product processing, in particular to a quartz tube hanging ring welding device. Background Art

[0002] Quartz tubes have the characteristics of high purity and high temperature resistance, and are widely used in semiconductor silicon wafer oxidation, diffusion and other processes. In the preparation process of quartz tubes, it is necessary to weld and process the rings on the inner wall of the quartz tube to facilitate the installation of other devices on the quartz tube. The traditional method uses manual fixing of the rings and welding, which is difficult to operate, has low work efficiency, and is not safe enough. Therefore, mechanical welding equipment is currently basically used for the welding operation of the quartz tube rings. However, some existing mechanical welding equipment has a relatively complex structure, high manufacturing cost, and inconvenient operation and control. Utility Model Content

[0003] The utility model aims to solve the shortcomings in the prior art and proposes a quartz tube hoist ring welding device, which optimizes the device structure, reduces the manufacturing cost and improves the convenience of operation.

[0004] In order to achieve the above purpose, the utility model adopts the following technical solutions:

[0005] A quartz tube hanging ring welding device comprises a first supporting mechanism, a second supporting mechanism, a clamping mechanism and a welding mechanism.

[0006] The first supporting mechanism comprises a base, a movable module and a supporting assembly. The movable module is arranged on the base, and the supporting assembly is movably arranged on the movable module along the length direction of the base.

[0007] The second supporting mechanism includes a supporting platform, a lifting module and a supporting frame. The supporting platform is arranged at one end of the base, the lifting module is arranged on the supporting platform, and the supporting frame is liftably arranged on the lifting module. The length direction of the supporting frame is parallel to the length direction of the base.

[0008] The clamping mechanism comprises a clamping cylinder, a mounting plate and a clamping claw. The clamping cylinder is arranged at the end of the support frame in the vertical direction. The mounting plate is connected to the piston rod of the clamping cylinder. The clamping claw is arranged on the mounting plate.

[0009] The welding mechanism comprises a propulsion module and a welding gun. The propulsion module is arranged on the support frame. The length direction of the propulsion module is parallel to the length direction of the base. The welding gun is movably arranged on the propulsion module.

[0010] Preferably, the supporting assembly includes a support plate and a roller shaft, the support plate is arranged on the movable module, there are two roller shafts, the two roller shafts are arranged on the support plate parallel to each other, the central axis of each roller shaft is parallel to the length direction of the base, and multiple rollers are arranged on the roller shaft.

[0011] Preferably, a limiting block is provided at one end of the support plate away from the support platform.

[0012] Preferably, the moving module, the lifting module and the propulsion module respectively adopt linear guide modules or cylinders.

[0013] Preferably, the support frame is cylindrical, and the central axis of the support frame is parallel to the length direction of the base.

[0014] Preferably, the clamping cylinder is arranged inside the support frame, and a first opening is correspondingly provided on the bottom side of the support frame, and the clamping claw extends from the first opening.

[0015] Preferably, the propulsion module is arranged inside the support frame, and a second opening is correspondingly provided on the bottom side of the support frame. The welding gun extends from the second opening, and the nozzle of the welding gun faces the direction of the clamping jaw.

[0016] Preferably, the surface of the support frame is covered with a fire-resistant layer.

[0017] Preferably, there are two welding guns, which are arranged oppositely on the propulsion module.

[0018] Preferably, the welding gun is an oxyhydrogen welding gun.

[0019] Compared with the prior art, the beneficial effects of the utility model are as follows: the quartz tube lifting ring welding equipment of the utility model has a relatively simple structure and low manufacturing cost, and is applied to the quartz tube lifting ring welding process. The first supporting mechanism is used to support the quartz tube, the clamping mechanism is used to clamp the lifting ring, and the welding mechanism is used to weld the lifting ring to the specified position of the quartz tube. The operation and control are convenient, and the production efficiency is improved. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] Figure 1 It is a structural schematic diagram of a quartz tube hanging ring welding device of some embodiments of the utility model;

[0021] Figure 2 It is a schematic diagram of the structure of the supporting assembly in some embodiments of the utility model;

[0022] Figure 3 It is a structural schematic diagram of the clamping mechanism and the welding mechanism in some embodiments of the utility model;

[0023] Figure 4This is a schematic structural diagram of the quartz tube hanging ring welding equipment of some embodiments of the utility model when applied to quartz tube hanging ring welding.

[0024] In the figure, 10-first supporting mechanism, 11-base, 12-movable module, 13-supporting assembly, 131-support plate, 132-roller shaft, 133-roller, 134-limiting block, 20-second supporting mechanism, 21-support table, 22-lifting module, 23-support frame, 231-first opening, 232-second opening, 30-clamping mechanism, 31-clamping cylinder, 32-mounting plate, 33-clamping claw, 40-welding mechanism, 41-propelling module, 42-welding gun, 50-quartz tube, 51-lifting ring. DETAILED DESCRIPTION

[0025] In order to make the purpose, technical solution and advantages of the utility model clearer, the technical solution of the embodiment of the utility model will be clearly and completely described below in conjunction with the drawings of the embodiment of the utility model. Obviously, the described embodiment is a part of the embodiment of the utility model, not all of the embodiments. Based on the described embodiment of the utility model, all other embodiments obtained by ordinary technicians in this field without creative work belong to the scope of protection of the utility model. It can be understood that some technical means of the various embodiments described herein can be replaced or combined with each other without conflict.

[0026] In the description of the present invention, if there are terms such as "first", "second", etc., they are only used to distinguish the objects described, and do not have any order or technical meaning. Therefore, the objects defined as "first", "second", etc. may explicitly or implicitly include one or more of the objects. Moreover, "one" or "a" and similar words do not indicate a quantity limitation, but indicate the existence of at least one, and "multiple" means not less than two.

[0027] In the description of the utility model specification, reference to "one embodiment" or "some embodiments" etc. means that one or more embodiments of the utility model include specific features, structures or characteristics described in conjunction with the embodiment. Therefore, the phrases "in one embodiment", "in some embodiments", "in some other embodiments", "in some other embodiments", etc. appearing in different places in the specification do not necessarily refer to the same embodiment, but mean "one or more but not all embodiments", unless otherwise specifically emphasized in other ways.

[0028] Please refer to Figures 1 to 3The utility model provides a quartz tube ring welding device, which includes a first supporting mechanism 10, a second supporting mechanism 20, a clamping mechanism 30 and a welding mechanism 40. The first supporting mechanism 10 is used to support the quartz tube, the second supporting mechanism 20 is used to install the clamping mechanism 30 and the welding mechanism 40, the clamping mechanism 30 is used to stably clamp the ring, and the welding mechanism 40 is used to weld the ring to the quartz tube.

[0029] Specifically, the first support mechanism 10 includes a base 11, a moving module 12 and a supporting assembly 13. The moving module 12 is disposed on the base 11, and the supporting assembly 13 is movably disposed on the moving module 12 along the length direction of the base 11. The structure of the supporting assembly 13 can be matched with the structure of the quartz tube. The supporting assembly 13 is used to support the quartz tube. The moving module 12 can drive the supporting assembly 13 to move along the length direction of the base 11, so as to facilitate the welding of the lifting ring at different axial positions of the quartz tube according to needs.

[0030] The second support mechanism 20 includes a support platform 21, a lifting module 22 and a support frame 23. The support platform 21 is arranged at one end of the base 11, the lifting module 22 is arranged on the support platform 21, and the support frame 23 is arranged on the lifting module 22 in a liftable manner. The length direction of the support frame 23 is parallel to the length direction of the base 11. Further, one end of the support frame 23 is connected to the lifting module 22, and the other end of the support frame 23 faces the direction of the supporting assembly 13. The lifting module 22 can drive the support frame 23 to move up and down to facilitate the ring welding operation.

[0031] The clamping mechanism 30 includes a clamping cylinder 31, a mounting plate 32 and a clamping jaw 33. The clamping cylinder 31 is arranged at the end of the support frame 23 (the end of the support frame 23 facing the supporting assembly 13) in the vertical direction. The mounting plate 32 is connected to the piston rod of the clamping cylinder 31. The clamping jaw 33 is arranged on the mounting plate 32. Specifically, the clamping jaw 33 is arranged at the bottom of the mounting plate 32. In application, the clamping jaw 33 can adopt commercially available pneumatic clamping jaws or electric clamping jaws. The structure and working principle of such products belong to the prior art and will not be repeated here. The clamping jaw 33 can be used to stably clamp the lifting ring. The clamping cylinder 31 can drive the clamping jaw 33 to move downward to press the lifting ring to the specified position of the quartz tube.

[0032] The welding mechanism 40 includes a propulsion module 41 and a welding gun 42. The propulsion module 41 is arranged on the support frame 23. The length direction of the propulsion module 41 is parallel to the length direction of the base 11. The welding gun 42 is movably arranged on the propulsion module 41. The nozzle of the welding gun 42 faces the direction of the clamping jaw 33. In the welding of the quartz tube ring, the propulsion module 41 can drive the welding gun 42 to move back and forth within a certain range to uniformly heat the ring welding position and improve the welding quality.

[0033] Combination Figures 1 to 4When the quartz tube lifting ring welding device of the utility model is applied to the quartz tube lifting ring welding, the clamping claw 33 is used to stably clamp the lifting ring 51, and the quartz tube 50 is placed on the supporting assembly 13. The moving module 12 can drive the supporting assembly 13 to move toward the second supporting mechanism 20, so that the support frame 23 enters the quartz tube; when the lifting ring 51 reaches above the designated lifting ring welding position, the moving module 12 stops driving the supporting assembly 13 to move, and then the lifting module 22 drives the support frame 23 to move downward, so that The welding gun 42 is close to the ring welding position; then, the propulsion module 41 drives the welding gun 42 to move back and forth within a certain range at the ring welding position to uniformly heat the quartz tube 50 at that position; after the quartz tube 50 at that position softens, the clamping cylinder 31 drives the clamping claw 33 to move downward and presses the ring 51 at the designated ring welding position; at the same time, the propulsion module 41 continues to drive the welding gun 42 to move back and forth at the ring welding position, so that the ring 51 and the quartz tube 50 are welded together. This quartz tube ring welding equipment has a relatively simple structure and low manufacturing cost. It is applied to the quartz tube ring welding process, is easy to operate and control, and improves production efficiency.

[0034] It should be noted that the welding position of the lifting ring, the distance range of the propulsion module 41 driving the welding gun 42 to move, etc. can be reasonably set according to actual needs.

[0035] The above-mentioned moving module 12, lifting module 22, and propulsion module 41 can respectively adopt commercially available linear guide modules, cylinders or other suitable products. In some embodiments, the moving module 12 adopts a linear guide module product, and the moving module 12 includes a first slide rail and a first slider, the first slide rail is arranged along the length direction of the base 11, the first slider is movably arranged on the first slide rail, and the supporting assembly 13 is fixedly arranged on the first slider. When the first slider moves along the first slide rail, the supporting assembly 13 can move synchronously therewith. In other embodiments, the lifting module 22 adopts a linear guide module product, and the lifting module 22 includes a second slide rail and a second slider. The second slide rail is arranged on the support platform 21 in the vertical direction, the second slider is movably arranged on the second slide rail, and the support frame 23 is fixedly connected to the second slider. When the second slider moves up and down along the second slide rail, the support frame 23 can move up and down synchronously therewith. In some other embodiments, the propulsion module 41 is a cylinder product, which is arranged on the support frame 23 along the length direction of the base 11. The piston rod of the cylinder is connected to the welding gun 42, and the piston rod moves in the cylinder, thereby driving the welding gun 42 to move synchronously.

[0036] Reference Figure 2 and Figure 4In some embodiments, the supporting assembly 13 includes a supporting plate 131 and a roller shaft 132. The supporting plate 131 is disposed on the moving module 12. There are two roller shafts 132. The two roller shafts 132 are disposed on the supporting plate 131 in parallel with each other. The central axis of each roller shaft 132 is parallel to the length direction of the base 11. A plurality of rollers 133 are disposed on the roller shaft 132. The roller shaft 132 can be rotatably mounted on the supporting plate 131 using accessories such as a bearing seat, and the roller 133 can be made of flexible materials such as rubber and plastic or its surface is covered with these flexible materials to avoid scratching the quartz tube 50. When the quartz tube 50 is placed on the supporting assembly 13, the multiple rollers 133 on the two roller shafts 132 are in contact with the outer wall of the quartz tube 50 respectively. The arrangement of the roller shafts 132 enables the quartz tube 50 to rotate around its own axis, so as to facilitate welding of the hanging ring 51 at different circumferential positions of the quartz tube 50 according to process requirements. However, the present invention is not limited to this, and in other embodiments, the supporting assembly can also adopt other reasonable structures.

[0037] Furthermore, a stopper 134 is provided at one end of the support plate 131 away from the support platform 21, and the tail end of the quartz tube 50 abuts against the stopper 134. The stopper 134 is used to limit the position of the quartz tube 50, thereby ensuring the welding positioning accuracy. Furthermore, the stopper 134 can be made of flexible materials such as rubber and plastic or its surface is covered with these flexible materials to avoid scratching the quartz tube 50.

[0038] Reference Figure 1 and Figure 3 In some embodiments, the support frame 23 is cylindrical, and the central axis of the support frame 23 is parallel to the length direction of the base 11. In this way, most of the components in the clamping mechanism 30 and the welding mechanism 40 can be arranged inside the support frame 23 to avoid damage to these components caused by high temperature during welding, thereby extending the service life of the welding equipment.

[0039] Furthermore, the clamping cylinder 31 is arranged inside the support frame 23. Specifically, the clamping cylinder 31 can be fixed to the inner wall of the top side of the support frame 23. The bottom side of the support frame 23 is correspondingly provided with a first opening 231, and the clamping claw 33 extends from the first opening 231. Furthermore, the pushing module 41 is arranged inside the support frame 23. The bottom side of the support frame 23 is correspondingly provided with a second opening 232. The welding gun 42 extends from the second opening 232, and the nozzle of the welding gun 42 faces the direction of the clamping claw 33. However, the utility model is not limited to this. In other embodiments, the specific position settings of the clamping mechanism 30 and the welding mechanism 40 on the support frame 23 can be reasonably set according to actual conditions.

[0040] In some other embodiments, the surface of the support frame 23 is covered with a refractory layer to enhance the refractory performance of the support frame 23 and extend its service life. In actual manufacturing, the refractory layer can be formed by coating the outer wall of the support frame 23 with an existing refractory coating, or by wrapping the support frame 23 with refractory materials such as refractory rock wool and refractory fibers. It should be understood that the melting point of the support frame and the refractory layer should be much higher than the melting point of the quartz material.

[0041] In some embodiments, there are two welding guns 42, and the two welding guns 42 are oppositely arranged on the pushing module 41. In the quartz tube hanging ring welding operation, the two welding guns 42 correspond to the two sides of the hanging ring 51 respectively, and the pushing module 41 can drive the two welding guns 42 to move back and forth, so that the two welding guns 42 heat the quartz tube 50 and the hanging ring 51 respectively, thereby improving the heating efficiency.

[0042] The welding gun 42 can be a commercially available welding gun product, which can be reasonably selected according to actual needs. For example, in some embodiments, the welding gun 42 adopts a commercially available hydrogen-oxygen welding gun product. The hydrogen-oxygen welding gun uses water as a raw material, and decomposes it into a mixed fuel gas of hydrogen and oxygen through electrolysis. After use, the hydrogen and oxygen are burned into water, which can completely replace the traditional welding method of acetylene and liquefied gas plus oxygen cylinders, and has the characteristics of safety, environmental protection, energy saving, and high efficiency. In addition, since the support frame 23 is configured as a cylindrical shape, some pipes, devices, etc. in the hydrogen-oxygen welding gun can be installed inside the support frame 23, and only the nozzle part of the welding gun is extended from the second opening, thereby avoiding the high temperature during welding from damaging these pipes or devices.

[0043] The quartz tube lifting ring welding equipment of the utility model has a relatively simple structure and low manufacturing cost. It is applied to the quartz tube lifting ring welding process. The first supporting mechanism is used to support the quartz tube, the clamping mechanism is used to clamp the lifting ring, and the welding mechanism is used to weld the lifting ring to the specified position of the quartz tube. The operation and control are convenient and the production efficiency is high.

[0044] The present invention has been described by the above-mentioned relevant embodiments, however, the above-mentioned embodiments are only examples for implementing the present invention. It must be pointed out that the disclosed embodiments do not limit the scope of the present invention. On the contrary, any changes and modifications made without departing from the spirit and scope of the present invention are within the scope of patent protection of the present invention.

Claims

1. A quartz tube ring welding device, characterized in that: It includes a first supporting mechanism, a second supporting mechanism, a clamping mechanism and a welding mechanism; The first supporting mechanism comprises a base, a movable module and a supporting assembly, wherein the movable module is arranged on the base, and the supporting assembly is arranged on the movable module movably along the length direction of the base; The second supporting mechanism comprises a supporting platform, a lifting module and a supporting frame, wherein the supporting platform is arranged at one end of the base, the lifting module is arranged on the supporting platform, and the supporting frame is liftably arranged on the lifting module, and the length direction of the supporting frame is parallel to the length direction of the base; The clamping mechanism comprises a clamping cylinder, a mounting plate and a clamping claw, wherein the clamping cylinder is arranged at the end of the support frame in the vertical direction, the mounting plate is connected to the piston rod of the clamping cylinder, and the clamping claw is arranged on the mounting plate; The welding mechanism comprises a propulsion module and a welding gun. The propulsion module is arranged on the support frame. The length direction of the propulsion module is parallel to the length direction of the base. The welding gun is movably arranged on the propulsion module.

2. The quartz tube hanging ring welding equipment according to claim 1, characterized in that: The supporting assembly includes a support plate and a roller shaft, the support plate is arranged on the movable module, there are two roller shafts, the two roller shafts are arranged on the support plate in parallel with each other, the central axis of each roller shaft is parallel to the length direction of the base, and multiple rollers are arranged on the roller shafts.

3. The quartz tube hanging ring welding equipment according to claim 2, characterized in that: A limiting block is provided at one end of the support plate away from the support platform.

4. The quartz tube hanging ring welding equipment according to claim 1, characterized in that: The moving module, the lifting module and the propulsion module respectively adopt linear guide modules or cylinders.

5. The quartz tube hanging ring welding equipment according to claim 1, characterized in that: The support frame is cylindrical, and the central axis of the support frame is parallel to the length direction of the base.

6. The quartz tube hanging ring welding equipment according to claim 5, characterized in that: The clamping cylinder is arranged inside the support frame, and a first opening is correspondingly arranged on the bottom side of the support frame, and the clamping claw extends from the first opening.

7. The quartz tube hanging ring welding equipment according to claim 5, characterized in that: The propulsion module is arranged inside the support frame, and a second opening is correspondingly arranged on the bottom side of the support frame. The welding gun extends from the second opening, and the nozzle of the welding gun faces the direction where the clamping claw is located.

8. The quartz tube hanging ring welding equipment according to claim 1, characterized in that: The surface of the support frame is covered with a fire-resistant layer.

9. The quartz tube hanging ring welding equipment according to claim 1, characterized in that: There are two welding guns, which are arranged on the propulsion module opposite to each other.

10. The quartz tube hanging ring welding equipment according to claim 1, characterized in that: The welding gun adopts an oxyhydrogen welding gun.

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