Integrated polishing solution supply equipment

Abstract

The utility model discloses integrated polishing solution supply equipment which comprises a box body, three supporting frames are installed in the box body, a first solution storage barrel, a second solution storage barrel and a third solution storage barrel are fixed to the three supporting frames respectively, and the first solution storage barrel, the second solution storage barrel and the third solution storage barrel are all connected with a clear water pipe, a water outlet pipe and a water return pipe. A water outlet pipe on the first liquid storage barrel is connected with the magnetic levitation pump to achieve the liquid supply effect. The integrated polishing solution supply equipment integrates solution supply, recovery, cleaning, temperature control and PH value monitoring for a polishing machine, solution preparation and supply of polishing solutions with different parameters can be achieved according to actual needs, various requirements of solution supply of the polishing machine are met, manual intervention is effectively reduced, three kinds of polishing solutions are integrated on one equipment, and the integrated polishing solution supply equipment is convenient to use and high in practicability. Different liquid supply requirements of the polishing machine can be met, the number of devices is reduced, and the production cost of the devices can be greatly reduced.

Description

Technical Field

[0001] The utility model relates to the technical field of liquid supply equipment, in particular to an integrated polishing liquid supply equipment. Background Art

[0002] In the semiconductor processing process, in order to meet the liquid supply needs of the 12-inch polishing machine, it is necessary to equip the polishing machine with special liquid supply equipment to meet the actual liquid supply needs. Under different process polishing processes, the parameter requirements for the polishing liquid are also different, so it is necessary to convert different liquid supply equipment to meet the liquid supply needs or replace the polishing liquid by cleaning the liquid supply cylinder, which is more troublesome and greatly increases the labor cost. To address the above problems, an integrated polishing liquid supply device is designed to better meet the actual use needs. Utility Model Content

[0003] The purpose of the utility model is to provide an integrated polishing liquid supply device to solve the problems raised in the above background technology.

[0004] To achieve the above-mentioned purpose, the utility model provides the following technical solutions: an integrated polishing liquid supply device, comprising a box body, three support frames are installed in the box body, and a first liquid storage barrel, a second liquid storage barrel and a third liquid storage barrel are fixed on the three support frames respectively, the first liquid storage barrel, the second liquid storage barrel and the third liquid storage barrel are all connected with a clean water pipe, a water outlet pipe and a return water pipe, the water outlet pipe on the first liquid storage barrel is connected to a magnetic levitation pump to realize liquid supply, the water outlet pipes on the second liquid storage barrel and the third liquid storage barrel are respectively connected to a diaphragm pump to realize liquid supply, the water outlet pipe is also connected to a first filter and a second filter, and the return water pipe is also connected to a third filter and a fourth filter.

[0005] Preferably, the lower end surface of the box body is fixed with universal wheels by bolts, and four universal wheels are provided. Through the action of the universal wheels, the entire device can be easily moved, thereby improving the convenience of carrying the device.

[0006] Preferably, the first liquid storage barrel, the second liquid storage barrel and the third liquid storage barrel are all installed with heat exchange tubes, and the heat exchange tubes are spiral structures. The first liquid storage barrel, the second liquid storage barrel and the third liquid storage barrel are all installed with temperature sensors. Through the action of the heat exchange tubes, the temperature in the first liquid storage barrel, the second liquid storage barrel or the third liquid storage barrel can be controlled, thereby realizing the temperature control of the polishing liquid to meet the actual polishing requirements. In conjunction with the action of the temperature sensor, the temperature of the polishing liquid can be detected.

[0007] Preferably, a pH detector is installed at the bottom of the inner side of the first liquid storage barrel, the second liquid storage barrel and the third liquid storage barrel, and a pressure liquid level detector is also fixed at the bottom of the inner side of the first liquid storage barrel, the second liquid storage barrel and the third liquid storage barrel. The pH value of the polishing liquid can be detected by the pH detector, and the liquid level detection function of the first liquid storage barrel, the second liquid storage barrel or the third liquid storage barrel can be realized in combination with the pressure liquid level detector, so as to remind the staff to replenish the liquid in time.

[0008] Preferably, the first filter is installed in parallel with the second filter, and control valves are installed between the first filter, the second filter and the third liquid storage tank. Through the parallel action of the first filter and the second filter, when the filter is clogged and needs to be replaced, there is no need to shut down the device, thereby ensuring the normal operation of the device.

[0009] Preferably, the third filter and the fourth filter are installed in parallel, and control valves are installed between the third filter, the fourth filter and the return pipe. Through the parallel action of the third filter and the fourth filter, when the filter is clogged and needs to be replaced, there is no need to shut down, thereby ensuring the normal operation of the device.

[0010] Compared with the prior art, the beneficial effects of the utility model are: the integrated polishing liquid supply equipment integrates the supply, recovery, cleaning, temperature control and pH value monitoring for the polishing machine, and can realize the liquid supply of polishing liquid with different parameters according to actual needs, meet various requirements of polishing machine liquid supply, effectively reduce manual intervention, and by integrating three polishing liquid supplies, the three are integrated on one device, which can not only meet the different liquid supply needs of the polishing machine and reduce the number of equipment, but also greatly reduce the equipment production cost. BRIEF DESCRIPTION OF THE DRAWINGS

[0011] Figure 1 This is a schematic diagram of the front view structure of the box body of the utility model;

[0012] Figure 2 This is a schematic diagram of the rear view structure of the box body of the utility model;

[0013] Figure 3 This is a left-side perspective structural diagram of the box body of the utility model;

[0014] Figure 4 This is a right-side perspective structural diagram of the box body of the utility model;

[0015] Figure 5 It is a schematic diagram of the cross-sectional three-dimensional structure of the first liquid storage barrel of the utility model.

[0016] In the figure: 1. box body; 101. universal wheel; 2. support frame; 3. first liquid storage barrel; 301. heat exchange tube; 302. temperature sensor; 4. second liquid storage barrel; 5. third liquid storage barrel; 6. PH detector; 7. pressure level detector; 8. clean water pipe; 9. water outlet pipe; 901. first filter; 902. second filter; 10. return pipe; 1001. third filter; 1002. fourth filter. DETAILED DESCRIPTION

[0017] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0018] See also Figure 1-Figure 5 The utility model provides a technical solution: an integrated polishing liquid supply device, including a box body 1, three support frames 2 are installed in the box body 1, and the first liquid storage barrel 3, the second liquid storage barrel 4 and the third liquid storage barrel 5 are respectively fixed on the three support frames 2, the first liquid storage barrel 3, the second liquid storage barrel 4 and the third liquid storage barrel 5 are connected with a clean water pipe 8, a water outlet pipe 9 and a return water pipe 10, the water outlet pipe 9 on the first liquid storage barrel 3 is connected to the magnetic floating pump to realize the liquid supply function, the water outlet pipes 9 on the second liquid storage barrel 4 and the third liquid storage barrel 5 are respectively connected to the diaphragm pump to realize the liquid supply function, the water outlet pipe 9 is also connected to the first filter 901 and the second filter 902, and the return water pipe 10 is also connected to the third filter 1001 and the fourth filter 1002.

[0019] A universal wheel 101 is fixed to the lower end surface of the box body 1 by bolts, and four universal wheels 101 are provided; a heat exchange tube 301 is installed in the first liquid storage barrel 3, the second liquid storage barrel 4 and the third liquid storage barrel 5, and the heat exchange tube 301 is a spiral structure, and a temperature sensor 302 is installed in the first liquid storage barrel 3, the second liquid storage barrel 4 and the third liquid storage barrel 5; a PH detector 6 is installed at the bottom of the inner side of the first liquid storage barrel 3, the second liquid storage barrel 4 and the third liquid storage barrel 5, and a pressure level detector 7 is also fixed at the bottom of the inner side of the first liquid storage barrel 3, the second liquid storage barrel 4 and the third liquid storage barrel 5;

[0020] When using the integrated polishing liquid supply device, Figure 1-Figure 5As shown, the universal wheel 101 can facilitate the movement of the device, and the outlet pipe 9 and the return pipe 10 on the first liquid storage barrel 3, the second liquid storage barrel 4 and the third liquid storage barrel 5 are respectively connected to the liquid supply pipe and the return pipe of the polishing machine to realize the supply and recovery of the polishing liquid. In actual use, the temperature sensor 302 can detect the temperature of the polishing liquid in the first liquid storage barrel 3, the second liquid storage barrel 4 and the third liquid storage barrel 5. The heat exchange tube 301 can be used to adjust the temperature of the polishing liquid to ensure that the temperature of the polishing liquid meets the actual use requirements. The pH value of the polishing liquid can be detected in conjunction with the pH detector 6 to ensure that the pH value of the polishing liquid meets the polishing requirements. The pressure level detector 7 can measure the liquid level through the gravity of the polishing liquid in the barrel, which is convenient for notifying the staff to perform the refilling operation in time. In actual use, the supply of polishing liquids with different parameters can be realized by controlling the valves of the first liquid storage barrel 3, the second liquid storage barrel 4 and the third liquid storage barrel 5, so as to better meet the actual polishing requirements.

[0021] The first filter 901 and the second filter 902 are installed in parallel, and control valves are installed between the first filter 901, the second filter 902 and the third liquid storage tank 5; the third filter 1001 and the fourth filter 1002 are installed in parallel, and control valves are installed between the third filter 1001, the fourth filter 1002 and the return pipe 10;

[0022] During the operation of the device, Figure 1-Figure 4 As shown, through the action of the filter, the polishing liquid can be filtered to ensure the cleanliness of the polishing liquid, and in actual use, by opening the valves of the first filter 901 and the third filter 1001, the filtering effect of the inlet and return liquid can be achieved. At this time, the valves on the second filter 902 and the fourth filter 1002 are closed. When the first filter 901 and the third filter 1001 need to be replaced, it is only necessary to open the valves on the second filter 902 and the fourth filter 1002, and close the valves on the first filter 901 and the third filter 1001. There is no need to stop the machine for replacement, which ensures the normal operation of the device and makes equipment maintenance more convenient. This is the working principle of the integrated polishing liquid supply device.

[0023] Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. An integrated polishing liquid supply device, comprising a housing (1), characterized in that: Three support frames (2) are installed in the box body (1), and a first liquid storage barrel (3), a second liquid storage barrel (4) and a third liquid storage barrel (5) are fixed on the three support frames (2) respectively. The first liquid storage barrel (3), the second liquid storage barrel (4) and the third liquid storage barrel (5) are all connected with a clean water pipe (8), a water outlet pipe (9) and a water return pipe (10). The water outlet pipe (9) on the first liquid storage barrel (3) is connected to a magnetic floating pump to realize a liquid supply function. The water outlet pipes (9) on the second liquid storage barrel (4) and the third liquid storage barrel (5) are respectively connected to a diaphragm pump to realize a liquid supply function. The water outlet pipe (9) is also connected to a first filter (901) and a second filter (902), and the water return pipe (10) is also connected to a third filter (1001) and a fourth filter (1002).

2. The integrated polishing liquid supply device according to claim 1, characterized in that: A universal wheel (101) is fixed to the lower end surface of the box body (1) by means of bolts, and four universal wheels (101) are provided.

3. The integrated polishing liquid supply device according to claim 1, characterized in that: The first liquid storage barrel (3), the second liquid storage barrel (4) and the third liquid storage barrel (5) are all equipped with heat exchange tubes (301), and the heat exchange tubes (301) are of a spiral structure. The first liquid storage barrel (3), the second liquid storage barrel (4) and the third liquid storage barrel (5) are all equipped with temperature sensors (302).

4. The integrated polishing liquid supply device according to claim 1, characterized in that: A pH detector (6) is installed on the inner bottom of each of the first liquid storage barrel (3), the second liquid storage barrel (4) and the third liquid storage barrel (5), and a pressure liquid level detector (7) is also fixed on the inner bottom of each of the first liquid storage barrel (3), the second liquid storage barrel (4) and the third liquid storage barrel (5).

5. The integrated polishing liquid supply device according to claim 1, characterized in that: The first filter (901) and the second filter (902) are installed in parallel, and control valves are installed between the first filter (901) and the second filter (902) and the third liquid storage tank (5).

6. The integrated polishing liquid supply device according to claim 1, characterized in that: The third filter (1001) and the fourth filter (1002) are installed in parallel, and control valves are installed between the third filter (1001), the fourth filter (1002) and the return pipe (10).

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