Vapor deposition device

Abstract

The utility model belongs to the technical field of display device manufacturing, and discloses a vapor deposition device which comprises a deposition assembly and a heating assembly, the deposition assembly comprises a cavity, a first electrode and a second electrode, the first electrode is connected with a radio frequency power supply, and the second electrode is used for supporting a workpiece to be plated; the heating assembly comprises an adjusting part and a plurality of heating parts arranged at intervals in the first direction, all the heating parts abut against the side, away from the first electrode, of the second electrode, at least part of the heating parts are movable heating parts, and the adjusting part is in transmission connection with the movable heating parts so as to drive the movable heating parts to move in the first direction. According to the vapor deposition device disclosed by the utility model, the movable heating piece at the bottom of the second electrode can move by adjusting the movement of the movable heating piece through the adjusting piece, so that the condition that the balance of the coating environment at each point position of the glass substrate is not uniform due to the inclination of the first electrode is improved, and the uniformity of the coating thickness at each point position of the glass substrate is ensured; and the production yield of glass substrate coating can be improved.

Description

Technical Field

[0001] The utility model relates to the technical field of display device manufacturing, in particular to a vapor deposition device. Background Art

[0002] With the development of semiconductor technology, the development and use of Plasma Enhanced Chemical Vapor Deposition (PECVD) devices are becoming more and more widespread. The device uses two parallel electrode plates placed in a vacuum environment, one of which is connected to a radio frequency (RF) power supply and the other is grounded. A radio frequency electric field is generated between the two electrode plates, and the substrate to be film-formed is placed between the two electrode plates. The film-forming process gas enters between the two electrode plates and is excited to become plasma under the action of the radio frequency electric field. The plasma is adsorbed on the surface of the substrate or reacts with the surface of the substrate to form a thin film on the surface of the substrate. Factors such as gas flow, radio frequency electric field power, and process temperature may have an important impact on the quality of the final film.

[0003] Reference Figure 1 As shown, an existing chemical vapor deposition device includes a deposition chamber 1′, an upper electrode 2′, a lower electrode 3′ and a resistance wire 4. A deposition chamber 11′ for accommodating a glass substrate 5′ is arranged in the deposition chamber 1′. The upper electrode 2′ and the lower electrode 3′ are arranged in the deposition chamber 11′ with an interval. The glass substrate 5′ is placed on the lower electrode 3′. The resistance wire 4′ is fixed on the bottom side of the lower electrode 3′. When depositing a coating, the resistance wire 4′ is used to heat the lower electrode 3′ and the glass substrate 5′ on the lower electrode 3′ to a set temperature. The upper electrode 2′ ejects a gas containing plasma downward, and the gas is deposited on the surface of the glass substrate 5′ to form a thin film structure.

[0004] The prior art has the following deficiencies: after the upper electrode 2' has been used for a period of time, due to reasons such as loose screws, the upper electrode 2' will be offset at a certain angle, so that the distance between each point of the upper electrode 2' and the lower electrode 3' is different, while the heat is uniformly received at each point on the lower electrode 3', resulting in inconsistent coating environments at each point on the glass substrate 5'. The film thickness at a position where the upper electrode 2' is close to the lower electrode 3' will be greater than that at a position where the upper electrode 2' is far from the lower electrode 3', affecting the production yield of the glass substrate coating 5'. Therefore, it is necessary to disassemble the machine for maintenance after stopping production, which seriously affects the productivity of the glass substrate coating 5'. Utility Model Content

[0005] The utility model aims to provide a vapor deposition device, which has a simple structure and an adjustable position of a heating component to ensure uniformity of the coating environment at each point of a workpiece to be plated.

[0006] To achieve this purpose, the utility model adopts the following technical solutions:

[0007] A vapor deposition device is provided, comprising a deposition component and a heating component, wherein the deposition component comprises a chamber, and a first electrode and a second electrode arranged in the chamber relative to each other along a vertical direction, wherein the first electrode is connected to a radio frequency power supply, and the second electrode is used to support a workpiece to be plated; the heating component comprises a first driving member, an adjusting member, and a plurality of heating members arranged in a first direction, wherein all of the heating members abut against a side of the second electrode away from the first electrode, and at least some of the heating members are mobile heating members, wherein the adjusting member is transmission-connected to the mobile heating member to drive the mobile heating member to move along the first direction, and the adjusting member is arranged at the bottom of the chamber, and the first driving member is transmission-connected to the adjusting member to enable the adjusting member and the mobile heating member to move along the vertical direction, wherein the first direction is arranged at an angle to the vertical direction.

[0008] As a preferred solution of the vapor deposition device, all of the heating elements are the movable heating elements, the adjusting element includes a screw, a nut and a second driving element, the length of the screw extends along the first direction, a plurality of threads are arranged on the screw, and each of the threads is slidably connected with at least one nut, each of the movable heating elements is respectively connected with the nut on each of the threads, and the second driving element is transmission-connected to the screw to drive all of the movable heating elements to move synchronously along the first direction.

[0009] As a preferred solution of the vapor deposition device, the screw rod is provided with a plurality of threads with different pitches, and the pitch of the thread adjacent to the second driving member is greater than the pitch of the thread away from the second driving member.

[0010] As a preferred solution of the vapor deposition device, the heating assembly also includes a guide shaft and a sleeve. The length of the guide shaft extends along the first direction. The movable heating element is provided with the sleeve at one end away from the screw rod, and the sleeve is slidably connected to the guide shaft.

[0011] As a preferred solution of the vapor deposition device, the nut is an insulating and heat-insulating nut; and / or the sleeve is an insulating and heat-insulating sleeve.

[0012] As a preferred solution of the vapor deposition device, the heating element comprises a fixed heating element and the movable heating element, and the fixed heating element and the movable heating element are arranged alternately along the first direction.

[0013] As a preferred solution of the vapor deposition device, the movable heating element includes a heating block, a heat conductive block and an elastic element, the heating block is arranged on the adjusting element, the heat conductive block abuts against the second electrode, and the elastic element is arranged between the heat conductive block and the heating block.

[0014] As a preferred solution of the vapor deposition device, one of the two sides adjacent to each other of the heating block and the heat conducting block is provided with a guide groove, and the other is provided with a guide portion, and the guide portion is inserted into the guide groove.

[0015] As a preferred solution of the vapor deposition device, the elastic member is sleeved on the outer periphery of the guide portion.

[0016] As a preferred solution of the vapor deposition device, the second electrode has a plurality of heating areas arranged along the first direction, and one heating component is disposed in each of the heating areas.

[0017] The beneficial effects of the utility model are as follows: when the first electrode is tilted downward from a high point to a low point along a first direction, the movable heating element is adjusted by the adjusting element so that the movable heating element at the bottom of the second electrode can move toward a position adjacent to a high point, thereby increasing the temperature of the second electrode adjacent to a high point and reducing the temperature of the second electrode adjacent to a low point, so that the temperature of the glass substrate adjacent to a high point is greater than the temperature of the glass substrate adjacent to a low point, thereby improving the uneven balance of the coating environment at various points of the glass substrate caused by the tilt of the first electrode, ensuring the uniformity of the coating thickness at various points of the glass substrate, and helping to improve the production efficiency of the glass substrate coating. The production yield is high, and the heating component has a simple structure and is easy to adjust. The uniformity of the coating environment of the glass substrate can be adjusted without stopping the machine and disassembling, thereby effectively ensuring the production efficiency of the coating of the glass substrate. Through the setting of the first driving member, the adjusting member and the movable heating member can be driven to move downward in the vertical direction before the movement and adjustment, so that the movable heating member is separated from the second electrode and then moved and adjusted by the adjusting member, which can reduce the friction between the movable heating member and the second electrode during the movement and adjustment, thereby improving the movement smoothness of the movable heating member, reducing the loss of the movable heating member and the second electrode, and ensuring the service life of the movable heating member and the second electrode. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] The utility model is further described in detail below based on the drawings and embodiments.

[0019] Figure 1 It is a schematic diagram of the structure of an existing vapor deposition device;

[0020] Figure 2 It is a schematic structural diagram of a vapor deposition device according to an embodiment of the utility model;

[0021] Figure 3It is a schematic diagram of the structure of the heating component of an embodiment of the utility model;

[0022] Figure 4 It is a structural schematic diagram of a mobile heating element in an embodiment of the utility model.

[0023] Figure 1 middle:

[0024] 1′, deposition chamber; 2′, upper electrode; 3′, lower electrode; 4′, resistance wire; 5′, glass substrate.

[0025] Figures 2 to 4 middle:

[0026] 100. Workpiece to be plated;

[0027] 1. Deposition assembly; 11. Chamber; 12. First electrode; 13. Second electrode; 2. Heating assembly; 21. Adjusting member; 211. Screw rod; 2111. Thread; 212. Second driving member; 22. Moving heating member; 221. Heating block; 2211. Guide groove; 222. Heat conductive block; 2221. Guide portion; 223. Elastic member; 23. Guide shaft; 24. Bushing; 25. First driving member; 26. Mounting plate. DETAILED DESCRIPTION

[0028] The advantages and features of the present invention and the methods for achieving them will become apparent with reference to the embodiments described in detail below in conjunction with the accompanying drawings. However, the present invention is not limited to the embodiments disclosed below, but can be implemented in various forms. The present embodiments are provided only to complete the disclosure of the present invention and to enable those skilled in the art to fully understand the scope of the present invention, and the present invention is limited only by the scope of the claims. The same reference numerals represent the same constituent elements throughout the specification.

[0029] Hereinafter, the present invention will be described in detail with reference to the accompanying drawings.

[0030] like Figure 2 and Figure 3As shown, the vapor deposition device of an embodiment of the utility model includes a deposition component 1 and a heating component 2. The deposition component 1 includes a chamber 11, and a first electrode 12 and a second electrode 13 (the vertical direction is the Y direction shown in the figure) arranged in the chamber 11 at intervals in a vertical direction. The first electrode 12 is connected to a radio frequency power supply, and the second electrode 13 is used to support a workpiece 100 to be plated; the heating component 2 includes a first driving member 25, an adjusting member 21 and a plurality of heating members arranged in a first direction at intervals (the first direction is the X direction shown in the figure), all of the heating members are abutted against the side of the second electrode 13 away from the first electrode 12, at least some of the heating members are movable heating members 22, the adjusting member 21 is transmission-connected to the movable heating member 22 to drive the movable heating member 22 to move in the first direction, the adjusting member 21 is arranged at the bottom of the chamber 11, the first driving member 25 is transmission-connected to the adjusting member 21, so that the adjusting member 21 and the movable heating member 22 can move in the vertical direction, wherein the first direction is arranged at an angle to the vertical direction. The RF power supply is turned on, and the first electrode 12 is connected to the RF current to generate a RF electric field between the first electrode 12 and the second electrode 13. At the same time, an external reaction gas source inputs chemical gas between the first electrode 12 and the second electrode 13. The chemical gas is excited into plasma in the RF electric field, and the plasma is deposited on the surface of the glass substrate to form a thin film structure.

[0031] It can be understood that when the first electrode 12 tilts downward from a high point to a low point along the first direction, the movable heating element 22 is adjusted by the adjusting element 21 so that the movable heating element 22 at the bottom of the second electrode 13 can move toward a position adjacent to a high point, thereby increasing the temperature of the second electrode 13 adjacent to a high point and reducing the temperature of the second electrode 13 adjacent to a low point, so that the temperature of the glass substrate adjacent to a high point is greater than the temperature of the glass substrate adjacent to a low point, thereby improving the uneven balance of the coating environment at various points of the glass substrate caused by the tilt of the first electrode 12, ensuring the uniformity of the coating thickness at various points of the glass substrate, and helping to improve the production yield of the glass substrate coating. The heating component 2 has a simple structure and is easy to adjust. The heating component 2 can be adjusted to adapt to the tilt of the first electrode 12 without stopping the equipment structure, thereby completing the uniformity adjustment of the glass substrate coating environment, effectively ensuring the production efficiency of the glass substrate coating.

[0032] In this embodiment, the first direction is perpendicular to the vertical direction, the adjusting member 21 is arranged on the mounting plate 26, and the mounting plate 26 is arranged on the driving end of the first driving member 25. Before the mobile heating member 22 is moved and adjusted, the mounting plate 26 is driven by the first driving member 25 to drive the adjusting member 21 and the mobile heating member 22 on the mounting plate 26 to move downward in the vertical direction, so that the mobile heating member 22 is separated from the second electrode 13. At this time, the adjusting member 21 moves and adjusts the mobile heating member 22 again. After the adjustment is in place, the adjusting member 21 and the mobile heating member 22 are driven by the first driving member 25 to move upward in the vertical direction, so that the mobile heating member 22 is pressed against the second electrode 13. By setting the first driving member 25, the friction between the mobile heating member 22 and the second electrode 13 during the movement and adjustment can be reduced, thereby improving the moving smoothness of the mobile heating member 22, and reducing the loss of the mobile heating member 22 and the second electrode 13, ensuring the service life of the mobile heating member 22 and the second electrode 13.

[0033] In some embodiments, Figure 3 As shown, all the heating elements are mobile heating elements 22, and the adjusting element 21 includes a screw rod 211, a nut and a second driving element 212. The length of the screw rod 211 extends along the first direction, and the screw rod 211 is provided with multiple sections of threads 2111, and each section of threads 2111 is slidably connected with at least one nut, and each mobile heating element 22 is respectively connected with the nut on each section of threads 2111. The second driving element 212 is provided on the mounting plate 26, and the second driving element 212 is connected to the screw rod 211 in a transmission manner to drive all the mobile heating elements 22 to move synchronously along the first direction. The synchronous movement of multiple mobile heating elements 22 on the screw rod 211 is achieved by driving a screw rod 211 with a second driving element 212, and the movement synchronization is high. Compared with the situation where one second driving element 212 controls the movement of one heating element, this structural layout can reduce the investment of the second driving element 212, reduce energy consumption and the occupied space of the structure.

[0034] Furthermore, the screw rod 211 is provided with multiple sections of threads 2111 with different pitches, and the pitch of the threads 2111 adjacent to the second driving member 212 is greater than the pitch of the threads 2111 away from the second driving member 212. By providing sections of threads 2111 with different pitches, it is possible to achieve the adjustment of different nuts to different distances by rotating one screw rod 211, and the adjustment is convenient.

[0035] For example, three sections of threads 2111 are arranged on the screw rod 211 along the first direction, which are the first thread, the second thread and the third thread in sequence, and the first thread is adjacent to the second driving member 212, that is, the pitch of the first thread is greater than the pitch of the second thread, which is greater than the pitch of the third thread. Taking the first thread adjacent to the low point of the inclination of the upper electrode as an example, the second driving member 212 drives the screw rod 211 to drive, so that the moving distance of the mobile heating member 22 driven by the nut on the first thread is greater than the moving distance of the mobile heating member 22 driven by the nut on the second thread, and the moving distance of the mobile heating member 22 driven by the nut on the second thread is greater than the moving distance of the mobile heating member 22 driven by the nut on the third thread. The moving distance of the movable heating element 22, on the one hand, the screw on the third thread is adjacent to the side of the second electrode 13, reducing the adjustment distance of the movable heating element 22, can ensure that the movable heating element 22 is always in contact with the second electrode 13, and avoid the movable heating element 22 on the third thread from moving out of the second electrode 13; on the other hand, when the first electrode 12 is tilted, the low point moves from the edge side of the second electrode 13 to the inner side of the second electrode 13. Therefore, the moving distance of the movable heating element 22 under the second electrode 13 should be larger, which can ensure the adaptability of the movement adjustment of the movable heating element 22 and the tilt of the first electrode 12. The structure is simple and easy to adjust.

[0036] Furthermore, the heating assembly 2 also includes a guide shaft 23 and a sleeve 24, the length of the guide shaft 23 extends along the first direction, and the end of the movable heating element 22 away from the screw rod 211 is provided with a sleeve 24, and the sleeve 24 is slidably connected to the guide shaft 23. Through the cooperation of the sleeve 24 and the guide shaft 23, the movable heating element 22 can effectively improve the stability of the movement of the end of the movable heating element 22 away from the screw rod 211, and at the same time avoid the situation that the end of the movable heating element 22 away from the screw rod 211 droops due to its own gravity, thereby improving the structural installation stability of the movable heating element 22, that is, ensuring the stability of both ends of the length direction of the movable heating element 22. It is worth noting that the length direction of the movable heating element 22 is perpendicular to the first direction.

[0037] Optionally, the heating element often uses a resistance wire to directly energize and generate heat, and the nut is an insulating and heat-insulating nut. The setting of the insulating and heat-insulating nut can prevent the charge or heat on the resistance wire from being transferred to the screw rod 211 or the second drive member 212 and causing damage to the second drive member 212. The second drive member 212 can directly use a motor. The shaft sleeve 24 is an insulating and heat-insulating sleeve. The setting of the insulating and heat-insulating sleeve can reduce the transfer of charge or heat on the resistance wire, ensure the thermal stability of the resistance wire, and prevent the charge and heat from being transferred to other structures and affecting the safety of other structures, effectively improving the safety of the use of the heating component 2.

[0038] In other embodiments, the heating element includes a fixed heating element and a movable heating element 22, and the fixed heating element and the movable heating element 22 are arranged alternately along the first direction. By alternately arranging the fixed heating element and the movable heating element 22, the heat balance of the second electrode 13 can be adjusted by adjusting the local movable heating element 22, while achieving stable heating of the second electrode 13 by the fixed heating element, thereby improving the stability of the heat regulation of the second electrode 13.

[0039] Furthermore, if Figure 4 As shown, the movable heating element 22 includes a heating block 221, a heat conductive block 222 and an elastic member 223. The heating block 221 is arranged on the adjusting member 21, the heat conductive block 222 is in contact with the second electrode 13, and the elastic member 223 is arranged between the heat conductive block 222 and the heating block 221. By arranging the elastic member 223 between the heat conductive block 222 and the heating block 221, the heat generated by the heating block 221 can be transferred to the second electrode 13 through the heat conductive block 222, and the buffering of the elastic member 223 can prevent the heat conductive block 222 from directly and rigidly contacting the second electrode 13 under the drive of the first driving member 25, thereby preventing the second electrode 13 from being skewed, thereby improving the safety of the heating assembly 2.

[0040] Optionally, the heating block 221 is provided with a guide groove 2211 on the side facing the heat conducting block 222, and the heat conducting block 222 is provided with a guide portion 2221 on the side facing the heating block 221, the guide portion 2221 is inserted in the guide groove 2211, and the elastic member 223 is sleeved on the outer periphery of the guide portion 2221. Through the sliding cooperation between the guide portion 2221 and the guide groove 2211, the moving stability of the heat conducting block 222 can be effectively improved. The elastic member 223 is directly provided with a spring, and by sleeved on the outer periphery of the guide portion 2221, the installation stability and use stability of the spring can be enhanced, and the situation that the spring is bent outward and damaged when being squeezed is avoided. Of course, the guide groove 2211 can also be provided on the side of the heat conducting block 222 facing the heating block 221, and the guide portion 2221 is provided on the side of the heating block 221 facing the heat conducting block 222.

[0041] In other embodiments, the second electrode 13 has multiple heating areas arranged along the first direction, and each heating area is provided with a heating assembly 2. By dividing the multiple heating areas, multiple temperatures in multiple areas can be independently controlled, further improving the convenience of temperature adjustment of the second electrode 13 and the workpiece 100 to be plated.

[0042] Although the embodiments of the present invention have been described above with reference to the accompanying drawings, the present invention is not limited to the above embodiments, but can be manufactured in various forms, and those skilled in the art will understand that the present invention can be implemented in other specific forms without changing the technical spirit or basic features of the present invention. Therefore, it should be understood that the above embodiments are exemplary and not restrictive in all aspects.

Claims

1. A vapor deposition device, characterized in that: include: A deposition assembly, the deposition assembly comprising a chamber, and a first electrode and a second electrode arranged in the chamber in a vertical direction and spaced relative to each other, the first electrode being connected to a radio frequency power source, and the second electrode being used to support a workpiece to be plated; A heating component, the heating component includes a first driving member, an adjusting member and a plurality of heating members arranged at intervals along a first direction, all of the heating members are abutted against the side of the second electrode away from the first electrode, at least some of the heating members are movable heating members, the adjusting member is transmission-connected to the movable heating member to drive the movable heating member to move along the first direction, the adjusting member is arranged at the bottom of the chamber, the first driving member is transmission-connected to the adjusting member to enable the adjusting member and the movable heating member to move along the vertical direction, wherein the first direction is arranged at an angle to the vertical direction.

2. The vapor deposition device according to claim 1, characterized in that: All of the heating elements are mobile heating elements, and the adjusting element includes a screw rod, a nut and a second driving element. The length of the screw rod extends along the first direction, and the screw rod is provided with multiple sections of threads, and each section of the threads is slidably connected with at least one nut. Each of the mobile heating elements is respectively connected to the nut on each section of the threads, and the second driving element is transmission-connected to the screw rod to drive all of the mobile heating elements to move synchronously along the first direction.

3. The vapor deposition device according to claim 2, characterized in that: The screw rod is provided with a plurality of threads with different pitches, and the pitch of the thread adjacent to the second driving member is greater than the pitch of the thread away from the second driving member.

4. The vapor deposition device according to claim 2, characterized in that: The heating assembly also includes a guide shaft and a sleeve. The length of the guide shaft extends along the first direction. The movable heating element is provided with the sleeve at one end away from the screw rod. The sleeve is slidably connected to the guide shaft.

5. The vapor deposition device according to claim 4, characterized in that: The nut is an insulating and heat-insulating nut; and / or the sleeve is an insulating and heat-insulating sleeve.

6. The vapor deposition device according to claim 1, characterized in that: The heating element comprises a fixed heating element and the movable heating element, and the fixed heating element and the movable heating element are arranged alternately along the first direction.

7. The vapor deposition device according to any one of claims 1 to 6, characterized in that: The movable heating element comprises a heating block, a heat conducting block and an elastic element. The heating block is arranged on the adjusting element. The heat conducting block abuts against the second electrode. The elastic element is arranged between the heat conducting block and the heating block.

8. The vapor deposition device according to claim 7, characterized in that: One of the two sides of the heating block and the heat conducting block adjacent to each other is provided with a guide groove, and the other is provided with a guide part, and the guide part is inserted in the guide groove.

9. The vapor deposition device according to claim 8, characterized in that: The elastic member is sleeved on the outer periphery of the guide portion.

10. The vapor deposition device according to any one of claims 1 to 6, characterized in that: The second electrode has a plurality of heating regions arranged along the first direction, and a heating component is disposed in each of the heating regions.

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