Horizontal and centering detection device for thermal field of single crystal furnace

Abstract

The utility model discloses a horizontal and centering detection device for a thermal field of a single crystal furnace, which comprises a horizontal centering ruler and a horizontal level bubble positioned in the centering ruler, the center of the centering ruler is movably connected with a measuring ruler, the periphery of the measuring ruler is provided with a slidable buckle, the buckle is provided with a measuring rod, and the measuring rod is provided with a clamping groove. The measuring rod rotates around the center of the centering ruler along with the measuring ruler to draw a circle. The horizontal and centering conditions of the thermal field to be measured are directly adjusted through the horizontal level bubble and the measuring rod, adjustment is convenient, the device manufacturing cost is low, meanwhile, the measuring rod made of carbon-carbon materials prevents the thermal field to be measured from generating metal pollution, follow-up crystal pulling abnormity is avoided, the crystal forming rate is increased, the accident rate is reduced, and the crystal pulling cost is reduced.

Description

Technical Field

[0001] The utility model relates to the technical field of single crystal silicon manufacturing, in particular to a level and centering detection device for a single crystal furnace thermal field. Background Art

[0002] With the rapid development of the photovoltaic industry, the quality, crystal formation rate, and cost of silicon rod production in single crystal furnaces have been gradually improved. Since the thermal field of the single crystal furnace is manually operated during the assembly process, it is impossible to make the thermal field components in a horizontal and centered position, resulting in large errors. In addition, the components are worn out and powdered over time, making it impossible to achieve good production conditions, resulting in low finished products, low crystal formation rate, high production accident rate, and high cost.

[0003] At present, the thermal field assembly of single crystal furnaces is manually operated. During the assembly process, the various components of the thermal field cannot be in a horizontal and centered position; at the same time, horizontal correction and adjustment cannot be performed quickly and conveniently, which is time-consuming and labor-intensive. Utility Model Content

[0004] The utility model aims to provide a horizontal correction detection device for the thermal field of a single crystal furnace, which solves the above-mentioned problems existing in the prior art by overlapping the centering ruler on the top of the thermal field and driving the measuring rod to rotate to perform convenient centering detection on the inner wall of the thermal field.

[0005] In order to solve the above technical problems, the utility model adopts the following solutions:

[0006] A level and centering detection device for a single crystal furnace thermal field comprises a horizontal centering ruler and a horizontal level bubble located inside the centering ruler, wherein the center of the centering ruler is movably connected to a measuring ruler, a slidable buckle is provided on the periphery of the measuring ruler, a measuring rod is assembled on the buckle, and the measuring rod rotates around the center of the centering ruler to draw a circle along with the measuring ruler.

[0007] Preferably, the buckle comprises a first assembly groove, the ruler is located in the first assembly groove and is fixed with a locking screw.

[0008] Preferably, a second assembly groove is further provided in the buckle, and corresponding through holes and screw holes are respectively provided at the top and bottom of the second assembly groove, and the measuring rod passes through the through holes and screw holes in sequence and is threadedly connected with the screw holes.

[0009] Preferably, the height of the second assembly groove is smaller than the height of the first assembly groove.

[0010] Preferably, the surface of the centering ruler is concave downward to form a groove, and the horizontal vial is located in the groove. The number of the horizontal vials is two and they are symmetrically arranged.

[0011] Preferably, the surface of the ruler is provided with scale lines, the end of the ruler is connected to the center of the centering ruler through a connecting rod, and the starting end of the scale lines is adjacent to the connecting rod.

[0012] Preferably, a display slot for observing scale lines is provided on the top of the buckle.

[0013] Preferably, the measuring rod is made of carbon-carbon material.

[0014] Preferably, the centering ruler, buckle and measuring ruler are made of aluminum alloy, the connecting rod is made of stainless steel, and the centering ruler and measuring ruler are hollow inside.

[0015] The utility model has the beneficial effects:

[0016] The utility model detects the horizontal condition of the entire thermal field by assembling a horizontal level bubble on the centering ruler, and the measuring rod is assembled with the ruler by a buckle. The ruler rotates above the centering ruler to rotate the measuring rod to detect the centering condition of the thermal field, and directly adjusts the thermal field to be measured. The adjustment is convenient and the device cost is low. At the same time, the measuring rod made of carbon-carbon material prevents metal contamination of the thermal field to be measured, avoids subsequent abnormal crystal pulling, improves the crystal formation rate, reduces the accident rate, and reduces the crystal pulling cost. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 It is a schematic diagram of the structure of the utility model;

[0018] Figure 2 This is a schematic diagram of the assembly structure of the ruler and the buckle of the utility model;

[0019] Figure 3 For this utility model Figure 1 Schematic diagram of the enlarged structure of the circled part.

[0020] Figure markings: 1-centering ruler, 10-groove, 2-level bubble, 3-ruler, 30-scale line, 4-buckle, 40-first assembly groove, 41-second assembly groove, 42-through hole, 43-screw hole, 44-display slot, 5-measuring rod, 6-locking screw, 7-connecting rod. DETAILED DESCRIPTION

[0021] The present invention will be further described in detail below in conjunction with the embodiments and drawings, but the implementation manner of the present invention is not limited thereto.

[0022] In the description of the present utility model, it should be noted that the terms "center", "up", "down", "left", "right", "vertical", "longitudinal", "lateral", "horizontal", "inside", "outside", "front", "back", "top", "bottom", etc. indicate directions or positional relationships based on the directions or positional relationships shown in the accompanying drawings, or are the directions or positional relationships in which the utility model product is usually placed when in use. They are only for the convenience of describing the present utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific direction, be constructed and operated in a specific direction, and therefore cannot be understood as a limitation on the present utility model.

[0023] In the description of the present invention, it is also necessary to explain that, unless otherwise clearly specified and limited, the terms "set", "open", "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0024] Example 1

[0025] Embodiment 1 of the utility model is a horizontal and centering detection device for the thermal field of a single crystal furnace, comprising a horizontal centering ruler 1 and a horizontal level bubble 2 located inside the centering ruler 1, wherein the center of the centering ruler 1 is movably connected to a measuring ruler 3, and a slidable buckle 4 is provided on the periphery of the measuring ruler 3, and the buckle 4 is equipped with a measuring rod 5, and the measuring rod 5 rotates around the center of the centering ruler 1 with the measuring ruler 3 to draw a circle.

[0026] Reference Figure 1 and Figure 2 In the present application, a horizontal level bubble 2 is provided on the surface of the centering ruler 1, and the ruler 3 movably connected to the center of the centering ruler 1 drives the buckle 4 to slide on the periphery of the ruler 3, and the distance between the measuring rod 5 and the center of the centering ruler 1 is adjusted. The radius formed by the measuring rod 5 and the center is half of the inner diameter of the thermal field to be measured at this time for centering detection. The assembly between the measuring rod 5 and the ruler 3 can adapt to thermal fields of various specifications.

[0027] The thermal field to be measured includes a heat preservation tube or a main heater, etc., but is not limited thereto. First, place the centering ruler 1 on the top of the thermal field to be measured, and observe whether the bubble in the level bubble 2 is in the center position. When the thermal field to be measured is not in the horizontal position, adjust the thermal field to be measured so that the bubble in the level bubble is in the horizontal position. Then, the measuring rod 5, under the action of the buckle 4 and the ruler 3, performs a circle centering detection as the ruler 3 rotates in the centering ruler 1, and timely adjusts the detected centering deviation.

[0028] In order to realize that the buckle 4 drives the measuring rod 5 to slide in the ruler 3, the buckle 4 includes a first assembly groove 40, and the ruler 3 is located in the first assembly groove 40 and is fixed by a locking screw 6. The buckle 4 is also provided with a second assembly groove 41, and the top and bottom of the second assembly groove 41 are respectively provided with corresponding through holes 42 and screw holes 43, and the measuring rod 5 passes through the through holes 42 and screw holes 43 in sequence and is threadedly connected with the screw holes 43. The height of the second assembly groove 41 is less than the height of the first assembly groove 40.

[0029] When the ruler 3 passes through the first assembly slot 40 and the buckle 4 moves to the distance to be detected, the locking screw 6 arranged on the side of the buckle 4 is tightened so that the inner end of the locking screw 6 is in close contact with the side of the ruler 3 for limit fixation to prevent the measuring rod 5 from being displaced during the circle detection and causing inaccurate detection.

[0030] Specifically, the measuring rod 5 is assembled so that its end passes through the through hole 42 and the screw hole 43 in sequence, and an external thread is provided on the periphery where the measuring rod 5 contacts the screw hole 43 to fix the assembly position of the measuring rod 5 in the buckle 4 and improve the assembly stability.

[0031] In some preferred embodiments, the surface of the centering ruler 1 is concave downward to form a groove 10, and the level vial 2 is located in the groove 10. The number of the level vials 2 is two and they are symmetrically arranged.

[0032] There are two grooves 10 which are symmetrically arranged at the center of the centering ruler 1. The surfaces of the two level bubbles 2 are on a horizontal plane for detecting and adjusting the levelness of the thermal field to be measured, thereby improving the detection effect of the levelness.

[0033] In some preferred embodiments, the surface of the ruler 3 is provided with scale lines 30, the end of the ruler 3 is connected to the center of the centering ruler 1 through a connecting rod 7, and the starting end of the scale lines 30 is adjacent to the connecting rod 7. A display slot 44 for observing the scale lines 30 is provided at the top of the buckle 4.

[0034] Reference Figure 3 The display slot 44 is divided into two parts, one part displays millimeter scale marks, and the other part displays centimeter data, and accurate measurement is performed through the display slot 44. A scale line 30 is set on the surface of the ruler 3, which is used to slide the buckle 4 to the position of the inner wall of the thermal field to be measured. This scale distance is used as a reference and displayed through the display slot 44. Then the ruler 3 is rotated to observe the relationship between the measuring rod 5 and the inner wall of the thermal field to be measured. If the outer peripheral surface of the measuring rod 5 does not contact the thermal field to be measured, the centering position of the thermal field to be measured is directly adjusted. After the adjustment is completed, the measuring rod 5 is used for secondary detection to improve the accuracy of the centering detection.

[0035] Since the thermal field is mostly made of carbon-carbon material, in order to avoid metal contamination of the inner wall of the thermal field during the circle-drawing correction process of the measuring rod 5, the measuring rod 5 is made of carbon-carbon material to improve the quality of crystal pulling.

[0036] In some preferred embodiments, the centering ruler 1, buckle 4 and measuring ruler 3 are made of aluminum alloy, and the connecting rod 7 is made of stainless steel. The centering ruler 1 and measuring ruler 3 are hollow inside. The aluminum alloy and stainless steel materials can reduce the processing cost, and the hollow inside can make the device as a whole convenient, lightweight and easy to operate.

[0037] Example 2

[0038] The working principle of the utility model is as follows: when in use, first overlap the centering ruler 1 in the diameter direction of the top of the thermal field to be measured (insulation tube or main heater, etc.), observe whether the horizontal level bubble 2 is in the center, if not in the center, adjust the thermal field to be measured until the horizontal level bubble 2 is in the center position, slide the buckle 4, make the spacing between the measuring rod 5 and the connecting rod 7 match with half the inner diameter of the thermal field to be measured, tighten the locking screw 6 to fix the position of the ruler 3 in the buckle 4, and then rotate the ruler 3 to make the measuring rod 5 perform a circle centering detection on the thermal field to be measured, when deviation occurs, directly adjust the centering and deflection of the thermal field to be measured, and finally perform a secondary correction on the measuring rod 5 to meet the alignment requirements, confirm whether the thermal field is horizontal and adjust the alignment through the horizontal level bubble 2, the ruler 3 and the measuring rod 5, and then close the furnace after confirmation. The utility model detects the horizontal condition of the entire thermal field by assembling a horizontal bubble 2 on the centering ruler 1, and assembling a measuring rod 5 with the ruler 3 through a buckle 4. The ruler 3 rotates above the centering ruler 1, so that the measuring rod 5 rotates to detect the centering condition of the thermal field, and directly adjusts the thermal field to be measured. The adjustment is convenient and the device cost is low. At the same time, the measuring rod 5 made of carbon-carbon material prevents metal contamination of the thermal field to be measured, avoids subsequent abnormal crystal pulling, improves the crystal formation rate, reduces the accident rate, and reduces the crystal pulling cost.

[0039] The above is only a preferred embodiment of the utility model and does not limit the utility model in any form. According to the technical essence of the utility model, within the spirit and principles of the utility model, any simple modification, equivalent replacement and improvement made to the above embodiment still falls within the protection scope of the technical solution of the utility model.

Claims

1. A horizontal and centering detection device for a single crystal furnace thermal field, characterized in that: The invention comprises a horizontal centering ruler (1) and a horizontal vial (2) located inside the centering ruler (1); the center of the centering ruler (1) is movably connected to a measuring ruler (3); a slidable buckle (4) is provided on the outer periphery of the measuring ruler (3); a measuring rod (5) is assembled on the buckle (4); and the measuring rod (5) rotates around the center of the centering ruler (1) along with the measuring ruler (3) to draw a circle.

2. The horizontal and centering detection device for the thermal field of a single crystal furnace according to claim 1, characterized in that: The buckle (4) comprises a first assembly groove (40), and the ruler (3) is located in the first assembly groove (40) and is fixed by a locking screw (6).

3. The horizontal and centering detection device for the thermal field of a single crystal furnace according to claim 2, characterized in that: The buckle (4) is also provided with a second assembly groove (41), and the top and bottom of the second assembly groove (41) are respectively provided with corresponding through holes (42) and screw holes (43), and the measuring rod (5) passes through the through holes (42) and the screw holes (43) in sequence and is threadedly connected with the screw holes (43).

4. The horizontal and centering detection device for the thermal field of a single crystal furnace according to claim 3, characterized in that: The height of the second assembly groove (41) is smaller than the height of the first assembly groove (40).

5. The horizontal and centering detection device for the thermal field of a single crystal furnace according to claim 3, characterized in that: The surface of the centering ruler (1) is concave downward to form a groove (10), and the horizontal vial (2) is located in the groove (10). The number of the horizontal vials (2) is two and they are symmetrically arranged.

6. The horizontal and centering detection device for the thermal field of a single crystal furnace according to claim 3, characterized in that: The surface of the ruler (3) is provided with scale lines (30), the end of the ruler (3) is connected to the center of the centering ruler (1) through a connecting rod (7), and the starting end of the scale lines (30) is adjacent to the connecting rod (7).

7. The horizontal and centering detection device for the thermal field of a single crystal furnace according to claim 6, characterized in that: The top of the buckle (4) is provided with a display slot (44) for observing the scale line (30).

8. The horizontal and centering detection device for the thermal field of a single crystal furnace according to claim 6, characterized in that: The measuring rod (5) is made of carbon-carbon material.

9. The horizontal and centering detection device for the thermal field of a single crystal furnace according to claim 6, characterized in that: The centering ruler (1), the buckle (4) and the measuring ruler (3) are made of aluminum alloy, the connecting rod (7) is made of stainless steel, and the centering ruler (1) and the measuring ruler (3) are hollow inside.

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